treatment to change the morphology of the insulating layer

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H01L21/02356

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02356treatment to change the morphology of the insulating layer

Industries

Patents Grantslast 30 patents

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- Samsung Electronics Co., Ltd.
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- H01 - BASIC ELECTRIC ELEMENTS

treatment to change the morphology of the insulating layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of fabricating nanoscale structures usable in molecular sen...

Semiconductor device and method of manufacture

Integrated circuit isolation feature and method of forming the same

Method for manufacturing semiconductor device

Semiconductor device and method for manufacturing the same

Semiconductor device and method of manufacture

Semiconductor device and method

Gate stack treatment for ferroelectric transistors

Semiconductor devices and methods of manufacture

Method of treating target film and method of manufacturing semicond...

Electronic device and method of manufacturing the same

Ferroelectric structure for semiconductor devices

Method and device for bonding substrates

Electronic device and method of manufacturing the same

Electronic device and method of manufacturing the same

Semiconductor device and manufacturing method for the semiconductor...

Semiconductor devices and methods of manufacture

Amorphization and regrowth of source-drain regions from the bottom-...

Semiconductor structure and manufacturing method for the semiconduc...

Methods for depositing a hafnium lanthanum oxide film on a substrat...

Method of manufacturing semiconductor device and semiconductor device

Masking layer with post treatment

Semiconductor device and method of manufacture

Semiconductor device and method for manufacturing the same

Structure and formation method of semiconductor device with fin str...

Gate stack treatment for ferroelectric transistors

Capacitive memory structure, functional layer, electronic device, a...

Crystallization of amorphous multicomponent ionic compounds

Back-end-of-line compatible metal-insulator-metal on-chip decouplin...

Methods of forming amorphous carbon hard mask layers and hard mask...

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

TRANSISTOR GATE STRUCTURES

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE

GATE STACK TREATMENT FOR FERROELECTRIC TRANSISTORS

COMPOSITE SUBSTRATE AND PREPARATION METHOD THEREOF, AND SEMICONDUCT...

THIN FILM STRUCTURE AND ELECTRONIC DEVICE INCLUDING THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY THERMAL TREATMENT U...

HARDMASK FORMATION WITH HYBRID MATERIALS IN SEMICONDUCTOR DEVICE

FERROELECTRIC STRUCTURE FOR SEMICONDUCTOR DEVICES

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SEMICONDUCTOR...

AMORPHIZATION AND REGROWTH OF SOURCE-DRAIN REGIONS FROM THE BOTTOM-...

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SEMICONDUC...

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE

STRUCTURE AND FORMATION METHOD OF DEVICE WITH FERROELECTRIC LAYER

Masking Layer with Post Treatment

SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME

METHOD FOR PRODUCING A FERROELECTRIC LAYER OR AN ANTIFERROELECTRIC...

Semiconductor Device and Method of Manufacture

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR DEVICE WITH FIN STRUCTURES

Gate Stack Treatment For Ferroelectric Transistors

METHOD, SEMICONDUCTOR STRUCTURE, AND VACUUM PROCESSING SYSTEM

Metal-Comprising Bottom Isolation Structures

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Transistor Gate Structures and Methods of Forming the Same

ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME