Ultraviolet [UV] mirrors

Industry

CPC
G02B5/0891

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Parent Industries

GPHYSICS G02Optics G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS G02B5/00Optical elements other than lenses

Current Industry

G02B5/0891Ultraviolet [UV] mirrors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for heating an optical element in a microlithographic projec...
- Patent number 12,353,141
- Issue date Jul 8, 2025
- Carl Zeiss SMT GmbH
- Dirk Hellweg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Curved reticle by mechanical and phase bending along orthogonal axes
- Patent number 12,346,029
- Issue date Jul 1, 2025
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Composite cooling film and article including the same
- Patent number 12,339,471
- Issue date Jun 24, 2025
- 3M Innovative Properties Company
- Timothy J. Hebrink
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Devices for disinfecting a surface using ultraviolet light
- Patent number 12,337,070
- Issue date Jun 24, 2025
- The United States of America as represented by the Secretary of the Navy
- Christopher S. Doyle
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Amorphous or nanocrystalline molybdenum nitride and silicon nitride...
- Patent number 12,339,477
- Issue date Jun 24, 2025
- Lawrence Livermore National Security, LLC
- Catherine Burcklen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for generating EUV radiation
- Patent number 12,321,099
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sheng-Min Wang
- G02 - OPTICS
Information Patent Grant
Method for operating an EUV lithography apparatus, and EUV lithogra...
- Patent number 12,287,588
- Issue date Apr 29, 2025
- Carl Zeiss SMT GmbH
- Moritz Becker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Information display apparatus
- Patent number 12,287,480
- Issue date Apr 29, 2025
- MAXELL, LTD.
- Koji Hirata
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Oxygen-loss resistant top coating for optical elements
- Patent number 12,287,455
- Issue date Apr 29, 2025
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drive device, optical system and lithography apparatus
- Patent number 12,276,916
- Issue date Apr 15, 2025
- Carl Zeiss SMT GmbH
- Michel Aliman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
EUV collector mirror
- Patent number 12,276,815
- Issue date Apr 15, 2025
- Carl Zeiss SMT GmbH
- Marcus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,265,336
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kai-Chieh Chang
- G02 - OPTICS
Information Patent Grant
Fluid system with integrated disinfecting optics
- Patent number 12,257,373
- Issue date Mar 25, 2025
- Stephen J. Sustrick
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method for producing a substrate for an optical element
- Patent number 12,196,986
- Issue date Jan 14, 2025
- Carl Zeiss SMT GmbH
- Andreas Schmehl
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for sterilization of inside of vehicle using drone
- Patent number 12,186,443
- Issue date Jan 7, 2025
- Hyundai Motor Company
- Jae Seung Lee
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Grant
Sterilization device, air filter, and filtration system
- Patent number 12,128,161
- Issue date Oct 29, 2024
- SHENZHEN YITOA INTELLIGENT INDUSTRIAL CO., LTD
- Junhuang Zhuang
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
EUV lithography apparatus
- Patent number 12,119,129
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng Hung Tsai
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Mirror for an illumination optical unit of a projection exposure ap...
- Patent number 12,111,578
- Issue date Oct 8, 2024
- Carl Zeiss SMT GmbH
- Christof Jalics
- G02 - OPTICS
Information Patent Grant
Apparatus and method for cleaning an inspection system
- Patent number 12,055,478
- Issue date Aug 6, 2024
- ASML Netherlands B.V.
- Andrey Nikipelov
- G01 - MEASURING TESTING
Information Patent Grant
Optical element having a coating for influencing heating radiation...
- Patent number 12,025,818
- Issue date Jul 2, 2024
- Carl Zeiss SMT GmbH
- Boris Bittner
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Systems and methods that utilize angled photolithography for manufa...
- Patent number 11,994,802
- Issue date May 28, 2024
- Waymo LLC
- James Dunphy
- G02 - OPTICS
Information Patent Grant
Substrate for a reflective optical element
- Patent number 11,987,521
- Issue date May 21, 2024
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Radiation source apparatus and method for using the same
- Patent number 11,948,702
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chung Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fabric warming rack
- Patent number 11,944,240
- Issue date Apr 2, 2024
- Joseph Schwartz
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Grant
Optical diffraction component
- Patent number 11,947,265
- Issue date Apr 2, 2024
- Carl Zeiss SMT GmbH
- Heiko Feldmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Information display apparatus
- Patent number 11,933,980
- Issue date Mar 19, 2024
- MAXELL, LTD.
- Koji Hirata
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Solar reflecting film and preparation method thereof
- Patent number 11,899,227
- Issue date Feb 13, 2024
- NINGBO RADI-COOL ADVANCED ENERGY TECHNOLOGIES CO., LTD.
- Ronggui Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measuring apparatus for interferometrically determining a surface s...
- Patent number 11,892,283
- Issue date Feb 6, 2024
- Carl Zeiss SMT GmbH
- Stefan Schulte
- G01 - MEASURING TESTING
Information Patent Grant
UV reflective mirrors for display fabrication
- Patent number 11,885,990
- Issue date Jan 30, 2024
- Materion Corporation
- Ki-Sung Song
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Optical element and lithography system
- Patent number 11,874,525
- Issue date Jan 16, 2024
- Carl Zeiss SMT GmbH
- Eric Eva
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
FILM PRODUCT FOR APPLICATION TO A BUILDING ENVELOPE FOR PROTECTION...
- Publication number 20250223866
- Publication date Jul 10, 2025
- BirdShades Innovations GmbH
- Christoph CERNY
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Application
INFORMATION DISPLAY APPARATUS
- Publication number 20250216677
- Publication date Jul 3, 2025
- Maxell, Ltd.
- Koji HIRATA
- B60 - VEHICLES IN GENERAL
Information Patent Application
APPARATUS FOR REFLECTING AN INCIDENT RAY OF ELECTROMAGNETIC RADIATION
- Publication number 20250205377
- Publication date Jun 26, 2025
- 12180235 Canada Ltd.
- David Allan Prystupa
- A62 - LIFE-SAVING FIRE-FIGHTING
Information Patent Application
Reflective Surface for a Photochemistry Chamber
- Publication number 20250164674
- Publication date May 22, 2025
- 12180235 Canada Ltd.
- David Prystupa
- G02 - OPTICS
Information Patent Application
DIRECTING ELECTROMAGNETIC RADIATION
- Publication number 20250147207
- Publication date May 8, 2025
- 12180235 Canada Ltd.
- David Allan Prystupa
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHOD FOR PRODUCING A SUBSTRATE FOR AN OPTICAL ELEMENT, AND REFLEC...
- Publication number 20250093557
- Publication date Mar 20, 2025
- Carl Zeiss SMT GMBH
- Andreas SCHMEHL
- C30 - CRYSTAL GROWTH
Information Patent Application
OPTICAL SYSTEM COMPRISING AN EUV MIRROR AND METHOD FOR OPERATING AN...
- Publication number 20250060517
- Publication date Feb 20, 2025
- Carl Zeiss SMT GMBH
- Hartmut Enkisch
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR A WAVELENGTH IN THE EXTREME ULTRAVIO...
- Publication number 20250020838
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Alexandra PAZIDIS
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240385540
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chieh CHANG
- G02 - OPTICS
Information Patent Application
EUV LITHOGRAPHY APPARATUS
- Publication number 20240379259
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng Hung TSAI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM
- Publication number 20240353315
- Publication date Oct 24, 2024
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE HOLLOW STRUCTURE, M...
- Publication number 20240329285
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Tobias ULLSPERGER
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ILLUMINATION APPARATUS AND ILLUMINATION METHOD
- Publication number 20240302670
- Publication date Sep 12, 2024
- Lasertec Corporation
- Keitaro HAYASHIDA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
DEVICE FOR AMPLIFYING LIGHT BY MEANS OF REFLECTIONS IN CONDUITS
- Publication number 20240248254
- Publication date Jul 25, 2024
- Johann-Marius MILOSIU
- G02 - OPTICS
Information Patent Application
OPTICAL DISC UNIT FOR ULTRAVIOLET STERILIZER, METHOD OF MANUFACTURI...
- Publication number 20240231117
- Publication date Jul 11, 2024
- Hyundai Motor Company
- Han-Joo JANG
- G11 - INFORMATION STORAGE
Information Patent Application
INFORMATION DISPLAY APPARATUS
- Publication number 20240219718
- Publication date Jul 4, 2024
- Maxell, Ltd.
- Koji HIRATA
- B60 - VEHICLES IN GENERAL
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
- Publication number 20240184211
- Publication date Jun 6, 2024
- Gigaphoton Inc.
- Yuichi NISHIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ULTRAVIOLET-C EMITTING DISINFECTING DEVICE AND METHOD OF USING THE...
- Publication number 20240115746
- Publication date Apr 11, 2024
- Timothy J. Hebrink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV REFLECTIVE MIRRORS FOR DISPLAY FABRICATION
- Publication number 20240118464
- Publication date Apr 11, 2024
- MATERION CORPORATION
- Ki-Sung SONG
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMEN...
- Publication number 20240111216
- Publication date Apr 4, 2024
- Carl Zeiss SMT GMBH
- Dirk EHM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMAGING OPTICAL UNIT
- Publication number 20240094637
- Publication date Mar 21, 2024
- Carl Zeiss SMT GMBH
- Hans-Jürgen Rostalski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
- Publication number 20240085800
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...
- Publication number 20240035163
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Felix LANGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM
- Publication number 20240027730
- Publication date Jan 25, 2024
- Carl Zeiss SMT GMBH
- Christoph Zaczek
- G02 - OPTICS
Information Patent Application
METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...
- Publication number 20240019613
- Publication date Jan 18, 2024
- Carl Zeiss SMT GMBH
- Christoph Zaczek
- G02 - OPTICS
Information Patent Application
EUV MIRROR WITH IMPROVED OPTICAL STABILITY
- Publication number 20240019786
- Publication date Jan 18, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Yung-Yao Lee
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ELEMENT, OPTICAL ARRANGEMENT AND INSERT COMPONENT
- Publication number 20240004160
- Publication date Jan 4, 2024
- Carl Zeiss SMT GMBH
- Eduard Schweigert
- G02 - OPTICS
Information Patent Application
PROCESS FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR THE EXTREME...
- Publication number 20230417961
- Publication date Dec 28, 2023
- Carl Zeiss SMT GMBH
- Thomas SCHICKETANZ
- B24 - GRINDING POLISHING
Information Patent Application
IN-SITU ALUMINIUM CLEANING USING ATOMIC LAYER ETCHING FOLLOWED BY A...
- Publication number 20230417954
- Publication date Dec 28, 2023
- Corning Incorporated
- Donald Erwin Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method For Producing A Continuous Diffractive Optical Element, Devi...
- Publication number 20230375760
- Publication date Nov 23, 2023
- Rheinische Friedrich-Wilhelms-Universitat Bonn
- Martin WEITZ
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Ultraviolet [UV] mirrors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for heating an optical element in a microlithographic projec...

Curved reticle by mechanical and phase bending along orthogonal axes

Composite cooling film and article including the same

Devices for disinfecting a surface using ultraviolet light

Amorphous or nanocrystalline molybdenum nitride and silicon nitride...

Method for generating EUV radiation

Method for operating an EUV lithography apparatus, and EUV lithogra...

Information display apparatus

Oxygen-loss resistant top coating for optical elements

Drive device, optical system and lithography apparatus

EUV collector mirror

Semiconductor processing tool and methods of operation

Fluid system with integrated disinfecting optics

Method for producing a substrate for an optical element

Apparatus for sterilization of inside of vehicle using drone

Sterilization device, air filter, and filtration system

EUV lithography apparatus

Mirror for an illumination optical unit of a projection exposure ap...

Apparatus and method for cleaning an inspection system

Optical element having a coating for influencing heating radiation...

Systems and methods that utilize angled photolithography for manufa...

Substrate for a reflective optical element

Radiation source apparatus and method for using the same

Fabric warming rack

Optical diffraction component

Information display apparatus

Solar reflecting film and preparation method thereof

Measuring apparatus for interferometrically determining a surface s...

UV reflective mirrors for display fabrication

Optical element and lithography system

Patents Applicationslast 30 patents

FILM PRODUCT FOR APPLICATION TO A BUILDING ENVELOPE FOR PROTECTION...

INFORMATION DISPLAY APPARATUS

APPARATUS FOR REFLECTING AN INCIDENT RAY OF ELECTROMAGNETIC RADIATION

Reflective Surface for a Photochemistry Chamber

DIRECTING ELECTROMAGNETIC RADIATION

METHOD FOR PRODUCING A SUBSTRATE FOR AN OPTICAL ELEMENT, AND REFLEC...

OPTICAL SYSTEM COMPRISING AN EUV MIRROR AND METHOD FOR OPERATING AN...

REFLECTIVE OPTICAL ELEMENT FOR A WAVELENGTH IN THE EXTREME ULTRAVIO...

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

EUV LITHOGRAPHY APPARATUS

APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM

METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE HOLLOW STRUCTURE, M...

ILLUMINATION APPARATUS AND ILLUMINATION METHOD

DEVICE FOR AMPLIFYING LIGHT BY MEANS OF REFLECTIONS IN CONDUITS

OPTICAL DISC UNIT FOR ULTRAVIOLET STERILIZER, METHOD OF MANUFACTURI...

INFORMATION DISPLAY APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...

ULTRAVIOLET-C EMITTING DISINFECTING DEVICE AND METHOD OF USING THE...

UV REFLECTIVE MIRRORS FOR DISPLAY FABRICATION

PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMEN...

IMAGING OPTICAL UNIT

PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...

METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...

METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM

METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...

EUV MIRROR WITH IMPROVED OPTICAL STABILITY

OPTICAL ELEMENT, OPTICAL ARRANGEMENT AND INSERT COMPONENT

PROCESS FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR THE EXTREME...

IN-SITU ALUMINIUM CLEANING USING ATOMIC LAYER ETCHING FOLLOWED BY A...

Method For Producing A Continuous Diffractive Optical Element, Devi...