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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02315
treatment by exposure to a plasma
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last 30 patents
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Method for manufacturing semiconductor device
Patent number
11,972,945
Issue date
Apr 30, 2024
Semiconductor Energy Laboratory Co., Ltd.
Kenichi Okazaki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of forming a source/drain
Patent number
11,929,401
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Wei Lee
C30 - CRYSTAL GROWTH
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Patent Grant
Method for selective deposition of silicon nitride layer and struct...
Patent number
11,901,175
Issue date
Feb 13, 2024
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Vertical semiconductor device and method for fabricating the same
Patent number
11,903,209
Issue date
Feb 13, 2024
SK hynix Inc.
Hye-Hyeon Byeon
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and method for treating substrate
Patent number
11,881,382
Issue date
Jan 23, 2024
Semes Co., Ltd.
Jun Pyo Hong
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
Patent number
11,848,204
Issue date
Dec 19, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor device with multi-layer etch stop...
Patent number
11,848,231
Issue date
Dec 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Po-Cheng Shih
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Selective passivation and selective deposition
Patent number
11,830,732
Issue date
Nov 28, 2023
ASM IP Holding B.V.
Jan Willem Hub Maes
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
CVD based oxide-metal multi structure for 3D NAND memory devices
Patent number
11,817,320
Issue date
Nov 14, 2023
Applied Materials, Inc.
Susmit Singha Roy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Selective removal of ruthenium-containing materials
Patent number
11,798,813
Issue date
Oct 24, 2023
Applied Materials, Inc.
Baiwei Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,728,166
Issue date
Aug 15, 2023
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Prevention of metal pad corrosion due to exposure to halogen
Patent number
11,670,608
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Fan Huang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method to reduce breakdown failure in a MIM capacitor
Patent number
11,594,593
Issue date
Feb 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hsing-Lien Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods for enhancing selectivity in SAM-based selective deposition
Patent number
11,515,155
Issue date
Nov 29, 2022
Applied Materials, Inc.
Chang Ke
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Surface pretreatment process to improve quality of oxide films prod...
Patent number
11,495,437
Issue date
Nov 8, 2022
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor structure and method for manufacturing same
Patent number
11,462,403
Issue date
Oct 4, 2022
SJ Semiconductor (Jiangyin) Corporation
Jiashan Yin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for selective deposition of silicon nitride layer and struct...
Patent number
11,424,119
Issue date
Aug 23, 2022
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods for depositing blocking layers on metal surfaces
Patent number
11,417,515
Issue date
Aug 16, 2022
Applied Materials, Inc.
Bhaskar Jyoti Bhuyan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Vertical semiconductor device and method for fabricating the same
Patent number
11,404,432
Issue date
Aug 2, 2022
SK hynix Inc.
Hye-Hyeon Byeon
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods for selective deposition of dielectric on silicon oxide
Patent number
11,371,136
Issue date
Jun 28, 2022
Applied Materials, Inc.
Bhaskar Jyoti Bhuyan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Surface roughness for flowable CVD film
Patent number
11,367,614
Issue date
Jun 21, 2022
Applied Materials, Inc.
Jinrui Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
Patent number
11,348,784
Issue date
May 31, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of fabricating display substrate, display substrate, and dis...
Patent number
11,315,783
Issue date
Apr 26, 2022
Hefei Xinsheng Optoelectronics Technology Co., Ltd.
Yuankui Ding
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device with multi-layer etch stop structure and metho...
Patent number
11,282,742
Issue date
Mar 22, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Po-Cheng Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,282,701
Issue date
Mar 22, 2022
Tokyo Electron Limited
Takashi Dokan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gallium nitride based semiconductor device and manufacturing method...
Patent number
11,257,676
Issue date
Feb 22, 2022
Fuji Electric Co., Ltd.
Hideaki Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of forming a structure on a substrate
Patent number
11,251,035
Issue date
Feb 15, 2022
ASM IP Holding B.V.
Timothee Blanquart
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,251,052
Issue date
Feb 15, 2022
Tokyo Electron Limited
Naotsugu Hoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition using methylation treatment
Patent number
11,164,742
Issue date
Nov 2, 2021
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Integrated epitaxy and preclean system
Patent number
11,164,737
Issue date
Nov 2, 2021
Applied Materials, Inc.
Lara Hawrylchak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Isolation Regions For Isolating Transistors and the Methods Forming...
Publication number
20240120236
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tai-Jung Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105448
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Motomu DEGAI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
Publication number
20240087885
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Munehito KAGAYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
PROCESSING METHOD OF WAFER
Publication number
20240071753
Publication date
Feb 29, 2024
Disco Corporation
Shunsuke TERANISHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
Publication number
20240071754
Publication date
Feb 29, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION
Publication number
20240047197
Publication date
Feb 8, 2024
ASM IP HOLDING B.V.
Jan Willem Hub Maes
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ELECTRONIC ESD PROTECTION DEVICE
Publication number
20240021701
Publication date
Jan 18, 2024
STMicroelectronics (Tours) SAS
Aurelie ARNAUD
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SELECTIVE DEPOSITION OF METAL OXIDES USING SILANES AS AN INHIBITOR
Publication number
20230386831
Publication date
Nov 30, 2023
LAM RESEARCH CORPORATION
Kashish SHARMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230369039
Publication date
Nov 16, 2023
Samsung Electronics Co., Ltd.
Eunhyea KO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PREVENTION OF METAL PAD CORROSION DUE TO EXPOSURE TO HALOGEN
Publication number
20230317651
Publication date
Oct 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Fan Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE TANTALUM NITRIDE DEPOSITION FOR BARRIER APPLICATIONS
Publication number
20230197438
Publication date
Jun 22, 2023
Applied Materials, Inc.
Aaron Dangerfield
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
DEPOSITION OF SILICON NITRIDE WITH ENHANCED SELECTIVITY
Publication number
20230187202
Publication date
Jun 15, 2023
Entegris, Inc.
Han Wang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD TO REDUCE BREAKDOWN FAILURE IN A MIM CAPACITOR
Publication number
20230187478
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsing-Lien Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Devices and Methods of Manufacture
Publication number
20230178361
Publication date
Jun 8, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Yang Hung
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
DEPOSITION OF A THIN FILM NANOCRYSTALLINE DIAMOND ON A SUBSTRATE
Publication number
20230102356
Publication date
Mar 30, 2023
THE BOARD OF REGENTS FOR THE OKLAHOMA AGRICULTURAL AND MECHANICAL COLLEGES
Nirmal Govindaraju
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TOPOLOGY-SELECTIVE NITRIDE DEPOSITION METHOD AND STRUCTURE FORMED U...
Publication number
20230084552
Publication date
Mar 16, 2023
ASM IP HOLDING B.V.
Timothee Blanquart
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
Publication number
20230023936
Publication date
Jan 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shahaji B. MORE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Methods Of Forming Memory Device With Reduced Resistivity
Publication number
20220415651
Publication date
Dec 29, 2022
Applied Materials, Inc.
Qixin Shen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
Publication number
20220416070
Publication date
Dec 29, 2022
Samsung Electronics Co., Ltd.
Junhyuk PARK
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS, AND PLASMA P...
Publication number
20220406609
Publication date
Dec 22, 2022
TOKYO ELECTRON LIMITED
Takahiro YONEZAWA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Methods For Depositing Blocking Layers On Metal Surfaces
Publication number
20220384176
Publication date
Dec 1, 2022
Applied Materials, Inc.
Bhaskar Jyoti Bhuyan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220367182
Publication date
Nov 17, 2022
United Microelectronics Corp.
Yu Cheng Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
TEMPORARY PASSIVATION LAYER ON A SUBSTRATE
Publication number
20220359332
Publication date
Nov 10, 2022
SPTS TECHNOLOGIES LIMITED
Michael Grimes
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...
Publication number
20220351958
Publication date
Nov 3, 2022
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE REMOVAL OF RUTHENIUM-CONTAINING MATERIALS
Publication number
20220344172
Publication date
Oct 27, 2022
Applied Materials, Inc.
Baiwei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-GATE DEVICE GATE STRUCTURE AND METHODS THEREOF
Publication number
20220344355
Publication date
Oct 27, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Hao LIN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
VERTICAL SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20220336491
Publication date
Oct 20, 2022
SK HYNIX INC.
Hye-Hyeon BYEON
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION
Publication number
20220208542
Publication date
Jun 30, 2022
ASM IP HOLDING B.V.
Jan Willem Hub Maes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FILLING A GAP AND RELATED SYSTEMS AND DEVICES
Publication number
20220165569
Publication date
May 26, 2022
ASM IP HOLDING B.V.
Zecheng Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE
Publication number
20220102194
Publication date
Mar 31, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Shang GAO
H01 - BASIC ELECTRIC ELEMENTS