treatment by exposure to a plasma

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/0234treatment by exposure to a plasma

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Patents Grantslast 30 patents

Information Patent Grant
Ultraviolet radiation activated atomic layer deposition
- Patent number 12,327,721
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Christine Y. Ouyang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 12,327,720
- Issue date Jun 10, 2025
- Kokusai Electric Corporation
- Toshiyuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of silicon-based dielectric films
- Patent number 12,322,592
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Geetika Bajaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsing plasma treatment for film densification
- Patent number 12,322,573
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Rui Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improving surface of semiconductor device
- Patent number 12,315,720
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jung-Tang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-etch treatment for metal etch
- Patent number 12,308,250
- Issue date May 20, 2025
- Tokyo Electron Limited
- Scott Lefevre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Warpage-reducing semiconductor structure and fabricating method of...
- Patent number 12,300,633
- Issue date May 13, 2025
- United Microelectronics Corp.
- Da-Jun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus including a substrate chuck, a dispenser, and a planariza...
- Patent number 12,300,522
- Issue date May 13, 2025
- Canon Kabushiki Kaisha
- Ozkan Ozturk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV cure for local stress modulation
- Patent number 12,300,489
- Issue date May 13, 2025
- Lam Research Corporation
- Anirvan Sircar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of semiconductor integration films
- Patent number 12,300,491
- Issue date May 13, 2025
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing gap filling fluids and related systems and d...
- Patent number 12,293,942
- Issue date May 6, 2025
- ASM IP Holding B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modifying hydrophobicity of a wafer surface using an organosilicon...
- Patent number 12,288,685
- Issue date Apr 29, 2025
- Lam Research Corporation
- Jeremy D. Fields
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern decomposition lithography techniques
- Patent number 12,278,204
- Issue date Apr 15, 2025
- Intel Corporation
- Charles H. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate stripping method and epitaxial wafer
- Patent number 12,261,040
- Issue date Mar 25, 2025
- HC Semitek (Zhejiang) Co. Ltd.
- Hongpo Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing with material modification and removal
- Patent number 12,261,054
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Ivo Otto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inner spacer structures for gate-all-around field effect transistors
- Patent number 12,255,249
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Mrunal Abhijith Khaderbad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment on metal-oxide TFT
- Patent number 12,237,406
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Soo Young Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,237,228
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Jyun Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of post treating silicon nitride based dielectric films wit...
- Patent number 12,230,499
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Yong Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric gap-filling process for semiconductor device
- Patent number 12,198,974
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-I Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with multi-layer etch stop structure
- Patent number 12,198,979
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Cheng Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for high pressure anneal
- Patent number 12,183,573
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a silicon carbide device
- Patent number 12,176,207
- Issue date Dec 24, 2024
- X-FAB TEXAS, INC.
- Daniel Mauch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer process, apparatus and method of manufacturing an article
- Patent number 12,176,208
- Issue date Dec 24, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Varying temperature anneal for film and structures formed thereby
- Patent number 12,176,206
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shu Ling Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cyclic low temperature film growth processes
- Patent number 12,176,204
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic spin-on coating process for forming dielectric material
- Patent number 12,170,199
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Je-Ming Kuo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chuck assembly, planarization process, apparatus and method of manu...
- Patent number 12,165,903
- Issue date Dec 10, 2024
- Canon Kabushiki Kaisha
- Seth J. Bamesberger
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Photovoltaic cell
- Patent number 12,166,143
- Issue date Dec 10, 2024
- STMicroelectronics S.r.l.
- Cosimo Gerardi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 12,165,882
- Issue date Dec 10, 2024
- Yuta Akasu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METAL STORAGE DEVICE, METAL INJECTION SYSTEM INCLUDING THE SAME, AN...
- Publication number 20250189355
- Publication date Jun 12, 2025
- Samsung Electronics Co., Ltd.
- Jaehong Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compositions and Methods Using Same for Deposition of Silicon-Conta...
- Publication number 20250188605
- Publication date Jun 12, 2025
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250191907
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EMBEDDING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250171890
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Isao GUNJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL FILM DEPOSITION
- Publication number 20250166989
- Publication date May 22, 2025
- LAM RESEARCH CORPORATION
- Jason Alexander Varnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING INSULATING FILM, AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20250166990
- Publication date May 22, 2025
- Tokyo Electron Limited
- Daisuke OBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE OXIDATION LAYER FOR METAL VOIDING REDUCTION
- Publication number 20250167086
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Man-Yun Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOW COMPENSATION BY PATTERNED UV CURE
- Publication number 20250166991
- Publication date May 22, 2025
- LAM RESEARCH CORPORATION
- Tong LEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250149331
- Publication date May 8, 2025
- Kokusai Electric Corporation
- Kenshiro USUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Having Dielectric Material Treated with Microw...
- Publication number 20250140553
- Publication date May 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Szu-Hua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20250140568
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- SangHyuk YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF CARBON GAPFILL MATERIALS
- Publication number 20250137119
- Publication date May 1, 2025
- Applied Materials, Inc.
- Bhargav S. CITLA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD FOR FILLING ONE OR MORE GAPS ON A SURFA...
- Publication number 20250125142
- Publication date Apr 17, 2025
- ASM IP HOLDING B.V.
- SangHeon Yong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO IMPROVE OXIDE SIDEWALL QUALITY
- Publication number 20250125145
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Tianyang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF BONDING MULTIPLE COPPER ELEMENTS AND METHOD OF BONDING MU...
- Publication number 20250125185
- Publication date Apr 17, 2025
- National Cheng Kung University
- Shih-kang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT DISSIPATION FOR FIELD EFFECT TRANSISTORS
- Publication number 20250118548
- Publication date Apr 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fang Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS HAVING BEAM FOR SURFACE TREATMENT AND POLISHING...
- Publication number 20250112050
- Publication date Apr 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jin-Hao JHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CYCLIC LOW TEMPERATURE FILM GROWTH PROCESSES
- Publication number 20250095983
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Jianping Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFAC...
- Publication number 20250098248
- Publication date Mar 20, 2025
- Kioxia Corporation
- Masaya NAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Increasing Skin Depth and Reducing Eddy Cu...
- Publication number 20250087483
- Publication date Mar 13, 2025
- Atlas Magnetics
- John Othniel McDonald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FILLING GAP
- Publication number 20250087529
- Publication date Mar 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Hsien CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL
- Publication number 20250079162
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM OF DETERMINING LEAKAGE OF SEMICONDUCTOR MANUFACTURING TOOL A...
- Publication number 20250079200
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- MING-YING PEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...
- Publication number 20250066921
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- Ranjit Rohidas Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...
- Publication number 20250069938
- Publication date Feb 27, 2025
- Canon Kabushiki Kaisha
- SETH J. BAMESBERGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM MANUFACTURING METHOD AND THIN FILM
- Publication number 20250069886
- Publication date Feb 27, 2025
- Jusung Engineering Co., Ltd.
- Duck Ho KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANARIZATION METHOD AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20250069892
- Publication date Feb 27, 2025
- Canon Kabushiki Kaisha
- KENJI YAEGASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20250054753
- Publication date Feb 13, 2025
- ASM IP HOLDING B.V.
- KiHun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR COMPONENTS FROM A WAFER WITH SEL...
- Publication number 20250054746
- Publication date Feb 13, 2025
- ROBERT BOSCH GmbH
- Bernhard Polzinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20250046608
- Publication date Feb 6, 2025
- Samsung Electronics Co., Ltd.
- Jin Wook Jung
- H01 - BASIC ELECTRIC ELEMENTS

treatment by exposure to a plasma

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ultraviolet radiation activated atomic layer deposition

Method of processing substrate, substrate processing apparatus, rec...

Deposition of silicon-based dielectric films

Pulsing plasma treatment for film densification

Method for improving surface of semiconductor device

Pre-etch treatment for metal etch

Warpage-reducing semiconductor structure and fabricating method of...

Apparatus including a substrate chuck, a dispenser, and a planariza...

UV cure for local stress modulation

Deposition of semiconductor integration films

Methods for depositing gap filling fluids and related systems and d...

Modifying hydrophobicity of a wafer surface using an organosilicon...

Pattern decomposition lithography techniques

Substrate stripping method and epitaxial wafer

Substrate processing with material modification and removal

Inner spacer structures for gate-all-around field effect transistors

Plasma treatment on metal-oxide TFT

Semiconductor device and method

Methods of post treating silicon nitride based dielectric films wit...

Dielectric gap-filling process for semiconductor device

Semiconductor device with multi-layer etch stop structure

Device and method for high pressure anneal

Method for manufacturing a silicon carbide device

Wafer process, apparatus and method of manufacturing an article

Varying temperature anneal for film and structures formed thereby

Cyclic low temperature film growth processes

Cyclic spin-on coating process for forming dielectric material

Chuck assembly, planarization process, apparatus and method of manu...

Photovoltaic cell

Semiconductor device manufacturing method

Patents Applicationslast 30 patents

METAL STORAGE DEVICE, METAL INJECTION SYSTEM INCLUDING THE SAME, AN...

Compositions and Methods Using Same for Deposition of Silicon-Conta...

FILM FORMING METHOD AND FILM FORMING APPARATUS

EMBEDDING METHOD AND SUBSTRATE PROCESSING APPARATUS

THERMAL FILM DEPOSITION

METHOD FOR FORMING INSULATING FILM, AND SUBSTRATE PROCESSING SYSTEM

SURFACE OXIDATION LAYER FOR METAL VOIDING REDUCTION

WAFER BOW COMPENSATION BY PATTERNED UV CURE

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

Semiconductor Device Having Dielectric Material Treated with Microw...

METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES

DEPOSITION OF CARBON GAPFILL MATERIALS

SUBSTRATE PROCESSING METHOD FOR FILLING ONE OR MORE GAPS ON A SURFA...

METHODS TO IMPROVE OXIDE SIDEWALL QUALITY

METHOD OF BONDING MULTIPLE COPPER ELEMENTS AND METHOD OF BONDING MU...

HEAT DISSIPATION FOR FIELD EFFECT TRANSISTORS

POLISHING APPARATUS HAVING BEAM FOR SURFACE TREATMENT AND POLISHING...

CYCLIC LOW TEMPERATURE FILM GROWTH PROCESSES

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFAC...

Method and Apparatus for Increasing Skin Depth and Reducing Eddy Cu...

METHOD FOR FILLING GAP

DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL

SYSTEM OF DETERMINING LEAKAGE OF SEMICONDUCTOR MANUFACTURING TOOL A...

MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...

CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...

THIN FILM MANUFACTURING METHOD AND THIN FILM

PLANARIZATION METHOD AND METHOD OF MANUFACTURING ARTICLE

SUBSTRATE PROCESSING METHOD

METHOD FOR PRODUCING SEMICONDUCTOR COMPONENTS FROM A WAFER WITH SEL...

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE