using a general scheme of a conveying path within a factory

Industry

CPC
H01L21/67727

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67727using a general scheme of a conveying path within a factory

Industries

Patents Grantslast 30 patents

Information Patent Grant
Transportation facility
- Patent number 11,952,024
- Issue date Apr 9, 2024
- Daifuku Co., Ltd.
- Kazuya Namazue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying system and method for operating the same
- Patent number 11,942,342
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage system
- Patent number 11,942,347
- Issue date Mar 26, 2024
- Murata Machinery, Ltd.
- Eiji Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Traveling vehicle and traveling vehicle system
- Patent number 11,904,887
- Issue date Feb 20, 2024
- Murata Machinery, Ltd.
- Munekuni Oshima
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Modular pressurized workstation
- Patent number 11,901,206
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,869,790
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Yuji Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance system
- Patent number 11,791,186
- Issue date Oct 17, 2023
- Murata Machinery, Ltd.
- Kazumi Harasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer cassette warehouse transportation structure system
- Patent number 11,764,091
- Issue date Sep 19, 2023
- EDDIE AND SONS TECHNOLOGY CO., LTD
- James Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular pressurized workstation
- Patent number 11,587,811
- Issue date Feb 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for integrating load locks into a factory interface footpri...
- Patent number 11,581,203
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyor system
- Patent number 11,501,988
- Issue date Nov 15, 2022
- Semes Co., Ltd.
- Hyeongjin Bak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 11,312,578
- Issue date Apr 26, 2022
- Daifuku Co., Ltd.
- Makoto Kono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system and transport method
- Patent number 11,286,117
- Issue date Mar 29, 2022
- Murata Machinery, Ltd.
- Kazunori Shimamura
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Conveyance system
- Patent number 11,276,596
- Issue date Mar 15, 2022
- Murata Machinery, Ltd.
- Masayoshi Torazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,183,409
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Grant
Vehicle
- Patent number 11,114,323
- Issue date Sep 7, 2021
- Daifuku Co., Ltd.
- Daisuke Ogawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Conveying system and method for operating the same
- Patent number 11,107,713
- Issue date Aug 31, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,069,548
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Toru Nishino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Article transport device
- Patent number 11,066,248
- Issue date Jul 20, 2021
- Daifuku Co., Ltd.
- Takeshi Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport vehicle system and transport vehicle arrangement method i...
- Patent number 11,053,074
- Issue date Jul 6, 2021
- Murata Machinery, Ltd.
- Yuichi Imamura
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Methods and apparatus for novel fabricators with Cleanspace
- Patent number 11,024,527
- Issue date Jun 1, 2021
- Frederick A. Flitsch
- G05 - CONTROLLING REGULATING
Information Patent Grant
Modular pressurized workstation
- Patent number 11,011,401
- Issue date May 18, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Customized smart devices and touchscreen devices and cleanspace man...
- Patent number 11,011,396
- Issue date May 18, 2021
- Frederick A. Flitsch
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electronic component handler and electronic component tester
- Patent number 10,994,951
- Issue date May 4, 2021
- Seiko Epson Corporation
- Fuyumi Takata
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Reticle transfer system and method
- Patent number 10,991,607
- Issue date Apr 27, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Jung Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Walking beam chamber
- Patent number 10,923,374
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Paul Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temporary storage system
- Patent number 10,913,601
- Issue date Feb 9, 2021
- Murata Machinery, Ltd.
- Takashi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for automated wafer handling
- Patent number 10,910,249
- Issue date Feb 2, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Feng-Lung Hsieh
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
In-line system for mass production of organic optoelectronic device...
- Patent number 10,790,466
- Issue date Sep 29, 2020
- Feng-Wen Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system with crane
- Patent number 10,699,928
- Issue date Jun 30, 2020
- Murata Machinery, Ltd.
- Yoichi Motoori
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240145287
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Yuji Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PRESSURIZED WORKSTATION
- Publication number 20240136213
- Publication date Apr 25, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TURNTABLE FOR WAFER TRANSPORT SYSTEM
- Publication number 20240071797
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Guancyun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PICK-AND-PLACE APPARATUS AND METHOD
- Publication number 20240030053
- Publication date Jan 25, 2024
- NEXPERIA B.V.
- Steven Verstoep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORTATION FACILITY
- Publication number 20240010251
- Publication date Jan 11, 2024
- DAIFUKU CO., LTD.
- Kazuya NAMAZUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
- Publication number 20240006214
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Shingo Katsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE METHOD AND PROCESSING SYSTEM
- Publication number 20230411194
- Publication date Dec 21, 2023
- TOKYO ELECTRON LIMITED
- Wataru NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MEASURING MAGNETIC FIELDS IN PVD SYSTEM
- Publication number 20230395414
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Mei-Hsuan LIN
- B60 - VEHICLES IN GENERAL
Information Patent Application
TRANSPORT VEHICLE SYSTEM AND METHOD OF CONTROLLING TRANSPORT VEHICLE
- Publication number 20230322486
- Publication date Oct 12, 2023
- MURATA MACHINERY, LTD.
- Masayuki TAKAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CARRIER STORAGE SYSTEM, SEMICONDUCTOR FABRICATION SYS...
- Publication number 20230326777
- Publication date Oct 12, 2023
- Samsung Electronics Co., Ltd.
- Youngwook KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230307279
- Publication date Sep 28, 2023
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLE TRANSPORT VEHICLE, RAIL ASSEMBLY, AND ARTICLE TRANSPORT SYS...
- Publication number 20230211966
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Wan Hee JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOGISTICS SYSTEM IN FABRICATION FACILITY
- Publication number 20230215749
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Jin Ho LEE
- B66 - HOISTING LIFTING HAULING
Information Patent Application
INTER-FLOOR TRANSPORT APPARATUS AND LOGISTICS TRANSPORT SYSTEM INCL...
- Publication number 20230207363
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Eun Sang Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLE TRANSFER APPARATUS AND METHOD FOR TRANSFERRING ARTICLE
- Publication number 20230207362
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Won Young KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLE TRANSPORT SYSTEM AND METHOD OF OPERATING ARTICLE TRANSPORT...
- Publication number 20230207364
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Mei Xiang JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR INTEGRATING LOAD LOCKS INTO A FACTORY INTER...
- Publication number 20230187239
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PRESSURIZED WORKSTATION
- Publication number 20230178401
- Publication date Jun 8, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER
- Publication number 20230035556
- Publication date Feb 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Kuo CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYOR SYSTEM
- Publication number 20230029892
- Publication date Feb 2, 2023
- SEMES CO., LTD.
- HYEONGJIN BAK
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
FOUP TRANSFER DEVICE
- Publication number 20230010048
- Publication date Jan 12, 2023
- Rorze Corporation
- Yoshiyuki Fujishiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT VEHICLE
- Publication number 20220359251
- Publication date Nov 10, 2022
- MURATA MACHINERY, LTD.
- Wataru Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAVELING VEHICLE SYSTEM
- Publication number 20220344189
- Publication date Oct 27, 2022
- MURATA MACHINERY, LTD.
- Hidetoshi FUJIWARA
- G05 - CONTROLLING REGULATING
Information Patent Application
MOBILE STOCKER AND METHODS OF OPERATION
- Publication number 20220344187
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Rong Syuan FAN
- G05 - CONTROLLING REGULATING
Information Patent Application
SEMICONDUCTOR WAFER CASSETTE WAREHOUSE TRANSPORTATION STRUCTURE SYSTEM
- Publication number 20220246450
- Publication date Aug 4, 2022
- Eddie and Sons Technology Co., Ltd
- James TENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20220187797
- Publication date Jun 16, 2022
- SEMES CO., LTD.
- SUNG MIN LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY, CONTROLLED INTEGRATED CIRCUITS FACTORY
- Publication number 20220171370
- Publication date Jun 2, 2022
- LAM RESEARCH CORPORATION
- Thorsten LILL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER VEHICLE SYSTEM
- Publication number 20220144557
- Publication date May 12, 2022
- MURATA MACHINERY, LTD.
- Makoto KOBAYASHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
- Publication number 20220076975
- Publication date Mar 10, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME
- Publication number 20210384052
- Publication date Dec 9, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

using a general scheme of a conveying path within a factory

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transportation facility

Conveying system and method for operating the same

Storage system

Traveling vehicle and traveling vehicle system

Modular pressurized workstation

Substrate processing apparatus, method of manufacturing semiconduct...

Conveyance system

Semiconductor wafer cassette warehouse transportation structure system

Modular pressurized workstation

Systems for integrating load locks into a factory interface footpri...

Conveyor system

Article transport facility

Transport system and transport method

Conveyance system

System for a semiconductor fabrication facility and method for oper...

Vehicle

Conveying system and method for operating the same

Substrate processing method and substrate processing system

Article transport device

Transport vehicle system and transport vehicle arrangement method i...

Methods and apparatus for novel fabricators with Cleanspace

Modular pressurized workstation

Customized smart devices and touchscreen devices and cleanspace man...

Electronic component handler and electronic component tester

Reticle transfer system and method

Walking beam chamber

Temporary storage system

Systems and methods for automated wafer handling

In-line system for mass production of organic optoelectronic device...

Transport system with crane

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

MODULAR PRESSURIZED WORKSTATION

TURNTABLE FOR WAFER TRANSPORT SYSTEM

PICK-AND-PLACE APPARATUS AND METHOD

TRANSPORTATION FACILITY

SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...

CONVEYANCE METHOD AND PROCESSING SYSTEM

SYSTEM AND METHOD FOR MEASURING MAGNETIC FIELDS IN PVD SYSTEM

TRANSPORT VEHICLE SYSTEM AND METHOD OF CONTROLLING TRANSPORT VEHICLE

SEMICONDUCTOR CARRIER STORAGE SYSTEM, SEMICONDUCTOR FABRICATION SYS...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

ARTICLE TRANSPORT VEHICLE, RAIL ASSEMBLY, AND ARTICLE TRANSPORT SYS...

LOGISTICS SYSTEM IN FABRICATION FACILITY

INTER-FLOOR TRANSPORT APPARATUS AND LOGISTICS TRANSPORT SYSTEM INCL...

ARTICLE TRANSFER APPARATUS AND METHOD FOR TRANSFERRING ARTICLE

ARTICLE TRANSPORT SYSTEM AND METHOD OF OPERATING ARTICLE TRANSPORT...

SYSTEMS AND METHODS FOR INTEGRATING LOAD LOCKS INTO A FACTORY INTER...

MODULAR PRESSURIZED WORKSTATION

PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER

CONVEYOR SYSTEM

FOUP TRANSFER DEVICE

TRANSPORT VEHICLE

TRAVELING VEHICLE SYSTEM

MOBILE STOCKER AND METHODS OF OPERATION

SEMICONDUCTOR WAFER CASSETTE WAREHOUSE TRANSPORTATION STRUCTURE SYSTEM

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

HIGH DENSITY, CONTROLLED INTEGRATED CIRCUITS FACTORY

TRANSFER VEHICLE SYSTEM

SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...

CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME