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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02211
the compound being a silane
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Systems and methods for depositing low-k dielectric films
Patent number
11,967,498
Issue date
Apr 23, 2024
Applied Materials, Inc.
Bo Xie
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Plasma generating device, substrate processing apparatus, and metho...
Patent number
11,967,490
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Akihiro Sato
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Method of manufacturing semiconductor device, substrate processing...
Patent number
11,961,733
Issue date
Apr 16, 2024
Kokusai Electric Corporation
Tomiyuki Shimizu
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Semiconductor devices and methods of manufacture
Patent number
11,955,370
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Bo-Cyuan Lu
H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,952,664
Issue date
Apr 9, 2024
Kokusai Electric Corporation
Hidenari Yoshida
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Forming nitrogen-containing low-K gate spacer
Patent number
11,948,841
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device and method
Patent number
11,948,798
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ching-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device and method of manufacture
Patent number
11,942,549
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
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Contact features of semiconductor devices
Patent number
11,935,786
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tsui-Ling Yen
H01 - BASIC ELECTRIC ELEMENTS
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Method of processing substrate, method of manufacturing semiconduct...
Patent number
11,935,742
Issue date
Mar 19, 2024
Kokusai Electric Corporation
Yoshitomo Hashimoto
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Device of dielectric layer
Patent number
11,935,752
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Yun Peng
H01 - BASIC ELECTRIC ELEMENTS
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Method of manufacturing semiconductor device, substrate processing...
Patent number
11,923,193
Issue date
Mar 5, 2024
Kokusai Electric Corporation
Kimihiko Nakatani
H01 - BASIC ELECTRIC ELEMENTS
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Methods for depositing an oxide film on a substrate by a cyclical d...
Patent number
11,923,192
Issue date
Mar 5, 2024
ASM IP Holding B.V.
Fu Tang
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Semiconductor device and method of manufacture
Patent number
11,916,132
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
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Manufacturing method for silicon nitride thin film, thin film trans...
Patent number
11,908,683
Issue date
Feb 20, 2024
BEIHAI HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
En-Tsung Cho
H01 - BASIC ELECTRIC ELEMENTS
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Dielectric film for semiconductor fabrication
Patent number
11,901,295
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Cheng-Yi Wu
H01 - BASIC ELECTRIC ELEMENTS
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Method of manufacturing semiconductor device
Patent number
11,903,202
Issue date
Feb 13, 2024
Kioxia Corporation
Aki Maeda
H01 - BASIC ELECTRIC ELEMENTS
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Conformal deposition of silicon carbide films
Patent number
11,894,227
Issue date
Feb 6, 2024
Novellus Systems, Inc.
Bhadri N. Varadarajan
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Semiconductor device structure with interconnect structure and meth...
Patent number
11,854,872
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Hao Kung
H01 - BASIC ELECTRIC ELEMENTS
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Gate structure, fin field-effect transistor, and method of manufact...
Patent number
11,855,083
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ji-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device structure with gate spacer
Patent number
11,854,796
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Guan-Yao Tu
H01 - BASIC ELECTRIC ELEMENTS
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FinFET structure and method with reduced fin buckling
Patent number
11,855,207
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Jen Lai
H01 - BASIC ELECTRIC ELEMENTS
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PECVD deposition system for deposition on selective side of the sub...
Patent number
11,851,760
Issue date
Dec 26, 2023
Lam Research Corporation
Fayaz Shaikh
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Semiconductor structure with an air gap
Patent number
11,848,253
Issue date
Dec 19, 2023
United Microelectronics Corp.
Ching-Pin Hsu
H01 - BASIC ELECTRIC ELEMENTS
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Methods for selectively forming a silicon nitride film on a substra...
Patent number
11,848,200
Issue date
Dec 19, 2023
ASM IP Holding B.V.
Jacob Woodruff
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Method of manufacturing semiconductor device, recording medium, and...
Patent number
11,848,201
Issue date
Dec 19, 2023
Kokusai Electric Corporation
Tsukasa Kamakura
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Method of manufacturing semiconductor device, substrate processing...
Patent number
11,837,466
Issue date
Dec 5, 2023
Kokusai Electric Corporation
Kimihiko Nakatani
H01 - BASIC ELECTRIC ELEMENTS
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Layer forming method and apparatus
Patent number
11,830,730
Issue date
Nov 28, 2023
ASM IP Holding B.V.
Arjen Klaver
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Method for forming film
Patent number
11,830,741
Issue date
Nov 28, 2023
Tokyo Electron Limited
Shinichi Ike
H01 - BASIC ELECTRIC ELEMENTS
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Conformal damage-free encapsulation of chalcogenide materials
Patent number
11,832,533
Issue date
Nov 28, 2023
Lam Research Corporation
James Samuel Sims
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last 30 patents
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Isolation Regions For Isolating Transistors and the Methods Forming...
Publication number
20240120236
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tai-Jung Kuo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CARBON REPLENISHMENT OF SILICON-CONTAINING MATERIAL
Publication number
20240120193
Publication date
Apr 11, 2024
Applied Materials, Inc.
Shankar Venkataraman
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240112907
Publication date
Apr 4, 2024
Kokusai Electric Corporation
Shoma MIYATA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105443
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Kimihiko NAKATANI
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Patent Application
FORMATION OF SELF-ASSEMBLED MONOLAYER FOR SELECTIVE ETCHING PROCESS
Publication number
20240105462
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Hsiu CHEN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
FINFET STRUCTURE AND METHOD WITH REDUCED FIN BUCKLING
Publication number
20240097033
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Jen Lai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF MANUFACTURING GATE STRUCTURE AND METHOD OF MANUFACTURING...
Publication number
20240096883
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ji-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Deposition of Thick Layers of Silicon Dioxide
Publication number
20240096616
Publication date
Mar 21, 2024
SPTS TECHNOLOGIES LIMITED
Matt Edmonds
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
GATE STRUCTURE, FIN FIELD-EFFECT TRANSISTOR, AND METHOD OF MANUFACT...
Publication number
20240088144
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ji-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
Publication number
20240088301
Publication date
Mar 14, 2024
Applied Materials, Inc.
Jianheng LI
H01 - BASIC ELECTRIC ELEMENTS
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METHOD FOR FORMING SILICON-CONTAINING FILM AND FILM FORMING APPARATUS
Publication number
20240087883
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Nobuo MATSUKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240071748
Publication date
Feb 29, 2024
ASM IP HOLDING B.V.
SangHeon Yong
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240071749
Publication date
Feb 29, 2024
ASM IP HOLDING B.V.
SangHeon Yong
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Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240063014
Publication date
Feb 22, 2024
ASM IP HOLDING B.V.
SangHeon Yong
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SELECTIVE DEPOSITION FOR SUB 20 NM PITCH EUV PATTERNING
Publication number
20240055255
Publication date
Feb 15, 2024
Applied Materials, Inc.
Zeqing Shen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20240055252
Publication date
Feb 15, 2024
Kokusai Electric Corporation
Kimihiko NAKATANI
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Patent Application
Methods of Depositing SiCON with C, O, and N Compositional Control
Publication number
20240047193
Publication date
Feb 8, 2024
Applied Materials, Inc.
Mark Saly
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...
Publication number
20240030064
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
Timothee Blanquart
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Patent Application
METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE AND STRUCTURE IN...
Publication number
20240014030
Publication date
Jan 11, 2024
ASM IP HOLDING B.V.
Agung Setiadi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF DEPOSITING CONDENSABLE MATERIAL ONTO A SURFACE OF A SUBST...
Publication number
20240014033
Publication date
Jan 11, 2024
ASM IP HOLDING B.V.
Hiroshi Kou
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SELECTIVE DEPOSITION OF SILICON AND OXYGEN CONTAINING DIELECTRIC FI...
Publication number
20230416911
Publication date
Dec 28, 2023
VERSUM MATERIALS US, LLC
RAVINDRA KANJOLIA
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20230411146
Publication date
Dec 21, 2023
TOKYO ELECTRON LIMITED
Hiroki MURAKAMI
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Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230411149
Publication date
Dec 21, 2023
Kokusai Electric Corporation
Takeo HANASHIMA
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Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
Publication number
20230411145
Publication date
Dec 21, 2023
Kokusai Electric Corporation
Yusaku OKAJIMA
H01 - BASIC ELECTRIC ELEMENTS
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METHOD OF FORMING SiOCN LAYER
Publication number
20230407465
Publication date
Dec 21, 2023
ASM IP HOLDING B.V.
Takashi Yoshida
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Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20230407472
Publication date
Dec 21, 2023
Kokusai Electric Corporation
Hiroki HATTA
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SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING THE SAME
Publication number
20230395369
Publication date
Dec 7, 2023
EUGENUS, INC.
Sung-Hoon Jung
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SELECTIVE DEPOSITION OF METAL OXIDES USING SILANES AS AN INHIBITOR
Publication number
20230386831
Publication date
Nov 30, 2023
LAM RESEARCH CORPORATION
Kashish SHARMA
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Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
Publication number
20230377874
Publication date
Nov 23, 2023
VERSUM MATERIALS US, LLC
Haripin Chandra
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230377953
Publication date
Nov 23, 2023
Tokyo Electron Limited
Hiroki MURAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...