using a coherent energy beam

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CPC
H01L21/2026

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/2026using a coherent energy beam

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method for array substrate
- Patent number 11,443,945
- Issue date Sep 13, 2022
- TCL CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Jinyang Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Base substrate, functional element, and method for manufacturing ba...
- Patent number 11,437,233
- Issue date Sep 6, 2022
- NGK Insulators, Ltd.
- Masashi Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser crystallizing apparatus and method of manufacturing display a...
- Patent number 11,407,061
- Issue date Aug 9, 2022
- SAMSUNG DISPLAY CO., LTD.
- Dong-Sung Lee
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Producing method for thin film transistor with different crystallin...
- Patent number 11,133,333
- Issue date Sep 28, 2021
- SAKAI DISPLAY PRODUCTS CORPORATION
- Yuta Sugawara
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,879,272
- Issue date Dec 29, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Annealing apparatus using two wavelengths of radiation
- Patent number 10,857,623
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Dean Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Crystallized silicon vertical diode on BEOL for access device for c...
- Patent number 10,763,374
- Issue date Sep 1, 2020
- International Business Machines Corporation
- Fabio Carta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing method, laser annealing apparatus, and manufacturin...
- Patent number 10,651,294
- Issue date May 12, 2020
- V Technology Co., Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing method, laser annealing apparatus, and manufacturin...
- Patent number 10,644,133
- Issue date May 5, 2020
- V Technology Co., Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,515,983
- Issue date Dec 24, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of laser irradiation, laser irradiation apparatus, and metho...
- Patent number 10,488,671
- Issue date Nov 26, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polysilicon thin film and manufacturing method thereof, TFT and man...
- Patent number 10,431,669
- Issue date Oct 1, 2019
- BOE Technology Group Co., Ltd.
- Xiaolong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing method and laser annealing device
- Patent number 10,410,866
- Issue date Sep 10, 2019
- Sumitomo Heavy Industries, Ltd.
- Naoki Wakabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Crystallized silicon vertical diode on BEOL for access device for c...
- Patent number 10,374,103
- Issue date Aug 6, 2019
- International Business Machines Corporation
- Fabio Carta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,361,222
- Issue date Jul 23, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing method, laser annealing apparatus, and manufacturin...
- Patent number 10,312,351
- Issue date Jun 4, 2019
- V Technology Co., Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 10,290,992
- Issue date May 14, 2019
- Gigaphoton Inc.
- Hiroshi Umeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique and related semiconductor devices based on crystalline se...
- Patent number 10,283,365
- Issue date May 7, 2019
- GLOBALFOUNDRIES Inc.
- Elliot John Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 9,899,419
- Issue date Feb 20, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Annealing apparatus using two wavelengths of radiation
- Patent number 9,839,976
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Dean Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 9,806,096
- Issue date Oct 31, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Masahiko Hayakawa
- G02 - OPTICS
Information Patent Grant
Thermal processing by scanning a laser line beam
- Patent number 9,737,959
- Issue date Aug 22, 2017
- Applied Materials, Inc.
- Dean C. Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of laser irradiation, laser irradiation apparatus, and metho...
- Patent number 9,564,323
- Issue date Feb 7, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lift-off method
- Patent number 9,531,154
- Issue date Dec 27, 2016
- Disco Corporation
- Tasuku Koyanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processes and systems for laser crystallization processing of film...
- Patent number 9,466,402
- Issue date Oct 11, 2016
- The Trustees of Columbia University In the City of New York
- James S. Im
- C30 - CRYSTAL GROWTH
Information Patent Grant
Bonding head
- Patent number 9,446,477
- Issue date Sep 20, 2016
- Shibuya Kogyo Co., Ltd.
- Eiji Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing device including tunable mask and method of using t...
- Patent number 9,406,515
- Issue date Aug 2, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- BoXiu Cai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods of forming conductors and semiconductors on a substrate
- Patent number 9,343,310
- Issue date May 17, 2016
- Nathaniel R Quick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 9,257,562
- Issue date Feb 9, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Akihisa Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing device and method
- Patent number 9,257,287
- Issue date Feb 9, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- BoXiu Cai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
III-N HETEROEPITAXIAL DEVICES ON ROCK SALT SUBSTRATES
- Publication number 20220230882
- Publication date Jul 21, 2022
- ALLIANCE FOR SUSTAINABLE ENERGY, LLC
- Marshall Brooks TELLEKAMP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20210118916
- Publication date Apr 22, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER CRYSTALLIZING APPARATUS AND METHOD OF MANUFACTURING DISPLAY A...
- Publication number 20200171600
- Publication date Jun 4, 2020
- SAMSUNG DISPLAY CO., LTD.
- Dong-Sung LEE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20200135770
- Publication date Apr 30, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20190341404
- Publication date Nov 7, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CRYSTALLIZED SILICON VERTICAL DIODE ON BEOL FOR ACCESS DEVICE FOR C...
- Publication number 20190305142
- Publication date Oct 3, 2019
- International Business Machines Corporation
- Fabio Carta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING METHOD, LASER ANNEALING APPARATUS, AND MANUFACTURIN...
- Publication number 20190245062
- Publication date Aug 8, 2019
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING METHOD, LASER ANNEALING APPARATUS, AND MANUFACTURIN...
- Publication number 20190245063
- Publication date Aug 8, 2019
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE AND RELATED SEMICONDUCTOR DEVICES BASED ON CRYSTALLINE SE...
- Publication number 20190148149
- Publication date May 16, 2019
- GLOBALFOUNDRIES INC.
- Elliot John Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYSILICON THIN FILM AND MANUFACTURING METHOD THEREOF, TFT AND MAN...
- Publication number 20180337262
- Publication date Nov 22, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaolong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING METHOD AND LASER ANNEALING DEVICE
- Publication number 20180277372
- Publication date Sep 27, 2018
- Sumitomo Heavy Industries, Ltd.
- Naoki Wakabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20180190677
- Publication date Jul 5, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
POLYSILICON THIN FILM AND MANUFACTURING METHOD THEREOF, TFT AND MAN...
- Publication number 20180108757
- Publication date Apr 19, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaolong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING APPARATUS USING TWO WAVELENGTHS OF RADIATION
- Publication number 20180099353
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Dean JENNINGS
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER ANNEALING METHOD, LASER ANNEALING APPARATUS, AND MANUFACTURIN...
- Publication number 20180040718
- Publication date Feb 8, 2018
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processes And Systems For Laser Crystallization Processing Of Film...
- Publication number 20140361414
- Publication date Dec 11, 2014
- James S. Im
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF LASER IRRADIATION, LASER IRRADIATION APPARATUS, AND METHO...
- Publication number 20140220768
- Publication date Aug 7, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER ANNEALING DEVICE AND METHOD
- Publication number 20140162381
- Publication date Jun 12, 2014
- SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION (SHANGHAI)
- BoXiu CAI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same
- Publication number 20140139776
- Publication date May 22, 2014
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Masahiko Hayakawa
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140027882
- Publication date Jan 30, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Tomoaki Atsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING HEAD
- Publication number 20140001162
- Publication date Jan 2, 2014
- Eiji TANAKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR PROCESSING THIN FILMS
- Publication number 20140001164
- Publication date Jan 2, 2014
- THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- James S. IM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF LASER IRRADIATION, LASER IRRADIATION APPARATUS, AND METHO...
- Publication number 20130323866
- Publication date Dec 5, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SINGLE-SHOT SEMICONDUCTOR PROCESSING SYSTEM AND METHOD HAVING VARIO...
- Publication number 20130316548
- Publication date Nov 28, 2013
- THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- James S. IM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FLAT PANEL DISPLAY DEVICE COMPRISING POLYSILICON THIN FILM TRANSIST...
- Publication number 20130230976
- Publication date Sep 5, 2013
- SAMSUNG DISPLAY CO., LTD.
- Ji-Yong PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-IRRADIATED THIN FILMS HAVING VARIABLE THICKNESS
- Publication number 20130161312
- Publication date Jun 27, 2013
- THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- James S. IM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR THIN FILM, THIN FILM TRANSISTOR, METHOD FOR MANUFACTU...
- Publication number 20130146883
- Publication date Jun 13, 2013
- GETNER FOUNDATION LLC
- Hiroshi Tanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device, and Method of Forming the Same
- Publication number 20130112981
- Publication date May 9, 2013
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Application
Single-Shot Semiconductor Processing System and Method Having Vario...
- Publication number 20130071974
- Publication date Mar 21, 2013
- Columbia University
- James S. Im
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LINE SCAN SEQUENTIAL LATERAL SOLIDIFICATION OF THIN FILMS
- Publication number 20130012036
- Publication date Jan 10, 2013
- Columbia University
- James S. IM
- C30 - CRYSTAL GROWTH

using a coherent energy beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Manufacturing method for array substrate

Base substrate, functional element, and method for manufacturing ba...

Laser crystallizing apparatus and method of manufacturing display a...

Producing method for thin film transistor with different crystallin...

Semiconductor device and semiconductor device production system

Annealing apparatus using two wavelengths of radiation

Crystallized silicon vertical diode on BEOL for access device for c...

Laser annealing method, laser annealing apparatus, and manufacturin...

Laser annealing method, laser annealing apparatus, and manufacturin...

Semiconductor device and semiconductor device production system

Method of laser irradiation, laser irradiation apparatus, and metho...

Polysilicon thin film and manufacturing method thereof, TFT and man...

Laser annealing method and laser annealing device

Crystallized silicon vertical diode on BEOL for access device for c...

Semiconductor device and semiconductor device production system

Laser annealing method, laser annealing apparatus, and manufacturin...

Laser system

Technique and related semiconductor devices based on crystalline se...

Semiconductor device and semiconductor device production system

Annealing apparatus using two wavelengths of radiation

Semiconductor device and method for manufacturing the same

Thermal processing by scanning a laser line beam

Method of laser irradiation, laser irradiation apparatus, and metho...

Lift-off method

Processes and systems for laser crystallization processing of film...

Bonding head

Laser annealing device including tunable mask and method of using t...

Methods of forming conductors and semiconductors on a substrate

Semiconductor device

Laser annealing device and method

Patents Applicationslast 30 patents

III-N HETEROEPITAXIAL DEVICES ON ROCK SALT SUBSTRATES

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

LASER CRYSTALLIZING APPARATUS AND METHOD OF MANUFACTURING DISPLAY A...

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

CRYSTALLIZED SILICON VERTICAL DIODE ON BEOL FOR ACCESS DEVICE FOR C...

LASER ANNEALING METHOD, LASER ANNEALING APPARATUS, AND MANUFACTURIN...

LASER ANNEALING METHOD, LASER ANNEALING APPARATUS, AND MANUFACTURIN...

TECHNIQUE AND RELATED SEMICONDUCTOR DEVICES BASED ON CRYSTALLINE SE...

POLYSILICON THIN FILM AND MANUFACTURING METHOD THEREOF, TFT AND MAN...

LASER ANNEALING METHOD AND LASER ANNEALING DEVICE

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

POLYSILICON THIN FILM AND MANUFACTURING METHOD THEREOF, TFT AND MAN...

ANNEALING APPARATUS USING TWO WAVELENGTHS OF RADIATION

LASER ANNEALING METHOD, LASER ANNEALING APPARATUS, AND MANUFACTURIN...

Processes And Systems For Laser Crystallization Processing Of Film...

METHOD OF LASER IRRADIATION, LASER IRRADIATION APPARATUS, AND METHO...

LASER ANNEALING DEVICE AND METHOD

Semiconductor Device and Method for Manufacturing the Same

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

BONDING HEAD

SYSTEMS AND METHODS FOR PROCESSING THIN FILMS

METHOD OF LASER IRRADIATION, LASER IRRADIATION APPARATUS, AND METHO...

SINGLE-SHOT SEMICONDUCTOR PROCESSING SYSTEM AND METHOD HAVING VARIO...

FLAT PANEL DISPLAY DEVICE COMPRISING POLYSILICON THIN FILM TRANSIST...

LASER-IRRADIATED THIN FILMS HAVING VARIABLE THICKNESS

SEMICONDUCTOR THIN FILM, THIN FILM TRANSISTOR, METHOD FOR MANUFACTU...

Semiconductor Device, and Method of Forming the Same

Single-Shot Semiconductor Processing System and Method Having Vario...

LINE SCAN SEQUENTIAL LATERAL SOLIDIFICATION OF THIN FILMS