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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C99/00
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B81C99/005
Test apparatus
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Patents Grants
last 30 patents
Information
Patent Grant
Testing apparatus and testing method thereof
Patent number
11,368,804
Issue date
Jun 21, 2022
xMEMS Labs, Inc.
Yuan-Shuang Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for packaging, handling or testing of sensors
Patent number
10,935,569
Issue date
Mar 2, 2021
Rosemount Aerospace Inc.
Jim Golden
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for packaging, handling or testing of sensors
Patent number
10,782,315
Issue date
Sep 22, 2020
Rosemount Aerospace Inc.
Jim Golden
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated optical probe card and system for batch testing of optic...
Patent number
10,782,342
Issue date
Sep 22, 2020
Si-Ware Systems
Bassam Saadany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor characteristic evaluation method and charged particle beam d...
Patent number
10,737,937
Issue date
Aug 11, 2020
Hitachi, Ltd.
Toshiyuki Mine
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and methods for integrated MEMS devices
Patent number
10,479,676
Issue date
Nov 19, 2019
MCube, Inc.
Ben Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Controlled pulse generation methods and apparatuses for evaluating...
Patent number
10,393,618
Issue date
Aug 27, 2019
NXP USA, INC.
Peter T. Jones
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Probe card for a magnetically-actuable device and test system inclu...
Patent number
10,364,147
Issue date
Jul 30, 2019
STMicroelectronics S.r.l.
Marco Rossi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Centrifuge MEMS stiction test system and method
Patent number
10,317,333
Issue date
Jun 11, 2019
MCube Inc.
Raymond Merrill
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure and method of manufacturing the same
Patent number
10,183,858
Issue date
Jan 22, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Albert Wan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and methods for integrated MEMS devices
Patent number
10,046,966
Issue date
Aug 14, 2018
MCube, Inc.
Ben Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and corresponding test method for a micro...
Patent number
9,764,945
Issue date
Sep 19, 2017
Robert Bosch GmbH
Sebastian Reiss
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Centrifuge MEMS stiction detection and screening system and method
Patent number
9,758,374
Issue date
Sep 12, 2017
MCube Inc.
Raymond Merrill
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Single motor dynamic calibration unit
Patent number
9,751,757
Issue date
Sep 5, 2017
Kionix, Inc.
Nathan L. Stirling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method including an intertial mass element
Patent number
9,679,857
Issue date
Jun 13, 2017
NXP B.V.
Matthias Merz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level centrifuge for MEMS stiction detection and screening sy...
Patent number
9,651,473
Issue date
May 16, 2017
MCube Inc.
Raymond Merrill
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for fabricating and manufacturing micro—and nano-fabricated...
Patent number
9,646,878
Issue date
May 9, 2017
Corporation for National Research Initiatives
Michael A. Huff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device positioning apparatus, test system, and test method
Patent number
9,618,556
Issue date
Apr 11, 2017
NXP USA, INC.
Thomas J. Birk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System for the combined, probe-based mechanical and electrical test...
Patent number
9,575,093
Issue date
Feb 21, 2017
FemtoTools AG
Felix Beyeler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Interface of a microfabricated scanning force sensor for combined f...
Patent number
9,535,086
Issue date
Jan 3, 2017
FemtoTools AG
Felix Beyeler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methodology and system for wafer-level testing of MEMS pressure sen...
Patent number
9,527,731
Issue date
Dec 27, 2016
NXP USA, INC.
Bruno J. Debeurre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Testing for defective manufacturing of microphones and ultralow pre...
Patent number
9,400,262
Issue date
Jul 26, 2016
Robert Bosch GmbH
Andrew J. Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device positioning apparatus, test system, and test method
Patent number
9,341,663
Issue date
May 17, 2016
FREESCALE SEMICONDUCTOR, INC.
Thomas J. Birk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MCU-based compensation and calibration for MEMS devices
Patent number
9,335,396
Issue date
May 10, 2016
FREESCALE SEMICONDUCTOR, INC.
Bruno Debeurre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for measuring a microelectromechanical semiconductor component
Patent number
9,322,731
Issue date
Apr 26, 2016
Elmos Semiconductor AG
Peter Binkhoff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tester and method for testing a strip of devices
Patent number
9,285,422
Issue date
Mar 15, 2016
Freescale Semiconductor Inc.
Chad S. Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level packaging techniques
Patent number
9,269,679
Issue date
Feb 23, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Chuan Teng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Spread-spectrum MEMS self-test system and method
Patent number
9,238,580
Issue date
Jan 19, 2016
Analog Devices Global
Kamatchi Saravanan Alagarsamy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for in situ testing of microscale and nanoscal...
Patent number
9,019,512
Issue date
Apr 28, 2015
The Board of Trustees of the University of Illinois
Wonmo Kang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and device for measuring a microelectromechanical semiconduc...
Patent number
8,943,907
Issue date
Feb 3, 2015
Elmos Semiconductor AG
Peter Binkhoff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MOVABLE DEVICE, MEMS DEVICE AND OPTICAL SCANNING APPARATUS
Publication number
20240004185
Publication date
Jan 4, 2024
MITSUMI ELECTRIC CO., LTD.
Tomohiro TAIRA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR CHARACTERISTIC EVALUATION METHOD AND CHARGED PARTICLE BEAM D...
Publication number
20190292046
Publication date
Sep 26, 2019
Hitachi, Ltd
Toshiyuki MINE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES
Publication number
20180346328
Publication date
Dec 6, 2018
MCUBE, INC.
Ben LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHOD FOR PACKAGING, HANDLING OR TESTING OF SENSORS
Publication number
20180299482
Publication date
Oct 18, 2018
Rosemount Aerospace Inc.
Jim Golden
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROBE CARD FOR A MAGNETICALLY-ACTUABLE DEVICE AND TEST SYSTEM INCLU...
Publication number
20180237293
Publication date
Aug 23, 2018
STMicroelectronics S.r.l.
Marco Rossi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED OPTICAL PROBE CARD AND SYSTEM FOR BATCH TESTING OF OPTIC...
Publication number
20180143245
Publication date
May 24, 2018
SI-WARE SYSTEMS
Bassam Saadany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES
Publication number
20170283256
Publication date
Oct 5, 2017
MCUBE, INC.
Ben LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM FOR WAFER-LEVEL TESTING OF MEMS PRESSURE SENSORS
Publication number
20160116361
Publication date
Apr 28, 2016
FREESCALE SEMICONDUCTOR, INC.
BRUNO J. DEBEURRE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODOLOGY AND SYSTEM FOR WAFER-LEVEL TESTING OF MEMS PRESSURE SEN...
Publication number
20160107887
Publication date
Apr 21, 2016
FREESCALE SEMICONDUCTOR, INC.
BRUNO J. DEBEURRE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CENTRIFUGE MEMS STICTION DETECTION AND SCREENING SYSTEM AND METHOD
Publication number
20150284245
Publication date
Oct 8, 2015
MCube Inc.
RAYMOND MERRILL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CENTRIFUGE MEMS STICTION TEST SYSTEM AND METHOD
Publication number
20140352403
Publication date
Dec 4, 2014
MCube Inc.
RAYMOND MERRILL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL CENTRIFUGE FOR MEMS STICTION DETECTION AND SCREENING SY...
Publication number
20140290331
Publication date
Oct 2, 2014
MCube Inc.
Raymond Merrill
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MCU-BASED COMPENSATION AND CALIBRATION FOR MEMS DEVICES
Publication number
20140266246
Publication date
Sep 18, 2014
FREESCALE SEMICONDUCTOR, INC.
Bruno Debeurre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Spread-Spectrum MEMS Self-Test System and Method
Publication number
20140250969
Publication date
Sep 11, 2014
Analog Devices Technology
Kamatchi Saravanan Alagarsamy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SINGLE MOTOR DYNAMIC CALIBRATION UNIT
Publication number
20140245810
Publication date
Sep 4, 2014
Kionix, Inc.
Nathan L. STIRLING
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TESTING FOR DEFECTIVE MANUFACTURING OF MICROPHONES AND ULTRALOW PRE...
Publication number
20140076052
Publication date
Mar 20, 2014
ROBERT BOSCH GmbH
Andrew J. Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHOD FOR IN SITU TESTING OF MICROSCALE AND NANOSCAL...
Publication number
20140013854
Publication date
Jan 16, 2014
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Wonmo Kang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
AUTOMATIC CHARACTERIZATION OF AN ACTUATOR BASED ON CAPACITANCE MEAS...
Publication number
20130338834
Publication date
Dec 19, 2013
Analog Devices, Inc.
Eduardo M. MARTINEZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TESTER AND METHOD FOR TESTING A STRIP OF DEVICES
Publication number
20130297248
Publication date
Nov 7, 2013
FREESCALE SEMICONDUCTOR, INC.
Chad S. Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MEASURING A MICROELECTROMECHANICAL SEMICONDUCTOR COMPONENT
Publication number
20130263643
Publication date
Oct 10, 2013
ELMOS Semiconductor AG
Peter Binkhoff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO/NANO-MECHANICAL TEST SYSTEM EMPLOYING TENSILE TEST HOLDER WIT...
Publication number
20130247682
Publication date
Sep 26, 2013
Hysitron Inc.
Yunje Oh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND DEVICE FOR MEASURING A MICROELECTROMECHANICAL SEMICONDUC...
Publication number
20130247688
Publication date
Sep 26, 2013
ELMOS Semiconductor AG
Peter Binkhoff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHOD FOR IN SITU TESTING OF MICROSCALE AND NANOSCAL...
Publication number
20110317157
Publication date
Dec 29, 2011
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Wonmo Kang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED CIRCUIT DEVICE TEST APPARATUS
Publication number
20110260734
Publication date
Oct 27, 2011
AFA Micro Co.
Shyh-Shyan Liao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
QUALITY CONTROL METHOD AND MICRO/NANO-CHANNELED DEVICES
Publication number
20110137596
Publication date
Jun 9, 2011
The Board of Regents of the University of Texas System
Alessandro Grattoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PROBE CARD AND MANUFACTURING METHOD THEREOF
Publication number
20110089967
Publication date
Apr 21, 2011
Sanghee Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
AUTOMATIC CHARACTERIZATION OF AN ACTUATOR BASED ON CAPACITANCE MEAS...
Publication number
20110050252
Publication date
Mar 3, 2011
Analog Devices, Inc.
Eduardo Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD
Publication number
20110012211
Publication date
Jan 20, 2011
NXP B.V.
Matthias Merz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROBE CARD AND MICROSTRUCTURE INSPECTING APPARATUS
Publication number
20100225342
Publication date
Sep 9, 2010
TOKYO ELECTRON LIMITED
Masato Hayashi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO/NANO-MECHANICAL TEST SYSTEM EMPLOYING TENSILE TEST HOLDER WIT...
Publication number
20100095780
Publication date
Apr 22, 2010
Hysitron Incorporated
Yunje Oh
B81 - MICRO-STRUCTURAL TECHNOLOGY