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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0234
treatment by exposure to a plasma
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last 30 patents
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Patent Grant
Methods of forming metal nitride films
Patent number
11,978,625
Issue date
May 7, 2024
Applied Materials, Inc.
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Planarization system, planarization process, and method of manufact...
Patent number
11,972,976
Issue date
Apr 30, 2024
Canon Kabushiki Kaisha
Byung-Jin Choi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor film composition, method for manufacturing semiconduc...
Patent number
11,965,109
Issue date
Apr 23, 2024
Mitsui Chemicals, Inc.
Yasuhisa Kayaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reflector and/or method for ultraviolet curing of semiconductor
Patent number
11,929,267
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Chun Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing silicon-free carbon-containing film as gap-fi...
Patent number
11,923,190
Issue date
Mar 5, 2024
ASM IP Holding B.V.
Timothee Julien Vincent Blanquart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Light-driven transition from insulator to conductor
Patent number
11,923,245
Issue date
Mar 5, 2024
Bowling Green State University
Farida Selim
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device manufacturing method
Patent number
11,915,925
Issue date
Feb 27, 2024
Daicel Corporation
Naoko Tsuji
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Replacement gate methods that include treating spacers to widen gate
Patent number
11,908,695
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shu-Han Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Transistor isolation structures
Patent number
11,908,921
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Yun Peng
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for selective deposition of silicon nitride layer and struct...
Patent number
11,901,175
Issue date
Feb 13, 2024
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Ferroelectric structure for semiconductor devices
Patent number
11,901,450
Issue date
Feb 13, 2024
Taiwan Semicondutor Manufacturing Co., Ltd.
Cheng-Ming Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
11,901,437
Issue date
Feb 13, 2024
Marlin Semiconductor Limited
Te-Chang Hsu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method making the same
Patent number
11,894,226
Issue date
Feb 6, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
PingHeng Wu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Display module, method for manufacturing display module, and laser...
Patent number
11,890,700
Issue date
Feb 6, 2024
Samsung Display Co., Ltd.
Youngjin Oh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Grant
Molybdenum thin films by oxidation-reduction
Patent number
11,891,690
Issue date
Feb 6, 2024
Applied Materials, Inc.
Feng Q. Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Deposition tool and method for depositing metal oxide films on orga...
Patent number
11,887,846
Issue date
Jan 30, 2024
Lam Research Corporation
Akhil Singhal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Semiconductor devices including stack oxide materials having differ...
Patent number
11,889,693
Issue date
Jan 30, 2024
Srikant Jayanti
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and manufacturing method of semiconductor device
Patent number
11,881,522
Issue date
Jan 23, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for forming semiconductor device
Patent number
11,876,122
Issue date
Jan 16, 2024
United Microelectronics Corp.
Chia-Wei Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
11,876,126
Issue date
Jan 16, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and display device including the same
Patent number
11,862,454
Issue date
Jan 2, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for high pressure anneal
Patent number
11,854,800
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Szu-Ying Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
Patent number
11,848,204
Issue date
Dec 19, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor device with multi-layer etch stop...
Patent number
11,848,231
Issue date
Dec 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Po-Cheng Shih
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device, manufacturing method thereof, display device,...
Patent number
11,842,901
Issue date
Dec 12, 2023
Semiconductor Energy Laboratory Co., Ltd.
Masami Jintyou
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Isolation features and methods of fabricating the same
Patent number
11,843,028
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
I-Wen Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching techniques
Patent number
11,837,467
Issue date
Dec 5, 2023
Toyko Electron Limited
Pingshan Luan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,837,515
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yin-Jie Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conformal damage-free encapsulation of chalcogenide materials
Patent number
11,832,533
Issue date
Nov 28, 2023
Lam Research Corporation
James Samuel Sims
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Liquid crystal display device including transistor comprising oxide...
Patent number
11,824,124
Issue date
Nov 21, 2023
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Replacement Gate Methods That Include Treating Spacers to Widen Gate
Publication number
20240145250
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shu-Han Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE WITH NITRIDED INNER SPACERS AND METHOD FOR...
Publication number
20240136427
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Man-Nung SU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20240113207
Publication date
Apr 4, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High-Crystallinity Barium Titanate Film Structure, Method of Prepar...
Publication number
20240102170
Publication date
Mar 28, 2024
LoMaRe Chip Technology Changzhou Co., Ltd.
Fengzhi Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RADICAL TREATMENT FOR METAL GATE STACK
Publication number
20240087899
Publication date
Mar 14, 2024
Applied Materials, Inc.
Zhihui Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING A PARTIALLY SILICIDED ELEMENT
Publication number
20240087886
Publication date
Mar 14, 2024
MICROCHIP TECHNOLOGY INCORPORATED
Yaojian Leng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Publication number
20240087881
Publication date
Mar 14, 2024
Applied Materials, Inc.
Michael Haverty
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA-ASSISTED ANNEALING SYSTEM AND METHOD
Publication number
20240079230
Publication date
Mar 7, 2024
Metal Industries Research & Development Centre
Wei-Chen Tien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SURFACE TREATMENT FOR WAFER BONDING METHODS
Publication number
20240071746
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Yu-Hao Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
Publication number
20240071754
Publication date
Feb 29, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTOR AND/OR METHOD FOR ULTRAVIOLET CURING OF SEMICONDUCTOR
Publication number
20240063035
Publication date
Feb 22, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chien-Chun Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing Method Of Semiconductor Device
Publication number
20240063028
Publication date
Feb 22, 2024
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240063014
Publication date
Feb 22, 2024
ASM IP HOLDING B.V.
SangHeon Yong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD FOR DEVICE EMBEDDED PACKAGING STRUCTURE
Publication number
20240063055
Publication date
Feb 22, 2024
Zhuhai ACCESS Semiconductor Co., Ltd
Xianming CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING WITH MATERIAL MODIFICATION AND REMOVAL
Publication number
20240055270
Publication date
Feb 15, 2024
TOKYO ELECTRON LIMITED
Ivo Otto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR SUBSTRATE AND MANUFACTURING MET...
Publication number
20240047343
Publication date
Feb 8, 2024
nD-HI Technologies Lab,Inc.
Ho-Ming TONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING TREATED SILICON-CARBON MATERIAL
Publication number
20240047198
Publication date
Feb 8, 2024
ASM IP HOLDING B.V.
Hirotsugu Sugiura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240047199
Publication date
Feb 8, 2024
ASM IP HOLDING B.V.
SungHa Choi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
DEPOSITION METHOD OF METAL OXIDE AND MANUFACTURING METHOD OF MEMORY...
Publication number
20240038529
Publication date
Feb 1, 2024
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Shunpei YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SACRIFICIAL PROTECTION LAYER FOR ENVIRONMENTALLY SENSITIVE SURFACES...
Publication number
20240030023
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...
Publication number
20240030064
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
Timothee Blanquart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...
Publication number
20230420232
Publication date
Dec 28, 2023
Applied Materials, Inc.
Tomohiko Kitajima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cyclic Spin-On Coating Process for Forming Dielectric Material
Publication number
20230411150
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Je-Ming Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR FORMING PATTERNED STRUCTURES USING MULTIPLE P...
Publication number
20230395372
Publication date
Dec 7, 2023
ASM IP HOLDING B.V.
Shinya Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230395371
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Kazumasa IGARASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated Circuitry, Method Used In The Fabrication Of A Vertical...
Publication number
20230395699
Publication date
Dec 7, 2023
Micron Technology, Inc.
Masihhur R. Laskar
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE HAVING ISOLATION STRUCTURE TO REDUCE CURRENT L...
Publication number
20230387312
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Yu YEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL
Publication number
20230386832
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Szu-Ying Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF SEMICONDUCTOR INTEGRATION FILMS
Publication number
20230386839
Publication date
Nov 30, 2023
Applied Materials, Inc.
Lakmal Charidu Kalutarage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSISTOR ISOLATION STRUCTURES
Publication number
20230387254
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Mrunal Abhijith KHADERBAD
H01 - BASIC ELECTRIC ELEMENTS