using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

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GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

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G01P2015/0845using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS tri-axial accelerometer with one or more decoupling elements
- Patent number 11,650,221
- Issue date May 16, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- G01 - MEASURING TESTING
Information Patent Grant
MEMS tri-axial accelerometer with one or more decoupling elements
- Patent number 10,768,199
- Issue date Sep 8, 2020
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- G01 - MEASURING TESTING
Information Patent Grant
Integrated motion processing unit (MPU) with MEMS inertial sensing...
- Patent number 10,288,427
- Issue date May 14, 2019
- Invensense, Inc.
- Steven S. Nasiri
- G01 - MEASURING TESTING
Information Patent Grant
Micro-electro-mechanical system (MEMS) device with multi-dimensiona...
- Patent number 9,733,269
- Issue date Aug 15, 2017
- Richtek Technology Corporation
- Yu-Wen Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS-based dual and single proof-mass accelerometer methods and app...
- Patent number 9,246,017
- Issue date Jan 26, 2016
- MCube, Inc.
- Dolf van der Heide
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional micro-electro-mechanical-system sensor
- Patent number 9,010,185
- Issue date Apr 21, 2015
- Pixart Imaging Incorporation, R.O.C.
- Ming-Han Tsai
- G01 - MEASURING TESTING
Information Patent Grant
Integrated motion processing unit (MPU) with MEMS inertial sensing...
- Patent number 8,997,564
- Issue date Apr 7, 2015
- Invensense, Inc.
- Steven S. Nasiri
- G01 - MEASURING TESTING
Information Patent Grant
Element structure, inertia sensor, and electronic device
- Patent number 8,950,259
- Issue date Feb 10, 2015
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- Shigekazu Takagi
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Information Patent Grant
Semiconductor device and method for manufacturing same
- Patent number 8,946,786
- Issue date Feb 3, 2015
- Rohm Co., Ltd.
- Goro Nakatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial force sensor
- Patent number 8,857,258
- Issue date Oct 14, 2014
- Panasonic Corporation
- Hideo Ohkoshi
- G01 - MEASURING TESTING
Information Patent Grant
Physical quantity detector
- Patent number 8,659,101
- Issue date Feb 25, 2014
- Hitachi Automotive Systems, Ltd.
- Kiyoko Yamanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor
- Patent number 8,497,672
- Issue date Jul 30, 2013
- Kabushiki Kaisha Toshiba
- Takashi Kawakubo
- G01 - MEASURING TESTING
Information Patent Grant
Acceleration sensor
- Patent number 8,327,708
- Issue date Dec 11, 2012
- Panasonic Corporation
- Isao Hattori
- G01 - MEASURING TESTING
Information Patent Grant
Integrated motion processing unit (MPU) with MEMS inertial sensing...
- Patent number 8,250,921
- Issue date Aug 28, 2012
- Invensense, Inc.
- Steven S. Nasiri
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical capacitive acceleration sensor
- Patent number 7,343,801
- Issue date Mar 18, 2008
- Conti Temic microelectronic GmbH
- Konrad Kapser
- G01 - MEASURING TESTING
Information Patent Grant
System for the measurement of acceleration in three axes
- Patent number 6,122,965
- Issue date Sep 26, 2000
- Temic Telefunken microelectronic GmbH
- Helmut Seidel
- G01 - MEASURING TESTING
Information Patent Grant
Instrument for measuring accelerations and process of making the same
- Patent number 5,065,628
- Issue date Nov 19, 1991
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Wolfgang Benecke
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INERTIAL SENSOR AND INERTIAL MEASUREMENT UNIT
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- Publication date Nov 2, 2023
- SEIKO EPSON CORPORATION
- Teruo Takizawa
- G01 - MEASURING TESTING
Information Patent Application
MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
- Publication number 20230314469
- Publication date Oct 5, 2023
- STMicroelectronics S.r.l.
- Alessandro TOCCHIO
- G01 - MEASURING TESTING
Information Patent Application
DUAL AND TRIPLE AXIS ACCELEROMETERS
- Publication number 20230204622
- Publication date Jun 29, 2023
- CAMBRIDGE ENTERPRISE LIMITED
- Ashwin SESHIA
- G01 - MEASURING TESTING
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MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
- Publication number 20200363448
- Publication date Nov 19, 2020
- STMicroelectronics S.r.l.
- Alessandro TOCCHIO
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...
- Publication number 20190226848
- Publication date Jul 25, 2019
- InvenSense, Inc.
- Steven S. NASIRI
- G01 - MEASURING TESTING
Information Patent Application
INERTIAL FORCE SENSOR
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- Publication date Dec 25, 2014
- HIDEO OHKOSHI
- G01 - MEASURING TESTING
Information Patent Application
Physical Quantity Detector
- Publication number 20130241013
- Publication date Sep 19, 2013
- Hitachi Automotive Systems, Ltd.
- Kiyoko Yamanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-BASED DUAL AND SINGLE PROOF-MASS ACCELEROMETER METHODS AND APP...
- Publication number 20130214367
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- mCube, Incorporated
- Dolf van der Heide
- G01 - MEASURING TESTING
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Three-Dimensional Micro-Electro-Mechanical-System Sensor
- Publication number 20130139595
- Publication date Jun 6, 2013
- PixArt Imaging Incorporation, R.O.C.
- Ming-Han Tsai
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
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- Publication date Apr 25, 2013
- Rohm Co., Ltd.
- Goro Nakatani
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Information Patent Application
INERTIA SENSING APPARATUS
- Publication number 20130042686
- Publication date Feb 21, 2013
- SITRONIX TECHNOLOGY CORP.
- CHIUNG-WEN LIN
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...
- Publication number 20120253738
- Publication date Oct 4, 2012
- INVENSENSE, INC.
- Steven S. NASIRI
- G01 - MEASURING TESTING
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Interconnection system on a plane adjacent to a solid-state device...
- Publication number 20120126351
- Publication date May 24, 2012
- Leslie Bruce Wilner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
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ACCELERATION SENSOR
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- Publication date May 24, 2012
- PANASONIC CORPORATION
- Isao Hattori
- G01 - MEASURING TESTING
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MEMS SENSOR
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- Publication date May 3, 2012
- Alps Electric Co., Ltd.
- Yoshitaka UTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Cost Optical Accelerometer
- Publication number 20120024062
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- Simeon E. Tiefel
- G01 - MEASURING TESTING
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ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE
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- Publication date Dec 1, 2011
- SEIKO EPSON CORPORATION
- Shigekazu TAKAGI
- G01 - MEASURING TESTING
Information Patent Application
INERTIAL FORCE SENSOR
- Publication number 20110271760
- Publication date Nov 10, 2011
- PANASONIC CORPORATION
- Hideo Ohkoshi
- G01 - MEASURING TESTING
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ACCELERATION SENSOR
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- Publication date Sep 29, 2011
- Kabushiki Kaisha Toshiba
- Takashi KAWAKUBO
- G01 - MEASURING TESTING
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Integrated Motion Processing Unit (MPU) With MEMS Inertial Sensing...
- Publication number 20090007661
- Publication date Jan 8, 2009
- InvenSense Inc.
- Steven S. NASIRI
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Micromechanical capacitive acceleration sensor
- Publication number 20060156818
- Publication date Jul 20, 2006
- Konrad Kapser
- G01 - MEASURING TESTING
Information Patent Application
Multiaxial monolithic acceleration sensor
- Publication number 20060021436
- Publication date Feb 2, 2006
- Konrad Kapser
- G01 - MEASURING TESTING

using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS tri-axial accelerometer with one or more decoupling elements

MEMS tri-axial accelerometer with one or more decoupling elements

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Micro-electro-mechanical system (MEMS) device with multi-dimensiona...

MEMS-based dual and single proof-mass accelerometer methods and app...

Three-dimensional micro-electro-mechanical-system sensor

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Element structure, inertia sensor, and electronic device

Semiconductor device and method for manufacturing same

Inertial force sensor

Physical quantity detector

Acceleration sensor

Acceleration sensor

Integrated motion processing unit (MPU) with MEMS inertial sensing...

Micromechanical capacitive acceleration sensor

System for the measurement of acceleration in three axes

Instrument for measuring accelerations and process of making the same

Patents Applicationslast 30 patents

INERTIAL SENSOR AND INERTIAL MEASUREMENT UNIT

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

DUAL AND TRIPLE AXIS ACCELEROMETERS

MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS

INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...

INERTIAL FORCE SENSOR

Physical Quantity Detector

MEMS-BASED DUAL AND SINGLE PROOF-MASS ACCELEROMETER METHODS AND APP...

Three-Dimensional Micro-Electro-Mechanical-System Sensor

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

INERTIA SENSING APPARATUS

INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING...

Interconnection system on a plane adjacent to a solid-state device...

ACCELERATION SENSOR

MEMS SENSOR

Low Cost Optical Accelerometer

ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE

INERTIAL FORCE SENSOR

ACCELERATION SENSOR

Integrated Motion Processing Unit (MPU) With MEMS Inertial Sensing...

Micromechanical capacitive acceleration sensor

Multiaxial monolithic acceleration sensor