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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/28568
the conductive layers comprising transition metals
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last 30 patents
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Method for forming ohmic contacts, particularly of Ni(GeSn) type im...
Patent number
11,973,118
Issue date
Apr 30, 2024
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Andréa-Carolina Quintero Colmena
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
11,973,117
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Hsien Huang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Atomic layer deposition on 3D NAND structures
Patent number
11,972,952
Issue date
Apr 30, 2024
Lam Research Corporation
Ruopeng Deng
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Atomic layer deposition of metal films
Patent number
11,970,776
Issue date
Apr 30, 2024
Lam Research Corporation
Joshua Collins
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Localized heating in laser annealing process
Patent number
11,967,647
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Blandine Duriez
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Dual metal silicide structures for advanced integrated circuit stru...
Patent number
11,961,767
Issue date
Apr 16, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of forming FinFET devices
Patent number
11,955,528
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsin-Yi Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Dual metal gate structure having portions of metal gate layers in c...
Patent number
11,955,532
Issue date
Apr 9, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Heterogeneous metal line compositions for advanced integrated circu...
Patent number
11,955,534
Issue date
Apr 9, 2024
Intel Corporation
Andrew W. Yeoh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Trench contact structures for advanced integrated circuit structure...
Patent number
11,948,997
Issue date
Apr 2, 2024
Intel Corporation
Subhash M. Joshi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method of fabricating the same
Patent number
11,942,427
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Seung Yong Yoo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Integrated circuit contact structures
Patent number
11,942,526
Issue date
Mar 26, 2024
Intel Corporation
Patrick Morrow
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method for fabricating the same
Patent number
11,935,926
Issue date
Mar 19, 2024
SK Hynix Inc.
Hyeng-Woo Eom
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Transistor gate structure and method of forming
Patent number
11,935,754
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsin-Yi Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,915,938
Issue date
Feb 27, 2024
Kokusai Electric Corporation
Arito Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
11,915,981
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Peng-Soon Lim
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device having fin structure
Patent number
11,908,851
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Shun-Li Chen
H01 - BASIC ELECTRIC ELEMENTS
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Method of manufacturing semiconductor device, substrate processing...
Patent number
11,908,737
Issue date
Feb 20, 2024
Kokusai Electric Corporation
Arito Ogawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
Patent number
11,908,736
Issue date
Feb 20, 2024
ASM IP Holding B.V.
Bhushan Zope
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of forming vanadium nitride-containing layer
Patent number
11,898,243
Issue date
Feb 13, 2024
ASM IP Holding B.V.
Pia Homm Jara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Metal capping layer and methods thereof
Patent number
11,894,266
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shao-Kuan Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Molybdenum thin films by oxidation-reduction
Patent number
11,891,690
Issue date
Feb 6, 2024
Applied Materials, Inc.
Feng Q. Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Electronic device having an oxygen free platinum group metal film
Patent number
11,894,233
Issue date
Feb 6, 2024
Applied Materials, Inc.
Yixiong Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods and systems for depositing a layer comprising vanadium, nit...
Patent number
11,887,857
Issue date
Jan 30, 2024
ASM IP Holding B.V.
Dieter Pierreux
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Trench plug hardmask for advanced integrated circuit structure fabr...
Patent number
11,887,838
Issue date
Jan 30, 2024
Intel Corporation
Anthony St. Amour
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Fin patterning for advanced integrated circuit structure fabrication
Patent number
11,881,520
Issue date
Jan 23, 2024
Intel Corporation
Curtis Ward
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Storage node contact structure of a memory device
Patent number
11,877,433
Issue date
Jan 16, 2024
United Microelectronics Corp.
Pin-Hong Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Metallization structures for stacked device connectivity and their...
Patent number
11,869,894
Issue date
Jan 9, 2024
Intel Corporation
Aaron D. Lilak
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method
Patent number
11,862,694
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Ju Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device, method and machine of manufacture
Patent number
11,851,749
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Jen-Chun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
Publication number
20240136192
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
METHODS FOR FILLING A RECESSED FEATURE ON A SUBSTRATE AND RELATED S...
Publication number
20240136224
Publication date
Apr 25, 2024
ASM IP HOLDING B.V.
YoungChol Byun
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240133026
Publication date
Apr 25, 2024
Koei KURIBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
INTEGRATED CIRCUIT CONTACT STRUCTURES
Publication number
20240128340
Publication date
Apr 18, 2024
Intel Corporation
Patrick Morrow
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
TRENCH PLUG HARDMASK FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABR...
Publication number
20240105520
Publication date
Mar 28, 2024
Intel Corporation
Anthony ST. AMOUR
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...
Publication number
20240105421
Publication date
Mar 28, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
TRANSITION METAL DEPOSITION PROCESSES AND A DEPOSITION ASSEMBLY
Publication number
20240096632
Publication date
Mar 21, 2024
ASM IP HOLDING B.V.
Elina Färm
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...
Publication number
20240093368
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
HONGTAEK LIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
OPTIMIZED SADDLE NOZZLE DESIGN FOR GAS INJECTION SYSTEM
Publication number
20240096592
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING TRANSITION METALS
Publication number
20240096633
Publication date
Mar 21, 2024
ASM IP HOLDING B.V.
Elina Färm
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
LANTHANUM NITRIDE AS A DRAM MOLYBDENUM LINER
Publication number
20240074162
Publication date
Feb 29, 2024
Applied Materials, Inc.
Rand Haddadin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...
Publication number
20240062990
Publication date
Feb 22, 2024
APPLIED MATERIALS ISRAEL LTD.
Sean Kashy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Methods for Selective Molybdenum Deposition
Publication number
20240052480
Publication date
Feb 15, 2024
Avgerinos V. GELATOS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
MOLYBDENUM DEPOSITION IN FEATURES
Publication number
20240047269
Publication date
Feb 8, 2024
LAM RESEARCH CORPORATION
Jeong-Seok NA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HETEROGENEOUS METAL LINE COMPOSITIONS FOR ADVANCED INTEGRATED CIRCU...
Publication number
20240047556
Publication date
Feb 8, 2024
Intel Corporation
Andrew W. YEOH
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CONTINUOUS GATE AND FIN SPACER FOR ADVANCED INTEGRATED CIRCUIT STRU...
Publication number
20240038578
Publication date
Feb 1, 2024
Intel Corporation
Heidi M. MEYER
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS FOR FORMING A TRANSITION METAL NIOBIUM NITRIDE FILM ON A SU...
Publication number
20240030035
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
Jerry Peijun Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
Publication number
20240003002
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Takashi SAMESHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
GATE CUT AND FIN TRIM ISOLATION FOR ADVANCED INTEGRATED CIRCUIT STR...
Publication number
20230420545
Publication date
Dec 28, 2023
Intel Corporation
Tahir GHANI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Semiconductor Device and Method
Publication number
20230411474
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Kuo-Ju Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SELECTIVE DEPOSITION OF MATERIAL COMPRISING NOBLE METAL
Publication number
20230407476
Publication date
Dec 21, 2023
ASM IP HOLDING B.V.
Mikko RITALA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
WORD LINE STRUCTURE OF THREE-DIMENSIONAL MEMORY DEVICE
Publication number
20230413560
Publication date
Dec 21, 2023
Yangtze Memory Technologies Co., Ltd.
Qiang XU
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
Publication number
20230387221
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hsien Huang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
FINFET STRUCTURE WITH CONTROLLED AIR GAPS
Publication number
20230386904
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Wen-Che Tsai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUF...
Publication number
20230377893
Publication date
Nov 23, 2023
TOKYO ELECTRON LIMITED
Shunji YAMAKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
METAL NITRIDE DIFFUSION BARRIER AND METHODS OF FORMATION
Publication number
20230377961
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Martin Christopher HOLLAND
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR F...
Publication number
20230374660
Publication date
Nov 23, 2023
Applied Materials, Inc.
Harpreet SINGH
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COM...
Publication number
20230348511
Publication date
Nov 2, 2023
Tanaka Kikinzoku Kogyo K.K.
Ryosuke HARADA
C07 - ORGANIC CHEMISTRY
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Patent Application
FILM SCHEME TO REDUCE PLASMA-INDUCED DAMAGE
Publication number
20230343642
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Wen Zhong
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD TO REDUCE BENDING OF FEATURES ON A SURFACE OF A SUBSTRATE AN...
Publication number
20230343596
Publication date
Oct 26, 2023
ASM IP HOLDING B.V.
Jaebeom Lee
H01 - BASIC ELECTRIC ELEMENTS