Temperature monitoring

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CPC
H01L21/67248

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67248Temperature monitoring

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Bonding apparatus and bonding method
- Patent number 12,243,847
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and ceiling heater
- Patent number 12,241,159
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled substrate support assembly
- Patent number 12,243,756
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with varying depths of areas between mesas and co...
- Patent number 12,227,840
- Issue date Feb 18, 2025
- Lam Research Corporation
- Keith Gaff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment apparatus
- Patent number 12,230,518
- Issue date Feb 18, 2025
- SCREEN Holdings Co., Ltd.
- Nobuhiko Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for non-contact low substrate temperature measurement
- Patent number 12,230,521
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and apparatus for a valve assembly
- Patent number 12,224,190
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Andrew Michael Yednak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for providing variable ramp-up control for an ele...
- Patent number 12,225,635
- Issue date Feb 11, 2025
- Watlow Electric Manufacturing Company
- Brittany Phillips
- G05 - CONTROLLING REGULATING
Information Patent Grant
Structure and method for providing line end extensions for fin-type...
- Patent number 12,218,239
- Issue date Feb 4, 2025
- Mosaid Technologies Incorporated
- Shao-Ming Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing a wafer, and method of controlling such an...
- Patent number 12,217,980
- Issue date Feb 4, 2025
- Lam Research AG
- Daniel Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum transfer device, substrate processing system, and substrate...
- Patent number 12,211,720
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time-varying frequency powered heat source
- Patent number 12,208,033
- Issue date Jan 28, 2025
- Anand Deo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Baking apparatus
- Patent number 12,211,711
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Bumjin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling substrate transfer system and the substrate t...
- Patent number 12,211,719
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Wataru Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus having closed loop IR camera heat detection system and me...
- Patent number 12,205,835
- Issue date Jan 21, 2025
- Illinois Tool Works Inc.
- Eric Wayne Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature calibration methods for semiconductor machine
- Patent number 12,205,834
- Issue date Jan 21, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- ShihChieh Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature change rate control device, method, and semiconductor p...
- Patent number 12,205,836
- Issue date Jan 21, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hongwei Geng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature profile measurement and synchronized control on substra...
- Patent number 12,196,617
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Zuoming Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Method of cleaning, method of manufacturing semiconductor device, s...
- Patent number 12,195,848
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Kazuhiro Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 12,198,927
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adaptive baking method
- Patent number 12,196,491
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tzung-Chen Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of calibrating radiation thermometer and system thereof
- Patent number 12,181,345
- Issue date Dec 31, 2024
- Ebara Corporation
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Grant
In-situ semiconductor processing chamber temperature apparatus
- Patent number 12,183,605
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment device and substrate treatment method
- Patent number 12,183,599
- Issue date Dec 31, 2024
- SCREEN Holdings Co., Ltd.
- Masafumi Inoue
- B08 - CLEANING
Information Patent Grant
Control system for adaptive control of a thermal processing system
- Patent number 12,174,616
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co. Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and device for temperature control
- Patent number 12,176,226
- Issue date Dec 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Guoqing Zhang
- G05 - CONTROLLING REGULATING
Information Patent Grant
RTP substrate temperature one for all control algorithm
- Patent number 12,169,098
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Wolfgang Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing system and method for manufactur...
- Patent number 12,170,214
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai-Chih Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing substrate with sensor
- Patent number 12,167,542
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-controlled chemical delivery system and reactor system...
- Patent number 12,163,225
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20250066918
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20250069866
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Changyou JING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS
- Publication number 20250069921
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Andrew NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOAD LOCK ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING...
- Publication number 20250069920
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- Masaei Suwada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RTP SUBSTRATE TEMPERATURE ONE FOR ALL CONTROL ALGORITHM
- Publication number 20250067511
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Wolfgang Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE ANNEALER FOR SEMICONDUCTOR WAFERS
- Publication number 20250063641
- Publication date Feb 20, 2025
- Cornell University
- James C. M. Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING APPARATUS AND METHOD
- Publication number 20250062140
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jieh-Chau HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES
- Publication number 20250062143
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Deepak Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIPELINE TEMPERATURE CONTROL EQUIPMENT AND PIPELINE TEMPERATURE CON...
- Publication number 20250053183
- Publication date Feb 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Caifeng HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...
- Publication number 20250051959
- Publication date Feb 13, 2025
- SUMCO CORPORATION
- Masayuki TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SELECTIVE RELEASE OF COMPONENTS USING THERMAL RELEASE LAYER
- Publication number 20250054785
- Publication date Feb 13, 2025
- Deca Technologies USA, Inc.
- Benedict SAN JOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY
- Publication number 20250054788
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIRTUAL MEASUREMENT OF CONDITIONS PROXIMATE TO A SUBSTRATE WITH PHY...
- Publication number 20250053715
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Preetham Prahallada Rao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE
- Publication number 20250046634
- Publication date Feb 6, 2025
- SAMSUNG DISPLAY CO., LTD.
- Soonjong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT UNIT AND HEAT TREATMENT APPARATUS
- Publication number 20250046630
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Yutaka MIZOBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC SPECTROSCOPY TEMPERATURE MONITORING USING ELECTROSTATIC...
- Publication number 20250046640
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Ori NOKED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR ACCURATE DETERMINATION OF SEMICONDUCTOR WAF...
- Publication number 20250046633
- Publication date Feb 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung Hsien Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING SYSTEM AND METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20250038019
- Publication date Jan 30, 2025
- Hitachi High-Tech Corporation
- Makoto SATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250038016
- Publication date Jan 30, 2025
- AP SYSTEMS INC.
- Dae Ryong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK, TEMPERATURE CONTROL SYSTEM, AND TEMPERATURE CONTROL ME...
- Publication number 20250038035
- Publication date Jan 30, 2025
- TOKYO SEIMITSU CO., LTD.
- Takenori TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STATUS DETERMINATION METHOD AND MONITORING DEVICE
- Publication number 20250038022
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Huizhen BU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF ANALYZING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS,...
- Publication number 20250029850
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Kim Ramkumar VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETERMINING SUBSTRATE DECENTERING IN SEMICONDUCTOR PROCESSING SYSTE...
- Publication number 20250029853
- Publication date Jan 23, 2025
- ASM IP HOLDING B.V.
- Christopher Cillie
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT
- Publication number 20250022724
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Masanori TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY SLOT PLATES
- Publication number 20250014922
- Publication date Jan 9, 2025
- Applied Materials Inc.
- Kenneth Brian Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...
- Publication number 20250014915
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND WET BENCH FOR THE IN-LINE PROCESSING OF SOLAR-CELL SUBST...
- Publication number 20250015223
- Publication date Jan 9, 2025
- SINGULUS TECHNOLOGIES AG
- Philipp NOACK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR ADJUSTING PLATE TEMPERATURE
- Publication number 20250006523
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TEMPERATURE CONTROL DEVICE, WAFER TEMPERATURE CONTROL METHOD...
- Publication number 20250006524
- Publication date Jan 2, 2025
- HORIBA STEC, CO., LTD.
- Daisuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS

Temperature monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Bonding apparatus and bonding method

Substrate processing apparatus and ceiling heater

Temperature controlled substrate support assembly

Substrate support with varying depths of areas between mesas and co...

Light irradiation type heat treatment apparatus

Method for non-contact low substrate temperature measurement

System and apparatus for a valve assembly

Method and system for providing variable ramp-up control for an ele...

Structure and method for providing line end extensions for fin-type...

Apparatus for processing a wafer, and method of controlling such an...

Vacuum transfer device, substrate processing system, and substrate...

Time-varying frequency powered heat source

Baking apparatus

Method of controlling substrate transfer system and the substrate t...

Apparatus having closed loop IR camera heat detection system and me...

Temperature calibration methods for semiconductor machine

Temperature change rate control device, method, and semiconductor p...

Temperature profile measurement and synchronized control on substra...

Method of cleaning, method of manufacturing semiconductor device, s...

Deposition system and method

Adaptive baking method

Method of calibrating radiation thermometer and system thereof

In-situ semiconductor processing chamber temperature apparatus

Substrate treatment device and substrate treatment method

Control system for adaptive control of a thermal processing system

System, method and device for temperature control

RTP substrate temperature one for all control algorithm

Semiconductor device manufacturing system and method for manufactur...

Method for manufacturing substrate with sensor

Temperature-controlled chemical delivery system and reactor system...

Patents Applicationslast 30 patents

MULTI ZONE SPOT HEATING IN EPI

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS

LOAD LOCK ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING...

RTP SUBSTRATE TEMPERATURE ONE FOR ALL CONTROL ALGORITHM

MICROWAVE ANNEALER FOR SEMICONDUCTOR WAFERS

WAFER CLEANING APPARATUS AND METHOD

SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES

PIPELINE TEMPERATURE CONTROL EQUIPMENT AND PIPELINE TEMPERATURE CON...

EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...

METHOD OF SELECTIVE RELEASE OF COMPONENTS USING THERMAL RELEASE LAYER

IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY

VIRTUAL MEASUREMENT OF CONDITIONS PROXIMATE TO A SUBSTRATE WITH PHY...

APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE

TEMPERATURE MEASUREMENT UNIT AND HEAT TREATMENT APPARATUS

DIELECTRIC SPECTROSCOPY TEMPERATURE MONITORING USING ELECTROSTATIC...

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

SYSTEMS AND METHODS FOR ACCURATE DETERMINATION OF SEMICONDUCTOR WAF...

MANUFACTURING SYSTEM AND METHOD OF SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

WAFER CHUCK, TEMPERATURE CONTROL SYSTEM, AND TEMPERATURE CONTROL ME...

STATUS DETERMINATION METHOD AND MONITORING DEVICE

METHODS OF ANALYZING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS,...

DETERMINING SUBSTRATE DECENTERING IN SEMICONDUCTOR PROCESSING SYSTE...

SUBSTRATE SUPPORT

METROLOGY SLOT PLATES

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...

METHOD AND WET BENCH FOR THE IN-LINE PROCESSING OF SOLAR-CELL SUBST...

APPARATUS AND METHODS FOR ADJUSTING PLATE TEMPERATURE

WAFER TEMPERATURE CONTROL DEVICE, WAFER TEMPERATURE CONTROL METHOD...