surrounding a central transfer chamber

Industry

CPC
H01L21/67167

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67167surrounding a central transfer chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Integrated dry processes for patterning radiation photoresist patte...
- Patent number 12,183,604
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 12,183,589
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for transferring wafer, and apparatus for cont...
- Patent number 12,176,233
- Issue date Dec 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Fencheng Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 12,162,698
- Issue date Dec 10, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling chemical concentration in electrolyte
- Patent number 12,157,952
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Integrated substrate measurement system to improve manufacturing pr...
- Patent number 12,136,557
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Upendra V. Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-stage substrate processing system
- Patent number 12,125,722
- Issue date Oct 22, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device
- Patent number 12,106,982
- Issue date Oct 1, 2024
- SCREEN Holdings Co., Ltd.
- Masaki Inaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module
- Patent number 12,106,989
- Issue date Oct 1, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,093,021
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Bipolar esc with balanced RF impedance
- Patent number 12,094,748
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abatement and strip process chamber in a load lock configuration
- Patent number 12,094,715
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Martin Jeffrey Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide films in semiconductor device manufacturing
- Patent number 12,094,711
- Issue date Sep 17, 2024
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing module and method of moving a workpiece
- Patent number 12,080,571
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,080,572
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system
- Patent number 12,080,570
- Issue date Sep 3, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Heng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-density substrate processing systems and methods
- Patent number 12,074,042
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-stage pumping liner
- Patent number 12,068,144
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Mingle Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced temperature monitoring system and methods for semiconducto...
- Patent number 12,068,180
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Xuesong Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System configurations for fabrication of micro-LED displays
- Patent number 12,062,735
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Hou T. Ng
- B08 - CLEANING
Information Patent Grant
Substrate processing system and particle removal method
- Patent number 12,062,557
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Genichi Nanasaki
- B08 - CLEANING
Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 12,062,567
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for thermal treatment of electronic devices
- Patent number 12,040,203
- Issue date Jul 16, 2024
- Kateeva, Inc.
- Conor F. Madigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 12,040,202
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer apparatus and substrate processing system
- Patent number 12,033,878
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus for treating substrate and method for treating substrate
- Patent number 12,027,381
- Issue date Jul 2, 2024
- Semes Co., Ltd.
- Youngseop Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for thin film deposition
- Patent number 12,024,772
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Jun Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrying apparatus
- Patent number 11,996,310
- Issue date May 28, 2024
- Shibaura Mechatronics Corporation
- Masaaki Furuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coupled processing containers, substrate processing system, and sub...
- Patent number 11,996,306
- Issue date May 28, 2024
- Tokyo Electron Limited
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20250001583
- Publication date Jan 2, 2025
- VM Inc.
- Tae Jin Kwon
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...
- Publication number 20250006521
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Senthil Sivaraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM ETCH PROCESS FOR CONTACT PLUG ANCHORING
- Publication number 20250006518
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Shiyu YUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE
- Publication number 20240395580
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...
- Publication number 20240332046
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240312809
- Publication date Sep 19, 2024
- KIOXIA Corporation
- Takashi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL
- Publication number 20240290644
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Crystal Display Device
- Publication number 20240280869
- Publication date Aug 22, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Atsushi Umezaki
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Equipment For Manufacturing Light-Emitting Device
- Publication number 20240266195
- Publication date Aug 8, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED LASER AND PLASMA ETCH DICING
- Publication number 20240266220
- Publication date Aug 8, 2024
- Jonathan Bryant MELLEN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...
- Publication number 20240258137
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Nir Merry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE
- Publication number 20240258136
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CALIBRATION OF SUBSTRATE PROCESSING CHAMB...
- Publication number 20240258141
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS
- Publication number 20240249957
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chao YIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240242977
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240234183
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS
- Publication number 20240234185
- Publication date Jul 11, 2024
- Pragmatic Printing Ltd.
- Richard David PRICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF TRANSFERRING SUBST...
- Publication number 20240222186
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING SYSTEM GROUP
- Publication number 20240222969
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPM...
- Publication number 20240222156
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Jong Seok SEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE HAVING RE...
- Publication number 20240213056
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Angela Rose Sico
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...
- Publication number 20240213064
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Minoru NAGASAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL
- Publication number 20240213089
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Navaneetha Krishnan SUBBAIYAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING DEVICE, WAFER PROCESSING SYSTEM AND CONTROL METHOD
- Publication number 20240203775
- Publication date Jun 20, 2024
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Ren ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFINED CHARGE TRAP LAYER
- Publication number 20240206172
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Chang Seok Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...
- Publication number 20240194503
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Randy A. HARRIS
- H01 - BASIC ELECTRIC ELEMENTS

surrounding a central transfer chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Integrated dry processes for patterning radiation photoresist patte...

Tin oxide mandrels in patterning

Apparatus and method for transferring wafer, and apparatus for cont...

Substrate transport apparatus

Method of controlling chemical concentration in electrolyte

Integrated substrate measurement system to improve manufacturing pr...

Multi-stage substrate processing system

Calibration of an electronics processing system

Substrate processing device

Equipment front end module

Substrate processing apparatus, method of manufacturing semiconduct...

Bipolar esc with balanced RF impedance

Abatement and strip process chamber in a load lock configuration

Tin oxide films in semiconductor device manufacturing

Substrate processing module and method of moving a workpiece

Substrate processing apparatus

Semiconductor processing system

High-density substrate processing systems and methods

Multi-stage pumping liner

Advanced temperature monitoring system and methods for semiconducto...

System configurations for fabrication of micro-LED displays

Substrate processing system and particle removal method

Systems and methods for substrate support temperature control

Techniques for thermal treatment of electronic devices

Processing system

Substrate transfer apparatus and substrate processing system

Apparatus for treating substrate and method for treating substrate

Apparatuses for thin film deposition

Substrate carrying apparatus

Coupled processing containers, substrate processing system, and sub...

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER APPARATUS

EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...

BOTTOM ETCH PROCESS FOR CONTACT PLUG ANCHORING

EQUIPMENT FRONT END MODULE

MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE

ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

SEMICONDUCTOR MANUFACTURING APPARATUS

TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL

Liquid Crystal Display Device

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

Equipment For Manufacturing Light-Emitting Device

INTEGRATED LASER AND PLASMA ETCH DICING

SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...

SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE

SUBSTRATE PROCESSING METHOD

METHODS AND APPARATUS FOR CALIBRATION OF SUBSTRATE PROCESSING CHAMB...

APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS

APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF TRANSFERRING SUBST...

POWER SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING SYSTEM GROUP

SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPM...

RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE HAVING RE...

SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...

INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL

WAFER PROCESSING DEVICE, WAFER PROCESSING SYSTEM AND CONTROL METHOD

CONFINED CHARGE TRAP LAYER

MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...