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C23C16/4584

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/4584the substrate being rotated

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Patents Grantslast 30 patents

Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,368,030
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanisms for supplying process gas into wafer process apparatus
- Patent number 12,359,318
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Su-Horng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arrangement for measuring the surface temperature of a susceptor in...
- Patent number 12,359,319
- Issue date Jul 15, 2025
- Aixtron SE
- Peter Sebald Lauffer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and substrate processing apparatus
- Patent number 12,362,142
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Takashi Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for spindle mechanism monitoring and maintenance in process...
- Patent number 12,362,157
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Hsiang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas showerhead with controllable airflow distribution
- Patent number 12,351,916
- Issue date Jul 8, 2025
- PIOTECH INC.
- Zhenjie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase growth method using reflector with changeable pattern
- Patent number 12,338,543
- Issue date Jun 24, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshitaka Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface treatment apparatus
- Patent number 12,331,400
- Issue date Jun 17, 2025
- Creating Nano Technologies, Inc.
- Ming-Yueh Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for CVD deposition of n-type doped silicon carbide and epita...
- Patent number 12,325,932
- Issue date Jun 10, 2025
- LPE S.P.A.
- Silvio Preti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reciprocating rotary CVD equipment and application method
- Patent number 12,325,917
- Issue date Jun 10, 2025
- Betone Technology Shanghai, Inc.
- Xiaoliang Jin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of conformal and gap-fill amorphous silicon thin-films
- Patent number 12,325,910
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Yihong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD reactor and method for controlling the surface temperature of t...
- Patent number 12,320,002
- Issue date Jun 3, 2025
- Aixtron SE
- Ralf Leiers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor with centering pin for epitaxial deposition
- Patent number 12,322,644
- Issue date Jun 3, 2025
- Veeco Instruments, Inc.
- Alexander Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor of a CVD reactor
- Patent number 12,305,282
- Issue date May 20, 2025
- Aixtron SE
- Wilhelm Josef Thomas Krücken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dithering or dynamic offsets for improved uniformity
- Patent number 12,305,283
- Issue date May 20, 2025
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,297,536
- Issue date May 13, 2025
- Tokyo Electron Limited
- Manabu Honma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, elevator and method of manufacturin...
- Patent number 12,293,932
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system for high accuracy patterning
- Patent number 12,289,979
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ping-Yin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,281,389
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical devices
- Patent number 12,252,789
- Issue date Mar 18, 2025
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing semiconductor device
- Patent number 12,252,791
- Issue date Mar 18, 2025
- Denso Corporation
- Hiroaki Fujibayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for performing film forming process on substrate and meth...
- Patent number 12,247,287
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting assembly and substrate processing apparatus
- Patent number 12,249,536
- Issue date Mar 11, 2025
- Wonik IPS Co., Ltd.
- Hyun Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method
- Patent number 12,237,167
- Issue date Feb 25, 2025
- Tokyo Electron Limited
- Ken Okoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD reactor with carrying ring for substrate handling, and use of a...
- Patent number 12,234,553
- Issue date Feb 25, 2025
- Aixtron SE
- Benjamin David Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition device capable of reciprocating rotation and lifting
- Patent number 12,227,845
- Issue date Feb 18, 2025
- Betone Technology Shanghai, Inc.
- Weicong Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,228,861
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Ki Sang Eum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition device capable of reciprocating rotation...
- Patent number 12,227,844
- Issue date Feb 18, 2025
- Betone Technology Shanghai, Inc.
- Xiaoliang Jin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Level monitoring and active adjustment of a substrate support assembly
- Patent number 12,227,847
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- James V. Santiago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,217,959
- Issue date Feb 4, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION SYSTEM FOR HIGH ACCURACY PATTERNING
- Publication number 20250230536
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Yin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250223701
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Takehiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250198003
- Publication date Jun 19, 2025
- TES CO., LTD.
- Kyung-Ho JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250188606
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR REAL-TIME OPTIMIZATION AND CONTROL OF SUBST...
- Publication number 20250188616
- Publication date Jun 12, 2025
- TATA CONSULTANCY SERVICES LIMITED
- Utkarsh Prateek Brajesh SINHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250188597
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Atsushi MORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION DEVICE
- Publication number 20250188612
- Publication date Jun 12, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS
- Publication number 20250179640
- Publication date Jun 5, 2025
- ADVANCED MICRO-FABRICATION EQUIPMENT INC.
- Zhenyu ZHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective metal Capping with Metal Halide enhancement
- Publication number 20250157824
- Publication date May 15, 2025
- Applied Materials, Inc.
- Shumao ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR EMISSIVITY-CORRECTED PYROMETRY
- Publication number 20250154655
- Publication date May 15, 2025
- AIXTRON SE
- Karsten ROJEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE, AND ME...
- Publication number 20250146133
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Yeontae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
- Publication number 20250137133
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...
- Publication number 20250137134
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Felix Rabinovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...
- Publication number 20250140597
- Publication date May 1, 2025
- LPE S.P.A.
- Silvio Preti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
- Publication number 20250137132
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250129472
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING SYSTEM
- Publication number 20250129479
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE ROTATING APPARATUS, PROCESSING SYSTEM, AND PROCESSING METHOD
- Publication number 20250116000
- Publication date Apr 10, 2025
- SANTEC HOLDINGS CORPORATION
- Noboru UEHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD FOR PROCESS TOOL
- Publication number 20250092521
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Anthony Dip
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, ME...
- Publication number 20250079231
- Publication date Mar 6, 2025
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250051920
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yudai FUKUSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPAT...
- Publication number 20250054804
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250043414
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Kazumi KUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...
- Publication number 20250034709
- Publication date Jan 30, 2025
- Semsysco GmbH
- Andreas Gleissner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE
- Publication number 20250034711
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Gaku WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250027201
- Publication date Jan 23, 2025
- Advanced Micro-Fabrication Equipment Inc. China
- Yong JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250029817
- Publication date Jan 23, 2025
- JUSUNG ENGINEERING CO., LTD.
- WOONG KYO OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250022702
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Masayuki ASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER TRANSFER APPARATUS, VAPOR DEPOSITION SYSTEM AND METHOD OF OPE...
- Publication number 20250019831
- Publication date Jan 16, 2025
- Advanced Micro-Fabrication Equipment Inc. China
- Yong JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS
- Publication number 20250019832
- Publication date Jan 16, 2025
- CVD Equipment Corporation
- William S. Linss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

the substrate being rotated

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Deposition method and deposition apparatus

Mechanisms for supplying process gas into wafer process apparatus

Arrangement for measuring the surface temperature of a susceptor in...

Plasma processing method and substrate processing apparatus

Methods for spindle mechanism monitoring and maintenance in process...

Gas showerhead with controllable airflow distribution

Vapor phase growth method using reflector with changeable pattern

Surface treatment apparatus

Method for CVD deposition of n-type doped silicon carbide and epita...

Reciprocating rotary CVD equipment and application method

Deposition of conformal and gap-fill amorphous silicon thin-films

CVD reactor and method for controlling the surface temperature of t...

Reactor with centering pin for epitaxial deposition

Susceptor of a CVD reactor

Dithering or dynamic offsets for improved uniformity

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, elevator and method of manufacturin...

Deposition system for high accuracy patterning

Substrate processing method and substrate processing apparatus

Nano-coating protection method for electrical devices

Apparatus for manufacturing semiconductor device

Apparatus for performing film forming process on substrate and meth...

Substrate supporting assembly and substrate processing apparatus

Deposition method

CVD reactor with carrying ring for substrate handling, and use of a...

Vapor deposition device capable of reciprocating rotation and lifting

Apparatus for treating substrate

Chemical vapor deposition device capable of reciprocating rotation...

Level monitoring and active adjustment of a substrate support assembly

Method of manufacturing semiconductor device, substrate processing...

Patents Applicationslast 30 patents

DEPOSITION SYSTEM FOR HIGH ACCURACY PATTERNING

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

METHODS AND SYSTEMS FOR REAL-TIME OPTIMIZATION AND CONTROL OF SUBST...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

FILM DEPOSITION DEVICE

HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS

Selective metal Capping with Metal Halide enhancement

METHOD FOR EMISSIVITY-CORRECTED PYROMETRY

SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE, AND ME...

METHODS AND APPARATUS FOR SUSCEPTOR LEVELING

CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...

SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...

METHODS AND APPARATUS FOR SUSCEPTOR LEVELING

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

FILM-FORMING METHOD AND FILM-FORMING SYSTEM

SUBSTRATE ROTATING APPARATUS, PROCESSING SYSTEM, AND PROCESSING METHOD

SHOWERHEAD FOR PROCESS TOOL

SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, ME...

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPAT...

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE

SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

WAFER TRANSFER APPARATUS, VAPOR DEPOSITION SYSTEM AND METHOD OF OPE...

IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS