surrounding a central transfer chamber

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CPC
H01L21/67167

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67167surrounding a central transfer chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for transferring substrate in vacuum chamber
- Patent number 12,255,090
- Issue date Mar 18, 2025
- T-Robotics Co., Ltd.
- Soo Jong Lee
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for controlling substrate pr...
- Patent number 12,224,194
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolated volume seals and method of forming an isolated volume with...
- Patent number 12,217,982
- Issue date Feb 4, 2025
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum transfer device, substrate processing system, and substrate...
- Patent number 12,211,720
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reconfigurable mainframe with replaceable interface plate
- Patent number 12,211,714
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate vacuum treatment apparatus and method therefor
- Patent number 12,211,715
- Issue date Jan 28, 2025
- EVATEC AG
- Gaston Van Buuren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure wafer processing systems and related methods
- Patent number 12,198,951
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated substrate measurement system to improve manufacturing pr...
- Patent number 12,191,176
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Upendra V. Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated dry processes for patterning radiation photoresist patte...
- Patent number 12,183,604
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 12,183,589
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for transferring wafer, and apparatus for cont...
- Patent number 12,176,233
- Issue date Dec 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Fencheng Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 12,162,698
- Issue date Dec 10, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling chemical concentration in electrolyte
- Patent number 12,157,952
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Integrated substrate measurement system to improve manufacturing pr...
- Patent number 12,136,557
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Upendra V. Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-stage substrate processing system
- Patent number 12,125,722
- Issue date Oct 22, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device
- Patent number 12,106,982
- Issue date Oct 1, 2024
- SCREEN Holdings Co., Ltd.
- Masaki Inaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module
- Patent number 12,106,989
- Issue date Oct 1, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,093,021
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Bipolar esc with balanced RF impedance
- Patent number 12,094,748
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abatement and strip process chamber in a load lock configuration
- Patent number 12,094,715
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Martin Jeffrey Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide films in semiconductor device manufacturing
- Patent number 12,094,711
- Issue date Sep 17, 2024
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing module and method of moving a workpiece
- Patent number 12,080,571
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,080,572
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system
- Patent number 12,080,570
- Issue date Sep 3, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Heng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-density substrate processing systems and methods
- Patent number 12,074,042
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-stage pumping liner
- Patent number 12,068,144
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Mingle Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced temperature monitoring system and methods for semiconducto...
- Patent number 12,068,180
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Xuesong Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System configurations for fabrication of micro-LED displays
- Patent number 12,062,735
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Hou T. Ng
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEMS AND METHODS USING VIRTUAL MACHINE ARCH...
- Publication number 20250096019
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Eric Steinseifer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20250096029
- Publication date Mar 20, 2025
- BROOKS AUTOMATION US, LLC
- Dana L. ATWOOD
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MULTI-STAGE PUMPING LINER
- Publication number 20250087471
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Mingle Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20250087498
- Publication date Mar 13, 2025
- LAM RESEARCH CORPORATION
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250087513
- Publication date Mar 13, 2025
- EBARA CORPORATION
- Masaya SEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20250087514
- Publication date Mar 13, 2025
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
REMOTE COMPUTER ACCESS LOCKOUT SYSTEMS AND METHODS FOR SUBSTRATE PR...
- Publication number 20250076830
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Eric Steinseifer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HAND...
- Publication number 20250069926
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Arunkumar Ramachandraiah
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...
- Publication number 20250038027
- Publication date Jan 30, 2025
- LPE S.p.A.
- Maurilio Giuseppe Meschia
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING TOOL WITH RAPID AND SELECTIVE CONTROL OF PARTI...
- Publication number 20250038011
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- Richard H. GOULD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing System
- Publication number 20250022728
- Publication date Jan 16, 2025
- SPTS TECHNOLOGIES LIMITED
- Attila Nagy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20250001583
- Publication date Jan 2, 2025
- VM Inc.
- Tae Jin Kwon
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...
- Publication number 20250006521
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Senthil Sivaraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM ETCH PROCESS FOR CONTACT PLUG ANCHORING
- Publication number 20250006518
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Shiyu YUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE
- Publication number 20240395580
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...
- Publication number 20240332046
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240312809
- Publication date Sep 19, 2024
- KIOXIA Corporation
- Takashi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL
- Publication number 20240290644
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Crystal Display Device
- Publication number 20240280869
- Publication date Aug 22, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Atsushi Umezaki
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Equipment For Manufacturing Light-Emitting Device
- Publication number 20240266195
- Publication date Aug 8, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED LASER AND PLASMA ETCH DICING
- Publication number 20240266220
- Publication date Aug 8, 2024
- Jonathan Bryant MELLEN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...
- Publication number 20240258137
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Nir Merry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE
- Publication number 20240258136
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CALIBRATION OF SUBSTRATE PROCESSING CHAMB...
- Publication number 20240258141
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS
- Publication number 20240249957
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chao YIN
- H01 - BASIC ELECTRIC ELEMENTS

surrounding a central transfer chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for transferring substrate in vacuum chamber

Semiconductor processing apparatus and method utilizing electrostat...

Substrate processing system and method for controlling substrate pr...

Isolated volume seals and method of forming an isolated volume with...

Vacuum transfer device, substrate processing system, and substrate...

Reconfigurable mainframe with replaceable interface plate

Substrate vacuum treatment apparatus and method therefor

High pressure wafer processing systems and related methods

Integrated substrate measurement system to improve manufacturing pr...

Integrated dry processes for patterning radiation photoresist patte...

Tin oxide mandrels in patterning

Apparatus and method for transferring wafer, and apparatus for cont...

Substrate transport apparatus

Method of controlling chemical concentration in electrolyte

Integrated substrate measurement system to improve manufacturing pr...

Multi-stage substrate processing system

Calibration of an electronics processing system

Substrate processing device

Equipment front end module

Substrate processing apparatus, method of manufacturing semiconduct...

Bipolar esc with balanced RF impedance

Abatement and strip process chamber in a load lock configuration

Tin oxide films in semiconductor device manufacturing

Substrate processing module and method of moving a workpiece

Substrate processing apparatus

Semiconductor processing system

High-density substrate processing systems and methods

Multi-stage pumping liner

Advanced temperature monitoring system and methods for semiconducto...

System configurations for fabrication of micro-LED displays

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEMS AND METHODS USING VIRTUAL MACHINE ARCH...

TRANSPORT APPARATUS AND ADAPTER PENDANT

MULTI-STAGE PUMPING LINER

TIN OXIDE MANDRELS IN PATTERNING

TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSPORT APPARATUS

REMOTE COMPUTER ACCESS LOCKOUT SYSTEMS AND METHODS FOR SUBSTRATE PR...

INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HAND...

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...

SUBSTRATE PROCESSING TOOL WITH RAPID AND SELECTIVE CONTROL OF PARTI...

Substrate Processing System

SUBSTRATE TRANSFER APPARATUS

EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...

BOTTOM ETCH PROCESS FOR CONTACT PLUG ANCHORING

EQUIPMENT FRONT END MODULE

MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE

ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

SEMICONDUCTOR MANUFACTURING APPARATUS

TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL

Liquid Crystal Display Device

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

Equipment For Manufacturing Light-Emitting Device

INTEGRATED LASER AND PLASMA ETCH DICING

SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE

METHODS AND APPARATUS FOR CALIBRATION OF SUBSTRATE PROCESSING CHAMB...

APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS