Thermionic sources

Industry

CPC
H01J2237/06308

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/06308Thermionic sources

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Device to control uniformity of extracted ion beam
- Patent number 12,154,753
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Jay T. Scheuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
- Patent number 12,033,828
- Issue date Jul 9, 2024
- NHV CORPORATION
- Masahiro Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, and device provided...
- Patent number 12,014,894
- Issue date Jun 18, 2024
- DENKA COMPANY LIMITED
- Hiromitsu Chatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
- Patent number 11,984,293
- Issue date May 14, 2024
- NHV CORPORATION
- Masahiro Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, and device provided...
- Patent number 11,984,291
- Issue date May 14, 2024
- DENKA COMPANY LIMITED
- Hiromitsu Chatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,688,579
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method for electron microscope and electron microscope
- Patent number 11,404,238
- Issue date Aug 2, 2022
- Jeol Ltd.
- Mitsuru Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods for plasma processing
- Patent number 11,393,662
- Issue date Jul 19, 2022
- Tokyo Electron Limited
- Zhiying Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,201,032
- Issue date Dec 14, 2021
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source
- Patent number 11,075,053
- Issue date Jul 27, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low work function electron beam filament assembly
- Patent number 10,796,876
- Issue date Oct 6, 2020
- Colorado State University Research Foundation
- Bao Gia Nguyen
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 10,784,071
- Issue date Sep 22, 2020
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflection array apparatus for multi-electron beam system
- Patent number 10,748,739
- Issue date Aug 18, 2020
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature, high-brightness, cathode
- Patent number 10,593,505
- Issue date Mar 17, 2020
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-brightness lanthanum hexaboride cathode and method for manufac...
- Patent number 10,553,388
- Issue date Feb 4, 2020
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source
- Patent number 10,468,227
- Issue date Nov 5, 2019
- Hermes-Microvision, Inc.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam source for semiconductor ion implantation
- Patent number 10,269,530
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsing-Piao Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, control method and control program thereof, and three...
- Patent number 10,217,599
- Issue date Feb 26, 2019
- TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
- Takashi Sato
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Device for producing an electron beam
- Patent number 9,773,635
- Issue date Sep 26, 2017
- LILAS GMBH
- Vitalij Lissotschenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Current regulation method of multiple beams
- Patent number 9,455,123
- Issue date Sep 27, 2016
- NuFlare Technology, Inc.
- Kenichi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermionic cathode with even electric field distribution on electro...
- Patent number 9,299,525
- Issue date Mar 29, 2016
- NUFLARE TECHNOLOGY, INC.
- Ryoei Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, method of controlling same, and electron beam additiv...
- Patent number 9,269,520
- Issue date Feb 23, 2016
- Jeol Ltd.
- Takashi Satoh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-brightness, long life thermionic cathode and methods of its fa...
- Patent number 9,165,737
- Issue date Oct 20, 2015
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for inhibiting ionization source filament failure
- Patent number 9,159,542
- Issue date Oct 13, 2015
- Thermo Finnigan LLC.
- Christopher Mullen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indirectly heated cathode cartridge design
- Patent number 9,076,625
- Issue date Jul 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Craig Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing rapid heating of a cathode installed in a therm...
- Patent number 8,987,982
- Issue date Mar 24, 2015
- Applied Physics Technologies, Inc.
- Gerald Magera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun used in particle beam device
- Patent number 8,890,444
- Issue date Nov 18, 2014
- Carl Zeiss Microscopy Limited
- Armin Heinz Hayn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particles beam apparatus and charged particles beam apparat...
- Patent number 8,809,799
- Issue date Aug 19, 2014
- Mamoru Nakasuji
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Pre-aligned thermionic emission assembly
- Patent number 8,581,481
- Issue date Nov 12, 2013
- Applied Physics Technologies, Inc.
- Gerald Magera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitting source and manufacturing method of electron emitt...
- Patent number 8,456,076
- Issue date Jun 4, 2013
- Denki Kagaku Kogyo Kabushiki Kaisha
- Toshiyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LAMINATE, ELECTRON SOURCE AND ELECTRONIC DEVICE CONTAINING LAMINATE...
- Publication number 20240395494
- Publication date Nov 28, 2024
- NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Katsumi NAGAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...
- Publication number 20240087836
- Publication date Mar 14, 2024
- NHV CORPORATION
- Masahiro NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...
- Publication number 20240029989
- Publication date Jan 25, 2024
- Denka Company Limited
- Hiromitsu CHATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE AND METHOD FOR MANUFACTURING SAME, AND EMITTER AND...
- Publication number 20230317395
- Publication date Oct 5, 2023
- Denka Company Limited
- Daisuke ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER AND DEVICE PROVIDED WITH SAME
- Publication number 20230298846
- Publication date Sep 21, 2023
- Denka Company Limited
- Daisuke ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION DEVICE, AND ELECTRON BEAM EMISSION METHOD...
- Publication number 20220199350
- Publication date Jun 23, 2022
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON EMITTER AND METHOD OF FABRICATING SAME
- Publication number 20220189725
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Juying DOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20220068589
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON EMITTER AND METHOD OF FABRICATING SAME
- Publication number 20210142975
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control Method for Electron Microscope and Electron Microscope
- Publication number 20210074506
- Publication date Mar 11, 2021
- Mitsuru Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR PLASMA PROCESSING
- Publication number 20200365369
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Zhiying Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20200126753
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deflection Array Apparatus for Multi-Electron Beam System
- Publication number 20200118784
- Publication date Apr 16, 2020
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Source
- Publication number 20190057833
- Publication date Feb 21, 2019
- HERMES MICROVISION, INC.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPARATUS, AND X-RAY GENERATION APPARATUS AND SCANNIN...
- Publication number 20180366294
- Publication date Dec 20, 2018
- Shimadzu Corporation
- Akihiro MIYAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inverse Photoelectron Spectroscopy Device
- Publication number 20170199131
- Publication date Jul 13, 2017
- Japan Science and Technology Agency
- Hiroyuki Yoshida
- G01 - MEASURING TESTING
Information Patent Application
DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIU...
- Publication number 20150044615
- Publication date Feb 12, 2015
- Canon Kabushiki Kaisha
- Kimitaka OZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CURRENT REGULATION METHOD OF MULTIPLE BEAMS
- Publication number 20140265827
- Publication date Sep 18, 2014
- NuFlare Technology, Inc.
- Kenichi SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMIONIC CATHODE AND METHOD FOR MANUFACTURING THERMIONIC CATHODE
- Publication number 20140139100
- Publication date May 22, 2014
- NuFlare Technology, Inc.
- Ryoei KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-Brightness, Long Life Thermionic Cathode and Methods of its Fa...
- Publication number 20140097736
- Publication date Apr 10, 2014
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged practicles beam apparatus and charged particles beam appara...
- Publication number 20140097352
- Publication date Apr 10, 2014
- Mamoru Nakasuji
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD OF PRODUCING RAPID HEATING OF A CATHODE INSTALLED IN A THERM...
- Publication number 20140065918
- Publication date Mar 6, 2014
- Applied Physics Technologies, Inc.
- Gerald Magera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Inhibiting Ionization Source Filament Failure
- Publication number 20130214147
- Publication date Aug 22, 2013
- Christopher MULLEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDIRECTLY HEATED CATHODE CARTRIDGE DESIGN
- Publication number 20120256097
- Publication date Oct 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICL...
- Publication number 20110294071
- Publication date Dec 1, 2011
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron gun used in particle beam device
- Publication number 20100320942
- Publication date Dec 23, 2010
- Armin Heinz Hayn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON EMITTING SOURCE AND MANUFACTURING METHOD OF ELECTRON EMITT...
- Publication number 20100301736
- Publication date Dec 2, 2010
- Toshiyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOT CATHODE AND ION SOURCE INCLUDING THE SAME
- Publication number 20100038556
- Publication date Feb 18, 2010
- NISSIN ION EQUIPMENT CO., LTD.
- Naoki Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM EMITTER WITH SLOTTED GUN
- Publication number 20090289204
- Publication date Nov 26, 2009
- Advanced Electron Beams,Inc.
- Steven Raymond Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Unbalanced ion source
- Publication number 20090243490
- Publication date Oct 1, 2009
- Jeong-Ha Cho
- H01 - BASIC ELECTRIC ELEMENTS

Thermionic sources

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device to control uniformity of extracted ion beam

Electron-beam irradiation apparatus and maintenance method for elec...

Electron source, method for manufacturing same, and device provided...

Electron-beam irradiation apparatus and maintenance method for elec...

Electron source, method for manufacturing same, and device provided...

Electron emitter and method of fabricating same

Control method for electron microscope and electron microscope

Apparatuses and methods for plasma processing

Electron emitter and method of fabricating same

Charged particle source

Low work function electron beam filament assembly

Electron emitter and method of fabricating same

Deflection array apparatus for multi-electron beam system

Low temperature, high-brightness, cathode

High-brightness lanthanum hexaboride cathode and method for manufac...

Charged particle source

Ion beam source for semiconductor ion implantation

Electron gun, control method and control program thereof, and three...

Device for producing an electron beam

Current regulation method of multiple beams

Thermionic cathode with even electric field distribution on electro...

Electron gun, method of controlling same, and electron beam additiv...

High-brightness, long life thermionic cathode and methods of its fa...

Apparatus and method for inhibiting ionization source filament failure

Indirectly heated cathode cartridge design

Method of producing rapid heating of a cathode installed in a therm...

Electron gun used in particle beam device

Charged particles beam apparatus and charged particles beam apparat...

Pre-aligned thermionic emission assembly

Electron emitting source and manufacturing method of electron emitt...

Patents Applicationslast 30 patents

LAMINATE, ELECTRON SOURCE AND ELECTRONIC DEVICE CONTAINING LAMINATE...

ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...

ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...

ELECTRON SOURCE AND METHOD FOR MANUFACTURING SAME, AND EMITTER AND...

EMITTER AND DEVICE PROVIDED WITH SAME

ELECTRON BEAM APPLICATION DEVICE, AND ELECTRON BEAM EMISSION METHOD...

ELECTRON EMITTER AND METHOD OF FABRICATING SAME

CHARGED PARTICLE SOURCE

ELECTRON EMITTER AND METHOD OF FABRICATING SAME

Control Method for Electron Microscope and Electron Microscope

APPARATUSES AND METHODS FOR PLASMA PROCESSING

CHARGED PARTICLE SOURCE

Deflection Array Apparatus for Multi-Electron Beam System

Charged Particle Source

ELECTRON BEAM APPARATUS, AND X-RAY GENERATION APPARATUS AND SCANNIN...

Inverse Photoelectron Spectroscopy Device

DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIU...

CURRENT REGULATION METHOD OF MULTIPLE BEAMS

THERMIONIC CATHODE AND METHOD FOR MANUFACTURING THERMIONIC CATHODE

High-Brightness, Long Life Thermionic Cathode and Methods of its Fa...

Charged practicles beam apparatus and charged particles beam appara...

METHOD OF PRODUCING RAPID HEATING OF A CATHODE INSTALLED IN A THERM...

Apparatus and Method for Inhibiting Ionization Source Filament Failure

INDIRECTLY HEATED CATHODE CARTRIDGE DESIGN

ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICL...

Electron gun used in particle beam device

ELECTRON EMITTING SOURCE AND MANUFACTURING METHOD OF ELECTRON EMITT...

HOT CATHODE AND ION SOURCE INCLUDING THE SAME

ELECTRON BEAM EMITTER WITH SLOTTED GUN

Unbalanced ion source