MICRO-STRUCTURAL DEVICES OR SYSTEMS

Industry

CPC
B81B

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology

Current Industry

Sub Industries

B81B1/00Devices without movable or flexible elements B81B2201/00Specific applications of micro-electromechanical systems B81B2203/00Basic micro-electromechanical structures B81B2207/00Micro-structural systems or auxiliary parts thereof B81B3/00Devices comprising flexible or deformable elements B81B5/00Devices comprising elements which are movable in relation to each other B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Acceleration sensor and method of making the same
- Patent number 12,366,587
- Issue date Jul 22, 2025
- Chongqing University
- Xiaoping Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonance device with substrate having oxide film containing throug...
- Patent number 12,365,583
- Issue date Jul 22, 2025
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus for electronic device packaging
- Patent number 12,365,584
- Issue date Jul 22, 2025
- Texas Instruments Incorporated
- Jane Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Distributed MEMS switch array design with multiple input/output ports
- Patent number 12,365,579
- Issue date Jul 22, 2025
- Menlo Microsystems, Inc.
- Xu Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system membrane
- Patent number 12,368,997
- Issue date Jul 22, 2025
- AAC Technologies Pte. Ltd.
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor and sensor system
- Patent number 12,366,488
- Issue date Jul 22, 2025
- Kabushiki Kaisha Toshiba
- Yoshihiko Kurui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator integrated cicruit fabrication
- Patent number 12,365,582
- Issue date Jul 22, 2025
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a microstructured surface
- Patent number 12,365,585
- Issue date Jul 22, 2025
- The Regents of the University of California
- Muchen Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of glass cells for hermetic gas enclosures
- Patent number 12,366,831
- Issue date Jul 22, 2025
- mb-microtec ag
- Serge Lukas Zihlmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compact enhanced sensitivity temperature sensor using an encapsulat...
- Patent number 12,365,580
- Issue date Jul 22, 2025
- King Fahd University of Petroleum & Minerals
- Xuecui Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor or microphone device
- Patent number 12,365,581
- Issue date Jul 22, 2025
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) micro-mirror array (MMA) ste...
- Patent number 12,360,358
- Issue date Jul 15, 2025
- Raytheon Company
- Benn H. Gleason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing an integrated circuit pointed element comprisi...
- Patent number 12,360,135
- Issue date Jul 15, 2025
- STMicroelectronics (Rousset) SAS
- Abderrezak Marzaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric microelectromechanical system microphone sensitivity...
- Patent number 12,358,782
- Issue date Jul 15, 2025
- Skyworks Solutions, Inc.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wire-bond damper for shock absorption
- Patent number 12,358,783
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Lin Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device mounted on a system board
- Patent number 12,360,357
- Issue date Jul 15, 2025
- Texas Instruments Incorporated
- Paul Lawrence Rancuret
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a microstructure
- Patent number 12,358,784
- Issue date Jul 15, 2025
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb electrode release process for MEMS structure
- Patent number 12,358,785
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS structures from fused silica for inertial sensors
- Patent number 12,351,451
- Issue date Jul 8, 2025
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device for amplifying and detecting gene
- Patent number 12,351,864
- Issue date Jul 8, 2025
- Electronics and Telecommunications Research Institute
- Jin Tae Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of manufa...
- Patent number 12,350,710
- Issue date Jul 8, 2025
- Vermon S.A.
- Dominique Gross
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS with small-molecule barricade
- Patent number 12,351,452
- Issue date Jul 8, 2025
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual membrane piezoelectric microelectromechanical system microphone
- Patent number 12,351,450
- Issue date Jul 8, 2025
- Skyworks Solutions, Inc.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-diaphragm MEMS transducers with high effective area
- Patent number 12,356,167
- Issue date Jul 8, 2025
- Knowles Electronics, LLC
- Shubham Shubham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating semiconductor structures including cavities...
- Patent number 12,344,524
- Issue date Jul 1, 2025
- Soitec
- Mariam Sadaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Neuromorphic micro-electro-mechanical-system device
- Patent number 12,344,523
- Issue date Jul 1, 2025
- SOCPRA Sciences et Genie S.E.C.
- Julien Sylvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method of manufacturing the device
- Patent number 12,343,979
- Issue date Jul 1, 2025
- Canon Kabushiki Kaisha
- Noriyuki Nakai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical infrared sensing device and fabrication meth...
- Patent number 12,345,571
- Issue date Jul 1, 2025
- Industrial Technology Research Institute
- Chin-Jou Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor structure, pressure sensor device, and method of ma...
- Patent number 12,345,593
- Issue date Jul 1, 2025
- Murata Manufacturing Co., Ltd.
- Kaoru Kishigui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror device
- Patent number 12,345,876
- Issue date Jul 1, 2025
- FUJIFILM Corporation
- Keisuke Aoshima
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME
- Publication number 20250240578
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
- Publication number 20250236506
- Publication date Jul 24, 2025
- Nanusens SL
- Josep Montanyà i Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...
- Publication number 20250236507
- Publication date Jul 24, 2025
- XI'AN JIAOTONG UNIVERSITY
- Xudong FANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor And Electronic Component
- Publication number 20250236511
- Publication date Jul 24, 2025
- SEIKO EPSON CORPORATION
- Tomonaga KOBAYASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS cavity with non-contaminating seal
- Publication number 20250236513
- Publication date Jul 24, 2025
- SiTime Corporation
- Michael Julian Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHEMICAL STOP STRUCTURES FOR MEMS DEVICES
- Publication number 20250236514
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Ko-Li Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST...
- Publication number 20250236508
- Publication date Jul 24, 2025
- GOVERNMENT OF THE UNITED STATES OF AMERICA, as represented by THE SECRETARY O...
- Jon Robert Pratt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR MODULE WITH STRESS-DECOUPLED VIBRATIONAL MODES
- Publication number 20250236509
- Publication date Jul 24, 2025
- Microsoft Technology Licensing, LLC
- Di SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230037
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230038
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
- Publication number 20250233327
- Publication date Jul 17, 2025
- Atomic Machines, Inc.
- Fabian Goericke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR
- Publication number 20250230034
- Publication date Jul 17, 2025
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Shitao Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROPHONE STRUCTURE, PACKAGING STRUCTURE, AND ELECTRONIC APPARATUS
- Publication number 20250230035
- Publication date Jul 17, 2025
- MEMSENSING MICROSYSTEMS (SUZHOU, CHINA) CO., LTD.
- Hao LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20250229292
- Publication date Jul 17, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTROL DEVICE FOR VIBRATION-TYPE ACTUATOR
- Publication number 20250233532
- Publication date Jul 17, 2025
- Canon Kabushiki Kaisha
- KENICHI KATAOKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20250230036
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- WEN-TUAN LO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM
- Publication number 20250230039
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND AIRFLOW GENERATING PACKAGE
- Publication number 20250223151
- Publication date Jul 10, 2025
- xMEMS Labs, Inc.
- Jemm Yue Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
- Publication number 20250223152
- Publication date Jul 10, 2025
- STMicroelectronics International N.V.
- Francesco RIZZINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETECTION APPARATUS, TRAINING METHOD AND APPARATUS, AND COMPUTER-RE...
- Publication number 20250224292
- Publication date Jul 10, 2025
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Jie SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING
- Publication number 20250223153
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Hsun LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...
- Publication number 20250223156
- Publication date Jul 10, 2025
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTISENSOR MEMS INERTIAL SENSOR GUIDANCE FOR AUTOMATIC VEHICLES
- Publication number 20250224729
- Publication date Jul 10, 2025
- MEI Micro, Inc.
- Robert Mark Boysel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM
- Publication number 20250223154
- Publication date Jul 10, 2025
- AAC TECHNOLOGIES PTE. LTD
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONFIGURABLE MICROPHONE USING INTERNAL CLOCK CHANGING
- Publication number 20250223155
- Publication date Jul 10, 2025
- INFINEON TECHNOLOGIES AG
- Dietmar Straeussnigg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Flexible Microelectrode Arrays
- Publication number 20250213160
- Publication date Jul 3, 2025
- Nikon Corporation
- Wan Qin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND ELECTRONIC DEVICE
- Publication number 20250220353
- Publication date Jul 3, 2025
- Goertek Microelectronics Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE
- Publication number 20250214829
- Publication date Jul 3, 2025
- MICROGLASS LLC
- John WASSERBAUER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE COMPRISING A BASE AND AN INTEGRATED GETTER FILM FOR MANUF...
- Publication number 20250214830
- Publication date Jul 3, 2025
- SAES GETTERS S. P. A.
- Alessandro GALLITOGNOTTA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USE OF MEMS PACKAGES AS ANTENNA SUBSTRATE
- Publication number 20250214832
- Publication date Jul 3, 2025
- Hahn-Schickard-Gesellschaft für angewandte Forschung e.V.
- Achim Bittner
- B81 - MICRO-STRUCTURAL TECHNOLOGY

MICRO-STRUCTURAL DEVICES OR SYSTEMS

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

Acceleration sensor and method of making the same

Resonance device with substrate having oxide film containing throug...

Methods and apparatus for electronic device packaging

Distributed MEMS switch array design with multiple input/output ports

Microelectromechanical system membrane

Sensor and sensor system

MEMS resonator integrated cicruit fabrication

Method of forming a microstructured surface

Fabrication of glass cells for hermetic gas enclosures

Compact enhanced sensitivity temperature sensor using an encapsulat...

Micromechanical component for a sensor or microphone device

Micro-electro-mechanical system (MEMS) micro-mirror array (MMA) ste...

Method for producing an integrated circuit pointed element comprisi...

Piezoelectric microelectromechanical system microphone sensitivity...

Wire-bond damper for shock absorption

Semiconductor device mounted on a system board

Method of manufacturing a microstructure

Comb electrode release process for MEMS structure

Fabrication of MEMS structures from fused silica for inertial sensors

Method and device for amplifying and detecting gene

Capacitive micromachined ultrasonic transducer and method of manufa...

MEMS with small-molecule barricade

Dual membrane piezoelectric microelectromechanical system microphone

Dual-diaphragm MEMS transducers with high effective area

Methods of fabricating semiconductor structures including cavities...

Neuromorphic micro-electro-mechanical-system device

Device and method of manufacturing the device

Microelectromechanical infrared sensing device and fabrication meth...

Pressure sensor structure, pressure sensor device, and method of ma...

Micromirror device

Patents Applicationslast 30 patents

MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME

MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...

ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...

Inertial Sensor And Electronic Component

MEMS cavity with non-contaminating seal

CHEMICAL STOP STRUCTURES FOR MEMS DEVICES

HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST...

MEMS MIRROR MODULE WITH STRESS-DECOUPLED VIBRATIONAL MODES

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES

ACCELERATION SENSOR

MICROPHONE STRUCTURE, PACKAGING STRUCTURE, AND ELECTRONIC APPARATUS

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

CONTROL DEVICE FOR VIBRATION-TYPE ACTUATOR

PACKAGE STRUCTURE AND METHOD OF FORMING THE SAME

MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM

SEMICONDUCTOR DEVICE AND AIRFLOW GENERATING PACKAGE

MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS

DETECTION APPARATUS, TRAINING METHOD AND APPARATUS, AND COMPUTER-RE...

SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING

CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...

MULTISENSOR MEMS INERTIAL SENSOR GUIDANCE FOR AUTOMATIC VEHICLES

MICROELECTROMECHANICAL SYSTEM

CONFIGURABLE MICROPHONE USING INTERNAL CLOCK CHANGING

Flexible Microelectrode Arrays

MEMS MICROPHONE AND ELECTRONIC DEVICE

MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE

SUBSTRATE COMPRISING A BASE AND AN INTEGRATED GETTER FILM FOR MANUF...

USE OF MEMS PACKAGES AS ANTENNA SUBSTRATE