using a general scheme of a conveying path within a factory

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H01L21/67727

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/67727using a general scheme of a conveying path within a factory

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Modular pressurized workstation
- Patent number 12,272,580
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport vehicle, rail assembly, and article transport sys...
- Patent number 12,227,373
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Wan Hee Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Portable robotic semiconductor pod loader
- Patent number 12,217,991
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Kuo Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for integrating load locks into a factory inter...
- Patent number 12,159,796
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for wafer manufacturing process management
- Patent number 12,154,808
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Mei-Hsuan Lin
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Conveyor system
- Patent number 12,125,724
- Issue date Oct 22, 2024
- Semes Co., Ltd.
- Hyeongjin Bak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport vehicle
- Patent number 12,119,253
- Issue date Oct 15, 2024
- Murata Machinery, Ltd.
- Wataru Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer vehicle system
- Patent number 12,110,188
- Issue date Oct 8, 2024
- Murata Machinery, Ltd.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system
- Patent number 12,111,636
- Issue date Oct 8, 2024
- Daifuku Co., Ltd.
- Koichi Hagiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 12,091,257
- Issue date Sep 17, 2024
- Daifuku Co., Ltd.
- Koichi Hagiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transportation facility
- Patent number 11,952,024
- Issue date Apr 9, 2024
- Daifuku Co., Ltd.
- Kazuya Namazue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying system and method for operating the same
- Patent number 11,942,342
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage system
- Patent number 11,942,347
- Issue date Mar 26, 2024
- Murata Machinery, Ltd.
- Eiji Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Traveling vehicle and traveling vehicle system
- Patent number 11,904,887
- Issue date Feb 20, 2024
- Murata Machinery, Ltd.
- Munekuni Oshima
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Modular pressurized workstation
- Patent number 11,901,206
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,869,790
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Yuji Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance system
- Patent number 11,791,186
- Issue date Oct 17, 2023
- Murata Machinery, Ltd.
- Kazumi Harasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer cassette warehouse transportation structure system
- Patent number 11,764,091
- Issue date Sep 19, 2023
- EDDIE AND SONS TECHNOLOGY CO., LTD
- James Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular pressurized workstation
- Patent number 11,587,811
- Issue date Feb 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for integrating load locks into a factory interface footpri...
- Patent number 11,581,203
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyor system
- Patent number 11,501,988
- Issue date Nov 15, 2022
- Semes Co., Ltd.
- Hyeongjin Bak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 11,312,578
- Issue date Apr 26, 2022
- Daifuku Co., Ltd.
- Makoto Kono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system and transport method
- Patent number 11,286,117
- Issue date Mar 29, 2022
- Murata Machinery, Ltd.
- Kazunori Shimamura
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Conveyance system
- Patent number 11,276,596
- Issue date Mar 15, 2022
- Murata Machinery, Ltd.
- Masayoshi Torazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,183,409
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Grant
Vehicle
- Patent number 11,114,323
- Issue date Sep 7, 2021
- Daifuku Co., Ltd.
- Daisuke Ogawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Conveying system and method for operating the same
- Patent number 11,107,713
- Issue date Aug 31, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,069,548
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Toru Nishino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Article transport device
- Patent number 11,066,248
- Issue date Jul 20, 2021
- Daifuku Co., Ltd.
- Takeshi Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport vehicle system and transport vehicle arrangement method i...
- Patent number 11,053,074
- Issue date Jul 6, 2021
- Murata Machinery, Ltd.
- Yuichi Imamura
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
OVERHEAD TRANSPORT VEHICLE SYSTEM
- Publication number 20250128745
- Publication date Apr 24, 2025
- MURATA MACHINERY, LTD.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER
- Publication number 20250125176
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Kuo CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMMON RESOURCE SHARING AND MANAGEMENT FOR SUBSTRATE PROCESSING SYS...
- Publication number 20250118583
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLE TRANSPORT FACILITY
- Publication number 20250066167
- Publication date Feb 27, 2025
- DAIFUKU CO., LTD.
- Tomotaka KINUGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR WAFER MANUFACTURING PROCESS MANAGEMENT
- Publication number 20250062147
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Rong Syuan FAN
- B60 - VEHICLES IN GENERAL
Information Patent Application
TABBING DEVICE FOR MANUFACTURING SOLAR CELL MODULE PREVENTING OVERS...
- Publication number 20250031480
- Publication date Jan 23, 2025
- Hanwha Solutions Corporation
- Min Su LEE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR CLEANING OHT VEHICLE
- Publication number 20240379395
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
Article Transport Facility
- Publication number 20240343280
- Publication date Oct 17, 2024
- DAIFUKU CO., LTD.
- Kengo Ikedo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Vehicle
- Publication number 20240339346
- Publication date Oct 10, 2024
- DAIFUKU CO., LTD.
- Yoshinari WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME
- Publication number 20240222166
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- B66 - HOISTING LIFTING HAULING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240145287
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Yuji Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PRESSURIZED WORKSTATION
- Publication number 20240136213
- Publication date Apr 25, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TURNTABLE FOR WAFER TRANSPORT SYSTEM
- Publication number 20240071797
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Guancyun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PICK-AND-PLACE APPARATUS AND METHOD
- Publication number 20240030053
- Publication date Jan 25, 2024
- NEXPERIA B.V.
- Steven Verstoep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORTATION FACILITY
- Publication number 20240010251
- Publication date Jan 11, 2024
- DAIFUKU CO., LTD.
- Kazuya NAMAZUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
- Publication number 20240006214
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Shingo Katsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE METHOD AND PROCESSING SYSTEM
- Publication number 20230411194
- Publication date Dec 21, 2023
- TOKYO ELECTRON LIMITED
- Wataru NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MEASURING MAGNETIC FIELDS IN PVD SYSTEM
- Publication number 20230395414
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Mei-Hsuan LIN
- B60 - VEHICLES IN GENERAL
Information Patent Application
TRANSPORT VEHICLE SYSTEM AND METHOD OF CONTROLLING TRANSPORT VEHICLE
- Publication number 20230322486
- Publication date Oct 12, 2023
- MURATA MACHINERY, LTD.
- Masayuki TAKAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CARRIER STORAGE SYSTEM, SEMICONDUCTOR FABRICATION SYS...
- Publication number 20230326777
- Publication date Oct 12, 2023
- Samsung Electronics Co., Ltd.
- Youngwook KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230307279
- Publication date Sep 28, 2023
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLE TRANSPORT VEHICLE, RAIL ASSEMBLY, AND ARTICLE TRANSPORT SYS...
- Publication number 20230211966
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Wan Hee JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOGISTICS SYSTEM IN FABRICATION FACILITY
- Publication number 20230215749
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Jin Ho LEE
- B66 - HOISTING LIFTING HAULING
Information Patent Application
INTER-FLOOR TRANSPORT APPARATUS AND LOGISTICS TRANSPORT SYSTEM INCL...
- Publication number 20230207363
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Eun Sang Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLE TRANSFER APPARATUS AND METHOD FOR TRANSFERRING ARTICLE
- Publication number 20230207362
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Won Young KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLE TRANSPORT SYSTEM AND METHOD OF OPERATING ARTICLE TRANSPORT...
- Publication number 20230207364
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Mei Xiang JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR INTEGRATING LOAD LOCKS INTO A FACTORY INTER...
- Publication number 20230187239
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PRESSURIZED WORKSTATION
- Publication number 20230178401
- Publication date Jun 8, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER
- Publication number 20230035556
- Publication date Feb 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Kuo CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYOR SYSTEM
- Publication number 20230029892
- Publication date Feb 2, 2023
- SEMES CO., LTD.
- HYEONGJIN BAK
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

using a general scheme of a conveying path within a factory

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Modular pressurized workstation

Article transport vehicle, rail assembly, and article transport sys...

Portable robotic semiconductor pod loader

Systems and methods for integrating load locks into a factory inter...

System and method for wafer manufacturing process management

Conveyor system

Transport vehicle

Transfer vehicle system

Transport system

Article transport facility

Transportation facility

Conveying system and method for operating the same

Storage system

Traveling vehicle and traveling vehicle system

Modular pressurized workstation

Substrate processing apparatus, method of manufacturing semiconduct...

Conveyance system

Semiconductor wafer cassette warehouse transportation structure system

Modular pressurized workstation

Systems for integrating load locks into a factory interface footpri...

Conveyor system

Article transport facility

Transport system and transport method

Conveyance system

System for a semiconductor fabrication facility and method for oper...

Vehicle

Conveying system and method for operating the same

Substrate processing method and substrate processing system

Article transport device

Transport vehicle system and transport vehicle arrangement method i...

Patents Applicationslast 30 patents

OVERHEAD TRANSPORT VEHICLE SYSTEM

PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER

COMMON RESOURCE SHARING AND MANAGEMENT FOR SUBSTRATE PROCESSING SYS...

ARTICLE TRANSPORT FACILITY

SYSTEM AND METHOD FOR WAFER MANUFACTURING PROCESS MANAGEMENT

TABBING DEVICE FOR MANUFACTURING SOLAR CELL MODULE PREVENTING OVERS...

METHOD FOR CLEANING OHT VEHICLE

Article Transport Facility

Transport Vehicle

CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

MODULAR PRESSURIZED WORKSTATION

TURNTABLE FOR WAFER TRANSPORT SYSTEM

PICK-AND-PLACE APPARATUS AND METHOD

TRANSPORTATION FACILITY

SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...

CONVEYANCE METHOD AND PROCESSING SYSTEM

SYSTEM AND METHOD FOR MEASURING MAGNETIC FIELDS IN PVD SYSTEM

TRANSPORT VEHICLE SYSTEM AND METHOD OF CONTROLLING TRANSPORT VEHICLE

SEMICONDUCTOR CARRIER STORAGE SYSTEM, SEMICONDUCTOR FABRICATION SYS...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

ARTICLE TRANSPORT VEHICLE, RAIL ASSEMBLY, AND ARTICLE TRANSPORT SYS...

LOGISTICS SYSTEM IN FABRICATION FACILITY

INTER-FLOOR TRANSPORT APPARATUS AND LOGISTICS TRANSPORT SYSTEM INCL...

ARTICLE TRANSFER APPARATUS AND METHOD FOR TRANSFERRING ARTICLE

ARTICLE TRANSPORT SYSTEM AND METHOD OF OPERATING ARTICLE TRANSPORT...

SYSTEMS AND METHODS FOR INTEGRATING LOAD LOCKS INTO A FACTORY INTER...

MODULAR PRESSURIZED WORKSTATION

PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER

CONVEYOR SYSTEM