using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

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GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

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G01P2015/0845using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

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Patents Grantslast 30 patents

Information Patent Grant
MEMS tri-axial accelerometer with one or more decoupling elements
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- Issue date May 16, 2023
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- G01 - MEASURING TESTING
Information Patent Grant
MEMS tri-axial accelerometer with one or more decoupling elements
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- Issue date Sep 8, 2020
- STMicroelectronics S.r.l.
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- G01 - MEASURING TESTING
Information Patent Grant
Integrated motion processing unit (MPU) with MEMS inertial sensing...
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Information Patent Grant
Micro-electro-mechanical system (MEMS) device with multi-dimensiona...
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MEMS-based dual and single proof-mass accelerometer methods and app...
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- Issue date Jan 26, 2016
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Information Patent Grant
Three-dimensional micro-electro-mechanical-system sensor
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- Issue date Apr 21, 2015
- Pixart Imaging Incorporation, R.O.C.
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Integrated motion processing unit (MPU) with MEMS inertial sensing...
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Element structure, inertia sensor, and electronic device
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Semiconductor device and method for manufacturing same
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Inertial force sensor
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- Issue date Oct 14, 2014
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Information Patent Grant
Physical quantity detector
- Patent number 8,659,101
- Issue date Feb 25, 2014
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- Kiyoko Yamanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor
- Patent number 8,497,672
- Issue date Jul 30, 2013
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Acceleration sensor
- Patent number 8,327,708
- Issue date Dec 11, 2012
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Information Patent Grant
Integrated motion processing unit (MPU) with MEMS inertial sensing...
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Information Patent Grant
Micromechanical capacitive acceleration sensor
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- Issue date Mar 18, 2008
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- G01 - MEASURING TESTING
Information Patent Grant
System for the measurement of acceleration in three axes
- Patent number 6,122,965
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- Temic Telefunken microelectronic GmbH
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- G01 - MEASURING TESTING
Information Patent Grant
Instrument for measuring accelerations and process of making the same
- Patent number 5,065,628
- Issue date Nov 19, 1991
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Wolfgang Benecke
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

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- G01 - MEASURING TESTING
Information Patent Application
MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
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DUAL AND TRIPLE AXIS ACCELEROMETERS
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- Ashwin SESHIA
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MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
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- STMicroelectronics S.r.l.
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- G01 - MEASURING TESTING
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INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...
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INERTIAL FORCE SENSOR
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Physical Quantity Detector
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MEMS-BASED DUAL AND SINGLE PROOF-MASS ACCELEROMETER METHODS AND APP...
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Three-Dimensional Micro-Electro-Mechanical-System Sensor
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- Publication date Feb 21, 2013
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- CHIUNG-WEN LIN
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INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...
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Interconnection system on a plane adjacent to a solid-state device...
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ACCELERATION SENSOR
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INERTIAL FORCE SENSOR
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Integrated Motion Processing Unit (MPU) With MEMS Inertial Sensing...
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Micromechanical capacitive acceleration sensor
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Multiaxial monolithic acceleration sensor
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- Konrad Kapser
- G01 - MEASURING TESTING

using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS tri-axial accelerometer with one or more decoupling elements

MEMS tri-axial accelerometer with one or more decoupling elements

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Micro-electro-mechanical system (MEMS) device with multi-dimensiona...

MEMS-based dual and single proof-mass accelerometer methods and app...

Three-dimensional micro-electro-mechanical-system sensor

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Element structure, inertia sensor, and electronic device

Semiconductor device and method for manufacturing same

Inertial force sensor

Physical quantity detector

Acceleration sensor

Acceleration sensor

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Micromechanical capacitive acceleration sensor

System for the measurement of acceleration in three axes

Instrument for measuring accelerations and process of making the same

Patents Applicationslast 30 patents

INERTIAL SENSOR AND INERTIAL MEASUREMENT UNIT

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

DUAL AND TRIPLE AXIS ACCELEROMETERS

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...

INERTIAL FORCE SENSOR

Physical Quantity Detector

MEMS-BASED DUAL AND SINGLE PROOF-MASS ACCELEROMETER METHODS AND APP...

Three-Dimensional Micro-Electro-Mechanical-System Sensor

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

INERTIA SENSING APPARATUS

INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...

Interconnection system on a plane adjacent to a solid-state device...

ACCELERATION SENSOR

MEMS SENSOR

Low Cost Optical Accelerometer

ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE

INERTIAL FORCE SENSOR

ACCELERATION SENSOR

Integrated Motion Processing Unit (MPU) With MEMS Inertial Sensing...

Micromechanical capacitive acceleration sensor

Multiaxial monolithic acceleration sensor