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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67248
Temperature monitoring
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,967,512
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Makoto Sambu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for thermally treating conductive elements on semiconductor...
Patent number
11,967,576
Issue date
Apr 23, 2024
Micron Technology, Inc.
James M. Derderian
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of analyzing semiconductor structure
Patent number
11,959,958
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Yi Min Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,961,744
Issue date
Apr 16, 2024
SCREEN Holdings Co., Ltd.
Eiji Fukatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ temperature controlling sample stage customized for coupled...
Patent number
11,955,357
Issue date
Apr 9, 2024
ShanghaiTech University
Yong Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,952,664
Issue date
Apr 9, 2024
Kokusai Electric Corporation
Hidenari Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature calibration with deposition and etch process
Patent number
11,948,818
Issue date
Apr 2, 2024
Applied Materials, Inc.
Zhepeng Cong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cooling device, substrate treatment device, cooling method, and sub...
Patent number
11,948,812
Issue date
Apr 2, 2024
Shibaura Mechatronics Corporation
Kensuke Demura
B08 - CLEANING
Information
Patent Grant
Wafer temperature measurement in an ion implantation system
Patent number
11,942,343
Issue date
Mar 26, 2024
Advanced Ion Beam Technology, Inc.
Chien-Li Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of determining a critical temperature of a semiconductor pac...
Patent number
11,942,344
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Ilyoung Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resin applying machine
Patent number
11,942,346
Issue date
Mar 26, 2024
Disco Corporation
Yoshikuni Migiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Maintenance device and maintenance method for substrate processing...
Patent number
11,941,105
Issue date
Mar 26, 2024
SCREEN Holdings Co., Ltd.
Shinichi Ogasawara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System for non radial temperature control for rotating substrates
Patent number
11,942,381
Issue date
Mar 26, 2024
Applied Materials, Inc.
Wolfgang R. Aderhold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing apparatus and liquid processing method
Patent number
11,935,766
Issue date
Mar 19, 2024
Tokyo Electron Limited
Masaru Amai
B08 - CLEANING
Information
Patent Grant
Electrostatically clamped edge ring
Patent number
11,935,776
Issue date
Mar 19, 2024
Lam Research Corporation
Christopher Kimball
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement for substrate carrier using a heater elemen...
Patent number
11,929,241
Issue date
Mar 12, 2024
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control method, measurement method, control device, and heat treatm...
Patent number
11,929,269
Issue date
Mar 12, 2024
Tokyo Electron Limited
Tatsuya Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Correction data creating method, substrate processing method, and s...
Patent number
11,923,211
Issue date
Mar 5, 2024
Tokyo Electron Limited
Hiroki Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating substrate
Patent number
11,923,219
Issue date
Mar 5, 2024
Semes Co., Ltd.
Youngseop Choi
B08 - CLEANING
Information
Patent Grant
Substrate table with vacuum channels grid
Patent number
11,923,231
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Min-Cheng Wu
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Substrate heating unit, substrate processing apparatus, and substra...
Patent number
11,923,213
Issue date
Mar 5, 2024
Semes Co., Ltd.
Tae Shin Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for in-situ Marangoni cleaning
Patent number
11,923,210
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Chun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus, systems, and methods of measuring edge ring distance for...
Patent number
11,915,953
Issue date
Feb 27, 2024
Applied Materials, Inc.
Ole Luckner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
11,915,951
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-zone semiconductor substrate supports
Patent number
11,915,950
Issue date
Feb 27, 2024
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control method, apparatus, electronic device and storag...
Patent number
11,915,952
Issue date
Feb 27, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for processing substrate
Patent number
11,908,710
Issue date
Feb 20, 2024
Semes Co., Ltd.
Jin Woo Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic temperature control of substrate support in substrate proce...
Patent number
11,908,715
Issue date
Feb 20, 2024
Lam Research Corporation
Sairam Sundaram
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement method and measurement system
Patent number
11,906,466
Issue date
Feb 20, 2024
Tokyo Electron Limited
Takayuki Hatanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate temperature sensor, substrate retainer and substrate proc...
Patent number
11,906,367
Issue date
Feb 20, 2024
Kokusai Electric Corporation
Tokunobu Akao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTI-WAVELENGTH PYROMETER FOR CHAMBER MONITORING
Publication number
20240145273
Publication date
May 2, 2024
Applied Materials, Inc.
Zhepeng CONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW TEMPERATURE MEASUREMENT OF SEMICONDUCTOR SUBSTRATES
Publication number
20240145274
Publication date
May 2, 2024
Applied Materials, Inc.
Wolfgang R. ADERHOLD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PROCESSING APPARATUS
Publication number
20240136216
Publication date
Apr 25, 2024
Samsung Electronics Co., Ltd.
Youngho Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER TEMPERATURE CONTROL DEVICE, WAFER TEMPERATURE CONTROL METHOD,...
Publication number
20240136212
Publication date
Apr 25, 2024
HORIBA STEC, CO., LTD.
Daisuke HAYASHI
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD OF ADJUSTING HEAT UNIFORMITY ON WAFER MOUNT AND METHOD OF MA...
Publication number
20240120216
Publication date
Apr 11, 2024
NGK Insulators, Ltd.
Hiroya SUGIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CORRECTING TARGET LOCATIONS FOR TEMPERATURE IN SEMICONDUCTOR APPLIC...
Publication number
20240120221
Publication date
Apr 11, 2024
KLA Corporation
Min-Yeong Moon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
Publication number
20240112893
Publication date
Apr 4, 2024
LAM RESEARCH CORPORATION
Feng WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CMP TEMPERATURE CONTROL
Publication number
20240109163
Publication date
Apr 4, 2024
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND APPARATUS FOR A VALVE ASSEMBLY
Publication number
20240112934
Publication date
Apr 4, 2024
ASM IP HOLDING B.V.
Andrew Michael Yednak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240112895
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL METHOD
Publication number
20240103482
Publication date
Mar 28, 2024
TOKYO ELECTRON LIMITED
Takari Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240105479
Publication date
Mar 28, 2024
ASM IP HOLDING B.V.
WonKi Jeong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROBER CONTROLLING DEVICE, PROBER CONTROLLING METHOD, AND PROBER
Publication number
20240094254
Publication date
Mar 21, 2024
TOKYO SEIMITSU CO., LTD.
Tetsuo YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENT PROCESSING APPARATUS, SUCH AS A PRESSURE SINTERING APPARA...
Publication number
20240096660
Publication date
Mar 21, 2024
BOSCHMAN TECHNOLOGIES BV
Johannes Cornelis de Beijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
Publication number
20240096688
Publication date
Mar 21, 2024
Applied Materials, Inc.
Michael Robert Rice
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240096650
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Shogo FUKUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20240096652
Publication date
Mar 21, 2024
KIOXIA Corporation
Mana TANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240096665
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Shinichiro MORI
G11 - INFORMATION STORAGE
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240096654
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Fumihiro KAMIMURA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240096655
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Katsuhiko Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, CALCULATION METHOD, AND CALCULATION PR...
Publication number
20240087855
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Shinsuke OKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...
Publication number
20240087928
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Toyohisa TSURUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS AND PARAMETER CONTROL METHOD
Publication number
20240087925
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Youngtai KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD
Publication number
20240087936
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Toshiaki KODAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING, METHOD OF MANUF...
Publication number
20240087946
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Yoshitomo HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTOR PLATE FOR SUBSTRATE PROCESSING
Publication number
20240079252
Publication date
Mar 7, 2024
Applied Materials, Inc.
Dongming IU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION AND CONTROL
Publication number
20240071804
Publication date
Feb 29, 2024
ASM IP HOLDING B.V.
Peipei Gao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
Publication number
20240071791
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Tae Soon KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING SYSTEM, POWER ADJUSTMENT METHOD, AND HEAT TR...
Publication number
20240063034
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Masakazu YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULAR WAFER-CHUCK SYSTEM
Publication number
20240063037
Publication date
Feb 22, 2024
ATT Advanced Temperature Test Systems GmbH
Markus Eibl
H01 - BASIC ELECTRIC ELEMENTS