the substrate being supported substantially horizontally

Industry

CPC
C23C16/4583

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4583the substrate being supported substantially horizontally

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Ribbon beam plasma enhanced chemical vapor deposition system for an...
- Patent number 12,191,156
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for forming semiconductor devices containin...
- Patent number 12,176,203
- Issue date Dec 24, 2024
- SanDisk Technologies LLC
- Fei Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flat pocket susceptor design with improved heat transfer
- Patent number 12,170,213
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic multi zone flow control for a processing system
- Patent number 12,159,785
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Daemian Raj Benjamin Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum seal for electrostatic chuck
- Patent number 12,125,734
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faceplate having a curved surface
- Patent number 12,110,590
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition method and vapor deposition device
- Patent number 12,100,590
- Issue date Sep 24, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,094,694
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,091,753
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulation of oxidation profile for substrate processing
- Patent number 12,087,573
- Issue date Sep 10, 2024
- Lam Research Corporation
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition furnace with a cleaning gas system to pro...
- Patent number 12,077,854
- Issue date Sep 3, 2024
- ASM IP Holding B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Connector for substrate support with embedded temperature sensors
- Patent number 12,077,862
- Issue date Sep 3, 2024
- Lam Research Corporation
- Siyuan Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 12,080,555
- Issue date Sep 3, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming mesas on an electrostatic chuck
- Patent number 12,074,052
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 12,074,049
- Issue date Aug 27, 2024
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,065,732
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Masayuki Harashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,054,828
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 12,051,568
- Issue date Jul 30, 2024
- Toto Ltd.
- Yasutaka Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating device and carrier seat thereof
- Patent number 12,043,897
- Issue date Jul 23, 2024
- PIOTECH INC.
- Yue Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and methods for calibrating a se...
- Patent number 12,040,200
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Shiva Rajavelu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-stick coating and its manufacturing method
- Patent number 12,024,773
- Issue date Jul 2, 2024
- Picosun Oy
- Xiaopeng Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses for thin film deposition
- Patent number 12,024,772
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Jun Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for motor shaft and heater leveling
- Patent number 12,018,376
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Ashutosh Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chucking process and system for substrate processing chambers
- Patent number 12,020,911
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Bhaskar Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 12,018,371
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Reita Igarashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and cleaning method
- Patent number 12,018,366
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Shingo Hishiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method of cleaning process chamber components
- Patent number 12,014,902
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Jong Yun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
- Publication number 20250011921
- Publication date Jan 9, 2025
- SAMSUNG DISPLAY CO., LTD.
- Junggon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MA...
- Publication number 20250011925
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20250006539
- Publication date Jan 2, 2025
- TOTO LTD.
- Tetsuro ITOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003064
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM
- Publication number 20250006487
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Daemian Raj BENJAMIN RAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20250006540
- Publication date Jan 2, 2025
- TOTO LTD.
- Tetsuro ITOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003063
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD, AND OXIDE SEMICONDU...
- Publication number 20240425982
- Publication date Dec 26, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS
- Publication number 20240417857
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20240420986
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20240404822
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS AND MANUFACTURING METHOD
- Publication number 20240401195
- Publication date Dec 5, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...
- Publication number 20240392435
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20240384406
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH AN INJECTOR
- Publication number 20240384411
- Publication date Nov 21, 2024
- ASM IP HOLDING B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR DYNAMICALLY ADJUSTING THIN-FILM DEPOSITION PA...
- Publication number 20240376605
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...
- Publication number 20240363378
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Thomas ACKERMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING MODULE AND PROGRAM CONTROL METHOD FOR PUMPING LINE OF SEMIC...
- Publication number 20240360551
- Publication date Oct 31, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Sheng-chun Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...
- Publication number 20240360590
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT SOCKET AND METHOD FOR MANUFACTURING PARTS USING SUPPORT SOCKET
- Publication number 20240352585
- Publication date Oct 24, 2024
- KNJ CO.,LTD
- Bun-hei KOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240355583
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Naohiko OKUNISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic Chuck and Method of Operation for Plasma Processing
- Publication number 20240355593
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR
- Publication number 20240347372
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Balakrishnam R. JAMPANA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...
- Publication number 20240344197
- Publication date Oct 17, 2024
- BENEQ OY
- Markus BOSUND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240331982
- Publication date Oct 3, 2024
- TOTO LTD.
- Yasutaka NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRAT...
- Publication number 20240327979
- Publication date Oct 3, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20240331985
- Publication date Oct 3, 2024
- TOTO LTD.
- Ryosuke SAKURAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
- Publication number 20240332535
- Publication date Oct 3, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

the substrate being supported substantially horizontally

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ribbon beam plasma enhanced chemical vapor deposition system for an...

Methods and apparatuses for forming semiconductor devices containin...

Flat pocket susceptor design with improved heat transfer

Dynamic multi zone flow control for a processing system

Vacuum seal for electrostatic chuck

Faceplate having a curved surface

PECVD apparatus

Vapor deposition method and vapor deposition device

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Modulation of oxidation profile for substrate processing

In-situ film growth rate monitoring apparatus, systems, and methods...

Chemical vapor deposition furnace with a cleaning gas system to pro...

Connector for substrate support with embedded temperature sensors

Method of manufacturing semiconductor device, non-transitory comput...

Forming mesas on an electrostatic chuck

Permanent secondary erosion containment for electrostatic chuck bonds

Film forming method and film forming apparatus

Substrate processing method and substrate processing apparatus

Apparatus and method for manufacturing hexagonal silicon crystal

Semiconductor manufacturing apparatus

Coating device and carrier seat thereof

Semiconductor processing apparatus and methods for calibrating a se...

Non-stick coating and its manufacturing method

Apparatuses for thin film deposition

Apparatus and methods for motor shaft and heater leveling

Chucking process and system for substrate processing chambers

Processing apparatus and processing method

Substrate processing apparatus and cleaning method

System and method of cleaning process chamber components

Patents Applicationslast 30 patents

DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS

SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MA...

ELECTROSTATIC CHUCK

Particle Coating Apparatus And Method Of Coating Particle

DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM

ELECTROSTATIC CHUCK

Particle Coating Apparatus And Method Of Coating Particle

FILM FORMING APPARATUS AND FILM FORMING METHOD, AND OXIDE SEMICONDU...

CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS

FORMING MESAS ON AN ELECTROSTATIC CHUCK

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING

FILM-FORMING APPARATUS AND MANUFACTURING METHOD

CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

SUBSTRATE PROCESSING APPARATUS WITH AN INJECTOR

SYSTEM AND METHOD FOR DYNAMICALLY ADJUSTING THIN-FILM DEPOSITION PA...

COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...

HEATING MODULE AND PROGRAM CONTROL METHOD FOR PUMPING LINE OF SEMIC...

GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...

SUPPORT SOCKET AND METHOD FOR MANUFACTURING PARTS USING SUPPORT SOCKET

PLASMA PROCESSING APPARATUS

Electrostatic Chuck and Method of Operation for Plasma Processing

SUSCEPTOR

AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...

SEMICONDUCTOR MANUFACTURING APPARATUS

METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRAT...

ELECTROSTATIC CHUCK

PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF