Temperature monitoring

Industry

CPC
H01L21/67248

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67248Temperature monitoring

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,322,609
- Issue date Jun 3, 2025
- Ebara Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual zone heaters for metallic pedestals
- Patent number 12,322,617
- Issue date Jun 3, 2025
- Lam Research Corporation
- Sairam Sundaram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device and heating method for semiconductor thermal process
- Patent number 12,322,612
- Issue date Jun 3, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Wanzheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure heating apparatus
- Patent number 12,322,613
- Issue date Jun 3, 2025
- Samsung Electronics Co., Ltd.
- Tatsuya Ishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with improved temperature control
- Patent number 12,322,633
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, and method and program for controlling...
- Patent number 12,315,704
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing maintenance on substrate processing apparatus
- Patent number 12,315,709
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yuya Minoura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid tuning of critical dimension non-uniformity by modulating tem...
- Patent number 12,308,264
- Issue date May 20, 2025
- Lam Research Corporation
- Ravi Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated substrate support
- Patent number 12,309,888
- Issue date May 20, 2025
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method for multi-zone active-matrix temperature control in...
- Patent number 12,309,891
- Issue date May 20, 2025
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF immune sensor probe for monitoring a temperature of an electrost...
- Patent number 12,308,265
- Issue date May 20, 2025
- Lam Research Corporation
- Siyuan Tian
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus, calculation method, and calculation pr...
- Patent number 12,300,469
- Issue date May 13, 2025
- Tokyo Electron Limited
- Shinsuke Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for CMP temperature control
- Patent number 12,296,427
- Issue date May 13, 2025
- Applied Materials, Inc.
- Haosheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing control method, substrate processing apparatus...
- Patent number 12,300,526
- Issue date May 13, 2025
- Tokyo Electron Limited
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,293,930
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermal control of devices in an electronics...
- Patent number 12,292,484
- Issue date May 6, 2025
- AEHR Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor laser inspection apparatus
- Patent number 12,287,279
- Issue date Apr 29, 2025
- Mitsubishi Electric Corporation
- Yohei Mikami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer mass metrology apparatus and semiconductor wafe...
- Patent number 12,288,702
- Issue date Apr 29, 2025
- Lam Research Corporation
- Gregor Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for temperature control for a substrate
- Patent number 12,283,500
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Paul Zachary Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor deposition monitoring device
- Patent number 12,283,497
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Young Uk Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment device
- Patent number 12,278,120
- Issue date Apr 15, 2025
- Shibaura Mechatronics Corporation
- Minami Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, thermal resistance acquisition method,...
- Patent number 12,278,126
- Issue date Apr 15, 2025
- Tokyo Electron Limited
- Shinsuke Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto fine-tuner for desired temperature profile
- Patent number 12,278,127
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- Yi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
- Patent number 12,272,575
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate temperature correction...
- Patent number 12,266,514
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Rei Ibuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system, and method for non-contact temperature monitorin...
- Patent number 12,266,551
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Bhaskar Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermal control of devices in electronics tester
- Patent number 12,265,136
- Issue date Apr 1, 2025
- AEHR Test Systems
- Jovan Jovanovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermoelectric cooling pedestal for substrate processing systems
- Patent number 12,266,588
- Issue date Apr 1, 2025
- Lam Research Corporation
- Mrinal Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and stage cleaning method
- Patent number 12,261,060
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Tsutomu Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20250179642
- Publication date Jun 5, 2025
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE...
- Publication number 20250180288
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Takahiro HAYASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFEROMETRY-BASED TEMPERATURE MONITORING IN MANUFACTURING SYSTEMS
- Publication number 20250183071
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Eric Chin Hong Ng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL DEVICE, SUBSTRATE PROCESSING APPARATUS, AND TEM...
- Publication number 20250181087
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Masaru ISAGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVALUATION APPARATUS, EVALUATION METHOD, AND STORAGE MEDIUM
- Publication number 20250183101
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER ARRANGEMENTS WITH UPPER AND LOWER PYROMETERS, SEMICONDUCTOR...
- Publication number 20250183070
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE RANGE HEATED ELECTROSTATIC CHUCK
- Publication number 20250183085
- Publication date Jun 5, 2025
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC HEATER
- Publication number 20250167019
- Publication date May 22, 2025
- MICO CERAMICS LTD.
- Jung-Chul Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...
- Publication number 20250166167
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Yusuke MIYAKUBO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Solid-state manufacturing method and solid-state manufacturing device
- Publication number 20250162064
- Publication date May 22, 2025
- IDQ SCIENCE AND TECHNOLOGY DEVELOPMENT (GUANGDONG, HENGQIN) CO.,LTD.
- Dawei GUO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS
- Publication number 20250167008
- Publication date May 22, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER UNIT
- Publication number 20250168934
- Publication date May 22, 2025
- NHK SPRING CO., LTD.
- Yoshihito ARAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20250144677
- Publication date May 8, 2025
- KIOXIA Corporation
- Minako INUKAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250140585
- Publication date May 1, 2025
- Tokyo Electron Limited
- Shogo FUKUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20250132148
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-HEAT RINGS, HEATING SYSTEMS, AND PROCESSING CHAMBERS INCLUDING...
- Publication number 20250132174
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Haifeng ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIRTUAL METROLOGY FOR ENHANCED WINDOW TEMPERATURE CONTROL
- Publication number 20250132179
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR PHASE GROWTH APPARATUS
- Publication number 20250129470
- Publication date Apr 24, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE ELECTROSTATIC CHUCK
- Publication number 20250125181
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK ELECTRODE WITH SELF-INDUCED DC VOLTAGE
- Publication number 20250125180
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR ASSEMBLY THERMAL BREAK AND METHODS FOR COOLING A SUSCEPTO...
- Publication number 20250125183
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Vijayabhaskara Venkatagiriyappa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20250118541
- Publication date Apr 10, 2025
- Hitachi High-Tech Corporation
- Tomoaki HYODO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...
- Publication number 20250118579
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20250118578
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Ajith Karonnan Ramapurath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250112063
- Publication date Apr 3, 2025
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...
- Publication number 20250112064
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET PROCESSING WITH AUTOMATIC PROCESS CONTROL
- Publication number 20250105036
- Publication date Mar 27, 2025
- Yield Engineering Systems, Inc.
- Venugopal Govindarajulu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT TRANSFER APPARATUS AND TRANSFER METHOD USING...
- Publication number 20250105047
- Publication date Mar 27, 2025
- Hyundai Motor Company
- Tae Woo KWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...
- Publication number 20250102373
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE OFFSET AND ZONE CONTROL TUNING
- Publication number 20250105035
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Ole LUCKNER
- H01 - BASIC ELECTRIC ELEMENTS

Temperature monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Dual zone heaters for metallic pedestals

Heating device and heating method for semiconductor thermal process

Pressure heating apparatus

Electrostatic chuck with improved temperature control

Plasma processing apparatus, and method and program for controlling...

Method of performing maintenance on substrate processing apparatus

Rapid tuning of critical dimension non-uniformity by modulating tem...

Heated substrate support

Control method for multi-zone active-matrix temperature control in...

Apparatus and method for drying substrate

RF immune sensor probe for monitoring a temperature of an electrost...

Plasma processing apparatus, calculation method, and calculation pr...

Apparatus and method for CMP temperature control

Substrate processing control method, substrate processing apparatus...

Substrate processing apparatus, method of manufacturing semiconduct...

Method and system for thermal control of devices in an electronics...

Semiconductor laser inspection apparatus

Semiconductor wafer mass metrology apparatus and semiconductor wafe...

Methods and systems for temperature control for a substrate

Semiconductor deposition monitoring device

Substrate treatment device

Plasma processing apparatus, thermal resistance acquisition method,...

Auto fine-tuner for desired temperature profile

Advanced temperature control for wafer carrier in plasma processing...

Substrate processing apparatus and substrate temperature correction...

Apparatus, system, and method for non-contact temperature monitorin...

Method and system for thermal control of devices in electronics tester

Thermoelectric cooling pedestal for substrate processing systems

Substrate processing apparatus and stage cleaning method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE...

INTERFEROMETRY-BASED TEMPERATURE MONITORING IN MANUFACTURING SYSTEMS

TEMPERATURE CONTROL DEVICE, SUBSTRATE PROCESSING APPARATUS, AND TEM...

EVALUATION APPARATUS, EVALUATION METHOD, AND STORAGE MEDIUM

CHAMBER ARRANGEMENTS WITH UPPER AND LOWER PYROMETERS, SEMICONDUCTOR...

LARGE RANGE HEATED ELECTROSTATIC CHUCK

CERAMIC HEATER

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...

Solid-state manufacturing method and solid-state manufacturing device

GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS

HEATER UNIT

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEPOSITION SYSTEM AND METHOD

PRE-HEAT RINGS, HEATING SYSTEMS, AND PROCESSING CHAMBERS INCLUDING...

VIRTUAL METROLOGY FOR ENHANCED WINDOW TEMPERATURE CONTROL

VAPOR PHASE GROWTH APPARATUS

LOW TEMPERATURE ELECTROSTATIC CHUCK

BIPOLAR ELECTROSTATIC CHUCK ELECTRODE WITH SELF-INDUCED DC VOLTAGE

SUSCEPTOR ASSEMBLY THERMAL BREAK AND METHODS FOR COOLING A SUSCEPTO...

PLASMA PROCESSING APPARATUS

TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...

PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CH...

WET PROCESSING WITH AUTOMATIC PROCESS CONTROL

SEMICONDUCTOR ELEMENT TRANSFER APPARATUS AND TRANSFER METHOD USING...

TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...

TEMPERATURE OFFSET AND ZONE CONTROL TUNING