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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02159
the material containing zirconium
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last 30 patents
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Patent Grant
Semiconductor Fin cutting process and structures formed thereby
Patent number
11,990,375
Issue date
May 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Wen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and its formation method
Patent number
11,978,624
Issue date
May 7, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Jiang Chu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma enhanced deposition processes for controlled formation of me...
Patent number
11,501,965
Issue date
Nov 15, 2022
ASM IP Holding B.V.
Lingyun Jia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor fin cutting process and structures formed thereby
Patent number
11,380,593
Issue date
Jul 5, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Wen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor Fin cutting process and structures formed thereby
Patent number
10,777,466
Issue date
Sep 15, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Wen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interface engineering for high capacitance capacitor for liquid cry...
Patent number
10,381,454
Issue date
Aug 13, 2019
PATTERSON + SHERIDAN LLP
Xuena Zhang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of forming dielectric films, new precursors and their use in...
Patent number
10,217,629
Issue date
Feb 26, 2019
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vertical metal insulator metal capacitor having a high-k dielectric...
Patent number
9,911,732
Issue date
Mar 6, 2018
Taiwan Semiconductor Manufacturing Co., Ltd
Chewn-Pu Jou
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of forming dielectric films, new precursors and their use i...
Patent number
9,911,590
Issue date
Mar 6, 2018
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vapor deposition of metal oxides, silicates and phosphates, and sil...
Patent number
9,905,414
Issue date
Feb 27, 2018
President and Fellows of Harvard College
Roy Gerald Gordon
C01 - INORGANIC CHEMISTRY
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Patent Grant
Method for manufacturing semiconductor device
Patent number
9,893,142
Issue date
Feb 13, 2018
Samsung Electronics Co., Ltd.
Se-Hyoung Ahn
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Vertical metal insulator metal capacitor having a high-K dielectric...
Patent number
9,793,264
Issue date
Oct 17, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Chewn-Pu Jou
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of growing oxide thin films
Patent number
9,514,956
Issue date
Dec 6, 2016
ASM International N.V.
Eva Tois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming material over a substrate and methods of forming...
Patent number
9,499,907
Issue date
Nov 22, 2016
Micron Technology, Inc.
Zhe Song
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Systems and methods for forming zirconium and/or hafnium-containing...
Patent number
9,184,061
Issue date
Nov 10, 2015
Micron Technology, Inc.
Brian A. Vaartstra
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Nitridation of atomic layer deposited high-k dielectrics using tris...
Patent number
9,064,694
Issue date
Jun 23, 2015
Tokyo Electron Limited
Steven P Consiglio
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method for fabricating semiconductor device
Patent number
9,058,984
Issue date
Jun 16, 2015
SK Hynix Inc.
Kee-Jeung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Capacitor dielectric comprising silicon-doped zirconium oxide and c...
Patent number
8,760,845
Issue date
Jun 24, 2014
Nanya Technology Corp.
Noel Rocklein
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for fabricating semiconductor device
Patent number
8,716,842
Issue date
May 6, 2014
SK Hynix Inc.
Kee-Jeung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods for manufacturing dielectric films
Patent number
8,524,617
Issue date
Sep 3, 2013
Canon Anelva Corporation
Takashi Nakagawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods of forming material over a substrate and methods of forming...
Patent number
8,501,268
Issue date
Aug 6, 2013
Micron Technology, Inc.
Zhe Song
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a metal-containing dielectric film
Patent number
8,470,402
Issue date
Jun 25, 2013
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Crosslinked hybrid gate dielectric materials and electronic devices...
Patent number
8,471,253
Issue date
Jun 25, 2013
Northwestern University
Tobin J. Marks
B82 - NANO-TECHNOLOGY
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Patent Grant
Film formation method and film formation apparatus
Patent number
8,389,421
Issue date
Mar 5, 2013
Tokyo Electron Limited
Katsushige Harada
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Vapor deposition of metal oxides, silicates and phosphates, and sil...
Patent number
8,334,016
Issue date
Dec 18, 2012
President and Fellows of Harvard College
Roy G. Gordon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming a metal silicate layer and methods of fabricatin...
Patent number
8,258,064
Issue date
Sep 4, 2012
Samsung Electronics Co., Ltd.
Jong-cheol Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
8,115,261
Issue date
Feb 14, 2012
Kabushiki Kaisha Toshiba
Tsunehiro Ino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of growing oxide thin films
Patent number
7,824,492
Issue date
Nov 2, 2010
ASM International N.V.
Eva Tois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic-layer-chemical-vapor-deposition of films that contain silico...
Patent number
7,771,533
Issue date
Aug 10, 2010
ASM International N.V.
Eva Tois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of growing oxide thin films
Patent number
7,771,534
Issue date
Aug 10, 2010
ASM International N.V.
Eva Tois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor Fin Cutting Process and Structures Formed Thereby
Publication number
20240282638
Publication date
Aug 22, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Fin Cutting Process and Structures Formed Thereby
Publication number
20220328360
Publication date
Oct 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND ITS FORMATION METHOD
Publication number
20220084818
Publication date
Mar 17, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Jiang CHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Fin Cutting Process and Structures Formed Thereby
Publication number
20200411386
Publication date
Dec 31, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE CUTTING PROCESS AND STRUCTURES FORMED THEREBY
Publication number
20190164844
Publication date
May 30, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wen HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ENHANCED DEPOSITION PROCESSES FOR CONTROLLED FORMATION OF ME...
Publication number
20180350587
Publication date
Dec 6, 2018
ASM IP HOLDING B.V.
Lingyun Jia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN...
Publication number
20180151354
Publication date
May 31, 2018
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Christian DUSSARRAT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vertical Metal Insulator Metal Capacitor Having a High-K Dielectric...
Publication number
20170373056
Publication date
Dec 28, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Chewn-Pu JOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-K DIELECTRIC MATERIALS UTILIZED IN DISPLAY DEVICES
Publication number
20170229554
Publication date
Aug 10, 2017
Applied Materials, Inc.
Soo Young CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE I...
Publication number
20170125242
Publication date
May 4, 2017
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Christian DUSSARRAT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
Publication number
20160268121
Publication date
Sep 15, 2016
President and Fellows of Harvard College
Roy Gerald GORDON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
Publication number
20160111276
Publication date
Apr 21, 2016
President and Fellows of Harvard College
Roy Gerald GORDON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Conformal Treatment of Dielectric Films Us...
Publication number
20140302686
Publication date
Oct 9, 2014
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS OF FORMING A LAYER
Publication number
20140287592
Publication date
Sep 25, 2014
Sukjin CHUNG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20140242772
Publication date
Aug 28, 2014
SK HYNIX INC.
Kee-Jeung LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20140182515
Publication date
Jul 3, 2014
Hitachi Kokusai Electric Inc.
Hirohisa YAMAZAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NITRIDATION OF ATOMIC LAYER DEPOSITED HIGH-K DIELECTRICS USING TRIS...
Publication number
20140017907
Publication date
Jan 16, 2014
Steven P. Consiglio
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods Of Forming Material Over A Substrate And Methods Of Forming...
Publication number
20130280426
Publication date
Oct 24, 2013
Zhe Song
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CAPACITOR DIELECTRIC COMPRISING SILICON-DOPED ZIRCONIUM OXIDE AND C...
Publication number
20130208403
Publication date
Aug 15, 2013
Noel Rocklein
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
Publication number
20130122328
Publication date
May 16, 2013
President and Fellows of Harvard College
Roy Gerald GORDON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20120146196
Publication date
Jun 14, 2012
Kee-Jeung LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20120108078
Publication date
May 3, 2012
Kabushiki Kalsha Toshiba
Tsunehiro INO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
Publication number
20120071002
Publication date
Mar 22, 2012
Hitachi Kokusai Electric Inc.
Masanori NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
Publication number
20120028478
Publication date
Feb 2, 2012
President and Fellows of Harvard College
Roy G. Gordon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR MANUFACTURING DIELECTRIC FILMS
Publication number
20120021612
Publication date
Jan 26, 2012
Canon ANELVA Corporation
Takashi Nakagawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Publication number
20110300719
Publication date
Dec 8, 2011
TOKYO ELECTRON LIMITED
Katsushige HARADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Crosslinked Hybrid Gate Dielectric Materials and Electronic Devices...
Publication number
20110284849
Publication date
Nov 24, 2011
Tobin J. Marks
B82 - NANO-TECHNOLOGY
Information
Patent Application
Methods Of Forming Material Over A Substrate And Methods Of Forming...
Publication number
20110223320
Publication date
Sep 15, 2011
Zhe Song
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN...
Publication number
20110207337
Publication date
Aug 25, 2011
L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Ge...
Christian DUSSARRAT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF GROWING OXIDE THIN FILMS
Publication number
20110104906
Publication date
May 5, 2011
ASM INTERNATIONAL N.V.
Eva Tois
C30 - CRYSTAL GROWTH