TREA

Thickness uniformity of coated layers or desired profile of target erosion

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  • CPC
  • H01J37/347
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/347Thickness uniformity of coated layers or desired profile of target erosion
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
    • Publication number 20240133025
    • Publication date Apr 25, 2024
    • SOLERAS ADVANCED COATINGS BV
    • Wilmert DE BOSSCHER
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THIN FILM FORMING APPARATUS AND METHOD
    • Publication number 20240112897
    • Publication date Apr 4, 2024
    • SEMES CO., LTD.
    • Sun Il KIM
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
    • Publication number 20240096609
    • Publication date Mar 21, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yen-Liang LIN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20240063003
    • Publication date Feb 22, 2024
    • Canon ANELVA Corporation
    • Susumu KARINO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EROSION RATE MONITORING FOR WAFER FABRICATION EQUIPMENT
    • Publication number 20240030006
    • Publication date Jan 25, 2024
    • Micron Technology, Inc.
    • Synn Nee Chow
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Apparatus and a Method of Controlling Thickness Variation in a Mate...
    • Publication number 20240014018
    • Publication date Jan 11, 2024
    • SPTS TECHNOLOGIES LIMITED
    • Tony WILBY
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SYSTEM AND METHOD FOR RESIDUAL GAS ANALYSIS
    • Publication number 20230386807
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yen-Liang CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20230386942
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD FOR RESIDUAL GAS ANALYSIS
    • Publication number 20230386808
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yen-Liang CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
    • Publication number 20230386809
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chia-Hung TSAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FABRICATION OF ELECTROCHROMIC DEVICES
    • Publication number 20230324754
    • Publication date Oct 12, 2023
    • VIEW, INC.
    • Robert Tad Rozbicki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FABRICATION OF ELECTROCHROMIC DEVICES
    • Publication number 20230314892
    • Publication date Oct 5, 2023
    • VIEW, INC.
    • Robert Tad Rozbicki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
    • Publication number 20230260770
    • Publication date Aug 17, 2023
    • Taiwan Semiconductor Manufacturing Company Limited
    • Chia-Hung TSAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROCHROMIC DEVICES
    • Publication number 20230144179
    • Publication date May 11, 2023
    • VIEW, INC.
    • Zhongchun Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    OVERHANG REDUCTION USING PULSED BIAS
    • Publication number 20230113961
    • Publication date Apr 13, 2023
    • Applied Materials, Inc.
    • Bencherki Mebarki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR ATOMICALLY MANIPULATING AN ARTIFICIAL TWO-DIMENSIONAL MA...
    • Publication number 20230104966
    • Publication date Apr 6, 2023
    • National Central University
    • Ching-Yuan Su
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method and Apparatus for Controlling Stress Variation in a Material...
    • Publication number 20230094699
    • Publication date Mar 30, 2023
    • SPTS Technologies Ltd.
    • Anthony WILBY
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    PHYSICAL VAPOR DEPOSITION PROCESS APPARATUS AND METHOD OF OPTIMIZIN...
    • Publication number 20230067466
    • Publication date Mar 2, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chen-Hung LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...
    • Publication number 20230067917
    • Publication date Mar 2, 2023
    • Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
    • Michael VERGÖHL
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor Analysis System
    • Publication number 20230055155
    • Publication date Feb 23, 2023
    • Hitachi High-Tech Corporation
    • Tsunenori NOMAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20230035198
    • Publication date Feb 2, 2023
    • SAMSUNG DISPLAY CO., LTD.
    • HYUN-WOO KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS, FILM FORMATION METHOD, AND METHOD FOR MANUFAC...
    • Publication number 20230029343
    • Publication date Jan 26, 2023
    • Canon Kabushiki Kaisha
    • Kazuya Demura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHO...
    • Publication number 20230026807
    • Publication date Jan 26, 2023
    • TOKYO ELECTRON LIMITED
    • Toshiharu HIRATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20220406583
    • Publication date Dec 22, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
    • Publication number 20220384165
    • Publication date Dec 1, 2022
    • Mengxue WU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ANALYZING METHOD
    • Publication number 20220359175
    • Publication date Nov 10, 2022
    • Taiwan Semiconductor Manufacturing company Ltd.
    • PRADIP GIRDHAR CHAUDHARI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20220336297
    • Publication date Oct 20, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MOVEMENT SYSTEMS FOR SPUTTER COATING OF NON-FLAT SUBSTRATES
    • Publication number 20220254613
    • Publication date Aug 11, 2022
    • SOLERAS ADVANCED COATINGS BV
    • Wilmert DE BOSSCHER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ANTI-STICTION PROCESS FOR MEMS DEVICE
    • Publication number 20220242724
    • Publication date Aug 4, 2022
    • Taiwan Semiconductor Manufacturing Co.,Ltd
    • Jui-Chun WENG
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    Niobium Sputtering Target
    • Publication number 20220157583
    • Publication date May 19, 2022
    • JX Nippon Mining & Metals Corporation
    • Yuki Yamada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...