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  • CPC
  • C23C16/4584
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/4584the substrate being rotated
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
    • Publication number 20250011931
    • Publication date Jan 9, 2025
    • Kokusai Electric Corporation
    • Shun MATSUI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20250006462
    • Publication date Jan 2, 2025
    • TOKYO ELECTRON LIMITED
    • Morihito INAGAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER HOLDER ASSEMBLY
    • Publication number 20250006528
    • Publication date Jan 2, 2025
    • Taiwan Semiconductor Manufacturing company Ltd.
    • CHENG-YOU TAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD
    • Publication number 20250003070
    • Publication date Jan 2, 2025
    • TOKYO ELECTRON LIMITED
    • Akira MATSUBARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Reaction Chamber and Reaction Device
    • Publication number 20250003075
    • Publication date Jan 2, 2025
    • SHENZHEN NASO TECH CO., LTD.
    • Yunzhang Xiao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ROTATING SUBSTRATE SUPPORT
    • Publication number 20240420931
    • Publication date Dec 19, 2024
    • ASM IP HOLDING B.V.
    • Yukihiro Mori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE SUPPORTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240417855
    • Publication date Dec 19, 2024
    • ASM IP HOLDING B.V.
    • Ippei Yanagisawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COATING METHOD
    • Publication number 20240420914
    • Publication date Dec 19, 2024
    • Jiangsu Favored Nanotechnology Co., Ltd.
    • Jian ZONG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND
    • Publication number 20240410077
    • Publication date Dec 12, 2024
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Xuelun WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
    • Publication number 20240404795
    • Publication date Dec 5, 2024
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
    • Publication number 20240401198
    • Publication date Dec 5, 2024
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20240401199
    • Publication date Dec 5, 2024
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...
    • Publication number 20240368766
    • Publication date Nov 7, 2024
    • ACM RESEARCH (SHANGHAI), INC.
    • Hui Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS AND METHODS USING STAGGERED PUMPING LOCATIONS
    • Publication number 20240360553
    • Publication date Oct 31, 2024
    • Applied Materials, Inc.
    • Joseph AuBuchon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DITHERING OR DYNAMIC OFFSETS FOR IMPROVED UNIFORMITY
    • Publication number 20240352586
    • Publication date Oct 24, 2024
    • Applied Materials, Inc.
    • Joseph AuBuchon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION AND LIFTING
    • Publication number 20240327987
    • Publication date Oct 3, 2024
    • BETONE TECHNOLOGY SHANGHAI, INC.
    • Weicong SONG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION...
    • Publication number 20240327986
    • Publication date Oct 3, 2024
    • BETONE TECHNOLOGY SHANGHAI, INC.
    • Xiaoliang JIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    EPITAXIAL REACTION DEVICE
    • Publication number 20240309550
    • Publication date Sep 19, 2024
    • Shenzhen Naso Tech Co Ltd
    • Yunzhang XIAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240295027
    • Publication date Sep 5, 2024
    • TOKYO ELECTRON LIMITED
    • Junnosuke TAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REACTION CHAMBER WITH COVERING SYSTEM AND EPITAXIAL REACTOR
    • Publication number 20240271319
    • Publication date Aug 15, 2024
    • LPE S.P.A.
    • Srinivas Yarlagadda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID
    • Publication number 20240247373
    • Publication date Jul 25, 2024
    • Applied Materials, Inc.
    • Muhannad Mustafa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20240240321
    • Publication date Jul 18, 2024
    • Jusung Engineering Co., Ltd.
    • Da Un JUNG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS CONVEYING ASSEMBLY AND GAS-PHASE REACTION DEVICE
    • Publication number 20240240313
    • Publication date Jul 18, 2024
    • Chuyun Tek (Shanghai) Co., Ltd.
    • Zhigang XING
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
    • Publication number 20240240319
    • Publication date Jul 18, 2024
    • CV Research Corporation
    • Hiroshi KAWAURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
    • Publication number 20240222097
    • Publication date Jul 4, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yu-Hsiang CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS AND PROCESSING METHOD
    • Publication number 20240209508
    • Publication date Jun 27, 2024
    • TOKYO ELECTRON LIMITED
    • MANABU HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...
    • Publication number 20240209502
    • Publication date Jun 27, 2024
    • LEHIGH UNIVERSITY
    • Siddha PIMPUTKAR
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20240209507
    • Publication date Jun 27, 2024
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
    • Publication number 20240209544
    • Publication date Jun 27, 2024
    • Applied Materials, Inc.
    • Tetsuya ISHIKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240209509
    • Publication date Jun 27, 2024
    • TOKYO ELECTRON LIMITED
    • Naoya FUKUDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...