the wafers being stored in a carrier, involving loading and unloading

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H01L21/67763

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67763the wafers being stored in a carrier, involving loading and unloading

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Automatic system calibration for wafer handling
- Patent number 12,027,400
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 11,990,358
- Issue date May 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preparation method for bifacial perc solar cell
- Patent number 11,848,395
- Issue date Dec 19, 2023
- GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY CO., LTD.
- Jiebin Fang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of monitoring tool
- Patent number 11,804,392
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for handling diced wafers of integrated circuits
- Patent number 11,658,056
- Issue date May 23, 2023
- NXP B.V.
- Antonius Hendrikus Jozef Kamphuis
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 11,631,605
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system for microelements
- Patent number 11,618,673
- Issue date Apr 4, 2023
- XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.
- Chenke Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-depth film for optical devices
- Patent number 11,608,558
- Issue date Mar 21, 2023
- Applied Materials, Inc.
- Karl J. Armstrong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for producing thin-film layers and microsystems having thin...
- Patent number 11,414,320
- Issue date Aug 16, 2022
- Infineon Technologies AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tool monitoring device and method of monitoring tool
- Patent number 11,239,099
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system and transfer method for microelements, manufacturin...
- Patent number 11,142,452
- Issue date Oct 12, 2021
- XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.
- Chenke Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
EFEM and method of introducing dry air thereinto
- Patent number 11,133,208
- Issue date Sep 28, 2021
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for bonding large modules, and bonding arrangement
- Patent number 11,103,946
- Issue date Aug 31, 2021
- Hesse GmbH
- Frank Walther
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor apparatus with inner wafer carrier buffer and method
- Patent number 11,062,931
- Issue date Jul 13, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jason Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for producing thin-film layers and microsystems having thin...
- Patent number 10,889,492
- Issue date Jan 12, 2021
- Infineon Technologies AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transporter and transporting method
- Patent number 10,850,923
- Issue date Dec 1, 2020
- Murata Machinery, Ltd.
- Naruto Adachi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Carrier substrate
- Patent number 10,820,426
- Issue date Oct 27, 2020
- Unimicron Technology Corp.
- Chun-Ting Lin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 10,553,469
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prober
- Patent number 10,510,574
- Issue date Dec 17, 2019
- Tokyo Seimitsu Co., Ltd.
- Hiroo Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate stocker and systems management software
- Patent number 10,504,764
- Issue date Dec 10, 2019
- Murata Machinery, Ltd.
- Gerhard Dovids
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automation for rotary sorters
- Patent number 10,406,562
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- Markus J. Stopper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus with inner wafer carrier buffer and method
- Patent number 10,403,532
- Issue date Sep 3, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jason Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance system
- Patent number 10,354,902
- Issue date Jul 16, 2019
- Murata Machinery, Ltd.
- Osamu Honda
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus, method of measuring temperature of...
- Patent number 10,340,164
- Issue date Jul 2, 2019
- Hitachi Kokusai Electric, Inc.
- Akihito Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, gas-purging method, method for manu...
- Patent number 10,269,603
- Issue date Apr 23, 2019
- Kokusai Electric Corporation
- Yoshihiko Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for wafer rotation to improve spatial ALD pro...
- Patent number 10,186,449
- Issue date Jan 22, 2019
- Applied Materials, Inc.
- William T. Weaver
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer cassette and placement method thereof
- Patent number 10,147,626
- Issue date Dec 4, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Si Jun Nian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 10,115,588
- Issue date Oct 30, 2018
- SCREEN Holdings Co., Ltd.
- Koji Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 9,905,447
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Michael Robert Rice
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Carrier, semiconductor package and fabrication method thereof
- Patent number 9,899,237
- Issue date Feb 20, 2018
- Siliconware Precision Industries Co., Ltd.
- Chiang-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20250014930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...
- Publication number 20240385582
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Kiminari SAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MONITORING TOOL
- Publication number 20240021453
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING APPARATUS AND A BONDING DEVICE THEREOF
- Publication number 20230298913
- Publication date Sep 21, 2023
- ALL RING TECH CO., LTD.
- Chun-Hung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...
- Publication number 20230253228
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CONVEYOR SYSTEM FOR SEMICONDUCTOR INSPECTING APPARATUS USI...
- Publication number 20230230866
- Publication date Jul 20, 2023
- ZEUS TECH CO., LTD.
- Hong Youn KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-DEPTH FILM FOR OPTICAL DEVICES
- Publication number 20230203647
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Karl J. ARMSTRONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CARRIER ASSEMBLY WITH PEDESTAL AND COVER RESTRAINT ARRANGEMEN...
- Publication number 20230060609
- Publication date Mar 2, 2023
- VEECO INSTRUMENTS INC.
- Sandeep Krishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING TRANSFER WITH AUTOMATED ROTATIONAL PRE-ALIGNMENT
- Publication number 20230047039
- Publication date Feb 16, 2023
- LAM RESEARCH CORPORATION
- Damon Tyrone GENETTI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DEPOSITION DEVICE
- Publication number 20230025927
- Publication date Jan 26, 2023
- SUMCO CORPORATION
- Yu MINAMIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFORMATION PROCESSING APPARATUS, TRANSFER POSITION TEACHING METHOD...
- Publication number 20220383536
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Tadashi ENOMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF AND APPARATUS FOR PROCESSING WAFER
- Publication number 20220384175
- Publication date Dec 1, 2022
- Disco Corporation
- Yoshinobu SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MONITORING TOOL
- Publication number 20220130697
- Publication date Apr 28, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Article Transport Facility
- Publication number 20220081219
- Publication date Mar 17, 2022
- DAIFUKU CO., LTD.
- Hiroshi Otsuka
- B61 - RAILWAYS
Information Patent Application
Transfer system for microelements
- Publication number 20220002146
- Publication date Jan 6, 2022
- Xiamen San'An Optoelectronics Co., Ltd.
- Chenke HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AUTOMATIC SYSTEM CALIBRATION FOR WAFER HANDLING
- Publication number 20210375654
- Publication date Dec 2, 2021
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR LIFTING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20210202296
- Publication date Jul 1, 2021
- Semes Co., LTD.
- Sukhwan CHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE FOR HANDLING DICED WAFERS OF INTEGRATED CIRCUITS
- Publication number 20210134648
- Publication date May 6, 2021
- NXP B.V.
- Antonius Hendrikus Jozef Kamphuis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM AND EFEM SYSTEM
- Publication number 20210090923
- Publication date Mar 25, 2021
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Producing Thin-Film Layers and Microsystems Having Thin...
- Publication number 20210017019
- Publication date Jan 21, 2021
- INFINEON TECHNOLOGIES AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...
- Publication number 20200126832
- Publication date Apr 23, 2020
- Applied Materials, Inc.
- Michael Robert Rice
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
TOOL MONITORING DEVICE AND METHOD OF MONITORING TOOL
- Publication number 20200105555
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Apparatus With Inner Wafer Carrier Buffer and Method
- Publication number 20190378736
- Publication date Dec 12, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jason Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MANUFACTURING APPARATUS AND METHODS WITH FACTORY INTERFAC...
- Publication number 20190362989
- Publication date Nov 28, 2019
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR BONDING LARGE MODULES, AND BONDING ARRANGEMENT
- Publication number 20190283163
- Publication date Sep 19, 2019
- Hesse GmbH
- Franz WALTHER
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TRANSFER SYSTEM AND TRANSFER METHOD FOR MICROELEMENTS, MANUFACTURIN...
- Publication number 20190276308
- Publication date Sep 12, 2019
- Xiamen San'An Optoelectronics Co., Ltd.
- Chenke HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSPORTER AND TRANSPORTING METHOD
- Publication number 20190248581
- Publication date Aug 15, 2019
- Naruto Adachi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHODS FOR PRODUCING THIN-FILM LAYERS AND MICROSYSTEMS HAVING THIN...
- Publication number 20190241431
- Publication date Aug 8, 2019
- INFINEON TECHNOLOGIES AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20190171198
- Publication date Jun 6, 2019
- FOXSEMICON INTEGRATED TECHNOLOGY, INC.
- YI-CHUN CHIU
- G05 - CONTROLLING REGULATING
Information Patent Application
PROBER
- Publication number 20190019711
- Publication date Jan 17, 2019
- TOKYO SEIMITSU CO., LTD.
- Hiroo Tamura
- H01 - BASIC ELECTRIC ELEMENTS

the wafers being stored in a carrier, involving loading and unloading

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Automatic system calibration for wafer handling

Sealed substrate carriers and systems and methods for transporting...

Preparation method for bifacial perc solar cell

Method of monitoring tool

Technique for handling diced wafers of integrated circuits

Sealed substrate carriers and systems and methods for transporting...

Transfer system for microelements

Multi-depth film for optical devices

Methods for producing thin-film layers and microsystems having thin...

Tool monitoring device and method of monitoring tool

Transfer system and transfer method for microelements, manufacturin...

EFEM and method of introducing dry air thereinto

Method for bonding large modules, and bonding arrangement

Semiconductor apparatus with inner wafer carrier buffer and method

Methods for producing thin-film layers and microsystems having thin...

Transporter and transporting method

Carrier substrate

Sealed substrate carriers and systems and methods for transporting...

Prober

Substrate stocker and systems management software

Automation for rotary sorters

Semiconductor apparatus with inner wafer carrier buffer and method

Conveyance system

Substrate processing apparatus, method of measuring temperature of...

Substrate processing apparatus, gas-purging method, method for manu...

Apparatus and methods for wafer rotation to improve spatial ALD pro...

Wafer cassette and placement method thereof

Substrate treating apparatus and substrate treating method

Sealed substrate carriers and systems and methods for transporting...

Carrier, semiconductor package and fabrication method thereof

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...

METHOD OF MONITORING TOOL

BONDING APPARATUS AND A BONDING DEVICE THEREOF

SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...

TRANSFER CONVEYOR SYSTEM FOR SEMICONDUCTOR INSPECTING APPARATUS USI...

MULTI-DEPTH FILM FOR OPTICAL DEVICES

WAFER CARRIER ASSEMBLY WITH PEDESTAL AND COVER RESTRAINT ARRANGEMEN...

EDGE RING TRANSFER WITH AUTOMATED ROTATIONAL PRE-ALIGNMENT

VAPOR DEPOSITION DEVICE

INFORMATION PROCESSING APPARATUS, TRANSFER POSITION TEACHING METHOD...

METHOD OF AND APPARATUS FOR PROCESSING WAFER

METHOD OF MONITORING TOOL

Article Transport Facility

Transfer system for microelements

AUTOMATIC SYSTEM CALIBRATION FOR WAFER HANDLING

METHOD FOR LIFTING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE

TECHNIQUE FOR HANDLING DICED WAFERS OF INTEGRATED CIRCUITS

EFEM AND EFEM SYSTEM

Methods for Producing Thin-Film Layers and Microsystems Having Thin...

SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...

TOOL MONITORING DEVICE AND METHOD OF MONITORING TOOL

Semiconductor Apparatus With Inner Wafer Carrier Buffer and Method

SUBSTRATE MANUFACTURING APPARATUS AND METHODS WITH FACTORY INTERFAC...

METHOD FOR BONDING LARGE MODULES, AND BONDING ARRANGEMENT

TRANSFER SYSTEM AND TRANSFER METHOD FOR MICROELEMENTS, MANUFACTURIN...

TRANSPORTER AND TRANSPORTING METHOD

METHODS FOR PRODUCING THIN-FILM LAYERS AND MICROSYSTEMS HAVING THIN...

SEMICONDUCTOR MANUFACTURING SYSTEM

PROBER