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B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B1/00
Devices without movable or flexible elements
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B81B1/004
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
Patent number
12,043,537
Issue date
Jul 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Wei Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Isotachophoresis for purification of nucleic acids
Patent number
12,006,496
Issue date
Jun 11, 2024
Purigen Biosystems, Inc.
Lewis A. Marshall
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-device structures with etch holes
Patent number
12,006,205
Issue date
Jun 11, 2024
X-CELEPRINT LIMITED
António José Marques Trindade
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Isotachophoresis for purification of nucleic acids
Patent number
11,674,132
Issue date
Jun 13, 2023
Purigen Biosystems, Inc.
Lewis A. Marshall
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro power generation device and electronic apparatus with the same
Patent number
11,539,307
Issue date
Dec 27, 2022
BOE Technology Group Co., Ltd.
Zhidong Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing at least one recess in a material by means of...
Patent number
11,478,880
Issue date
Oct 25, 2022
LPKF Laser & Electronics AG
Roman Ostholt
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
DNA sequencing with stacked nanopores
Patent number
11,453,911
Issue date
Sep 27, 2022
International Business Machines Corporation
Zhenxing Bi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Compact gas sensor including a MEMS element having capillaries to f...
Patent number
11,268,928
Issue date
Mar 8, 2022
Honeywell International Inc.
Richard Wade
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanopore flow cells and methods of fabrication
Patent number
11,249,067
Issue date
Feb 15, 2022
Applied Materials, Inc.
Joseph R. Johnson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Aircraft air contaminant analyzer and method of use
Patent number
11,243,145
Issue date
Feb 8, 2022
Pall Corporation
Richard Mlcak
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sidewall stopper for MEMS device
Patent number
11,203,522
Issue date
Dec 21, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Wei Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electro-fluidic flow probe
Patent number
10,967,373
Issue date
Apr 6, 2021
International Business Machines Corporation
Yann Andre Nicolas Astier
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Electro-fluidic flow probe
Patent number
10,967,372
Issue date
Apr 6, 2021
International Business Machines Corporation
Yann Andre Nicolas Astier
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Aircraft air contaminant analyzer and method of use
Patent number
10,955,318
Issue date
Mar 23, 2021
Pall Corporation
Richard Mlcak
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
3D stack configuration for 6-axis motion sensor
Patent number
10,941,033
Issue date
Mar 9, 2021
Invensense, Inc.
Dongyang Kang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Isotachophoresis for purification of nucleic acids
Patent number
10,822,603
Issue date
Nov 3, 2020
Purigen Biosystems, Inc.
Lewis A. Marshall
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sidewall stopper for MEMS device
Patent number
10,766,763
Issue date
Sep 8, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wei Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vertically stacked nanofluidic channel array
Patent number
10,689,245
Issue date
Jun 23, 2020
International Business Machines Corporation
Juntao Li
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Bonded substrate body, method for manufacturing bonded substrate bo...
Patent number
10,661,566
Issue date
May 26, 2020
Canon Kabushiki Kaisha
Yoshiyuki Fukumoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate structure, semiconductor structure and method for fabrica...
Patent number
10,508,020
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Tsai-Hao Hung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nozzle substrate, ink-jet print head, and method for producing nozz...
Patent number
10,500,857
Issue date
Dec 10, 2019
Rohm Co., Ltd.
Nobufumi Matsuo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Isotachophoresis for purification of nucleic acids
Patent number
10,415,030
Issue date
Sep 17, 2019
Purigen Biosystems, Inc.
Lewis A. Marshall
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Method for forming film and method for manufacturing inkjet print head
Patent number
10,343,403
Issue date
Jul 9, 2019
Canon Kabushiki Kaisha
Atsushi Teranishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
Patent number
10,144,633
Issue date
Dec 4, 2018
Universiteit Twente
Johan Willem Berenschot
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Combined laser drilling and the plasma etch method for the producti...
Patent number
10,017,380
Issue date
Jul 10, 2018
Robert Bosch GmbH
Jan-Peter Stadler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS pressure sensor and method of manufacturing the same
Patent number
9,718,669
Issue date
Aug 1, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Tung-Tsun Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate structure, semiconductor structure and method for fabrica...
Patent number
9,556,015
Issue date
Jan 31, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Tsai-Hao Hung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Reinforced microcapillary films and foams
Patent number
9,493,337
Issue date
Nov 15, 2016
Dow Global Technologies LLC
Luis G. Zalamea
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a micromechanical component, and micromechanic...
Patent number
9,365,410
Issue date
Jun 14, 2016
Robert Bosch GmbH
Dietmar Haberer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Solid state nanopore devices for nanopore applications to improve t...
Patent number
9,168,717
Issue date
Oct 27, 2015
GlobalFoundries U.S. 2 LLC
Yann Astier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
Publication number
20250042717
Publication date
Feb 6, 2025
X-CELEPRINT LIMITED
António José Marques Trindade
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A METHOD OF FABRICATING NANOPORES
Publication number
20250042726
Publication date
Feb 6, 2025
Australian National University
Shankar DUTT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PROCESSING SILICON SUBSTRATE AND METHOD FOR PROCESSING L...
Publication number
20250033956
Publication date
Jan 30, 2025
Canon Kabushiki Kaisha
Atsunori Terasaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Isotachophoresis for Purification of Nucleic Acids
Publication number
20240301395
Publication date
Sep 12, 2024
Purigen Biosystems, Inc.
Lewis A. Marshall
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Isotachophoresis for Purification of Nucleic Acids
Publication number
20230357748
Publication date
Nov 9, 2023
Purigen Biosystems, Inc.
Lewis A. Marshall
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Manufacturing a Microfluidic Device
Publication number
20230127645
Publication date
Apr 27, 2023
IMEC vzw
Simone Severi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECU...
Publication number
20230043407
Publication date
Feb 9, 2023
The Methodist Hospital System
Alessandro Grattoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANOPORE FLOW CELLS AND METHODS OF FABRICATION
Publication number
20220155279
Publication date
May 19, 2022
Applied Materials, Inc.
Joseph R. JOHNSON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
Publication number
20220112073
Publication date
Apr 14, 2022
X-CELEPRINT LIMITED
António José Marques Trindade
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Producing a Sequencing Unit for Sequencing a Biochemical...
Publication number
20210229982
Publication date
Jul 29, 2021
ROBERT BOSCH GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO POWER GENERATION DEVICE AND ELECTRONIC APPARATUS WITH THE SAME
Publication number
20210211071
Publication date
Jul 8, 2021
BOE TECHNOLOGY GROUP CO., LTD.
Zhidong WANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
AIRCRAFT AIR CONTAMINANT ANALYZER AND METHOD OF USE
Publication number
20210181070
Publication date
Jun 17, 2021
PALL CORPORATION
Richard MLCAK
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ISOTACHOPHORESIS FOR PURIFICATION OF NUCLEIC ACIDS
Publication number
20210054361
Publication date
Feb 25, 2021
Purigen Biosystems, Inc.
Lewis A. MARSHALL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
Publication number
20200369512
Publication date
Nov 26, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Shih-Wei Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
Publication number
20200369511
Publication date
Nov 26, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Shih-Wei Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
3D STACK CONFIGURATION FOR 6-AXIS MOTION SENSOR
Publication number
20200131027
Publication date
Apr 30, 2020
InvenSense, Inc.
Dongyang KANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING AT LEAST ONE RECESS IN A MATERIAL BY MEANS OF...
Publication number
20200009691
Publication date
Jan 9, 2020
LPKF Laser & Electronics AG
Roman OSTHOLT
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
VERTICALLY STACKED NANOFLUIDIC CHANNEL ARRAY
Publication number
20190263655
Publication date
Aug 29, 2019
International Business Machines Corporation
Juntao Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
Publication number
20190233280
Publication date
Aug 1, 2019
Shenyang Silicon Technology Co., Ltd.
Xiang LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ISOTACHOPHORESIS FOR PURIFICATION OF NUCLEIC ACIDS
Publication number
20190039069
Publication date
Feb 7, 2019
Purigen Biosystems, Inc.
Lewis A. MARSHALL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPACT GAS SENSOR INCLUDING A MEMS ELEMENT HAVING CAPILLARIES TO F...
Publication number
20180372675
Publication date
Dec 27, 2018
HONEYWELL INTERNATIONAL INC.
Richard Wade
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDED SUBSTRATE BODY, METHOD FOR MANUFACTURING BONDED SUBSTRATE BO...
Publication number
20180281414
Publication date
Oct 4, 2018
Canon Kabushiki Kaisha
Yoshiyuki Fukumoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LAYERED SILICON AND STACKING OF MICROFLUIDIC CHIPS
Publication number
20180229235
Publication date
Aug 16, 2018
International Business Machines Corporation
Joshua T. Smith
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING FILM AND METHOD FOR MANUFACTURING INKJET PRINT HEAD
Publication number
20180147848
Publication date
May 31, 2018
Canon Kabushiki Kaisha
Atsushi Teranishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NOZZLE SUBSTRATE, INK-JET PRINT HEAD, AND METHOD FOR PRODUCING NOZZ...
Publication number
20180117910
Publication date
May 3, 2018
Rohm Co., Ltd.
Nobufumi MATSUO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method Of Manufacturing A Plurality Of Through-Holes In A Layer Of...
Publication number
20170247243
Publication date
Aug 31, 2017
Universiteit Twente
Johan Willem Berenschot
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME
Publication number
20170190567
Publication date
Jul 6, 2017
TAIWAN SEMICODUCTOR MANUFACTURING CO., LTD.
Tung-Tsun Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICA...
Publication number
20170129767
Publication date
May 11, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Hao HUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND FABRICATION METHOD THEREOF
Publication number
20170057816
Publication date
Mar 2, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
CHAO ZHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
Publication number
20160368763
Publication date
Dec 22, 2016
ROBERT BOSCH GmbH
Julian Gonska
B81 - MICRO-STRUCTURAL TECHNOLOGY