the substrate being supported substantially horizontally

Industry

CPC
C23C16/4583

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4583the substrate being supported substantially horizontally

Industries

Patents Grantslast 30 patents

Information Patent Grant
Gas flow accelerator to prevent buildup of processing byproduct in...
- Patent number 11,972,957
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sheng-chun Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,970,767
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Taichi Monden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition methods
- Patent number 11,970,769
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Trigagema Gama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for atomic layer deposition (ALD)
- Patent number 11,970,773
- Issue date Apr 30, 2024
- Beneq Oy
- Matti Malila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 11,965,262
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,946,158
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low impedance current path for edge non-uniformity tuning
- Patent number 11,929,278
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Providing multifunctional shutter disk above the workpiece in the m...
- Patent number 11,920,237
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,915,927
- Issue date Feb 27, 2024
- Kokusai Electric Corporation
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rounded vertical wafer vessel rods
- Patent number 11,908,719
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Wen Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, and recording medium
- Patent number 11,905,596
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for controlling vapor phase processing
- Patent number 11,891,693
- Issue date Feb 6, 2024
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems to modulate film stress
- Patent number 11,887,818
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Tsutomu Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor with ring to limit backside deposition
- Patent number 11,885,019
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and charge neutralization method for...
- Patent number 11,862,439
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Takahiro Kawawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate having a curved surface
- Patent number 11,851,759
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,854,850
- Issue date Dec 26, 2023
- Kokusai Electric Corporation
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid stack for high frequency processing
- Patent number 11,846,011
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Shuran Sheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, substrate processing apparatus, met...
- Patent number 11,841,343
- Issue date Dec 12, 2023
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatial atomic layer deposition
- Patent number 11,834,745
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for susceptor deposition material removal
- Patent number 11,826,873
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Vijayabhaskara Venkatagiriyappa
- B24 - GRINDING POLISHING
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporization vessel and method
- Patent number 11,821,087
- Issue date Nov 21, 2023
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for holding and releasing a substrate
- Patent number 11,814,721
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Simon Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber injector
- Patent number 11,807,931
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical treatment, deposition and/or infiltration apparatus and me...
- Patent number 11,802,338
- Issue date Oct 31, 2023
- ASM IP Holding B.V.
- Robert Huggare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic multi zone flow control for a processing system
- Patent number 11,798,803
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Daemian Raj Benjamin Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 11,781,221
- Issue date Oct 10, 2023
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch substrate support with warped substrate capability
- Patent number 11,784,075
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Shashidhara Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer susceptor with improved thermal characteristics
- Patent number 11,773,506
- Issue date Oct 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Hung Lin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240141484
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Yasuaki KOMAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING SUSCEPTOR POCKET EDGE FOR PROCESS IMPRO...
- Publication number 20240141492
- Publication date May 2, 2024
- Applied Materials, Inc.
- Prasanth Narayanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...
- Publication number 20240142409
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240145288
- Publication date May 2, 2024
- Samsung Electronics Co., Ltd.
- Youngbok LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOZZLE FOR REMOTE PLASMA CLEANING OF PROCESS CHAMBERS
- Publication number 20240141482
- Publication date May 2, 2024
- LAM RESEARCH CORPORATION
- Jeremy Jerome Pool
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI OVERLAPPING DISK AND RING
- Publication number 20240141487
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
- Publication number 20240136161
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick LEESER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...
- Publication number 20240120220
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOVEL COATING METHOD OF COMPLEX 3D STRUCTURES USING LOW PRESSURE CH...
- Publication number 20240102167
- Publication date Mar 28, 2024
- California Institute of Technology
- Matthew R. Dickie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZATION VESSEL AND METHOD
- Publication number 20240084452
- Publication date Mar 14, 2024
- Entegris, Inc.
- Bryan C. HENDRIX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240084451
- Publication date Mar 14, 2024
- Samsung Electronics Co., Ltd.
- JEONGHYEONG LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLU...
- Publication number 20240068100
- Publication date Feb 29, 2024
- United Semiconductor Japan Co., Ltd.
- Satoshi Inagaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20240060184
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- Yoshitaka MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR PROCESSING SEMICONDUCTOR DEVICE, METHOD FOR FORMING SEMI...
- Publication number 20240060173
- Publication date Feb 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan DUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS
- Publication number 20240055230
- Publication date Feb 15, 2024
- Applied Materials, Inc.
- Jong Yun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM SEAL FOR ELECTROSTATIC CHUCK
- Publication number 20240055289
- Publication date Feb 15, 2024
- Applied Materials, Inc.
- Vijay D. PARKHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...
- Publication number 20240055259
- Publication date Feb 15, 2024
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT AND A METHOD FOR FORMING LAYER ON A PLURALITY OF SUBSTRATES
- Publication number 20240044003
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE HAVING A CURVED SURFACE
- Publication number 20240044000
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Shailendra SRIVASTAVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR SUSCEPTOR DEPOSITION MATERIAL REMOVAL
- Publication number 20240033877
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Vijayabhaskara Venkatagiriyappa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT AND PLATE FOR WAFER BOAT
- Publication number 20240038560
- Publication date Feb 1, 2024
- Hanwha Solutions Corporation
- Kyoungsup SHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THICKNESS UNIFORMITY IMPROVEMENT KIT FOR THERMALLY SENSITIVE EPITAX...
- Publication number 20240038575
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT
- Publication number 20240035162
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...
- Publication number 20240030028
- Publication date Jan 25, 2024
- LAM RESEARCH CORPORATION
- Abbin Antony
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240011156
- Publication date Jan 11, 2024
- SAMSUNG DISPLAY CO., LTD.
- CHOELMIN JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING TUBE, SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20240011154
- Publication date Jan 11, 2024
- Samsung Electronics Co., Ltd.
- HYUNJU LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230420294
- Publication date Dec 28, 2023
- Tokyo Electron Limited
- Makoto WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM
- Publication number 20230420245
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Daemian Raj BENJAMIN RAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL SOURCE VESSEL WITH DIP TUBE
- Publication number 20230407480
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20230399742
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

the substrate being supported substantially horizontally

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Gas flow accelerator to prevent buildup of processing byproduct in...

Film forming method and film forming apparatus

Cyclical deposition methods

Apparatus and method for atomic layer deposition (ALD)

Substrate supporting plate, thin film deposition apparatus includin...

Apparatus for growing a semiconductor wafer and associated manufact...

Low impedance current path for edge non-uniformity tuning

Providing multifunctional shutter disk above the workpiece in the m...

Substrate processing apparatus, method of manufacturing semiconduct...

Rounded vertical wafer vessel rods

Method of manufacturing semiconductor device, and recording medium

Systems and methods for controlling vapor phase processing

Methods and systems to modulate film stress

Susceptor with ring to limit backside deposition

Substrate processing apparatus and charge neutralization method for...

Faceplate having a curved surface

Substrate processing apparatus, method of manufacturing semiconduct...

Lid stack for high frequency processing

Method of processing substrate, substrate processing apparatus, met...

Spatial atomic layer deposition

Apparatus and methods for susceptor deposition material removal

Heated pedestal design for improved heat transfer and temperature u...

Vaporization vessel and method

Method for holding and releasing a substrate

Chamber injector

Chemical treatment, deposition and/or infiltration apparatus and me...

Dynamic multi zone flow control for a processing system

Chemical source vessel with dip tube

Batch substrate support with warped substrate capability

Wafer susceptor with improved thermal characteristics

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SEMICONDUCTOR MANUFACTURING SUSCEPTOR POCKET EDGE FOR PROCESS IMPRO...

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...

SUBSTRATE PROCESSING APPARATUS

NOZZLE FOR REMOTE PLASMA CLEANING OF PROCESS CHAMBERS

EPI OVERLAPPING DISK AND RING

TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS

LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...

NOVEL COATING METHOD OF COMPLEX 3D STRUCTURES USING LOW PRESSURE CH...

VAPORIZATION VESSEL AND METHOD

FILM FORMING APPARATUS

WAFER SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLU...

HEAT TREATMENT APPARATUS

SYSTEM FOR PROCESSING SEMICONDUCTOR DEVICE, METHOD FOR FORMING SEMI...

SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS

VACUUM SEAL FOR ELECTROSTATIC CHUCK

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...

WAFER BOAT AND A METHOD FOR FORMING LAYER ON A PLURALITY OF SUBSTRATES

FACEPLATE HAVING A CURVED SURFACE

APPARATUS AND METHODS FOR SUSCEPTOR DEPOSITION MATERIAL REMOVAL

WAFER BOAT AND PLATE FOR WAFER BOAT

THICKNESS UNIFORMITY IMPROVEMENT KIT FOR THERMALLY SENSITIVE EPITAX...

SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...

DEPOSITION APPARATUS

SUBSTRATE PROCESSING TUBE, SUBSTRATE PROCESSING APPARATUS INCLUDING...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM

CHEMICAL SOURCE VESSEL WITH DIP TUBE

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR