Testing

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B81C99/0035

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C99/00Subject matter not provided for in other groups of this subclass

Current Industry

B81C99/0035Testing

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Patents Grantslast 30 patents

Information Patent Grant
Electrical test structure and method for monitoring deep trench imp...
- Patent number 11,119,137
- Issue date Sep 14, 2021
- Texas Instruments Incorporated
- Thomas Edward Lillibridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems sensor testing device, system and me...
- Patent number 11,001,496
- Issue date May 11, 2021
- STMicroelectronics S.r.l.
- Federico Iaccarino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical component
- Patent number 10,336,610
- Issue date Jul 2, 2019
- Robert Bosch GmbH
- Heiko Stahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Circuitry and method for generating a discrete-time high voltage
- Patent number 10,323,957
- Issue date Jun 18, 2019
- Murata Manufacturing Co., Ltd.
- Lasse Aaltonen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Centrifuge MEMS stiction detection and screening system and method
- Patent number 9,758,374
- Issue date Sep 12, 2017
- MCube Inc.
- Raymond Merrill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method for detecting damaging of a semicon...
- Patent number 9,618,561
- Issue date Apr 11, 2017
- Infineon Technologies AG
- Dirk Meinhold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device calibration
- Patent number 9,513,184
- Issue date Dec 6, 2016
- ams International AG
- Martijn Goossens
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for testing signal-to-noise ratio using a film frame
- Patent number 9,491,558
- Issue date Nov 8, 2016
- Robert Bosch GmbH
- Andrew J. Doller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical semiconductor component that is sensitive to...
- Patent number 8,975,671
- Issue date Mar 10, 2015
- Elmos Semiconductor AG
- Arnd Ten Have
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive physical quantity sensor and diagnosis method
- Patent number 7,525,322
- Issue date Apr 28, 2009
- Denso Corporation
- Seiji Hattori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Noninvasive method for characterizing and identifying embedded micr...
- Patent number 7,262,837
- Issue date Aug 28, 2007
- Infineon Technologies AG
- Pierre-Yves Guittet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-machined electromechanical sensors (MEMS) devices
- Patent number 6,768,181
- Issue date Jul 27, 2004
- Honeywell International, Inc.
- Paul W. Dwyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of trimming micro-machined electromechanical sensors (MEMS)...
- Patent number 6,642,067
- Issue date Nov 4, 2003
- Honeywell International, Inc.
- Paul W. Dwyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for preparing backside-ground wafers for testing
- Patent number 6,472,235
- Issue date Oct 29, 2002
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuang-Peng Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microsystems integrated testing and characterization system and method
- Patent number 6,341,259
- Issue date Jan 22, 2002
- InterScience, Inc.
- Adolfo O. Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic micromechanical apparatus with suspended microstructure
- Patent number 6,192,757
- Issue date Feb 27, 2001
- Analog Devices, Inc.
- Robert W. K. Tsang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic micromechanical apparatus with suspended microstructure
- Patent number 6,009,753
- Issue date Jan 4, 2000
- Analog Devices, Inc.
- Robert W. K. Tsang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic micromechanical apparatus with suspended microstructure
- Patent number 5,847,280
- Issue date Dec 8, 1998
- Analog Devices, Inc.
- Steven J. Sherman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for fabricating monolithic device containing circuitry and...
- Patent number 5,620,931
- Issue date Apr 15, 1997
- Analog Devices, Inc.
- Robert W. K. Tsang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic chip containing integrated circuitry and suspended micro...
- Patent number 5,417,111
- Issue date May 23, 1995
- Analog Devices, Inc.
- Steven J. Sherman
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ELECTRICAL TEST STRUCTURE AND METHOD FOR MONITORING DEEP TRENCH IMP...
- Publication number 20210208187
- Publication date Jul 8, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Thomas Edward Lillibridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS SENSOR TESTING DEVICE, SYSTEM AND ME...
- Publication number 20200048083
- Publication date Feb 13, 2020
- STMicroelectronics S.r.l.
- Federico IACCARINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
- Publication number 20180111828
- Publication date Apr 26, 2018
- ROBERT BOSCH GmbH
- Heiko Stahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTROLLED PULSE GENERATION METHODS AND APPARATUSES FOR EVALUATING...
- Publication number 20170370799
- Publication date Dec 28, 2017
- Freescale Semiconductor Inc.
- PETER T. JONES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CIRCUITRY AND METHOD FOR GENERATING A DISCRETE-TIME HIGH VOLTAGE
- Publication number 20170146364
- Publication date May 25, 2017
- Murata Manufacturing Co., Ltd.
- Lasse AALTONEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD FOR FORMING THE SAME
- Publication number 20160241965
- Publication date Aug 18, 2016
- MEMSEN ELECTRONICS INC
- MANHING CHAU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD
- Publication number 20160152466
- Publication date Jun 2, 2016
- ROBERT BOSCH GmbH
- Julian GONSKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor device and method for detecting damaging of a semicon...
- Publication number 20150253375
- Publication date Sep 10, 2015
- INFINEON TECHNOLOGIES AG
- DIRK MEINHOLD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SEMICONDUCTOR COMPONENT
- Publication number 20130200439
- Publication date Aug 8, 2013
- ELMOS Semiconductor AG
- Michael Doelle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SEMICONDUCTOR COMPONENT AND METHOD FOR THE...
- Publication number 20130193529
- Publication date Aug 1, 2013
- ELMOS Semiconductor AG
- Bernd Burchard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SEMICONDUCTOR COMPONENT AND METHOD FOR THE...
- Publication number 20130087866
- Publication date Apr 11, 2013
- ELMOS Semiconductor AG
- Reinhard Senf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SEMICONDUCTOR COMPONENT
- Publication number 20130087865
- Publication date Apr 11, 2013
- ELMOS Semiconductor AG
- Arnd Ten Have
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR COMPONENT
- Publication number 20130087864
- Publication date Apr 11, 2013
- ELMOS Semiconductor AG
- Arnd Ten Have
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Capacitive physical quantity sensor and diagnosis method
- Publication number 20070236231
- Publication date Oct 11, 2007
- DENSO CORPORATION
- Seiji Hattori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low charging dielectric for capacitive MEMS devices and method of m...
- Publication number 20060138604
- Publication date Jun 29, 2006
- NORTHROP GRUMMAN CORPORATION
- Christopher F. Kirby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Noninvasive method for characterizing and identifying embedded micr...
- Publication number 20050018171
- Publication date Jan 27, 2005
- Pierre-Yves Guittet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of trimming micro-machined electromechanical sensors (MEMS)...
- Publication number 20030196489
- Publication date Oct 23, 2003
- Honeywell International, Inc.
- Paul W. Dwyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of trimming micro-machined electromechanical sensors (MEMS)...
- Publication number 20020068370
- Publication date Jun 6, 2002
- Paul W. Dwyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrical test structure and method for monitoring deep trench imp...

Microelectromechanical systems sensor testing device, system and me...

Method for producing a micromechanical component

Circuitry and method for generating a discrete-time high voltage

Centrifuge MEMS stiction detection and screening system and method

Semiconductor device and method for detecting damaging of a semicon...

MEMS device calibration

Method for testing signal-to-noise ratio using a film frame

Microelectromechanical semiconductor component that is sensitive to...

Capacitive physical quantity sensor and diagnosis method

Noninvasive method for characterizing and identifying embedded micr...

Micro-machined electromechanical sensors (MEMS) devices

Method of trimming micro-machined electromechanical sensors (MEMS)...

Apparatus and method for preparing backside-ground wafers for testing

Microsystems integrated testing and characterization system and method

Monolithic micromechanical apparatus with suspended microstructure

Monolithic micromechanical apparatus with suspended microstructure

Monolithic micromechanical apparatus with suspended microstructure

Methods for fabricating monolithic device containing circuitry and...

Monolithic chip containing integrated circuitry and suspended micro...

Patents Applicationslast 30 patents

ELECTRICAL TEST STRUCTURE AND METHOD FOR MONITORING DEEP TRENCH IMP...

MICROELECTROMECHANICAL SYSTEMS SENSOR TESTING DEVICE, SYSTEM AND ME...

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

CONTROLLED PULSE GENERATION METHODS AND APPARATUSES FOR EVALUATING...

CIRCUITRY AND METHOD FOR GENERATING A DISCRETE-TIME HIGH VOLTAGE

MEMS MICROPHONE AND METHOD FOR FORMING THE SAME

MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD

Semiconductor device and method for detecting damaging of a semicon...

MICRO-ELECTROMECHANICAL SEMICONDUCTOR COMPONENT

MICRO-ELECTROMECHANICAL SEMICONDUCTOR COMPONENT AND METHOD FOR THE...

MICRO-ELECTROMECHANICAL SEMICONDUCTOR COMPONENT AND METHOD FOR THE...

MICRO-ELECTROMECHANICAL SEMICONDUCTOR COMPONENT

SEMICONDUCTOR COMPONENT

Capacitive physical quantity sensor and diagnosis method

Low charging dielectric for capacitive MEMS devices and method of m...

Noninvasive method for characterizing and identifying embedded micr...

Method of trimming micro-machined electromechanical sensors (MEMS)...

Method of trimming micro-machined electromechanical sensors (MEMS)...