Temperature monitoring

Industry

CPC
H01L21/67248

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67248Temperature monitoring

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and system for providing variable ramp-down control for an e...
- Patent number 12,369,228
- Issue date Jul 22, 2025
- Watlow Electric Manufacturing Company
- Brittany Phillips
- G01 - MEASURING TESTING
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,365,987
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reflector plate for substrate processing
- Patent number 12,366,481
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controllable bonder equipment for substrate bonding
- Patent number 12,368,129
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-De Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Enhanced closed loop gas based heat exchange
- Patent number 12,368,057
- Issue date Jul 22, 2025
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,362,202
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Fumihiro Kamimura
- B08 - CLEANING
Information Patent Grant
Method for etching etch layer
- Patent number 12,362,203
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Manish Kumar Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control unit
- Patent number 12,354,892
- Issue date Jul 8, 2025
- Tocalo Co., Ltd.
- Ryutaro Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for detecting the presence of deposits in fluid...
- Patent number 12,347,703
- Issue date Jul 1, 2025
- Watlow Electric Manufacturing Company
- Miranda P. Pizzella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using cumulative heat amount data to qualify hot plate used for pos...
- Patent number 12,347,682
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic and localized temperature control for epitaxial deposition...
- Patent number 12,341,038
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Sathya Shrinivas Chary
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Support unit and substrate treating apparatus
- Patent number 12,341,030
- Issue date Jun 24, 2025
- Semes Co., Ltd.
- Kyung Man Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control apparatus for semiconductor processing equipmen...
- Patent number 12,341,037
- Issue date Jun 24, 2025
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and temperature regulation method
- Patent number 12,341,039
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Tatsuya Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing light-emitting element
- Patent number 12,342,658
- Issue date Jun 24, 2025
- Nichia Corporation
- Yoshitaka Kawata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing target material in deposition chamber with ti...
- Patent number 12,341,042
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate transfer device and method of cooling arm
- Patent number 12,330,888
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,334,401
- Issue date Jun 17, 2025
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 12,334,385
- Issue date Jun 17, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,322,609
- Issue date Jun 3, 2025
- Ebara Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual zone heaters for metallic pedestals
- Patent number 12,322,617
- Issue date Jun 3, 2025
- Lam Research Corporation
- Sairam Sundaram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device and heating method for semiconductor thermal process
- Patent number 12,322,612
- Issue date Jun 3, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Wanzheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure heating apparatus
- Patent number 12,322,613
- Issue date Jun 3, 2025
- Samsung Electronics Co., Ltd.
- Tatsuya Ishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with improved temperature control
- Patent number 12,322,633
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, and method and program for controlling...
- Patent number 12,315,704
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing maintenance on substrate processing apparatus
- Patent number 12,315,709
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yuya Minoura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated substrate support
- Patent number 12,309,888
- Issue date May 20, 2025
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method for multi-zone active-matrix temperature control in...
- Patent number 12,309,891
- Issue date May 20, 2025
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid tuning of critical dimension non-uniformity by modulating tem...
- Patent number 12,308,264
- Issue date May 20, 2025
- Lam Research Corporation
- Ravi Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250239472
- Publication date Jul 24, 2025
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCL...
- Publication number 20250232987
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Boi IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20250232993
- Publication date Jul 17, 2025
- Kokusai Electric Corporation
- Shin TSUJIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20250231066
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20250232967
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE
- Publication number 20250226240
- Publication date Jul 10, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Minami NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Control System, Method of Manufacturing Semiconductor D...
- Publication number 20250226246
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED OPTICAL NANOTHERMOMETRY FOR REAL-TIME WAFER TEMPERATURE...
- Publication number 20250224282
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Kate ABEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATIVE HEAT WINDOWS AND WAFER SUPPORT PADS IN VAPOR ETCH REACTORS
- Publication number 20250218819
- Publication date Jul 3, 2025
- LAM RESEARCH CORPORATION
- Ilia Kalinovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218825
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Jae Woo KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD FOR PROVIDING LINE END EXTENSION FOR FIN-TYPE...
- Publication number 20250220951
- Publication date Jul 3, 2025
- MOSAID TECHNOLOGIES INCORPORATED
- Shao-Ming YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20250218824
- Publication date Jul 3, 2025
- SCREEN Holdings Co., Ltd.
- Tomohiro UENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL SENSOR WAFER TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20250216268
- Publication date Jul 3, 2025
- LAM RESEARCH CORPORATION
- Ilia Kalinovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO FINE-TUNER FOR DESIRED TEMPERATURE PROFILE
- Publication number 20250210384
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Yi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20250210341
- Publication date Jun 26, 2025
- SCREEN Holdings Co., Ltd.
- Yuta SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CMP TEMPERATURE CONTROL
- Publication number 20250205847
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Haosheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHANNEL STRUCTURE AND SEMICONDUCTOR MANUFACTURING DEVICE
- Publication number 20250201600
- Publication date Jun 19, 2025
- KYOCERA CORPORATION
- Miki HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND TEMPERATURE MEASUREMENT METHOD
- Publication number 20250201601
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Kazuhito YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250193971
- Publication date Jun 12, 2025
- NGK Insulators, Ltd.
- Naoki YOSHITAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20250179642
- Publication date Jun 5, 2025
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERFEROMETRY-BASED TEMPERATURE MONITORING IN MANUFACTURING SYSTEMS
- Publication number 20250183071
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Eric Chin Hong Ng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE...
- Publication number 20250180288
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Takahiro HAYASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL DEVICE, SUBSTRATE PROCESSING APPARATUS, AND TEM...
- Publication number 20250181087
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Masaru ISAGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVALUATION APPARATUS, EVALUATION METHOD, AND STORAGE MEDIUM
- Publication number 20250183101
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER ARRANGEMENTS WITH UPPER AND LOWER PYROMETERS, SEMICONDUCTOR...
- Publication number 20250183070
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE RANGE HEATED ELECTROSTATIC CHUCK
- Publication number 20250183085
- Publication date Jun 5, 2025
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...
- Publication number 20250166167
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Yusuke MIYAKUBO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CERAMIC HEATER
- Publication number 20250167019
- Publication date May 22, 2025
- MICO CERAMICS LTD.
- Jung-Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS
- Publication number 20250167008
- Publication date May 22, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Solid-state manufacturing method and solid-state manufacturing device
- Publication number 20250162064
- Publication date May 22, 2025
- IDQ SCIENCE AND TECHNOLOGY DEVELOPMENT (GUANGDONG, HENGQIN) CO.,LTD.
- Dawei GUO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Temperature monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for providing variable ramp-down control for an e...

Method of processing substrate, method of manufacturing semiconduct...

Reflector plate for substrate processing

Temperature controllable bonder equipment for substrate bonding

Enhanced closed loop gas based heat exchange

Substrate processing method and substrate processing apparatus

Method for etching etch layer

Temperature control unit

Systems and methods for detecting the presence of deposits in fluid...

Using cumulative heat amount data to qualify hot plate used for pos...

Dynamic and localized temperature control for epitaxial deposition...

Support unit and substrate treating apparatus

Temperature control apparatus for semiconductor processing equipmen...

Substrate processing apparatus and temperature regulation method

Method for manufacturing light-emitting element

Method for depositing target material in deposition chamber with ti...

Substrate transfer device and method of cooling arm

Substrate processing apparatus, method of manufacturing semiconduct...

Tunable temperature controlled substrate support assembly

Substrate processing apparatus and substrate processing method

Dual zone heaters for metallic pedestals

Heating device and heating method for semiconductor thermal process

Pressure heating apparatus

Electrostatic chuck with improved temperature control

Plasma processing apparatus, and method and program for controlling...

Method of performing maintenance on substrate processing apparatus

Heated substrate support

Control method for multi-zone active-matrix temperature control in...

Rapid tuning of critical dimension non-uniformity by modulating tem...

Apparatus and method for drying substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCL...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

PROCESSING SYSTEM AND PROCESSING METHOD

SUBSTRATE TREATMENT DEVICE

Temperature Control System, Method of Manufacturing Semiconductor D...

INTEGRATED OPTICAL NANOTHERMOMETRY FOR REAL-TIME WAFER TEMPERATURE...

RADIATIVE HEAT WINDOWS AND WAFER SUPPORT PADS IN VAPOR ETCH REACTORS

SUBSTRATE PROCESSING APPARATUS

STRUCTURE AND METHOD FOR PROVIDING LINE END EXTENSION FOR FIN-TYPE...

HEAT TREATMENT APPARATUS

DUAL SENSOR WAFER TEMPERATURE MEASUREMENT SYSTEM

AUTO FINE-TUNER FOR DESIRED TEMPERATURE PROFILE

SUBSTRATE TREATING METHOD

METHOD FOR CMP TEMPERATURE CONTROL

CHANNEL STRUCTURE AND SEMICONDUCTOR MANUFACTURING DEVICE

PLASMA PROCESSING APPARATUS AND TEMPERATURE MEASUREMENT METHOD

CERAMIC SUSCEPTOR

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

INTERFEROMETRY-BASED TEMPERATURE MONITORING IN MANUFACTURING SYSTEMS

SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE...

TEMPERATURE CONTROL DEVICE, SUBSTRATE PROCESSING APPARATUS, AND TEM...

EVALUATION APPARATUS, EVALUATION METHOD, AND STORAGE MEDIUM

CHAMBER ARRANGEMENTS WITH UPPER AND LOWER PYROMETERS, SEMICONDUCTOR...

LARGE RANGE HEATED ELECTROSTATIC CHUCK

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...

CERAMIC HEATER

GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS

Solid-state manufacturing method and solid-state manufacturing device