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ELECTROSTATIC CHUCK ASSEMBLY
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Publication number 20240145220
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Publication date May 2, 2024
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Applied Materials, Inc.
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Jaeyong CHO
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER PLACEMENT TABLE
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Publication number 20240136219
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Publication date Apr 25, 2024
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NGK Insulators, Ltd.
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Tatsuya KUNO
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER PLACEMENT TABLE
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Publication number 20240128063
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Publication date Apr 18, 2024
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NGK Insulators, Ltd.
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Masaki ISHIKAWA
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H01 - BASIC ELECTRIC ELEMENTS
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MONOLITHIC ANISOTROPIC SUBSTRATE SUPPORTS
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Publication number 20240128062
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Publication date Apr 18, 2024
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LAM RESEARCH CORPORATION
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Joel HOLLINGSWORTH
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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ELECTROSTATIC CHUCK ASSEMBLY
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Publication number 20240105488
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Publication date Mar 28, 2024
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NGK Insulators, Ltd.
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Hiroshi TAKEBAYASHI
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER PLACEMENT TABLE
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Publication number 20240105428
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Publication date Mar 28, 2024
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NGK Insulators, Ltd.
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Tatsuya KUNO
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H01 - BASIC ELECTRIC ELEMENTS
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FLUORINE-DOPED SILICON-CONTAINING MATERIALS
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Publication number 20240087882
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Publication date Mar 14, 2024
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Applied Materials, Inc.
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Siyu Zhu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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WAFER PLACEMENT TABLE
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Publication number 20240079217
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Publication date Mar 7, 2024
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NGK Insulators, Ltd.
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Tatsuya KUNO
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20240079219
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Publication date Mar 7, 2024
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TOKYO ELECTRON LIMITED
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Masanori ASAHARA
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER PLACEMENT TABLE
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Publication number 20240079218
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Publication date Mar 7, 2024
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NGK Insulators, Ltd.
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Tatsuya KUNO
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H01 - BASIC ELECTRIC ELEMENTS
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METHODS AND SYSTEMS FOR DRY ETCHING
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Publication number 20240071803
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Publication date Feb 29, 2024
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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
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Fu-Yi Liu
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H01 - BASIC ELECTRIC ELEMENTS
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