Tilt

Industry

CPC
H01J2237/20207

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/20207Tilt

Industries

Patents Grantslast 30 patents

Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus, semiconductor device and man...
- Patent number 12,183,538
- Issue date Dec 31, 2024
- Kioxia Corporation
- Takayuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning ion beam deposition and etch
- Patent number 12,176,178
- Issue date Dec 24, 2024
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface processing equipment and surface processing method
- Patent number 12,154,768
- Issue date Nov 26, 2024
- Industrial Technology Research Institute
- Chih-Chieh Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Self-differential confocal tilt sensor for measuring level variatio...
- Patent number 12,142,456
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Jinmei Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder and charged particle beam system
- Patent number 12,112,917
- Issue date Oct 8, 2024
- Jeol Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement and correction of optical aberrations in charged partic...
- Patent number 11,990,315
- Issue date May 21, 2024
- FEI Company
- Erik Franken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryotransfer holder and workstation
- Patent number 11,908,655
- Issue date Feb 20, 2024
- Gatan, Inc.
- Alexander Jozef Gubbens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen machining device and information provision method
- Patent number 11,837,437
- Issue date Dec 5, 2023
- Jeol Ltd.
- Tatsuhito Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,776,787
- Issue date Oct 3, 2023
- Jeol Ltd.
- Kazuki Yagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion milling device and milling processing method using same
- Patent number 11,742,178
- Issue date Aug 29, 2023
- HITACHI HIGH-TECH CORPORATION
- Hitoshi Kamoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable wafer holder for film deposition chamber having six degrees...
- Patent number 11,742,231
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Charged particle beam device and control method thereof
- Patent number 11,742,172
- Issue date Aug 29, 2023
- HITACHI HIGH-TECH CORPORATION
- Takashi Dobashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Ion implanter and particle detection method
- Patent number 11,699,569
- Issue date Jul 11, 2023
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Aki Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample chip worktable and retainer
- Patent number 11,679,489
- Issue date Jun 20, 2023
- Jeol Ltd.
- Tomohisa Fukuda
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Scanning ion beam etch
- Patent number 11,646,171
- Issue date May 9, 2023
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam trajectory via combination of image shift and hardware alpha tilt
- Patent number 11,574,794
- Issue date Feb 7, 2023
- FEI Company
- OndOnd{hacek over (r)}ej L. Shánel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and setting assisting method
- Patent number 11,557,458
- Issue date Jan 17, 2023
- Jeol Ltd.
- Kazutaka Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and technique for profile modulation using high tilt angles
- Patent number 11,551,904
- Issue date Jan 10, 2023
- Applied Materials, Inc.
- Venkataramana R. Chavva
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,495,439
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Kohei Mizota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus
- Patent number 11,482,398
- Issue date Oct 25, 2022
- Hitachi High-Tech Science Corporation
- Haruyuki Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device with at least one adjustable sample holder and method of cha...
- Patent number 11,476,080
- Issue date Oct 18, 2022
- TESCAN Brno, s.r.o.
- Pavel Dolezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and cleaning method
- Patent number 11,458,513
- Issue date Oct 4, 2022
- HITACHI HIGH-TECH CORPORATION
- Akinari Morikawa
- B08 - CLEANING
Information Patent Grant
Composite charged particle beam apparatus
- Patent number 11,462,381
- Issue date Oct 4, 2022
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for nanoscale X-ray imaging
- Patent number 11,437,218
- Issue date Sep 6, 2022
- Massachusetts Institute of Technology
- Richard C. Lanza
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling etch angles by substrate rotation in angled etch tools
- Patent number 11,397,289
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Rutger Meyer Timmerman Thijssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-source ion beam etch system
- Patent number 11,387,071
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Qiwei Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ angle measurement using channeling
- Patent number 11,387,073
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching system
- Patent number 11,373,842
- Issue date Jun 28, 2022
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Na Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for changing the spatial orientation of a micro-sample in a...
- Patent number 11,355,310
- Issue date Jun 7, 2022
- Carl Zeiss Microscopy GmbH
- Holger Doemer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN-SITU MECHANICAL MICRO-ELECTRO-MECHANICAL DEVICE AND SYSTEM, AS W...
- Publication number 20250054725
- Publication date Feb 13, 2025
- BEIJING UNIVERSITY OF TECHNOLOGY
- Xiaodong HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONCURRENT OR CYCLICAL ETCH AND DIRECTIONAL DEPOSITION
- Publication number 20250046601
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Morgan EVANS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...
- Publication number 20250037966
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Jinmei YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROCESSING EQUIPMENT
- Publication number 20250006475
- Publication date Jan 2, 2025
- Industrial Technology Research Institute
- Chih-Chieh Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Sample Milling System and Apparatus and Method for Image Generation
- Publication number 20250006458
- Publication date Jan 2, 2025
- JEOL Ltd.
- Munehiro Kozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240404782
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Hirohisa ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Holder and Sample Processing Apparatus
- Publication number 20240331970
- Publication date Oct 3, 2024
- JEOL Ltd.
- Jun Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20240331986
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Yasunobu SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, AND SAMPLE OBSERVATION METHOD EMPLOYI...
- Publication number 20240242925
- Publication date Jul 18, 2024
- Hitachi, Ltd
- Shunya TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
- Publication number 20240234106
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick LEESER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER
- Publication number 20240170252
- Publication date May 23, 2024
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE
- Publication number 20240170269
- Publication date May 23, 2024
- Applied Materials, Inc.
- Harish PENMETHSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SAMPLE PREPARATON AND ANALYSIS
- Publication number 20240162001
- Publication date May 16, 2024
- FEI Company
- Michal Valík
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
- Publication number 20240136161
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick LEESER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT
- Publication number 20240096605
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Arun Kumar Kotrappa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope and Specimen Orientation Alignment Method
- Publication number 20240087840
- Publication date Mar 14, 2024
- JEOL Ltd.
- Motofumi Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
- Publication number 20240038486
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ching Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE
- Publication number 20230402265
- Publication date Dec 14, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yancheng LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tilting Element Of Manipulation Stage
- Publication number 20230326708
- Publication date Oct 12, 2023
- TESCAN Brno, s.r.o.
- Jiri Marsik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT AND CORRECTION OF OPTICAL ABERRATIONS IN CHARGED PARTIC...
- Publication number 20230274908
- Publication date Aug 31, 2023
- FEI Company
- Erik Franken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING A CRYSTALLINE ORIENTATION MAP OF A SURFACE POR...
- Publication number 20230178332
- Publication date Jun 8, 2023
- CARL ZEISS MICROSCOPY GMBH
- Luyang Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Gun, Charged Particle Beam System, and Lock Nut
- Publication number 20230126658
- Publication date Apr 27, 2023
- Hitachi High-Tech Corporation
- Teruaki HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System and Control Method Therefor
- Publication number 20230115486
- Publication date Apr 13, 2023
- JEOL Ltd.
- Takeshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR AUTOMATED GRID VALIDATION
- Publication number 20230093535
- Publication date Mar 23, 2023
- FEI Company
- Pavol KARLÍK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...
- Publication number 20230069666
- Publication date Mar 2, 2023
- KIOXIA Corporation
- Takayuki ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Sample Alignment For Microscopy
- Publication number 20230020742
- Publication date Jan 19, 2023
- FEI Company
- John FLANAGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Cleaning Method
- Publication number 20220402000
- Publication date Dec 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Akinari MORIKAWA
- B08 - CLEANING
Information Patent Application
Specimen Machining Device and Specimen Machining Method
- Publication number 20220392739
- Publication date Dec 8, 2022
- JEOL Ltd.
- Munehiro Kozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Specimen Machining Device and Information Provision Method
- Publication number 20220392744
- Publication date Dec 8, 2022
- JEOL Ltd.
- Tatsuhito Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HOLDER FOR FILM DEPOSITION CHAMBER
- Publication number 20220359232
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Chih Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Multiple charged-particle beam apparatus with low crosstalk

Semiconductor manufacturing apparatus, semiconductor device and man...

Scanning ion beam deposition and etch

Surface processing equipment and surface processing method

Self-differential confocal tilt sensor for measuring level variatio...

Sample holder and charged particle beam system

Measurement and correction of optical aberrations in charged partic...

Cryotransfer holder and workstation

Specimen machining device and information provision method

Charged particle beam apparatus

Ion milling device and milling processing method using same

Movable wafer holder for film deposition chamber having six degrees...

Charged particle beam device and control method thereof

Ion implanter and particle detection method

Sample chip worktable and retainer

Scanning ion beam etch

Beam trajectory via combination of image shift and hardware alpha tilt

Charged particle beam apparatus and setting assisting method

System and technique for profile modulation using high tilt angles

Plasma processing apparatus

Focused ion beam apparatus

Device with at least one adjustable sample holder and method of cha...

Charged particle beam apparatus and cleaning method

Composite charged particle beam apparatus

Apparatus and method for nanoscale X-ray imaging

Controlling etch angles by substrate rotation in angled etch tools

Multi-source ion beam etch system

In situ angle measurement using channeling

Ion beam etching system

Method for changing the spatial orientation of a micro-sample in a...

Patents Applicationslast 30 patents

IN-SITU MECHANICAL MICRO-ELECTRO-MECHANICAL DEVICE AND SYSTEM, AS W...

CONCURRENT OR CYCLICAL ETCH AND DIRECTIONAL DEPOSITION

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...

SURFACE PROCESSING EQUIPMENT

Sample Milling System and Apparatus and Method for Image Generation

CHARGED PARTICLE BEAM DEVICE

Sample Holder and Sample Processing Apparatus

PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD

CHARGED PARTICLE BEAM DEVICE, AND SAMPLE OBSERVATION METHOD EMPLOYI...

TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE

METHOD OF SAMPLE PREPARATON AND ANALYSIS

TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS

BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT

Electron Microscope and Specimen Orientation Alignment Method

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE

Tilting Element Of Manipulation Stage

MEASUREMENT AND CORRECTION OF OPTICAL ABERRATIONS IN CHARGED PARTIC...

METHOD OF GENERATING A CRYSTALLINE ORIENTATION MAP OF A SURFACE POR...

Charged Particle Gun, Charged Particle Beam System, and Lock Nut

Charged Particle Beam System and Control Method Therefor

APPARATUS AND METHOD FOR AUTOMATED GRID VALIDATION

SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...

Automated Sample Alignment For Microscopy

Charged Particle Beam Apparatus and Cleaning Method

Specimen Machining Device and Specimen Machining Method

Specimen Machining Device and Information Provision Method

WAFER HOLDER FOR FILM DEPOSITION CHAMBER