Tubes for spot-analysing by electron or ion beams Microanalysers

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CPC
H01J37/252

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/252Tubes for spot-analysing by electron or ion beams Microanalysers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Ion beam profiling system and related methods
- Patent number 11,598,890
- Issue date Mar 7, 2023
- Battelle Energy Alliance, LLC
- Chase N. Taylor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam profiles for analytic equipment configuration
- Patent number 11,508,549
- Issue date Nov 22, 2022
- FEI Company
- Herman Carlo Floresca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample inspection device and sample inspection method
- Patent number 11,150,204
- Issue date Oct 19, 2021
- Photo electron Soul Inc.
- Tomohiro Nishitani
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle microscope with a manipulator device, and method o...
- Patent number 11,127,560
- Issue date Sep 21, 2021
- FEI Company
- Johannes A. H. W. G. Persoon
- G02 - OPTICS
Information Patent Grant
X-ray analyzer and method for correcting counting rate
- Patent number 10,748,741
- Issue date Aug 18, 2020
- Jeol Ltd.
- Kazunori Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and control method
- Patent number 10,741,359
- Issue date Aug 11, 2020
- Jeol Ltd.
- Akira Abe
- G01 - MEASURING TESTING
Information Patent Grant
Handheld material analyser
- Patent number 10,712,296
- Issue date Jul 14, 2020
- ORION ENGINEERING LIMITED
- Vladimir Vishnyakov
- G01 - MEASURING TESTING
Information Patent Grant
Method of performing electron diffraction pattern analysis upon a s...
- Patent number 10,663,414
- Issue date May 26, 2020
- Oxford Instruments Nanotechnology Tools Limited
- Frank Willi Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic lens, and parallel beam generation device and paralle...
- Patent number 10,614,992
- Issue date Apr 7, 2020
- National University Corporation Nara Institute of Science and Technology
- Fumihiko Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Ion source and electron source having single-atom termination struc...
- Patent number 10,529,531
- Issue date Jan 7, 2020
- Hitachi High-Tech Science Corporation
- Chuhei Oshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image type electron spin polarimeter
- Patent number 9,741,533
- Issue date Aug 22, 2017
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy...
- Shan Qiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mineral identification using sequential decomposition into elements...
- Patent number 9,734,986
- Issue date Aug 15, 2017
- FEI Company
- Michael James Owen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample-specific reference spectra library
- Patent number 9,719,950
- Issue date Aug 1, 2017
- FEI Company
- Michael James Owen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object information obtaining apparatus, program, and imaging system
- Patent number 9,702,831
- Issue date Jul 11, 2017
- Canon Kabushiki Kaisha
- Kentaro Nagai
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of acquiring EBSP patterns
- Patent number 9,618,463
- Issue date Apr 11, 2017
- FEI Company
- Marek Uncovský
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectroscopic element and charged particle beam device using the same
- Patent number 9,601,308
- Issue date Mar 21, 2017
- Hitachi, Ltd.
- Yoshihiro Anan
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Projection-type charged particle optical system and imaging mass sp...
- Patent number 9,570,276
- Issue date Feb 14, 2017
- Canon Kabushiki Kaisha
- Kota Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two rotating electric fields mass analyzer
- Patent number 9,570,279
- Issue date Feb 14, 2017
- OFFICE TANDEM L.L.C.
- Masanao Hotta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source, ion gun, and analysis instrument
- Patent number 9,372,161
- Issue date Jun 21, 2016
- ULVAC-PHI, INC.
- Daisuke Sakai
- G01 - MEASURING TESTING
Information Patent Grant
Device for spot size measurement at wafer level using a knife edge...
- Patent number 9,240,306
- Issue date Jan 19, 2016
- Mapper Lithography IP B.V.
- Jan Andries Meijer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,236,225
- Issue date Jan 12, 2016
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam apparatus and sample processing method using...
- Patent number 9,202,671
- Issue date Dec 1, 2015
- Hitachi High-Tech Science Corporation
- Xin Man
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for analising a radiating material using a microprobe
- Patent number 9,052,272
- Issue date Jun 9, 2015
- Commisariat A l'Energie Atomique et Aux Energies Alternatives
- Jérôme Lamontagne
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle radiation apparatus
- Patent number 9,053,902
- Issue date Jun 9, 2015
- Hitachi High-Technologies Corporation
- Yuta Ebine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mineral identification using sequential decomposition into elements...
- Patent number 9,048,067
- Issue date Jun 2, 2015
- FEI Company
- Michael James Owen
- G01 - MEASURING TESTING
Information Patent Grant
Device for mass selective determination of an ion
- Patent number 9,035,245
- Issue date May 19, 2015
- Carl Zeiss Microscopy GmbH
- Albrecht Glasmachers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting high atomic number materials with cosmic ray muon tomography
- Patent number 9,035,236
- Issue date May 19, 2015
- Atomic Energy of Canada Limited
- Vinicius Anghel
- G01 - MEASURING TESTING
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,012,867
- Issue date Apr 21, 2015
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam interference device and electron beam interferometry
- Patent number 8,946,628
- Issue date Feb 3, 2015
- Hitachi, Ltd.
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Grant
Method for integrated circuit diagnosis
- Patent number 8,809,074
- Issue date Aug 19, 2014
- Micron Technology, Inc.
- Mark J. Williamson
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
EBEAM INSPECTION
- Publication number 20240120173
- Publication date Apr 11, 2024
- VueReal Inc.
- Gholamreza CHAJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROFILING SYSTEM AND RELATED METHODS
- Publication number 20210396894
- Publication date Dec 23, 2021
- Battelle Energy Alliance, LLC
- Chase N. Taylor
- G01 - MEASURING TESTING
Information Patent Application
PARTICLE BEAM PROFILES FOR ANALYTIC EQUIPMENT CONFIGURATION
- Publication number 20210125808
- Publication date Apr 29, 2021
- FEI Company
- Herman Carlo Floresca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HANDHELD MATERIAL ANALYSER
- Publication number 20200088660
- Publication date Mar 19, 2020
- ORION ENGINEERING LIMITED
- Vladimir VISHNYAKOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE INSPECTION DEVICE AND SAMPLE INSPECTION METHOD
- Publication number 20200080949
- Publication date Mar 12, 2020
- PHOTO ELECTRON SOUL INC.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MICROSCOPE WITH A MANIPULATOR DEVICE, AND METHOD O...
- Publication number 20200066482
- Publication date Feb 27, 2020
- FEI Company
- Johannes A. H. W. G. Persoon
- G02 - OPTICS
Information Patent Application
X-Ray Analyzer and Method for Correcting Counting Rate
- Publication number 20200058464
- Publication date Feb 20, 2020
- JEOL Ltd.
- Kazunori Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE AND ELECTRON SOURCE HAVING SINGLE-ATOM TERMINATION STRUC...
- Publication number 20190164719
- Publication date May 30, 2019
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Chuhei OSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope and Control Method
- Publication number 20180330917
- Publication date Nov 15, 2018
- JEOL Ltd.
- Akira Abe
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC LENS, AND PARALLEL BEAM GENERATION DEVICE AND PARALLE...
- Publication number 20180211812
- Publication date Jul 26, 2018
- National University Corporation Nara Institute of Science and Technology
- Fumihiko MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PERFORMING ELECTRON DIFFRACTION PATTERN ANALYSIS UPON A S...
- Publication number 20160356729
- Publication date Dec 8, 2016
- OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
- Frank Willi BAUER
- G01 - MEASURING TESTING
Information Patent Application
Sample-specific Reference Spectra Library
- Publication number 20160245762
- Publication date Aug 25, 2016
- FEI Company
- Michael James Owen
- G01 - MEASURING TESTING
Information Patent Application
Inspection of inconsistencies in and on semiconductor devices and s...
- Publication number 20160123905
- Publication date May 5, 2016
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G01 - MEASURING TESTING
Information Patent Application
OBJECT INFORMATION OBTAINING APPARATUS, PROGRAM, AND IMAGING SYSTEM
- Publication number 20150308967
- Publication date Oct 29, 2015
- Canon Kabushiki Kaisha
- Kentaro Nagai
- G01 - MEASURING TESTING
Information Patent Application
Multi-Beam Tool for Cutting Patterns
- Publication number 20150311030
- Publication date Oct 29, 2015
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE...
- Publication number 20150001423
- Publication date Jan 1, 2015
- MAPPER LITHOGRAPHY IP BV
- Jan Andries Meijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR MASS SELECTIVE DETERMINATION OF AN ION
- Publication number 20140339424
- Publication date Nov 20, 2014
- CARL ZEISS MICROSCOPY GMBH
- Albrecht Glasmachers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Interference Device and Electron Beam Interferometry
- Publication number 20140332684
- Publication date Nov 13, 2014
- Hitachi, Ltd
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Application
DETECTING HIGH ATOMIC NUMBER MATERIALS WITH COSMIC RAY MUON TOMOGRAPHY
- Publication number 20140332685
- Publication date Nov 13, 2014
- ATOMIC ENERGY OF CANADA LIMITED
- Vinicius Anghel
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR ANALISING A RADIATING MATERIAL USING A MICROPROBE
- Publication number 20140326880
- Publication date Nov 6, 2014
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Jérôme Lamontagne
- G01 - MEASURING TESTING
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20140306121
- Publication date Oct 16, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND SAMPLE PROCESSING METHOD USING...
- Publication number 20140291511
- Publication date Oct 2, 2014
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Xin MAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE RADIATION APPARATUS
- Publication number 20140284477
- Publication date Sep 25, 2014
- Yuta Ebine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINERAL IDENTIFICATION USING SEQUENTIAL DECOMPOSITION INTO ELEMENTS...
- Publication number 20140117229
- Publication date May 1, 2014
- FEI Company
- Michael James Owen
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INTEGRATED CIRCUIT DIAGNOSIS
- Publication number 20130295700
- Publication date Nov 7, 2013
- Mark J. Williamson
- G01 - MEASURING TESTING
Information Patent Application
GRAPHENE-BASED MEMBRANES AS ELECTRON TRANSPARENT WINDOWS FOR AMBIEN...
- Publication number 20130146221
- Publication date Jun 13, 2013
- SOUTHERN ILLINOIS UNIVERSITY CARBONDALE
- Andrei Kolmakov
- B82 - NANO-TECHNOLOGY
Information Patent Application
HOLLOW CYLINDRICAL ANALYZER
- Publication number 20130112870
- Publication date May 9, 2013
- Victor Gorelik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD
- Publication number 20130092837
- Publication date Apr 18, 2013
- HOYA CORPORATION
- Hiroshi Yamashita
- G11 - INFORMATION STORAGE
Information Patent Application
Imaging energy filter for electrically charged particles and spectr...
- Publication number 20120261571
- Publication date Oct 18, 2012
- Dietmar Funnemann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20120141693
- Publication date Jun 7, 2012
- ALIS Corporation
- Billy W. Ward
- B82 - NANO-TECHNOLOGY

Tubes for spot-analysing by electron or ion beams Microanalysers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion beam profiling system and related methods

Particle beam profiles for analytic equipment configuration

Sample inspection device and sample inspection method

Charged particle microscope with a manipulator device, and method o...

X-ray analyzer and method for correcting counting rate

Electron microscope and control method

Handheld material analyser

Method of performing electron diffraction pattern analysis upon a s...

Electrostatic lens, and parallel beam generation device and paralle...

Ion source and electron source having single-atom termination struc...

Image type electron spin polarimeter

Mineral identification using sequential decomposition into elements...

Sample-specific reference spectra library

Object information obtaining apparatus, program, and imaging system

Method of acquiring EBSP patterns

Spectroscopic element and charged particle beam device using the same

Projection-type charged particle optical system and imaging mass sp...

Two rotating electric fields mass analyzer

Ion source, ion gun, and analysis instrument

Device for spot size measurement at wafer level using a knife edge...

Ion sources, systems and methods

Charged particle beam apparatus and sample processing method using...

Device for analising a radiating material using a microprobe

Charged-particle radiation apparatus

Mineral identification using sequential decomposition into elements...

Device for mass selective determination of an ion

Detecting high atomic number materials with cosmic ray muon tomography

Ion sources, systems and methods

Electron beam interference device and electron beam interferometry

Method for integrated circuit diagnosis

Patents Applicationslast 30 patents

EBEAM INSPECTION

ION BEAM PROFILING SYSTEM AND RELATED METHODS

PARTICLE BEAM PROFILES FOR ANALYTIC EQUIPMENT CONFIGURATION

HANDHELD MATERIAL ANALYSER

SAMPLE INSPECTION DEVICE AND SAMPLE INSPECTION METHOD

CHARGED PARTICLE MICROSCOPE WITH A MANIPULATOR DEVICE, AND METHOD O...

X-Ray Analyzer and Method for Correcting Counting Rate

ION SOURCE AND ELECTRON SOURCE HAVING SINGLE-ATOM TERMINATION STRUC...

Electron Microscope and Control Method

ELECTROSTATIC LENS, AND PARALLEL BEAM GENERATION DEVICE AND PARALLE...

METHOD OF PERFORMING ELECTRON DIFFRACTION PATTERN ANALYSIS UPON A S...

Sample-specific Reference Spectra Library

Inspection of inconsistencies in and on semiconductor devices and s...

OBJECT INFORMATION OBTAINING APPARATUS, PROGRAM, AND IMAGING SYSTEM

Multi-Beam Tool for Cutting Patterns

DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE...

DEVICE FOR MASS SELECTIVE DETERMINATION OF AN ION

Electron Beam Interference Device and Electron Beam Interferometry

DETECTING HIGH ATOMIC NUMBER MATERIALS WITH COSMIC RAY MUON TOMOGRAPHY

DEVICE FOR ANALISING A RADIATING MATERIAL USING A MICROPROBE

ION SOURCES, SYSTEMS AND METHODS

CHARGED PARTICLE BEAM APPARATUS AND SAMPLE PROCESSING METHOD USING...

CHARGED-PARTICLE RADIATION APPARATUS

MINERAL IDENTIFICATION USING SEQUENTIAL DECOMPOSITION INTO ELEMENTS...

METHOD FOR INTEGRATED CIRCUIT DIAGNOSIS

GRAPHENE-BASED MEMBRANES AS ELECTRON TRANSPARENT WINDOWS FOR AMBIEN...

HOLLOW CYLINDRICAL ANALYZER

PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD

Imaging energy filter for electrically charged particles and spectr...

ION SOURCES, SYSTEMS AND METHODS