the substrate being supported substantially horizontally

Industry

CPC
C23C16/4583

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4583the substrate being supported substantially horizontally

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,281,389
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for susceptor deposition material removal
- Patent number 12,280,465
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Vijayabhaskara Venkatagiriyappa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment fixture for a reactor system
- Patent number 12,278,129
- Issue date Apr 15, 2025
- ASM IP Holding B.V.
- Surojit Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor infiltration densification method using single-pile...
- Patent number 12,264,394
- Issue date Apr 1, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu Champagne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,266,522
- Issue date Apr 1, 2025
- Kokusai Electric Corporation
- Kazuyuki Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods to eliminate of deposition on wafer bevel and backside
- Patent number 12,255,054
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,247,288
- Issue date Mar 11, 2025
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system including temperature controller
- Patent number 12,237,183
- Issue date Feb 25, 2025
- Samsung Electronics Co., Ltd.
- Kyoungsik Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting apparatus, substrate processing apparatus incl...
- Patent number 12,230,531
- Issue date Feb 18, 2025
- ASM IP Holding B.V.
- Seung Woo Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an injector
- Patent number 12,195,852
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 12,195,854
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ribbon beam plasma enhanced chemical vapor deposition system for an...
- Patent number 12,191,156
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for forming semiconductor devices containin...
- Patent number 12,176,203
- Issue date Dec 24, 2024
- SanDisk Technologies LLC
- Fei Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flat pocket susceptor design with improved heat transfer
- Patent number 12,170,213
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic multi zone flow control for a processing system
- Patent number 12,159,785
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Daemian Raj Benjamin Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum seal for electrostatic chuck
- Patent number 12,125,734
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faceplate having a curved surface
- Patent number 12,110,590
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition method and vapor deposition device
- Patent number 12,100,590
- Issue date Sep 24, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,094,694
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,091,753
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulation of oxidation profile for substrate processing
- Patent number 12,087,573
- Issue date Sep 10, 2024
- Lam Research Corporation
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition furnace with a cleaning gas system to pro...
- Patent number 12,077,854
- Issue date Sep 3, 2024
- ASM IP Holding B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Connector for substrate support with embedded temperature sensors
- Patent number 12,077,862
- Issue date Sep 3, 2024
- Lam Research Corporation
- Siyuan Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 12,080,555
- Issue date Sep 3, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming mesas on an electrostatic chuck
- Patent number 12,074,052
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 12,074,049
- Issue date Aug 27, 2024
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,065,732
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Masayuki Harashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20250129471
- Publication date Apr 24, 2025
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE INPUT POST MIX SHOWERHEAD
- Publication number 20250129475
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Norman JACOBSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUSES FOR TEMPERATURE INDEXED ALD
- Publication number 20250129473
- Publication date Apr 24, 2025
- ASM IP HOLDING B.V.
- Bert Jongbloed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250125128
- Publication date Apr 17, 2025
- NGK Insulators, Ltd.
- Shingo AMANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER WITH RF RETURN PATH
- Publication number 20250118593
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Vellaichamy NAGAPPAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MIXING BLOCKS FOR FLUID SYSTEMS, FIXTURES AND FIXTURE ARRANGEMENTS...
- Publication number 20250115995
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Iordan Iordanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT SYSTEM
- Publication number 20250112068
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Klaas Boonstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION SYSTEM WITH HOT-WALL HYBRID FLOW REACTOR...
- Publication number 20250109493
- Publication date Apr 3, 2025
- VEECO INSTRUMENTS INC.
- Johannes Kaeppeler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...
- Publication number 20250109497
- Publication date Apr 3, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu CHAMPAGNE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...
- Publication number 20250109495
- Publication date Apr 3, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING APPARATUS, PROCESS CHAMBER, AND METHOD OF COATING A SUBSTRA...
- Publication number 20250101592
- Publication date Mar 27, 2025
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOLDER AND VAPOR PHASE GROWTH APPARATUS
- Publication number 20250084560
- Publication date Mar 13, 2025
- NUFLARE TECHNOLOGY, INC.
- Toru WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLAT POCKET SUSCEPTOR DESIGN WITH IMPROVED HEAT TRANSFER
- Publication number 20250079203
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250051919
- Publication date Feb 13, 2025
- TES CO., LTD.
- Shin-Myoung KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND-LIKE CARBON GAP FILL
- Publication number 20250046599
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Jialiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...
- Publication number 20250038012
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Samer Banna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...
- Publication number 20250034714
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Wentao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...
- Publication number 20250034706
- Publication date Jan 30, 2025
- The Regents of the University of Michigan
- Neil P. Dasgupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINED REDUCED PRESSURE -HIGH VACUUM PROCESSING CHAMBER
- Publication number 20250034707
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Mukhles SOWWAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOAKING AND ESC CLAMPING SEQUENCE FOR HIGH BOW SUBSTRATES
- Publication number 20250027198
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
- Publication number 20250011921
- Publication date Jan 9, 2025
- SAMSUNG DISPLAY CO., LTD.
- Junggon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MA...
- Publication number 20250011925
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20250006539
- Publication date Jan 2, 2025
- TOTO LTD.
- Tetsuro ITOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003064
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM
- Publication number 20250006487
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Daemian Raj BENJAMIN RAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20250006540
- Publication date Jan 2, 2025
- TOTO LTD.
- Tetsuro ITOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003063
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD, AND OXIDE SEMICONDU...
- Publication number 20240425982
- Publication date Dec 26, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS
- Publication number 20240417857
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20240420986
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS

the substrate being supported substantially horizontally

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Apparatus and methods for susceptor deposition material removal

Alignment fixture for a reactor system

Substrate supporting plate, thin film deposition apparatus includin...

Chemical vapor infiltration densification method using single-pile...

Substrate processing apparatus, method of manufacturing semiconduct...

Methods to eliminate of deposition on wafer bevel and backside

Substrate processing apparatus and method

Semiconductor processing system including temperature controller

Substrate supporting apparatus, substrate processing apparatus incl...

Substrate processing apparatus with an injector

Substrate processing apparatus, method of processing substrate, met...

Ribbon beam plasma enhanced chemical vapor deposition system for an...

Methods and apparatuses for forming semiconductor devices containin...

Flat pocket susceptor design with improved heat transfer

Dynamic multi zone flow control for a processing system

Vacuum seal for electrostatic chuck

Faceplate having a curved surface

PECVD apparatus

Vapor deposition method and vapor deposition device

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Modulation of oxidation profile for substrate processing

In-situ film growth rate monitoring apparatus, systems, and methods...

Chemical vapor deposition furnace with a cleaning gas system to pro...

Connector for substrate support with embedded temperature sensors

Method of manufacturing semiconductor device, non-transitory comput...

Forming mesas on an electrostatic chuck

Permanent secondary erosion containment for electrostatic chuck bonds

Film forming method and film forming apparatus

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND FILM FORMING METHOD

MULTIPLE INPUT POST MIX SHOWERHEAD

METHOD AND APPARATUSES FOR TEMPERATURE INDEXED ALD

CERAMIC SUSCEPTOR

PROCESSING CHAMBER WITH RF RETURN PATH

MIXING BLOCKS FOR FLUID SYSTEMS, FIXTURES AND FIXTURE ARRANGEMENTS...

WAFER BOAT SYSTEM

CHEMICAL VAPOR DEPOSITION SYSTEM WITH HOT-WALL HYBRID FLOW REACTOR...

CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...

FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...

COATING APPARATUS, PROCESS CHAMBER, AND METHOD OF COATING A SUBSTRA...

HOLDER AND VAPOR PHASE GROWTH APPARATUS

FLAT POCKET SUSCEPTOR DESIGN WITH IMPROVED HEAT TRANSFER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DIAMOND-LIKE CARBON GAP FILL

SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...

REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...

Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...

COMBINED REDUCED PRESSURE -HIGH VACUUM PROCESSING CHAMBER

SOAKING AND ESC CLAMPING SEQUENCE FOR HIGH BOW SUBSTRATES

DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS

SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MA...

ELECTROSTATIC CHUCK

Particle Coating Apparatus And Method Of Coating Particle

DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM

ELECTROSTATIC CHUCK

Particle Coating Apparatus And Method Of Coating Particle

FILM FORMING APPARATUS AND FILM FORMING METHOD, AND OXIDE SEMICONDU...

CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS

FORMING MESAS ON AN ELECTROSTATIC CHUCK