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ELECTRICITY
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0276
using an anti-reflective coating
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last 30 patents
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Patent Grant
Photolithography method and photolithography system
Patent number
11,959,864
Issue date
Apr 16, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,955,336
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jing Hong Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for making photolithography mask plate
Patent number
11,947,255
Issue date
Apr 2, 2024
Tsinghua University
Mo Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Embedded memory with improved fill-in window
Patent number
11,943,921
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Meng-Han Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,935,757
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ambient controlled two-step thermal treatment for spin-on coating l...
Patent number
11,901,189
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Fong Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor arrangement and method of manufacture
Patent number
11,894,425
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Company Limited
Yun-Chi Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
11,887,814
Issue date
Jan 30, 2024
HITACHI HIGH-TECH CORPORATION
Mamoru Yakushiji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon-containing layer-forming composition, and method for produc...
Patent number
11,881,400
Issue date
Jan 23, 2024
Central Glass Company, Limited
Junya Nakatsuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spacer etching process for integrated circuit design
Patent number
11,854,820
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ru-Gun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Via structure and methods thereof
Patent number
11,854,962
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Che-Cheng Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for pattern reduction using a staircase spacer
Patent number
11,854,806
Issue date
Dec 26, 2023
Tokyo Electron Limited
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning method and structures resulting therefrom
Patent number
11,848,239
Issue date
Dec 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chieh-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices and methods of manufacturing
Patent number
11,842,896
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-layer photo etching mask including organic and inorganic mate...
Patent number
11,830,736
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Eight-transistor static random access memory, layout thereof, and m...
Patent number
11,832,429
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shau-Wei Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D NAND memory device and method of forming the same
Patent number
11,825,656
Issue date
Nov 21, 2023
Yangtze Memory Technologies Co., Ltd.
Yali Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing workpiece
Patent number
11,823,903
Issue date
Nov 21, 2023
Tokyo Electron Limited
Yoshihide Kihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Material for forming organic film, method for forming organic film,...
Patent number
11,822,247
Issue date
Nov 21, 2023
Shin-Etsu Chemical Co., Ltd.
Takayoshi Nakahara
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Coating compositions and methods of forming electronic devices
Patent number
11,817,316
Issue date
Nov 14, 2023
Rohm and Haas Electronic Materials LLC
Sheng Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal gate structure cutting process
Patent number
11,810,909
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Shiang-Bau Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method and method for manufacturing semiconductor d...
Patent number
11,798,806
Issue date
Oct 24, 2023
Kioxia Corporation
Yusuke Kasahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal via structure
Patent number
11,784,120
Issue date
Oct 10, 2023
International Business Machines Corporation
Yann Mignot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning a substrate using a sidewall spacer etch mask
Patent number
11,782,346
Issue date
Oct 10, 2023
Tokyo Electron Limited
Jodi Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for pattern reduction using a staircase spacer
Patent number
11,776,812
Issue date
Oct 3, 2023
Tokyo Electron Limited
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Memory device having contact plugs with narrower and wider portions
Patent number
11,764,274
Issue date
Sep 19, 2023
Winbond Electronics Corp.
Cheng-Hong Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and fabrication method thereof
Patent number
11,756,795
Issue date
Sep 12, 2023
Semiconductor Manufacturing International (Shanghai) Corporation
Shiliang Ji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Directional deposition in etch chamber
Patent number
11,742,212
Issue date
Aug 29, 2023
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reflection mode photomask and method of making
Patent number
11,735,421
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Lang Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for overlay measurement based on soft X-ray Sca...
Patent number
11,698,251
Issue date
Jul 11, 2023
KLA Corporation
Andrei V. Shchegrov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
Publication number
20240116958
Publication date
Apr 11, 2024
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240118618
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Chih HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARDMASK STRUCTURE AND METHOD OF FORMING SEMICONDUCTOR STRUCTURE
Publication number
20240096625
Publication date
Mar 21, 2024
NANYA TECHNOLOGY CORPORATION
WEI-CHUAN FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240096623
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh-Hsin HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARDMASK STRUCTURE AND METHOD OF FORMING SEMICONDUCTOR STRUCTURE
Publication number
20240096624
Publication date
Mar 21, 2024
NANYA TECHNOLOGY CORPORATION
WEI-CHUAN FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Novel 3D NAND Memory Device And Method of Forming The Same
Publication number
20240090223
Publication date
Mar 14, 2024
Yangtze Memory Technologies Co., Ltd.
Yali SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Double Patterning Method of Patterning a Substrate
Publication number
20240087892
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Eric Chih-Fang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING
Publication number
20240079235
Publication date
Mar 7, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE, AND SEMICONDUCTOR...
Publication number
20240071809
Publication date
Feb 29, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC
Yuanxi ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING METHOD AND STRUCTURES RESULTING THEREFROM
Publication number
20240063060
Publication date
Feb 22, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chieh-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE
Publication number
20240047211
Publication date
Feb 8, 2024
Samsung Electronics Co., Ltd.
Yeojin LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL HARD MASK FOR PRECISE TUNING OF MANDRELS
Publication number
20240038535
Publication date
Feb 1, 2024
International Business Machines Corporation
Joe Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE USING MULTI-LAYER H...
Publication number
20240014038
Publication date
Jan 11, 2024
NANYA TECHNOLOGY CORPORATION
YING-CHENG CHUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE USING MULTI-LAYER H...
Publication number
20240014040
Publication date
Jan 11, 2024
NANYA TECHNOLOGY CORPORATION
YING-CHENG CHUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTACT OVER ACTIVE GATE STRUCTURES WITH ETCH STOP LAYERS FOR ADVAN...
Publication number
20240006322
Publication date
Jan 4, 2024
Intel Corporation
Atul MADHAVAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METALLIC PHOTORESIST PATTERNING AND DEFECT IMPROVEMENT
Publication number
20230393475
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Chih CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST MATERIALS AND ASSOCIATED METHODS
Publication number
20230384669
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Hui WENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AMBIENT CONTROLLED TWO-STEP THERMAL TREATMENT FOR SPIN-ON COATING L...
Publication number
20230386852
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Fong Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Multi-Layer Photo Etching Mask Including Organic and Inorganic Mate...
Publication number
20230377887
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co.
Chung-Ting Ko
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PATTERNING A SUBSTRATE USING A SIDEWALL SPACER ETCH MASK
Publication number
20230367217
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Jodi GRZESKOWIAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTION MODE PHOTOMASK
Publication number
20230360914
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Lang CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Patterning Features with Metal Based Resists
Publication number
20230326755
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Katie Lutker-Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING CONTINUOUS LINE-END TO LINE-END SPACES WITH SPAC...
Publication number
20230314952
Publication date
Oct 5, 2023
International Business Machines Corporation
Allen GABOR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING METAL HARD MASK AND PATT...
Publication number
20230305405
Publication date
Sep 28, 2023
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Tuning Threshold Voltage Through Meta Stable Plasma Treatment
Publication number
20230282484
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shao-Jyun Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING COMPOSITIONS AND METHODS TO ENHANCE SC-1 RESISTANCE
Publication number
20230282478
Publication date
Sep 7, 2023
Brewer Science, Inc.
Daniel Patrick Sweat
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
PREPARATION METHOD FOR SEMICONDUCTOR STRUCTURE AND SAME
Publication number
20230282479
Publication date
Sep 7, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Longyang CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZING AGENT FOR FORMING ORGANIC FILM, COMPOSITION FOR FORMING...
Publication number
20230274936
Publication date
Aug 31, 2023
Shin-Etsu Chemical Co., Ltd.
Yasuyuki YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING PROTECTIVE FILM AGAINST ALKALINE AQUEOUS HY...
Publication number
20230260787
Publication date
Aug 17, 2023
Shin-Etsu Chemical Co., Ltd.
Keisuke NIIDA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20230245900
Publication date
Aug 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Hao CHEN
H01 - BASIC ELECTRIC ELEMENTS