Membership
Tour
Register
Log in
Temperature
Follow
Industry
CPC
H01J37/32724
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/32724
Temperature
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Edge seal for lower electrode assembly
Patent number
12,368,025
Issue date
Jul 22, 2025
Lam Research Corporation
David Schaefer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lamellar ceramic structure
Patent number
12,368,029
Issue date
Jul 22, 2025
Lam Research Corporation
Joel Philip Hollingsworth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
12,368,050
Issue date
Jul 22, 2025
Tokyo Electron Limited
Masahiko Yokoi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition method and deposition apparatus
Patent number
12,368,030
Issue date
Jul 22, 2025
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and semiconductor fabrication method us...
Patent number
12,362,216
Issue date
Jul 15, 2025
Samsung Electronics Co., Ltd.
Daehyun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, temperature control method of subst...
Patent number
12,362,155
Issue date
Jul 15, 2025
Tokyo Electron Limited
Toshiharu Hirata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High aspect ratio etch with infinite selectivity
Patent number
12,354,880
Issue date
Jul 8, 2025
Lam Research Corporation
Leonid Belau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film formation apparatus
Patent number
12,354,854
Issue date
Jul 8, 2025
Shibaura Mechatronics Corporation
Hisashi Nishigaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck, substrate processing apparatus, and substrate...
Patent number
12,354,852
Issue date
Jul 8, 2025
Semes Co., Ltd.
Hyun Tak Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone heater tuning in substrate heater
Patent number
12,351,917
Issue date
Jul 8, 2025
Applied Materials, Inc.
Jun Ma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Etching method and plasma etching apparatus
Patent number
12,354,853
Issue date
Jul 8, 2025
Tokyo Electron Limited
Koki Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for treating substrate
Patent number
12,347,694
Issue date
Jul 1, 2025
Semes Co., Ltd.
Dong-Hun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Susceptor assembly for plasma apparatus
Patent number
12,347,644
Issue date
Jul 1, 2025
ASM IP Holding B.V.
Sam Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage and plasma processing apparatus
Patent number
12,347,658
Issue date
Jul 1, 2025
Tokyo Electron Limited
Ryota Sakane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electromagnetic filter and plasma processing apparatus having the same
Patent number
12,347,655
Issue date
Jul 1, 2025
FNS.INC.
Kwankoo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck assembly for cryogenic applications
Patent number
12,347,659
Issue date
Jul 1, 2025
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Member for semiconductor manufacturing apparatus
Patent number
12,340,990
Issue date
Jun 24, 2025
NGK Insulators, Ltd.
Hiroshi Takebayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control apparatus for semiconductor processing equipmen...
Patent number
12,341,037
Issue date
Jun 24, 2025
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
Kui Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck including a heater element with mutiple heating...
Patent number
12,341,049
Issue date
Jun 24, 2025
Toto Ltd.
Akihito Ono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate fixing device
Patent number
12,340,991
Issue date
Jun 24, 2025
Shinko Electric Industries Co., Ltd.
Aya Uchiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cooled substrate support assembly for radio frequency environments
Patent number
12,334,315
Issue date
Jun 17, 2025
Applied Materials, Inc.
Vijay D. Parkhe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate support gap pumping to prevent glow discharge and light-up
Patent number
12,334,383
Issue date
Jun 17, 2025
Applied Materials, Inc.
James David Carducci
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cryogenic micro-zone electrostatic chuck connector assembly
Patent number
12,331,984
Issue date
Jun 17, 2025
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Filter device and plasma processing apparatus
Patent number
12,334,309
Issue date
Jun 17, 2025
Tokyo Electron Limited
Naohiko Okunishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,334,316
Issue date
Jun 17, 2025
HITACHI HIGH-TECH CORPORATION
Takamasa Ichino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for processing substrate
Patent number
12,327,735
Issue date
Jun 10, 2025
Semes Co., Ltd.
Seong Gil Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with improved temperature control
Patent number
12,322,633
Issue date
Jun 3, 2025
Applied Materials, Inc.
Hanish Kumar Panavalappil Kumarankutty
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone heater control for wafer processing equipment
Patent number
12,317,378
Issue date
May 27, 2025
Applied Materials, Inc.
Uwe P. Haller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mounting table structure, substrate processing apparatus, and metho...
Patent number
12,315,707
Issue date
May 27, 2025
Tokyo Electron Limited
Motoi Yamagata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for treating substrate
Patent number
12,315,708
Issue date
May 27, 2025
Semes Co., Ltd.
Su Hyung Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING METHOD, PRECOAT METHOD, AND ETCHING APPARATUS
Publication number
20250239476
Publication date
Jul 24, 2025
TOKYO ELECTRON LIMITED
Takamitsu TAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA MULTI-WAFER ASHING SYSTEM
Publication number
20250237959
Publication date
Jul 24, 2025
Rockwell Collins, Inc.
Mark J. Reimer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Processing Apparatus
Publication number
20250232963
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Motoi YAMAGATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20250232962
Publication date
Jul 17, 2025
Hitachi High-Tech Corporation
Yuki TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
Publication number
20250232967
Publication date
Jul 17, 2025
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250226190
Publication date
Jul 10, 2025
TOKYO ELECTRON LIMITED
Takayuki ISHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20250226207
Publication date
Jul 10, 2025
Kokusai Electric Corporation
Yasunobu KOSHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20250218825
Publication date
Jul 3, 2025
SEMES CO., LTD.
Jae Woo KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
Publication number
20250215551
Publication date
Jul 3, 2025
Silanna UV Technologies Pte Ltd
Petar Atanackovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE HOLDING UNIT AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250218843
Publication date
Jul 3, 2025
Samsung Electronics Co., Ltd.
Iksu BYUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20250218744
Publication date
Jul 3, 2025
TOKYO ELECTRON LIMITED
Naoki Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND METHOD
Publication number
20250218741
Publication date
Jul 3, 2025
SEMES CO., LTD.
Jin Hyeok KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20250210326
Publication date
Jun 26, 2025
NGK Insulators, Ltd.
Seiya INOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20250210328
Publication date
Jun 26, 2025
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING SUBSTRATE SUPPORT UNIT
Publication number
20250210395
Publication date
Jun 26, 2025
SEMES CO., LTD.
Kuk Saeng KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TRANSFER MEMBER, METHOD FOR MANUFACTURING HEAT TRANSFER MEMBER...
Publication number
20250210318
Publication date
Jun 26, 2025
MITSUBISHI MATERIALS CORPORATION
Miho Shoji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250210327
Publication date
Jun 26, 2025
TOKYO ELECTRON LIMITED
Takahiro YONEZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER ETCHING OF SILICON OXIDE AT CRYOGENIC TEMPERATURE
Publication number
20250210367
Publication date
Jun 26, 2025
Applied Materials, Inc.
Sonam Dorje SHERPA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ESC DESIGN WITH ENHANCED TUNABILITY FOR WAFER FAR EDGE PLASMA PROFI...
Publication number
20250201538
Publication date
Jun 19, 2025
Applied Materials, Inc.
Jian LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND TEMPERATURE MEASUREMENT METHOD
Publication number
20250201601
Publication date
Jun 19, 2025
TOKYO ELECTRON LIMITED
Kazuhito YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
Publication number
20250201526
Publication date
Jun 19, 2025
ASM IP HOLDING B.V.
Daniele Piumi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATER CIRCUIT, CONTROLLING METHOD THEREOF, AND SUBSTRATE PROCESSIN...
Publication number
20250201615
Publication date
Jun 19, 2025
SEMES CO., LTD.
Byeong Hyeon KONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK DEVICE AND COOLING PLATE
Publication number
20250191956
Publication date
Jun 12, 2025
HORIBA STEC, CO., LTD.
Esteban GONZALEZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLOWRATE CONTROL UNIT FOR TEMPERATURE ADJUSTMENT AND SEMICONDUCTOR...
Publication number
20250191895
Publication date
Jun 12, 2025
CKD CORPORATION
Yuko SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPARK PLASMA SINTERED COMPONENT FOR CRYO-PLASMA PROCESSING
Publication number
20250191893
Publication date
Jun 12, 2025
LAM RESEARCH CORPORATION
Lin XU
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD OF CLEANING INSIDE OF CHAMBER
Publication number
20250191896
Publication date
Jun 12, 2025
ASM IP HOLDING B.V.
Ryo MIYAMA
B08 - CLEANING
Information
Patent Application
Electrostatic Chuck Assembly for Plasma Processing Apparatus
Publication number
20250191958
Publication date
Jun 12, 2025
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH POWER CABLE FOR HEATED COMPONENTS IN RF ENVIRONMENT
Publication number
20250183015
Publication date
Jun 5, 2025
LAM RESEARCH CORPORATION
Seyed Jafar JAFARIAN-TEHRANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20250183014
Publication date
Jun 5, 2025
SEMES CO., LTD.
Won Jun LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PEDESTAL THERMAL PROFILE TUNING USING MULTIPLE HEATED ZONES AND THE...
Publication number
20250179633
Publication date
Jun 5, 2025
LAM RESEARCH CORPORATION
Gary B. LIND
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...