Use of auxiliary reactants other than used for contributing to the composition of the main film

Industry

CPC
C23C16/45534

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45534Use of auxiliary reactants other than used for contributing to the composition of the main film

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for nucleation of conductive nitride films
- Patent number 11,965,239
- Issue date Apr 23, 2024
- Entegris, Inc.
- Gavin Richards
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of lithium boron comprising nanocomposite s...
- Patent number 11,946,139
- Issue date Apr 2, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor structure
- Patent number 11,942,320
- Issue date Mar 26, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Kun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,887,856
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing vanadium metal
- Patent number 11,873,557
- Issue date Jan 16, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of processing substrate and manufacturing semiconductor dev...
- Patent number 11,848,203
- Issue date Dec 19, 2023
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, recording medium, and...
- Patent number 11,848,201
- Issue date Dec 19, 2023
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition with passivation treatment
- Patent number 11,834,741
- Issue date Dec 5, 2023
- The Board of Trustees of the Leland Stanford Junior University
- Friedrich B. Prinz
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Atomic layer deposition of rhenium containing thin films
- Patent number 11,821,084
- Issue date Nov 21, 2023
- ASM IP Holding, B.V.
- Jani Hamalainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for deposition of molybdenum-containing films
- Patent number 11,821,071
- Issue date Nov 21, 2023
- Lam Research Corporation
- Kyle Jordan Blakeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective processing with etch residue-based inhibitors
- Patent number 11,823,909
- Issue date Nov 21, 2023
- Lam Research Corporation
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium film deposition using low valent metal precursors
- Patent number 11,821,070
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Nasrin Kazem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,781,219
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective film forming composition having a diol structure
- Patent number 11,768,436
- Issue date Sep 26, 2023
- NISSAN CHEMICAL CORPORATION
- Takafumi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing tungsten or molybdenum films
- Patent number 11,761,081
- Issue date Sep 19, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiO2 thin film produced by atomic layer deposition at room temperature
- Patent number 11,753,718
- Issue date Sep 12, 2023
- LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Didier Arl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film
- Patent number 11,746,411
- Issue date Sep 5, 2023
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate and manufacturing semiconductor devi...
- Patent number 11,746,416
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming metal silicon oxide and metal silicon oxynitride...
- Patent number 11,725,280
- Issue date Aug 15, 2023
- ASM IP Holding B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst enhanced seamless ruthenium gap fill
- Patent number 11,680,312
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Byunghoon Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for the generation of metal-containing films
- Patent number 11,655,262
- Issue date May 23, 2023
- David Dominique Schweinfurth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a semiconductor device with air gaps for low capa...
- Patent number 11,646,227
- Issue date May 9, 2023
- Tokyo Electron Limited
- Kandabara Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of silicon oxide on metal surfaces
- Patent number 11,643,720
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Andrea Illiberi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Atomic layer deposition and etching of transition metal dichalcogen...
- Patent number 11,643,728
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Jani Hämäläinen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Simultaneous selective deposition of two different materials on two...
- Patent number 11,608,557
- Issue date Mar 21, 2023
- ASM IP Holding B.V.
- Michael Eugene Givens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for filling a gap
- Patent number 11,610,775
- Issue date Mar 21, 2023
- ASM IP Holding B.V.
- Viljami Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a thin film using a surface protection material
- Patent number 11,591,691
- Issue date Feb 28, 2023
- EGTM CO., LTD.
- Geun Su Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for treating semiconductor process gas and method of trea...
- Patent number 11,549,178
- Issue date Jan 10, 2023
- Samsung Electronics Co., Ltd.
- Suji Gim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Process for the generation of metal-containing films
- Patent number 11,505,562
- Issue date Nov 22, 2022
- BASF SE
- Lukas Mayr
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Process for the generation of metal- or semimetal-containing films
- Patent number 11,505,865
- Issue date Nov 22, 2022
- BASF SE
- David Dominique Schweinfurth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...
- Publication number 20240145301
- Publication date May 2, 2024
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSI...
- Publication number 20240093363
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF SILICON OXIDE ON METAL SURFACES
- Publication number 20240076775
- Publication date Mar 7, 2024
- ASM IP HOLDING B.V.
- Andrea Illiberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...
- Publication number 20240071752
- Publication date Feb 29, 2024
- Kokusai Electric Corporation
- Takayuki WASEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS
- Publication number 20240052486
- Publication date Feb 15, 2024
- LAM RESEARCH CORPORATION
- Kyle Jordan Blakeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS
- Publication number 20240038539
- Publication date Feb 1, 2024
- LAM RESEARCH CORPORATION
- Kashish Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING TUNGSTEN OR MOLYBDENUM FILMS
- Publication number 20240035157
- Publication date Feb 1, 2024
- Entegris, Inc.
- Robert WRIGHT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240011157
- Publication date Jan 11, 2024
- National Cheng Kung University
- Yu Chi CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING REGION-SELECTIVE THIN FILM USING SELECTIVATING A...
- Publication number 20230366080
- Publication date Nov 16, 2023
- EGTM CO., LTD.
- Jae Min KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING MET...
- Publication number 20230357926
- Publication date Nov 9, 2023
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING METAL SILICON OXIDE AND METAL SILICON...
- Publication number 20230349043
- Publication date Nov 2, 2023
- ASM IP HOLDING B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD OF FORMING THIN FILM...
- Publication number 20230313372
- Publication date Oct 5, 2023
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS ND METHODS USING SAME FOR GERMANIUM SEED LAYER
- Publication number 20230287562
- Publication date Sep 14, 2023
- VERSUM MATERIALS US, LLC
- MATTHEW R. MACDONALD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD OF FORMING THIN FILM...
- Publication number 20230257881
- Publication date Aug 17, 2023
- Soulbrain Co., LTD
- Chang Bong YEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...
- Publication number 20230250534
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Jani Hämäläinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH INHIBITOR FOR FORMING PELLICLE-PROTECTIVE THIN FILM, METHOD...
- Publication number 20230251565
- Publication date Aug 10, 2023
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION METHOD AND METHOD OF FABRICATING ELECTRONIC DE...
- Publication number 20230227972
- Publication date Jul 20, 2023
- SK hynix Inc.
- Do Han LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FILLING A GAP
- Publication number 20230207309
- Publication date Jun 29, 2023
- ASM IP HOLDING B.V.
- Viljami PORE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIMULTANEOUS SELECTIVE DEPOSITION OF TWO DIFFERENT MATERIALS ON TWO...
- Publication number 20230203644
- Publication date Jun 29, 2023
- ASM IP HOLDING B.V.
- Michael Eugene Givens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Forming Molybdenum-Containing Films Deposited On Element...
- Publication number 20230203645
- Publication date Jun 29, 2023
- Merck Patent GmbH
- Guo LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF IODINE-CONTAINING CARBON FILMS
- Publication number 20230193460
- Publication date Jun 22, 2023
- American Air Liquide, Inc.
- Phong NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR IMPROVING THIN FILM QUALITY
- Publication number 20230175129
- Publication date Jun 8, 2023
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION USING THERMAL AND PLASMA-ENHANCED PROCESS
- Publication number 20230139917
- Publication date May 4, 2023
- ASM IP HOLDING, B.V.
- Eva Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING THIN FILM USING SURFACE PROTECTION MATERIAL
- Publication number 20230057512
- Publication date Feb 23, 2023
- EGTM CO., LTD.
- Geun Su LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A FILM
- Publication number 20230058258
- Publication date Feb 23, 2023
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE GENERATION OF METAL- OR SEMIMETAL-CONTAINING FILMS
- Publication number 20230046318
- Publication date Feb 16, 2023
- BASF SE
- Sinja Verena KLENK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compounds And Methods For Selectively Forming Metal-Containing Films
- Publication number 20220411930
- Publication date Dec 29, 2022
- Merck Patent GmbH
- Charith NANAYAKKARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOELECTROCHEMICAL DEVICE AND METHOD FOR PRODUCING HYDROGEN USING...
- Publication number 20220349073
- Publication date Nov 3, 2022
- Industry-Academic Coorporation Foundation, Yonsei University
- Joo Ho MOON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATALYST ENHANCED SEAMLESS RUTHENIUM GAP FILL
- Publication number 20220333232
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Byunghoon Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD
- Publication number 20220328318
- Publication date Oct 13, 2022
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Use of auxiliary reactants other than used for contributing to the composition of the main film

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for nucleation of conductive nitride films

Atomic layer deposition of lithium boron comprising nanocomposite s...

Method of manufacturing semiconductor structure

Enhanced spatial ALD of metals through controlled precursor mixing

Method of depositing vanadium metal

Methods of processing substrate and manufacturing semiconductor dev...

Method of manufacturing semiconductor device, recording medium, and...

Atomic layer deposition with passivation treatment

Atomic layer deposition of rhenium containing thin films

Precursors for deposition of molybdenum-containing films

Selective processing with etch residue-based inhibitors

Ruthenium film deposition using low valent metal precursors

Processing apparatus and processing method

Protective film forming composition having a diol structure

Methods for depositing tungsten or molybdenum films

SiO2 thin film produced by atomic layer deposition at room temperature

Method for forming thin film

Method of processing substrate and manufacturing semiconductor devi...

Method for forming metal silicon oxide and metal silicon oxynitride...

Catalyst enhanced seamless ruthenium gap fill

Process for the generation of metal-containing films

Method of forming a semiconductor device with air gaps for low capa...

Selective deposition of silicon oxide on metal surfaces

Atomic layer deposition and etching of transition metal dichalcogen...

Simultaneous selective deposition of two different materials on two...

Method and apparatus for filling a gap

Method of forming a thin film using a surface protection material

Apparatus for treating semiconductor process gas and method of trea...

Process for the generation of metal-containing films

Process for the generation of metal- or semimetal-containing films

Patents Applicationslast 30 patents

METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...

METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSI...

SELECTIVE DEPOSITION OF SILICON OXIDE ON METAL SURFACES

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...

PRECURSORS FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS

SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS

METHODS FOR DEPOSITING TUNGSTEN OR MOLYBDENUM FILMS

DEPOSITION APPARATUS

METHOD FOR FORMING REGION-SELECTIVE THIN FILM USING SELECTIVATING A...

SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING MET...

METHOD AND SYSTEM FOR FORMING METAL SILICON OXIDE AND METAL SILICON...

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD OF FORMING THIN FILM...

COMPOSITIONS ND METHODS USING SAME FOR GERMANIUM SEED LAYER

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD OF FORMING THIN FILM...

ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...

GROWTH INHIBITOR FOR FORMING PELLICLE-PROTECTIVE THIN FILM, METHOD...

THIN FILM DEPOSITION METHOD AND METHOD OF FABRICATING ELECTRONIC DE...

METHOD AND APPARATUS FOR FILLING A GAP

SIMULTANEOUS SELECTIVE DEPOSITION OF TWO DIFFERENT MATERIALS ON TWO...

Methods Of Forming Molybdenum-Containing Films Deposited On Element...

DEPOSITION OF IODINE-CONTAINING CARBON FILMS

METHODS FOR IMPROVING THIN FILM QUALITY

SELECTIVE DEPOSITION USING THERMAL AND PLASMA-ENHANCED PROCESS

METHOD FOR FORMING THIN FILM USING SURFACE PROTECTION MATERIAL

METHOD FOR DEPOSITING A FILM

PROCESS FOR THE GENERATION OF METAL- OR SEMIMETAL-CONTAINING FILMS

Compounds And Methods For Selectively Forming Metal-Containing Films

PHOTOELECTROCHEMICAL DEVICE AND METHOD FOR PRODUCING HYDROGEN USING...

CATALYST ENHANCED SEAMLESS RUTHENIUM GAP FILL

DEPOSITION METHOD