Ultraviolet [UV] mirrors

Industry

CPC
G02B5/0891

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Parent Industries

GPHYSICS G02Optics G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS G02B5/00Optical elements other than lenses

Current Industry

G02B5/0891Ultraviolet [UV] mirrors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Sterilization device, air filter, and filtration system
- Patent number 12,128,161
- Issue date Oct 29, 2024
- SHENZHEN YITOA INTELLIGENT INDUSTRIAL CO., LTD
- Junhuang Zhuang
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
EUV lithography apparatus
- Patent number 12,119,129
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng Hung Tsai
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Mirror for an illumination optical unit of a projection exposure ap...
- Patent number 12,111,578
- Issue date Oct 8, 2024
- Carl Zeiss SMT GmbH
- Christof Jalics
- G02 - OPTICS
Information Patent Grant
Apparatus and method for cleaning an inspection system
- Patent number 12,055,478
- Issue date Aug 6, 2024
- ASML Netherlands B.V.
- Andrey Nikipelov
- G01 - MEASURING TESTING
Information Patent Grant
Optical element having a coating for influencing heating radiation...
- Patent number 12,025,818
- Issue date Jul 2, 2024
- Carl Zeiss SMT GmbH
- Boris Bittner
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Systems and methods that utilize angled photolithography for manufa...
- Patent number 11,994,802
- Issue date May 28, 2024
- Waymo LLC
- James Dunphy
- G02 - OPTICS
Information Patent Grant
Substrate for a reflective optical element
- Patent number 11,987,521
- Issue date May 21, 2024
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Radiation source apparatus and method for using the same
- Patent number 11,948,702
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chung Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fabric warming rack
- Patent number 11,944,240
- Issue date Apr 2, 2024
- Joseph Schwartz
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Grant
Optical diffraction component
- Patent number 11,947,265
- Issue date Apr 2, 2024
- Carl Zeiss SMT GmbH
- Heiko Feldmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Information display apparatus
- Patent number 11,933,980
- Issue date Mar 19, 2024
- MAXELL, LTD.
- Koji Hirata
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Solar reflecting film and preparation method thereof
- Patent number 11,899,227
- Issue date Feb 13, 2024
- NINGBO RADI-COOL ADVANCED ENERGY TECHNOLOGIES CO., LTD.
- Ronggui Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measuring apparatus for interferometrically determining a surface s...
- Patent number 11,892,283
- Issue date Feb 6, 2024
- Carl Zeiss SMT GmbH
- Stefan Schulte
- G01 - MEASURING TESTING
Information Patent Grant
UV reflective mirrors for display fabrication
- Patent number 11,885,990
- Issue date Jan 30, 2024
- Materion Corporation
- Ki-Sung Song
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Optical element and lithography system
- Patent number 11,874,525
- Issue date Jan 16, 2024
- Carl Zeiss SMT GmbH
- Eric Eva
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for reflecting an incident ray of electromagnetic radiation
- Patent number 11,872,321
- Issue date Jan 16, 2024
- 12180235 Canada Ltd.
- David Allan Prystupa
- A62 - LIFE-SAVING FIRE-FIGHTING
Information Patent Grant
Device for EUV light source
- Patent number 11,817,230
- Issue date Nov 14, 2023
- ESOL Inc.
- Dong Gun Lee
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Mirror, in particular for a microlithographic projection exposure a...
- Patent number 11,809,085
- Issue date Nov 7, 2023
- Carl Zeiss SMT GmbH
- Hans Michael Stiepan
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Apparatus for generating extreme ultraviolet (EUV), method of manuf...
- Patent number 11,729,896
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Jihoon Na
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Graded interface in Bragg reflector
- Patent number 11,720,013
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Wen Xiao
- G02 - OPTICS
Information Patent Grant
Radiation source apparatus and method for using the same
- Patent number 11,694,820
- Issue date Jul 4, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chung Tu
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet (EUV) collector inspection apparatus and method
- Patent number 11,676,263
- Issue date Jun 13, 2023
- Samsung Electronics Co., Ltd.
- Dong-Hyub Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Information display apparatus
- Patent number 11,675,189
- Issue date Jun 13, 2023
- MAXELL, LTD.
- Koji Hirata
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Mirror for extreme ultraviolet light and extreme ultraviolet light...
- Patent number 11,614,572
- Issue date Mar 28, 2023
- Gigaphoton Inc.
- Osamu Wakabayashi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of reducing roughness and/or defects on an optical surface a...
- Patent number 11,605,478
- Issue date Mar 14, 2023
- Zygo Corporation
- John Matthew Kincade
- G02 - OPTICS
Information Patent Grant
EUV lithography apparatus
- Patent number 11,605,477
- Issue date Mar 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng Hung Tsai
- G02 - OPTICS
Information Patent Grant
Catadioptric lens and optical system comprising such a lens
- Patent number 11,561,381
- Issue date Jan 24, 2023
- Carl Zeiss SMT GmbH
- Konstantin Forcht
- G02 - OPTICS
Information Patent Grant
Nested elliptic reflector for curing optical fibers
- Patent number 11,548,190
- Issue date Jan 10, 2023
- Phoseon Technology, Inc.
- Doug Childers
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for in situ protection of an aluminum layer and optical arra...
- Patent number 11,525,946
- Issue date Dec 13, 2022
- Carl Zeiss SMT GmbH
- Vitaliy Shklover
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of mitigating defects on an optical surface and mirror forme...
- Patent number 11,520,234
- Issue date Dec 6, 2022
- Zygo Corporation
- John Matthew Kincade
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240385540
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chieh CHANG
- G02 - OPTICS
Information Patent Application
EUV LITHOGRAPHY APPARATUS
- Publication number 20240379259
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng Hung TSAI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM
- Publication number 20240353315
- Publication date Oct 24, 2024
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE HOLLOW STRUCTURE, M...
- Publication number 20240329285
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Tobias ULLSPERGER
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ILLUMINATION APPARATUS AND ILLUMINATION METHOD
- Publication number 20240302670
- Publication date Sep 12, 2024
- Lasertec Corporation
- Keitaro HAYASHIDA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
DEVICE FOR AMPLIFYING LIGHT BY MEANS OF REFLECTIONS IN CONDUITS
- Publication number 20240248254
- Publication date Jul 25, 2024
- Johann-Marius MILOSIU
- G02 - OPTICS
Information Patent Application
OPTICAL DISC UNIT FOR ULTRAVIOLET STERILIZER, METHOD OF MANUFACTURI...
- Publication number 20240231117
- Publication date Jul 11, 2024
- Hyundai Motor Company
- Han-Joo JANG
- G11 - INFORMATION STORAGE
Information Patent Application
INFORMATION DISPLAY APPARATUS
- Publication number 20240219718
- Publication date Jul 4, 2024
- Maxell, Ltd.
- Koji HIRATA
- B60 - VEHICLES IN GENERAL
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
- Publication number 20240184211
- Publication date Jun 6, 2024
- Gigaphoton Inc.
- Yuichi NISHIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ULTRAVIOLET-C EMITTING DISINFECTING DEVICE AND METHOD OF USING THE...
- Publication number 20240115746
- Publication date Apr 11, 2024
- Timothy J. Hebrink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV REFLECTIVE MIRRORS FOR DISPLAY FABRICATION
- Publication number 20240118464
- Publication date Apr 11, 2024
- MATERION CORPORATION
- Ki-Sung SONG
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMEN...
- Publication number 20240111216
- Publication date Apr 4, 2024
- Carl Zeiss SMT GMBH
- Dirk EHM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMAGING OPTICAL UNIT
- Publication number 20240094637
- Publication date Mar 21, 2024
- Carl Zeiss SMT GMBH
- Hans-Jürgen Rostalski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
- Publication number 20240085800
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...
- Publication number 20240035163
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Felix LANGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM
- Publication number 20240027730
- Publication date Jan 25, 2024
- Carl Zeiss SMT GMBH
- Christoph Zaczek
- G02 - OPTICS
Information Patent Application
METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...
- Publication number 20240019613
- Publication date Jan 18, 2024
- Carl Zeiss SMT GMBH
- Christoph Zaczek
- G02 - OPTICS
Information Patent Application
EUV MIRROR WITH IMPROVED OPTICAL STABILITY
- Publication number 20240019786
- Publication date Jan 18, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Yung-Yao Lee
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ELEMENT, OPTICAL ARRANGEMENT AND INSERT COMPONENT
- Publication number 20240004160
- Publication date Jan 4, 2024
- Carl Zeiss SMT GMBH
- Eduard Schweigert
- G02 - OPTICS
Information Patent Application
PROCESS FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR THE EXTREME...
- Publication number 20230417961
- Publication date Dec 28, 2023
- Carl Zeiss SMT GMBH
- Thomas SCHICKETANZ
- B24 - GRINDING POLISHING
Information Patent Application
IN-SITU ALUMINIUM CLEANING USING ATOMIC LAYER ETCHING FOLLOWED BY A...
- Publication number 20230417954
- Publication date Dec 28, 2023
- Corning Incorporated
- Donald Erwin Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method For Producing A Continuous Diffractive Optical Element, Devi...
- Publication number 20230375760
- Publication date Nov 23, 2023
- Rheinische Friedrich-Wilhelms-Universitat Bonn
- Martin WEITZ
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR PRODUCING A MULTI-PART MIRROR OF A PROJECTION ILLUMINATI...
- Publication number 20230375939
- Publication date Nov 23, 2023
- Carl Zeiss SMT GMBH
- Christoph Zaczek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR EUV LIGHT SOURCE
- Publication number 20230368937
- Publication date Nov 16, 2023
- ESOL Inc.
- Dong Gun LEE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MULTILAYER ARTICLES INCLUDING AN ABSORBENT LAYER AND AN ULTRAVIOLET...
- Publication number 20230355821
- Publication date Nov 9, 2023
- 3M Innovative Properties Company
- Timothy J. Hebrink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFLECTOR AND SOLAR POWER GENERATION SYSTEM
- Publication number 20230353085
- Publication date Nov 2, 2023
- SHENZHEN HELLO TECH ENERGY CO LTD
- Yanjun ZHU
- G02 - OPTICS
Information Patent Application
METHOD FOR HEATING AN OPTICAL ELEMENT IN A MICROLITHO-GRAPHIC PROJE...
- Publication number 20230350312
- Publication date Nov 2, 2023
- Carl Zeiss SMT GMBH
- Dirk Hellweg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY
- Publication number 20230350307
- Publication date Nov 2, 2023
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM
- Publication number 20230305290
- Publication date Sep 28, 2023
- Carl Zeiss SMT GMBH
- Hartmut Enkisch
- G02 - OPTICS
Information Patent Application
RADIATION SOURCE APPARATUS AND METHOD FOR USING THE SAME
- Publication number 20230274850
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chung TU
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Ultraviolet [UV] mirrors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sterilization device, air filter, and filtration system

EUV lithography apparatus

Mirror for an illumination optical unit of a projection exposure ap...

Apparatus and method for cleaning an inspection system

Optical element having a coating for influencing heating radiation...

Systems and methods that utilize angled photolithography for manufa...

Substrate for a reflective optical element

Radiation source apparatus and method for using the same

Fabric warming rack

Optical diffraction component

Information display apparatus

Solar reflecting film and preparation method thereof

Measuring apparatus for interferometrically determining a surface s...

UV reflective mirrors for display fabrication

Optical element and lithography system

Apparatus for reflecting an incident ray of electromagnetic radiation

Device for EUV light source

Mirror, in particular for a microlithographic projection exposure a...

Apparatus for generating extreme ultraviolet (EUV), method of manuf...

Graded interface in Bragg reflector

Radiation source apparatus and method for using the same

Extreme ultraviolet (EUV) collector inspection apparatus and method

Information display apparatus

Mirror for extreme ultraviolet light and extreme ultraviolet light...

Method of reducing roughness and/or defects on an optical surface a...

EUV lithography apparatus

Catadioptric lens and optical system comprising such a lens

Nested elliptic reflector for curing optical fibers

Method for in situ protection of an aluminum layer and optical arra...

Method of mitigating defects on an optical surface and mirror forme...

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

EUV LITHOGRAPHY APPARATUS

APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM

METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE HOLLOW STRUCTURE, M...

ILLUMINATION APPARATUS AND ILLUMINATION METHOD

DEVICE FOR AMPLIFYING LIGHT BY MEANS OF REFLECTIONS IN CONDUITS

OPTICAL DISC UNIT FOR ULTRAVIOLET STERILIZER, METHOD OF MANUFACTURI...

INFORMATION DISPLAY APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...

ULTRAVIOLET-C EMITTING DISINFECTING DEVICE AND METHOD OF USING THE...

UV REFLECTIVE MIRRORS FOR DISPLAY FABRICATION

PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMEN...

IMAGING OPTICAL UNIT

PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...

METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...

METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM

METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...

EUV MIRROR WITH IMPROVED OPTICAL STABILITY

OPTICAL ELEMENT, OPTICAL ARRANGEMENT AND INSERT COMPONENT

PROCESS FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR THE EXTREME...

IN-SITU ALUMINIUM CLEANING USING ATOMIC LAYER ETCHING FOLLOWED BY A...

Method For Producing A Continuous Diffractive Optical Element, Devi...

METHOD FOR PRODUCING A MULTI-PART MIRROR OF A PROJECTION ILLUMINATI...

DEVICE FOR EUV LIGHT SOURCE

MULTILAYER ARTICLES INCLUDING AN ABSORBENT LAYER AND AN ULTRAVIOLET...

REFLECTOR AND SOLAR POWER GENERATION SYSTEM

METHOD FOR HEATING AN OPTICAL ELEMENT IN A MICROLITHO-GRAPHIC PROJE...

OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY

MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM

RADIATION SOURCE APPARATUS AND METHOD FOR USING THE SAME