using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

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GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

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G01P2015/0845using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

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Patents Grantslast 30 patents

Information Patent Grant
MEMS tri-axial accelerometer with one or more decoupling elements
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- G01 - MEASURING TESTING
Information Patent Grant
MEMS tri-axial accelerometer with one or more decoupling elements
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- Issue date Sep 8, 2020
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- G01 - MEASURING TESTING
Information Patent Grant
Integrated motion processing unit (MPU) with MEMS inertial sensing...
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- Invensense, Inc.
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Information Patent Grant
Micro-electro-mechanical system (MEMS) device with multi-dimensiona...
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- Issue date Aug 15, 2017
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- Yu-Wen Hsu
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MEMS-based dual and single proof-mass accelerometer methods and app...
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- Issue date Jan 26, 2016
- MCube, Inc.
- Dolf van der Heide
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Three-dimensional micro-electro-mechanical-system sensor
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- Issue date Apr 21, 2015
- Pixart Imaging Incorporation, R.O.C.
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Integrated motion processing unit (MPU) with MEMS inertial sensing...
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- Issue date Apr 7, 2015
- Invensense, Inc.
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Element structure, inertia sensor, and electronic device
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Semiconductor device and method for manufacturing same
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Inertial force sensor
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- Issue date Oct 14, 2014
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Physical quantity detector
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- Issue date Feb 25, 2014
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- Kiyoko Yamanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
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Acceleration sensor
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- Issue date Jul 30, 2013
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Acceleration sensor
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- Issue date Dec 11, 2012
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Information Patent Grant
Integrated motion processing unit (MPU) with MEMS inertial sensing...
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Micromechanical capacitive acceleration sensor
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- Issue date Mar 18, 2008
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- Konrad Kapser
- G01 - MEASURING TESTING
Information Patent Grant
System for the measurement of acceleration in three axes
- Patent number 6,122,965
- Issue date Sep 26, 2000
- Temic Telefunken microelectronic GmbH
- Helmut Seidel
- G01 - MEASURING TESTING
Information Patent Grant
Instrument for measuring accelerations and process of making the same
- Patent number 5,065,628
- Issue date Nov 19, 1991
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Wolfgang Benecke
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

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ACCELERATION SENSOR
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- Lingcheng Kong
- G01 - MEASURING TESTING
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MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
- Publication number 20250155469
- Publication date May 15, 2025
- STMicroelectronics S.r.l.
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- G01 - MEASURING TESTING
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INERTIAL SENSOR AND INERTIAL MEASUREMENT UNIT
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- Teruo Takizawa
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MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
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- G01 - MEASURING TESTING
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DUAL AND TRIPLE AXIS ACCELEROMETERS
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- CAMBRIDGE ENTERPRISE LIMITED
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MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
- Publication number 20200363448
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- STMicroelectronics S.r.l.
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- G01 - MEASURING TESTING
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INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...
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- Steven S. NASIRI
- G01 - MEASURING TESTING
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INERTIAL FORCE SENSOR
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Physical Quantity Detector
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- Kiyoko Yamanaka
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MEMS-BASED DUAL AND SINGLE PROOF-MASS ACCELEROMETER METHODS AND APP...
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Three-Dimensional Micro-Electro-Mechanical-System Sensor
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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
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INERTIA SENSING APPARATUS
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INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...
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Interconnection system on a plane adjacent to a solid-state device...
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ACCELERATION SENSOR
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MEMS SENSOR
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- Yoshitaka UTO
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Low Cost Optical Accelerometer
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ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE
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INERTIAL FORCE SENSOR
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ACCELERATION SENSOR
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- Kabushiki Kaisha Toshiba
- Takashi KAWAKUBO
- G01 - MEASURING TESTING
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Integrated Motion Processing Unit (MPU) With MEMS Inertial Sensing...
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- InvenSense Inc.
- Steven S. NASIRI
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Micromechanical capacitive acceleration sensor
- Publication number 20060156818
- Publication date Jul 20, 2006
- Konrad Kapser
- G01 - MEASURING TESTING
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Multiaxial monolithic acceleration sensor
- Publication number 20060021436
- Publication date Feb 2, 2006
- Konrad Kapser
- G01 - MEASURING TESTING

using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS tri-axial accelerometer with one or more decoupling elements

MEMS tri-axial accelerometer with one or more decoupling elements

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Micro-electro-mechanical system (MEMS) device with multi-dimensiona...

MEMS-based dual and single proof-mass accelerometer methods and app...

Three-dimensional micro-electro-mechanical-system sensor

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Element structure, inertia sensor, and electronic device

Semiconductor device and method for manufacturing same

Inertial force sensor

Physical quantity detector

Acceleration sensor

Acceleration sensor

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Micromechanical capacitive acceleration sensor

System for the measurement of acceleration in three axes

Instrument for measuring accelerations and process of making the same

Patents Applicationslast 30 patents

ACCELERATION SENSOR

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

INERTIAL SENSOR AND INERTIAL MEASUREMENT UNIT

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

DUAL AND TRIPLE AXIS ACCELEROMETERS

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...

INERTIAL FORCE SENSOR

Physical Quantity Detector

MEMS-BASED DUAL AND SINGLE PROOF-MASS ACCELEROMETER METHODS AND APP...

Three-Dimensional Micro-Electro-Mechanical-System Sensor

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

INERTIA SENSING APPARATUS

INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...

Interconnection system on a plane adjacent to a solid-state device...

ACCELERATION SENSOR

MEMS SENSOR

Low Cost Optical Accelerometer

ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE

INERTIAL FORCE SENSOR

ACCELERATION SENSOR

Integrated Motion Processing Unit (MPU) With MEMS Inertial Sensing...

Micromechanical capacitive acceleration sensor

Multiaxial monolithic acceleration sensor