the layer being a laminate, i.e. composed of sublayers

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/022the layer being a laminate, i.e. composed of sublayers

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Patents Grantslast 30 patents

Information Patent Grant
Integrated circuit device with low threshold voltage
- Patent number 12,272,604
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive coupling in a direct-bonded interface for microelectroni...
- Patent number 12,272,673
- Issue date Apr 8, 2025
- ADEIA SEMICONDUCTOR TECHNOLOGIES LLC
- Belgacem Haba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for dispensing spin-on glass (SOG) and method of using
- Patent number 12,272,549
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Cyclical deposition method and apparatus for filling a recess forme...
- Patent number 12,272,593
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Station-to-station control of backside bow compensation deposition
- Patent number 12,272,608
- Issue date Apr 8, 2025
- Lam Research Corporation
- Yanhui Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate with fluorinated yttrium coatings, and methods of prepari...
- Patent number 12,270,104
- Issue date Apr 8, 2025
- Entegris, Inc.
- Nilesh Gunda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 12,272,693
- Issue date Apr 8, 2025
- United Microelectronics Corp.
- Chun-Ya Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant filter for solid state RF impedance matching network
- Patent number 12,272,522
- Issue date Apr 8, 2025
- ASM America, Inc.
- Imran Ahmed Bhutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming an electronic structure using reforming gas, syst...
- Patent number 12,272,548
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Shinya Yoshimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual pressure oxidation method for forming an oxide layer in a feature
- Patent number 12,272,531
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Christopher S. Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of SiOC thin films
- Patent number 12,272,546
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 12,272,547
- Issue date Apr 8, 2025
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate suppport and method of ma...
- Patent number 12,272,579
- Issue date Apr 8, 2025
- Kokusai Electric Corporation
- Yusaku Okajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-resistance resistor based on silicon carbide and manufacturing...
- Patent number 12,268,013
- Issue date Apr 1, 2025
- Talyuan University of Technology
- Yuying Xi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask encapsulation to prevent degradation during fabrication of hig...
- Patent number 12,266,535
- Issue date Apr 1, 2025
- Lam Researh Corporation
- Kapu Sirish Reddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and methods of manufacture
- Patent number 12,266,576
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for adjusting the gap between a wafer and a top p...
- Patent number 12,266,579
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Chan Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide-nitride-oxide stack having multiple oxynitride layers
- Patent number 12,266,521
- Issue date Apr 1, 2025
- LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Sagy Charel Levy
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,266,522
- Issue date Apr 1, 2025
- Kokusai Electric Corporation
- Kazuyuki Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,266,541
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sung-En Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with source/drain contact formed using bottom-...
- Patent number 12,266,688
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sung-Li Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Finfet with dummy fins and methods of making the same
- Patent number 12,266,716
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hao Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor isolation regions and methods of forming the same
- Patent number 12,266,573
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi Chen Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bottom barrier free interconnects without voids
- Patent number 12,266,607
- Issue date Apr 1, 2025
- International Business Machines Corporation
- Kenneth Chun Kuen Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacture
- Patent number 12,266,728
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wan-Yi Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 12,261,198
- Issue date Mar 25, 2025
- SK Hynix Inc.
- Jun Hyuk Seo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Selective etch of a substrate
- Patent number 12,261,049
- Issue date Mar 25, 2025
- Applied Materials , Inc.
- David Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of manufacturing the same
- Patent number 12,261,220
- Issue date Mar 25, 2025
- Samsung Electronics Co., Ltd.
- Woocheol Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant antenna for physical vapor deposition applications
- Patent number 12,261,017
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Barton Lane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming low-stress silicon nitride layer through hydrogen treatment
- Patent number 12,261,036
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Che Hsieh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...
- Publication number 20250118549
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20250118550
- Publication date Apr 10, 2025
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEMT TRANSISTOR
- Publication number 20250118613
- Publication date Apr 10, 2025
- STMicroelectronics International N.V.
- Paolo COLPANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS
- Publication number 20250118533
- Publication date Apr 10, 2025
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO IMPROVE WAFER EDGE UNIFORMITY
- Publication number 20250118539
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Mingle Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT DISSIPATION FOR FIELD EFFECT TRANSISTORS
- Publication number 20250118548
- Publication date Apr 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fang Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF ORGANIC FILMS
- Publication number 20250118562
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Eva E. Tois
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF FORMING PATTERNS
- Publication number 20250115691
- Publication date Apr 10, 2025
- Samsung SDI Co., Ltd.
- Seung-Wook SHIN
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
THIN FILM STRUCTURE AND METHOD OF MANUFACTURING THE THIN FILM STRUC...
- Publication number 20250120150
- Publication date Apr 10, 2025
- Samsung Electronics Co., Ltd.
- Baekwon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE-ALL-AROUND INTEGRATED CIRCUIT STRUCTURES HAVING OXIDE SUB-FINS
- Publication number 20250120152
- Publication date Apr 10, 2025
- Intel Corporation
- Leonard P. GULER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE-ALL-AROUND DEVICE WITH TRIMMED CHANNEL AND DIPOLED DIELECTRIC...
- Publication number 20250120166
- Publication date Apr 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Wei Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED TEMPERATURE ETCHING OF DOPED SILICON OXIDE
- Publication number 20250118568
- Publication date Apr 10, 2025
- LAM RESEARCH CORPORATION
- Jonathan CHURCH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...
- Publication number 20250118576
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D DRAM WITH ENLARGE-LESS TRIM
- Publication number 20250120061
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Chang Seok Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM GROWTH MODULATION USING WAFER BOW
- Publication number 20250112040
- Publication date Apr 3, 2025
- LAM RESEARCH CORPORATION
- Xin Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...
- Publication number 20250112074
- Publication date Apr 3, 2025
- LPE S.p.A.
- Francesco Corea
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITING COMPOSITION INCLUDING GROUP 4 METAL ELEMENT-CONTAIN...
- Publication number 20250109496
- Publication date Apr 3, 2025
- UP CHEMICAL CO., LTD.
- Byung Kwan KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAM FREE ISOLATION STRUCTURES AND METHOD FOR MAKING THE SAME
- Publication number 20250113602
- Publication date Apr 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Ruei JHAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECT...
- Publication number 20250112038
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Shanshan Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAM-FREE SINGLE OPERATION AMORPHOUS SILICON GAP FILL
- Publication number 20250112039
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- John Bae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A POWER SEMICONDUCTOR COMPONENT HAVING A PLURA...
- Publication number 20250113514
- Publication date Apr 3, 2025
- ROBERT BOSCH GmbH
- Daniel Krebs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING CARBON-CONTAINING FILM
- Publication number 20250112036
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INHERENT AREA SELECTIVE DEPOSITION OF SILICON-CONTAINING DIELECTRIC...
- Publication number 20250112041
- Publication date Apr 3, 2025
- Gelest, Inc.
- Chad Michael BRICK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ETCHING OF SILICON-AND-GERMANIUM-CONTAINING MATERIALS WIT...
- Publication number 20250112051
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Jiayin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20250104998
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Shoma MIYATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105000
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE GASEOUS HYDROGEN OXIDE PROVIDING DEVICE, AND HIGH PRE...
- Publication number 20250105027
- Publication date Mar 27, 2025
- HPSP Co., Ltd.
- Si Hyung LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MIM CAPACITOR WITH A SYMMETRICAL CAPACITOR INSULATOR STRUCTURE
- Publication number 20250105137
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsing-Lien Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATION FILM MANUFACTURING METHOD OF SEMICONDUCTOR PROCESS
- Publication number 20250105003
- Publication date Mar 27, 2025
- HPSP Co., Ltd.
- Sung Kil CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20250107091
- Publication date Mar 27, 2025
- SK HYNIX INC.
- Moon Sik SEO
- H01 - BASIC ELECTRIC ELEMENTS

the layer being a laminate, i.e. composed of sublayers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Integrated circuit device with low threshold voltage

Capacitive coupling in a direct-bonded interface for microelectroni...

System for dispensing spin-on glass (SOG) and method of using

Cyclical deposition method and apparatus for filling a recess forme...

Station-to-station control of backside bow compensation deposition

Substrate with fluorinated yttrium coatings, and methods of prepari...

Semiconductor device and method for fabricating the same

Resonant filter for solid state RF impedance matching network

Method of forming an electronic structure using reforming gas, syst...

Dual pressure oxidation method for forming an oxide layer in a feature

Formation of SiOC thin films

Conformal deposition of silicon carbide films

Substrate processing apparatus, substrate suppport and method of ma...

High-resistance resistor based on silicon carbide and manufacturing...

Mask encapsulation to prevent degradation during fabrication of hig...

Semiconductor device and methods of manufacture

Method and system for adjusting the gap between a wafer and a top p...

Oxide-nitride-oxide stack having multiple oxynitride layers

Substrate processing apparatus, method of manufacturing semiconduct...

Semiconductor device and method

Semiconductor device with source/drain contact formed using bottom-...

Finfet with dummy fins and methods of making the same

Transistor isolation regions and methods of forming the same

Bottom barrier free interconnects without voids

Semiconductor device and method of manufacture

Semiconductor device and method for fabricating the same

Selective etch of a substrate

Semiconductor devices and methods of manufacturing the same

Resonant antenna for physical vapor deposition applications

Forming low-stress silicon nitride layer through hydrogen treatment

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

HEMT TRANSISTOR

RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS

METHOD TO IMPROVE WAFER EDGE UNIFORMITY

HEAT DISSIPATION FOR FIELD EFFECT TRANSISTORS

DEPOSITION OF ORGANIC FILMS

METHOD OF FORMING PATTERNS

THIN FILM STRUCTURE AND METHOD OF MANUFACTURING THE THIN FILM STRUC...

GATE-ALL-AROUND INTEGRATED CIRCUIT STRUCTURES HAVING OXIDE SUB-FINS

GATE-ALL-AROUND DEVICE WITH TRIMMED CHANNEL AND DIPOLED DIELECTRIC...

REDUCED TEMPERATURE ETCHING OF DOPED SILICON OXIDE

CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...

3D DRAM WITH ENLARGE-LESS TRIM

THIN FILM GROWTH MODULATION USING WAFER BOW

WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...

FILM DEPOSITING COMPOSITION INCLUDING GROUP 4 METAL ELEMENT-CONTAIN...

SEAM FREE ISOLATION STRUCTURES AND METHOD FOR MAKING THE SAME

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECT...

SEAM-FREE SINGLE OPERATION AMORPHOUS SILICON GAP FILL

METHOD FOR PRODUCING A POWER SEMICONDUCTOR COMPONENT HAVING A PLURA...

METHOD OF FORMING CARBON-CONTAINING FILM

INHERENT AREA SELECTIVE DEPOSITION OF SILICON-CONTAINING DIELECTRIC...

SELECTIVE ETCHING OF SILICON-AND-GERMANIUM-CONTAINING MATERIALS WIT...

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

HIGH PRESSURE GASEOUS HYDROGEN OXIDE PROVIDING DEVICE, AND HIGH PRE...

MIM CAPACITOR WITH A SYMMETRICAL CAPACITOR INSULATOR STRUCTURE

INSULATION FILM MANUFACTURING METHOD OF SEMICONDUCTOR PROCESS

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE