Temperature monitoring

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CPC
H01L21/67248

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67248Temperature monitoring

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Rapid tuning of critical dimension non-uniformity by modulating tem...
- Patent number 12,308,264
- Issue date May 20, 2025
- Lam Research Corporation
- Ravi Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated substrate support
- Patent number 12,309,888
- Issue date May 20, 2025
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method for multi-zone active-matrix temperature control in...
- Patent number 12,309,891
- Issue date May 20, 2025
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF immune sensor probe for monitoring a temperature of an electrost...
- Patent number 12,308,265
- Issue date May 20, 2025
- Lam Research Corporation
- Siyuan Tian
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus, calculation method, and calculation pr...
- Patent number 12,300,469
- Issue date May 13, 2025
- Tokyo Electron Limited
- Shinsuke Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for CMP temperature control
- Patent number 12,296,427
- Issue date May 13, 2025
- Applied Materials, Inc.
- Haosheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing control method, substrate processing apparatus...
- Patent number 12,300,526
- Issue date May 13, 2025
- Tokyo Electron Limited
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermal control of devices in an electronics...
- Patent number 12,292,484
- Issue date May 6, 2025
- AEHR Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,293,930
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor laser inspection apparatus
- Patent number 12,287,279
- Issue date Apr 29, 2025
- Mitsubishi Electric Corporation
- Yohei Mikami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer mass metrology apparatus and semiconductor wafe...
- Patent number 12,288,702
- Issue date Apr 29, 2025
- Lam Research Corporation
- Gregor Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for temperature control for a substrate
- Patent number 12,283,500
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor deposition monitoring device
- Patent number 12,283,497
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Young Uk Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment device
- Patent number 12,278,120
- Issue date Apr 15, 2025
- Shibaura Mechatronics Corporation
- Minami Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, thermal resistance acquisition method,...
- Patent number 12,278,126
- Issue date Apr 15, 2025
- Tokyo Electron Limited
- Shinsuke Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto fine-tuner for desired temperature profile
- Patent number 12,278,127
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- Yi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
- Patent number 12,272,575
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate temperature correction...
- Patent number 12,266,514
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Rei Ibuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system, and method for non-contact temperature monitorin...
- Patent number 12,266,551
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Bhaskar Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermal control of devices in electronics tester
- Patent number 12,265,136
- Issue date Apr 1, 2025
- AEHR Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermoelectric cooling pedestal for substrate processing systems
- Patent number 12,266,588
- Issue date Apr 1, 2025
- Lam Research Corporation
- Mrinal Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and stage cleaning method
- Patent number 12,261,060
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Tsutomu Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber with annealing mini-environment
- Patent number 12,249,522
- Issue date Mar 11, 2025
- Applied Materials, Inc.
- Michael Honan
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Using spectroscopic measurements for substrate temperature monitoring
- Patent number 12,249,525
- Issue date Mar 11, 2025
- Applied Materials, Inc.
- Ian McDonald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding apparatus and bonding method
- Patent number 12,243,847
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- Gil Yong Moon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and ceiling heater
- Patent number 12,241,159
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Tetsuya Kosugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled substrate support assembly
- Patent number 12,243,756
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with varying depths of areas between mesas and co...
- Patent number 12,227,840
- Issue date Feb 18, 2025
- Lam Research Corporation
- Keith Gaff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment apparatus
- Patent number 12,230,518
- Issue date Feb 18, 2025
- SCREEN Holdings Co., Ltd.
- Nobuhiko Nishide
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...
- Publication number 20250166167
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Yusuke MIYAKUBO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CERAMIC HEATER
- Publication number 20250167019
- Publication date May 22, 2025
- MICO CERAMICS LTD.
- Jung-Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Solid-state manufacturing method and solid-state manufacturing device
- Publication number 20250162064
- Publication date May 22, 2025
- IDQ SCIENCE AND TECHNOLOGY DEVELOPMENT (GUANGDONG, HENGQIN) CO.,LTD.
- Dawei GUO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS
- Publication number 20250167008
- Publication date May 22, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER UNIT
- Publication number 20250168934
- Publication date May 22, 2025
- NHK SPRING CO., LTD.
- Yoshihito ARAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20250144677
- Publication date May 8, 2025
- KIOXIA Corporation
- Minako INUKAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250140585
- Publication date May 1, 2025
- Tokyo Electron Limited
- Shogo FUKUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20250132148
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-HEAT RINGS, HEATING SYSTEMS, AND PROCESSING CHAMBERS INCLUDING...
- Publication number 20250132174
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Haifeng ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIRTUAL METROLOGY FOR ENHANCED WINDOW TEMPERATURE CONTROL
- Publication number 20250132179
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR PHASE GROWTH APPARATUS
- Publication number 20250129470
- Publication date Apr 24, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE ELECTROSTATIC CHUCK
- Publication number 20250125181
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK ELECTRODE WITH SELF-INDUCED DC VOLTAGE
- Publication number 20250125180
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR ASSEMBLY THERMAL BREAK AND METHODS FOR COOLING A SUSCEPTO...
- Publication number 20250125183
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Vijayabhaskara Venkatagiriyappa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250118541
- Publication date Apr 10, 2025
- Hitachi High-Tech Corporation
- Tomoaki HYODO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...
- Publication number 20250118579
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20250118578
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Ajith Karonnan Ramapurath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250112063
- Publication date Apr 3, 2025
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...
- Publication number 20250112064
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET PROCESSING WITH AUTOMATIC PROCESS CONTROL
- Publication number 20250105036
- Publication date Mar 27, 2025
- Yield Engineering Systems, Inc.
- Venugopal Govindarajulu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT TRANSFER APPARATUS AND TRANSFER METHOD USING...
- Publication number 20250105047
- Publication date Mar 27, 2025
- Hyundai Motor Company
- Tae Woo KWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...
- Publication number 20250102373
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE OFFSET AND ZONE CONTROL TUNING
- Publication number 20250105035
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Ole LUCKNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250105051
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control System For Adaptive Control Of A Thermal Processing System
- Publication number 20250093852
- Publication date Mar 20, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR PROVIDING VARIABLE RAMP-UP CONTROL FOR AN ELE...
- Publication number 20250089130
- Publication date Mar 13, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Brittany PHILLIPS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING ASSEMBLY FOR SEMICONDUCTOR PROCESS, SUBSTRATE PROCESSING APPAR...
- Publication number 20250087465
- Publication date Mar 13, 2025
- Samsung Electronics Co., Ltd.
- Hyungsik KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONITORING DEVICE FOR MEASURING CHARACTERISTICS OF EDGE AREA AND ME...
- Publication number 20250087508
- Publication date Mar 13, 2025
- WIT CORPORATION
- Jae Hwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS
- Publication number 20250087505
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Shashank Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...
- Publication number 20250079210
- Publication date Mar 6, 2025
- Kokusai Electric Corporation
- Shinichiro MORI
- H01 - BASIC ELECTRIC ELEMENTS

Temperature monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Rapid tuning of critical dimension non-uniformity by modulating tem...

Heated substrate support

Control method for multi-zone active-matrix temperature control in...

Apparatus and method for drying substrate

RF immune sensor probe for monitoring a temperature of an electrost...

Plasma processing apparatus, calculation method, and calculation pr...

Apparatus and method for CMP temperature control

Substrate processing control method, substrate processing apparatus...

Method and system for thermal control of devices in an electronics...

Substrate processing apparatus, method of manufacturing semiconduct...

Semiconductor laser inspection apparatus

Semiconductor wafer mass metrology apparatus and semiconductor wafe...

Methods and systems for temperature control for a substrate

Semiconductor deposition monitoring device

Substrate treatment device

Plasma processing apparatus, thermal resistance acquisition method,...

Auto fine-tuner for desired temperature profile

Advanced temperature control for wafer carrier in plasma processing...

Substrate processing apparatus and substrate temperature correction...

Apparatus, system, and method for non-contact temperature monitorin...

Method and system for thermal control of devices in electronics tester

Thermoelectric cooling pedestal for substrate processing systems

Substrate processing apparatus and stage cleaning method

Processing chamber with annealing mini-environment

Using spectroscopic measurements for substrate temperature monitoring

Bonding apparatus and bonding method

Substrate processing apparatus and ceiling heater

Temperature controlled substrate support assembly

Substrate support with varying depths of areas between mesas and co...

Light irradiation type heat treatment apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...

CERAMIC HEATER

Solid-state manufacturing method and solid-state manufacturing device

GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS

HEATER UNIT

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEPOSITION SYSTEM AND METHOD

PRE-HEAT RINGS, HEATING SYSTEMS, AND PROCESSING CHAMBERS INCLUDING...

VIRTUAL METROLOGY FOR ENHANCED WINDOW TEMPERATURE CONTROL

VAPOR PHASE GROWTH APPARATUS

LOW TEMPERATURE ELECTROSTATIC CHUCK

BIPOLAR ELECTROSTATIC CHUCK ELECTRODE WITH SELF-INDUCED DC VOLTAGE

SUSCEPTOR ASSEMBLY THERMAL BREAK AND METHODS FOR COOLING A SUSCEPTO...

PLASMA PROCESSING APPARATUS

TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...

PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...

WET PROCESSING WITH AUTOMATIC PROCESS CONTROL

SEMICONDUCTOR ELEMENT TRANSFER APPARATUS AND TRANSFER METHOD USING...

TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...

TEMPERATURE OFFSET AND ZONE CONTROL TUNING

MODULAR SUBSTRATE SUPPORT ASSEMBLY

Control System For Adaptive Control Of A Thermal Processing System

METHOD AND SYSTEM FOR PROVIDING VARIABLE RAMP-UP CONTROL FOR AN ELE...

RING ASSEMBLY FOR SEMICONDUCTOR PROCESS, SUBSTRATE PROCESSING APPAR...

MONITORING DEVICE FOR MEASURING CHARACTERISTICS OF EDGE AREA AND ME...

MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS

DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...