the devices involving a micro-mechanical structure

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G01C19/5656

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GPHYSICS G01Measuring instruments G01CMEASURING DISTANCES, LEVELS OR BEARINGS SURVEYING NAVIGATION GYROSCOPIC INSTRUMENTS PHOTOGRAMMETRY OR VIDEOGRAMMETRY G01C19/00Gyroscopes Turn-sensitive devices using vibrating masses Turn-sensitive devices without moving masses Measuring angular rate using gyroscopic effects

Current Industry

G01C19/5656the devices involving a micro-mechanical structure

Industries

Patents Grantslast 30 patents

Information Patent Grant
Micromechanical system, method for operating a micromechanical system
- Patent number 12,031,820
- Issue date Jul 9, 2024
- Robert Bosch GmbH
- Lars Tebje
- G01 - MEASURING TESTING
Information Patent Grant
Vibrator device, electronic apparatus, and vehicle
- Patent number 11,940,275
- Issue date Mar 26, 2024
- Seiko Epson Corporation
- Seiichiro Ogura
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
- Patent number 11,898,845
- Issue date Feb 13, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration element, physical quantity sensor, inertial measurement u...
- Patent number 11,888,464
- Issue date Jan 30, 2024
- Seiko Epson Corporation
- Seiichiro Ogura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric frequency-modulated gyroscope
- Patent number 11,781,867
- Issue date Oct 10, 2023
- Murata Manufacturing Co., Ltd.
- Ville Kaajakari
- G01 - MEASURING TESTING
Information Patent Grant
Vibration element, method of manufacturing vibration element, physi...
- Patent number 11,402,208
- Issue date Aug 2, 2022
- Seiko Epson Corporation
- Shogo Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Vibrator device, electronic apparatus, and vehicle
- Patent number 11,326,882
- Issue date May 10, 2022
- Seiko Epson Corporation
- Seiichiro Ogura
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Vibrator device
- Patent number 11,287,260
- Issue date Mar 29, 2022
- Seiko Epson Corporation
- Masahiro Oshio
- G01 - MEASURING TESTING
Information Patent Grant
Low power inertial sensor architecture and methods
- Patent number 11,236,999
- Issue date Feb 1, 2022
- MCube, Inc.
- Sanjay Bhandari
- G01 - MEASURING TESTING
Information Patent Grant
MEMS device
- Patent number 11,220,422
- Issue date Jan 11, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS gyroscope and electronic device including the same
- Patent number 11,156,458
- Issue date Oct 26, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhenkui Meng
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for self-testing MEMS inertial sensors
- Patent number 11,112,269
- Issue date Sep 7, 2021
- Analog Devices, Inc.
- William A. Clark
- G01 - MEASURING TESTING
Information Patent Grant
Frequency adjustment method of vibration element, manufacturing met...
- Patent number 11,085,765
- Issue date Aug 10, 2021
- Seiko Epson Corporation
- Shogo Sasaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
- Patent number 11,085,766
- Issue date Aug 10, 2021
- Semiconductor Components Industries, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system resonator devices and oscillator cont...
- Patent number 10,879,869
- Issue date Dec 29, 2020
- Socovar, Société En Commandite
- Mohannad Elsayad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Positioning apparatus comprising an inertial sensor and inertial se...
- Patent number 10,877,059
- Issue date Dec 29, 2020
- STMicroelectronics S.r.l.
- Nicola Matteo Palella
- G01 - MEASURING TESTING
Information Patent Grant
Electro-opto-mechanical micro gyroscope
- Patent number 10,866,099
- Issue date Dec 15, 2020
- United States of America as represented by the Secretary of the Navy
- Michael Mazilu
- G01 - MEASURING TESTING
Information Patent Grant
Method for operating a rotation rate sensor using different frequen...
- Patent number 10,837,776
- Issue date Nov 17, 2020
- Robert Bosch GmbH
- Michael Curcic
- G01 - MEASURING TESTING
Information Patent Grant
Multiple axis sensing device based on frequency modulation and meth...
- Patent number 10,823,569
- Issue date Nov 3, 2020
- NXP USA, INC.
- Peng Shao
- G01 - MEASURING TESTING
Information Patent Grant
Single axis inertial sensor with suppressed parasitic modes
- Patent number 10,809,277
- Issue date Oct 20, 2020
- NXP USA, INC.
- Jun Tang
- G01 - MEASURING TESTING
Information Patent Grant
Sensor device, gyro sensor, and electronic apparatus
- Patent number 10,775,168
- Issue date Sep 15, 2020
- Sony Corporation
- Satoshi Mitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration device, angular velocity sensor, electronic device, and v...
- Patent number 10,760,908
- Issue date Sep 1, 2020
- Seiko Epson Corporation
- Ryuta Nishizawa
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Silicon carbide microelectromechanical structure, device, and method
- Patent number 10,717,642
- Issue date Jul 21, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic device, and vehicle
- Patent number 10,712,157
- Issue date Jul 14, 2020
- Seiko Epson Corporation
- Ryuji Kihara
- G01 - MEASURING TESTING
Information Patent Grant
Liquid discharge apparatus and liquid discharge method
- Patent number 10,596,813
- Issue date Mar 24, 2020
- Ricoh Company, Ltd.
- Hiroki Tanaka
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Silicon carbide microelectromechanical structure, device, and method
- Patent number 10,589,983
- Issue date Mar 17, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for determining the quality factor of an oscillator
- Patent number 10,578,661
- Issue date Mar 3, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Antoine Nowodzinski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drive mode and sense mode resonance frequency matching
- Patent number 10,538,427
- Issue date Jan 21, 2020
- Invensense, Inc.
- Alireza Shirvani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Functional element, electronic apparatus and mobile entity
- Patent number 10,421,661
- Issue date Sep 24, 2019
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated sensor and homologous calibration structure for resonant...
- Patent number 10,386,204
- Issue date Aug 20, 2019
- Intel Corporation
- Sasha Oster
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Vibrator Device
- Publication number 20240361125
- Publication date Oct 31, 2024
- SEIKO EPSON CORPORATION
- Kota KOMATSUBARA
- G01 - MEASURING TESTING
Information Patent Application
SENSOR AND ELECTRONIC DEVICE
- Publication number 20240085181
- Publication date Mar 14, 2024
- Kabushiki Kaisha Toshiba
- Kei MASUNISHI
- G01 - MEASURING TESTING
Information Patent Application
4-POINTS PHASE AND SENSITIVITY ESTIMATION ALGORITHM AND RELATED ARC...
- Publication number 20230160696
- Publication date May 25, 2023
- InvenSense, Inc.
- Vito Avantaggiati
- G01 - MEASURING TESTING
Information Patent Application
VIBROMETER AND METHOD FOR DETECTING VIBRATION
- Publication number 20220268582
- Publication date Aug 25, 2022
- KYOCERA CORPORATION
- Munetaka SOEJIMA
- G01 - MEASURING TESTING
Information Patent Application
Vibrator Device, Electronic Apparatus, And Vehicle
- Publication number 20220236057
- Publication date Jul 28, 2022
- SEIKO EPSON CORPORATION
- Seiichiro OGURA
- B60 - VEHICLES IN GENERAL
Information Patent Application
PIEZOELECTRIC FREQUENCY-MODULATED GYROSCOPE
- Publication number 20220178696
- Publication date Jun 9, 2022
- Murata Manufacturing Co., Ltd.
- Ville KAAJAKARI
- G01 - MEASURING TESTING
Information Patent Application
MICROMECHANICAL SYSTEM, METHOD FOR OPERATING A MICROMECHANICAL SYSTEM
- Publication number 20220049958
- Publication date Feb 17, 2022
- ROBERT BOSCH GmbH
- Lars Tebje
- G01 - MEASURING TESTING
Information Patent Application
MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY
- Publication number 20210372795
- Publication date Dec 2, 2021
- Semiconductor Components Industries, LLC
- Cenk ACAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL DEVICES WITH WAFER-LEVEL INTEGRATION OF HIGHER DENSITY PRO...
- Publication number 20210140767
- Publication date May 13, 2021
- Societe de commercialisation des produits de la recherche appliquee SOCPRA Sc...
- Andre DOMPIERRE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibrator Device
- Publication number 20210063156
- Publication date Mar 4, 2021
- SEIKO EPSON CORPORATION
- Masahiro OSHIO
- G01 - MEASURING TESTING
Information Patent Application
Electro-Opto-Mechanical Micro Gyroscope
- Publication number 20200378762
- Publication date Dec 3, 2020
- United States of America, as Represented by teh Secretary of the Navy
- Michael Mazilu
- G01 - MEASURING TESTING
Information Patent Application
POSITIONING APPARATUS COMPRISING AN INERTIAL SENSOR AND INERTIAL SE...
- Publication number 20200292570
- Publication date Sep 17, 2020
- STMicroelectronics S.r.l.
- Nicola Matteo Palella
- G01 - MEASURING TESTING
Information Patent Application
MEMS DEVICE
- Publication number 20200290863
- Publication date Sep 17, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- FAN HU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GYROSCOPE AND ELECTRONIC DEVICE INCLUDING THE SAME
- Publication number 20200208973
- Publication date Jul 2, 2020
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhenkui Meng
- G01 - MEASURING TESTING
Information Patent Application
VIBRATION ELEMENT, METHOD OF MANUFACTURING VIBRATION ELEMENT, PHYSI...
- Publication number 20200200533
- Publication date Jun 25, 2020
- SEIKO EPSON CORPORATION
- Shogo SASAKI
- G01 - MEASURING TESTING
Information Patent Application
Silicon Carbide Microelectromechanical Structure, Device, and Method
- Publication number 20200115219
- Publication date Apr 16, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND SYSTEMS FOR SELF-TESTING MEMS INERTIAL SENSORS
- Publication number 20200011702
- Publication date Jan 9, 2020
- Analog Devices, Inc.
- William A. Clark
- G01 - MEASURING TESTING
Information Patent Application
VIBRATORY GYROSCOPE UTILIZING THE NONLINEAR MODAL INTERACTION
- Publication number 20200011666
- Publication date Jan 9, 2020
- SIMON FRASER UNIVERSITY
- Farid Golnaraghi
- G01 - MEASURING TESTING
Information Patent Application
GYROSENSOR, SIGNAL PROCESSING DEVICE, ELECTRONIC APPARATUS, AND MET...
- Publication number 20190310086
- Publication date Oct 10, 2019
- SONY CORPORATION
- KAZUO TAKAHASHI
- G01 - MEASURING TESTING
Information Patent Application
Frequency Adjustment Method Of Vibration Element, Manufacturing Met...
- Publication number 20190301869
- Publication date Oct 3, 2019
- SEIKO EPSON CORPORATION
- Shogo SASAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIQUID DISCHARGE APPARATUS AND LIQUID DISCHARGE METHOD
- Publication number 20190283408
- Publication date Sep 19, 2019
- RICOH COMPANY, LTD.
- Hiroki TANAKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SINGLE AXIS INERTIAL SENSOR WITH SUPPRESSED PARASITIC MODES
- Publication number 20190187169
- Publication date Jun 20, 2019
- NXP USA, Inc.
- Jun Tang
- G01 - MEASURING TESTING
Information Patent Application
MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY
- Publication number 20190145772
- Publication date May 16, 2019
- Semiconductor Components Industries, LLC
- Cenk ACAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DRIVE MODE AND SENSE MODE RESONANCE FREQUENCY MATCHING
- Publication number 20190055116
- Publication date Feb 21, 2019
- InvenSense, Inc.
- Alireza SHIRVANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED SENSOR AND HOMOLOGOUS CALIBRATION STRUCTURE FOR RESONANT...
- Publication number 20190003854
- Publication date Jan 3, 2019
- Sasha Oster
- G01 - MEASURING TESTING
Information Patent Application
PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND VEHICLE
- Publication number 20180292210
- Publication date Oct 11, 2018
- SEIKO EPSON CORPORATION
- Ryuji KIHARA
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR PROCESSING OF RESIDUAL VALUES WHEN CONTROLLIN...
- Publication number 20180252525
- Publication date Sep 6, 2018
- NORTHROP GRUMMAN LITEF GMBH
- GUENTER SPAHLINGER
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR A FOUR-MASS VIBRATING MEMS STRUCTURE
- Publication number 20180231384
- Publication date Aug 16, 2018
- HONEYWELL INTERNATIONAL INC.
- Burgess R. Johnson
- G01 - MEASURING TESTING
Information Patent Application
VIBRATORY GYROSCOPE UTILIZING A NONLINEAR MODAL INTERACTION
- Publication number 20180143021
- Publication date May 24, 2018
- SIMON FRASER UNIVERSITY
- Farid Golnaraghi
- G01 - MEASURING TESTING
Information Patent Application
Silicon Carbide Microelectromechanical Structure, Device, and Method
- Publication number 20180086625
- Publication date Mar 29, 2018
- The Government of the United States of America, as represented by the Secreta...
- Francis J. KUB
- B81 - MICRO-STRUCTURAL TECHNOLOGY

the devices involving a micro-mechanical structure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micromechanical system, method for operating a micromechanical system

Vibrator device, electronic apparatus, and vehicle

Micromachined multi-axis gyroscopes with reduced stress sensitivity

Vibration element, physical quantity sensor, inertial measurement u...

Piezoelectric frequency-modulated gyroscope

Vibration element, method of manufacturing vibration element, physi...

Vibrator device, electronic apparatus, and vehicle

Vibrator device

Low power inertial sensor architecture and methods

MEMS device

MEMS gyroscope and electronic device including the same

Methods and systems for self-testing MEMS inertial sensors

Frequency adjustment method of vibration element, manufacturing met...

Micromachined multi-axis gyroscopes with reduced stress sensitivity

Microelectromechanical system resonator devices and oscillator cont...

Positioning apparatus comprising an inertial sensor and inertial se...

Electro-opto-mechanical micro gyroscope

Method for operating a rotation rate sensor using different frequen...

Multiple axis sensing device based on frequency modulation and meth...

Single axis inertial sensor with suppressed parasitic modes

Sensor device, gyro sensor, and electronic apparatus

Vibration device, angular velocity sensor, electronic device, and v...

Silicon carbide microelectromechanical structure, device, and method

Physical quantity sensor, electronic device, and vehicle

Liquid discharge apparatus and liquid discharge method

Silicon carbide microelectromechanical structure, device, and method

Method for determining the quality factor of an oscillator

Drive mode and sense mode resonance frequency matching

Functional element, electronic apparatus and mobile entity

Integrated sensor and homologous calibration structure for resonant...

Patents Applicationslast 30 patents

Vibrator Device

SENSOR AND ELECTRONIC DEVICE

4-POINTS PHASE AND SENSITIVITY ESTIMATION ALGORITHM AND RELATED ARC...

VIBROMETER AND METHOD FOR DETECTING VIBRATION

Vibrator Device, Electronic Apparatus, And Vehicle

PIEZOELECTRIC FREQUENCY-MODULATED GYROSCOPE

MICROMECHANICAL SYSTEM, METHOD FOR OPERATING A MICROMECHANICAL SYSTEM

MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY

INERTIAL DEVICES WITH WAFER-LEVEL INTEGRATION OF HIGHER DENSITY PRO...

Vibrator Device

Electro-Opto-Mechanical Micro Gyroscope

POSITIONING APPARATUS COMPRISING AN INERTIAL SENSOR AND INERTIAL SE...

MEMS DEVICE

MEMS GYROSCOPE AND ELECTRONIC DEVICE INCLUDING THE SAME

VIBRATION ELEMENT, METHOD OF MANUFACTURING VIBRATION ELEMENT, PHYSI...

Silicon Carbide Microelectromechanical Structure, Device, and Method

METHODS AND SYSTEMS FOR SELF-TESTING MEMS INERTIAL SENSORS

VIBRATORY GYROSCOPE UTILIZING THE NONLINEAR MODAL INTERACTION

GYROSENSOR, SIGNAL PROCESSING DEVICE, ELECTRONIC APPARATUS, AND MET...

Frequency Adjustment Method Of Vibration Element, Manufacturing Met...

LIQUID DISCHARGE APPARATUS AND LIQUID DISCHARGE METHOD

SINGLE AXIS INERTIAL SENSOR WITH SUPPRESSED PARASITIC MODES

MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY

DRIVE MODE AND SENSE MODE RESONANCE FREQUENCY MATCHING

INTEGRATED SENSOR AND HOMOLOGOUS CALIBRATION STRUCTURE FOR RESONANT...

PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND VEHICLE

DEVICE AND METHOD FOR PROCESSING OF RESIDUAL VALUES WHEN CONTROLLIN...

SYSTEMS AND METHODS FOR A FOUR-MASS VIBRATING MEMS STRUCTURE

VIBRATORY GYROSCOPE UTILIZING A NONLINEAR MODAL INTERACTION

Silicon Carbide Microelectromechanical Structure, Device, and Method