Thermal treatment for modifying the properties of semiconductor bodies

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H01L21/324

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/324Thermal treatment for modifying the properties of semiconductor bodies

Industries

Patents Grantslast 30 patents

Information Patent Grant
Localized heating in laser annealing process
- Patent number 11,967,647
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Blandine Duriez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,959,167
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor devices including channel regions having non-uniform...
- Patent number 11,961,911
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Chun Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 11,955,340
- Issue date Apr 9, 2024
- SK hynix Inc.
- Dae Hee Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source/drain structure
- Patent number 11,955,553
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate manufacturing device applicable to large-di...
- Patent number 11,955,354
- Issue date Apr 9, 2024
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annealing apparatus using two wavelengths of radiation
- Patent number 11,945,045
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Dean Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing semiconductor device, cleaning method, and...
- Patent number 11,942,333
- Issue date Mar 26, 2024
- Kokusai Electric Corporation
- Tomihiro Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer temperature measurement in an ion implantation system
- Patent number 11,942,343
- Issue date Mar 26, 2024
- Advanced Ion Beam Technology, Inc.
- Chien-Li Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor structure
- Patent number 11,942,376
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum dot devices with overlapping gates
- Patent number 11,942,516
- Issue date Mar 26, 2024
- Intel Corporation
- Nicole K. Thomas
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for non radial temperature control for rotating substrates
- Patent number 11,942,381
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxial wafer and method of producing semiconductor...
- Patent number 11,935,745
- Issue date Mar 19, 2024
- Sumco Corporation
- Ryosuke Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming graphene barrier layer in interconnect structure
- Patent number 11,929,326
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shin-Yi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a source/drain
- Patent number 11,929,401
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Wei Lee
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate processing apparatus, substrate support, and method of ma...
- Patent number 11,929,272
- Issue date Mar 12, 2024
- Kokusai Electric Corporation
- Kenichi Suzaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 11,923,444
- Issue date Mar 5, 2024
- Fuji Electric Co., Ltd.
- Tatsuya Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device comprising oxide semic...
- Patent number 11,923,204
- Issue date Mar 5, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having buried gate structure and method for fa...
- Patent number 11,923,416
- Issue date Mar 5, 2024
- SK Hynix Inc.
- Seong-Wan Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and apparatus
- Patent number 11,923,187
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Min-Cheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lateral bipolar junction transistors including a graded silicon-ger...
- Patent number 11,916,136
- Issue date Feb 27, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Arkadiusz Malinowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diamond semiconductor system and method
- Patent number 11,915,934
- Issue date Feb 27, 2024
- AKHAN SEMICONDUCTOR, INC.
- Adam Khan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment method
- Patent number 11,908,703
- Issue date Feb 20, 2024
- SCREEN Holdings Co., Ltd.
- Mao Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a perovskite-material based planar capacitor...
- Patent number 11,908,704
- Issue date Feb 20, 2024
- Kepler Computing Inc.
- Niloy Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming semiconductor structures
- Patent number 11,908,914
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Ria Someshwar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit structure with non-gated well tap cell
- Patent number 11,908,896
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jiefeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, systems, and apparatus for conducting a radical treatment...
- Patent number 11,901,195
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Pradeep Sampath Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 11,901,200
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having cut gate dielectric
- Patent number 11,901,237
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chang-Yun Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing substrate for solar cell and substrate for...
- Patent number 11,901,475
- Issue date Feb 13, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroyuki Otsuka
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SUBSTRATE FOR SOLAR CELL AND SUBSTRATE FOR...
- Publication number 20240136464
- Publication date Apr 25, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroyuki OTSUKA
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20240128361
- Publication date Apr 18, 2024
- Fuji Electric Co., Ltd.
- Tatsuya NAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TSV-BUMP STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD OF FORMING THE...
- Publication number 20240128158
- Publication date Apr 18, 2024
- Micron Technology, Inc.
- YUTAKA NAKAE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...
- Publication number 20240128096
- Publication date Apr 18, 2024
- SCREEN Holdings Co., Ltd.
- Akitsugu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED ESR IN TRENCH CAPACITOR
- Publication number 20240120368
- Publication date Apr 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Jing Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED ETCHING TECHNOLOGIES FOR STRAIGHT, TALL AND UNIFORM FINS A...
- Publication number 20240120206
- Publication date Apr 11, 2024
- Intel Corporation
- Muralidhar S. AMBATI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING A SEMICONDUCTOR...
- Publication number 20240121953
- Publication date Apr 11, 2024
- SK HYNIX INC.
- Nam Jae LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE DEVICE WITH SINGLE METALLIZATION PROCESS FOR OHMIC...
- Publication number 20240113235
- Publication date Apr 4, 2024
- Wolfspeed, Inc.
- Rahul R. Potera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A GRID
- Publication number 20240105783
- Publication date Mar 28, 2024
- II-VI Delaware, Inc.
- Adolf Schöner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS, OPERATION METHOD THEREOF, AND PHOTO S...
- Publication number 20240105492
- Publication date Mar 28, 2024
- SEMES CO., LTD.
- Jong Gun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Annealing Apparatus And Method For Forming Semiconductor St...
- Publication number 20240105473
- Publication date Mar 28, 2024
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Lei WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TESTING THE STRESS ROBUSTNESS OF A SEMICONDUCTOR SUBSTRATE
- Publication number 20240105523
- Publication date Mar 28, 2024
- Siltronic AG
- Ludwig Koester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOI WAFER
- Publication number 20240096645
- Publication date Mar 21, 2024
- ZING SEMICONDUCTOR CORPORATION
- Xing WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FinFET Device and Method of Forming Same
- Publication number 20240097036
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Hao Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
- Publication number 20240088258
- Publication date Mar 14, 2024
- Kabushiki Kaisha Toshiba
- Tatsuo SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240088041
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- TSENG-CHIEH PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF HIGHLY SELECTIVE SILICON OXIDE REMOVAL
- Publication number 20240087910
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Lala Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
N-TYPE METAL OXIDE SEMICONDUCTOR TRANSISTOR AND METHOD FOR FABRICAT...
- Publication number 20240088293
- Publication date Mar 14, 2024
- UNITED MICROELECTRONICS CORP.
- Chun-Ya Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MELT ANNEAL SOURCE AND DRAIN REGIONS
- Publication number 20240088225
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH METAL LAYERS
- Publication number 20240079401
- Publication date Mar 7, 2024
- Monolithic 3D Inc.
- Zvi Or-Bach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BONDING PROCESS WITH REDUCED OVERLAY DISTORTION
- Publication number 20240063022
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- Christopher Michael Netzband
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CURVED SEMICONDUCTOR CHIP AND METHOD FOR FORMING THE SAME
- Publication number 20240063338
- Publication date Feb 22, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- JHENG-HONG JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED DIPOLE REGION FOR TRANSISTOR
- Publication number 20240063064
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIF...
- Publication number 20240055279
- Publication date Feb 15, 2024
- ASM IP HOLDING B.V.
- Shiva K.T. Rajavelu Muralidhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240047213
- Publication date Feb 8, 2024
- DENSO CORPORATION
- TAKASHI OKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR SUBSTRATE AND MANUFACTURING MET...
- Publication number 20240047343
- Publication date Feb 8, 2024
- nD-HI Technologies Lab,Inc.
- Ho-Ming TONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240047575
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Zheng-Long CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION
- Publication number 20240047197
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Jan Willem Hub Maes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE
- Publication number 20240047272
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- I-MING CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER
- Publication number 20240047176
- Publication date Feb 8, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yoji Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS

Thermal treatment for modifying the properties of semiconductor bodies

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Localized heating in laser annealing process

Selective cobalt deposition on copper surfaces

Semiconductor devices including channel regions having non-uniform...

Semiconductor device and method of manufacturing the same

Source/drain structure

Semiconductor substrate manufacturing device applicable to large-di...

Annealing apparatus using two wavelengths of radiation

Method of manufacturing semiconductor device, cleaning method, and...

Wafer temperature measurement in an ion implantation system

Method for manufacturing semiconductor structure

Quantum dot devices with overlapping gates

System for non radial temperature control for rotating substrates

Semiconductor epitaxial wafer and method of producing semiconductor...

Method of forming graphene barrier layer in interconnect structure

Method of forming a source/drain

Substrate processing apparatus, substrate support, and method of ma...

Semiconductor device and manufacturing method of semiconductor device

Manufacturing method of semiconductor device comprising oxide semic...

Semiconductor device having buried gate structure and method for fa...

Cleaning method and apparatus

Lateral bipolar junction transistors including a graded silicon-ger...

Diamond semiconductor system and method

Light irradiation type heat treatment method

Method of fabricating a perovskite-material based planar capacitor...

Methods of forming semiconductor structures

Integrated circuit structure with non-gated well tap cell

Methods, systems, and apparatus for conducting a radical treatment...

Light irradiation type heat treatment method and heat treatment app...

Semiconductor device having cut gate dielectric

Method for manufacturing substrate for solar cell and substrate for...

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SUBSTRATE FOR SOLAR CELL AND SUBSTRATE FOR...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

TSV-BUMP STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD OF FORMING THE...

LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...

REDUCED ESR IN TRENCH CAPACITOR

ADVANCED ETCHING TECHNOLOGIES FOR STRAIGHT, TALL AND UNIFORM FINS A...

SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING A SEMICONDUCTOR...

SILICON CARBIDE DEVICE WITH SINGLE METALLIZATION PROCESS FOR OHMIC...

METHOD FOR MANUFACTURING A GRID

THERMAL PROCESSING APPARATUS, OPERATION METHOD THEREOF, AND PHOTO S...

Optical Annealing Apparatus And Method For Forming Semiconductor St...

METHOD FOR TESTING THE STRESS ROBUSTNESS OF A SEMICONDUCTOR SUBSTRATE

SOI WAFER

FinFET Device and Method of Forming Same

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

METHODS OF HIGHLY SELECTIVE SILICON OXIDE REMOVAL

N-TYPE METAL OXIDE SEMICONDUCTOR TRANSISTOR AND METHOD FOR FABRICAT...

MELT ANNEAL SOURCE AND DRAIN REGIONS

3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH METAL LAYERS

WAFER BONDING PROCESS WITH REDUCED OVERLAY DISTORTION

CURVED SEMICONDUCTOR CHIP AND METHOD FOR FORMING THE SAME

INTEGRATED DIPOLE REGION FOR TRANSISTOR

SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIF...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE, SEMICONDUCTOR SUBSTRATE AND MANUFACTURING MET...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION

SEMICONDUCTOR STRUCTURE

ION IMPLANTATION METHOD AND ION IMPLANTER