using an exciting beam and a detection beam including surface acoustic waves [SAW]

Industry

CPC
G01B11/0666

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Parent Industries

GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B11/00Measuring arrangements characterised by the use of optical means

Current Industry

G01B11/0666using an exciting beam and a detection beam including surface acoustic waves [SAW]

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,074,076
- Issue date Aug 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Soichiro Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Raman spectroscopy based measurements in patterned structures
- Patent number 12,066,385
- Issue date Aug 20, 2024
- Nova Ltd.
- Gilad Barak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid metrology method and system
- Patent number 12,025,560
- Issue date Jul 2, 2024
- Gilad Barak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Raman spectroscopy based measurements in patterned structures
- Patent number 11,275,027
- Issue date Mar 15, 2022
- Nova Ltd.
- Gilad Barak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid metrology method and system
- Patent number 11,150,190
- Issue date Oct 19, 2021
- Nova Ltd.
- Gilad Barak
- G01 - MEASURING TESTING
Information Patent Grant
Method for real-time inspection of structural components
- Patent number 11,022,429
- Issue date Jun 1, 2021
- Triad National Security, LLC
- Nicholas D. Stull
- G01 - MEASURING TESTING
Information Patent Grant
Methods for nondestructive measurements of thickness of underlying...
- Patent number 10,989,520
- Issue date Apr 27, 2021
- Samsung Electronics Co., Ltd.
- Duck-mahn Oh
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus, inspection method, computer program and recor...
- Patent number 10,801,954
- Issue date Oct 13, 2020
- Pioneer Corporation
- Takanori Ochiai
- G01 - MEASURING TESTING
Information Patent Grant
Hybrid metrology method and system
- Patent number 10,732,116
- Issue date Aug 4, 2020
- NOVA MEASURING INSTRUMENTS LTD.
- Gilad Barak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Raman spectroscopy based measurements in patterned structures
- Patent number 10,564,106
- Issue date Feb 18, 2020
- Nova Measuring Instruments Ltd.
- Gilad Barak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining the layer thickness of a connecting layer be...
- Patent number 10,401,160
- Issue date Sep 3, 2019
- Constantia Teich GmbH
- Bernhard Reitinger
- G01 - MEASURING TESTING
Information Patent Grant
Wavelength-selectable coating thickness measurement apparatus
- Patent number 9,534,889
- Issue date Jan 3, 2017
- Electronics and Telecommunications Research Institute
- Jeong Eun Kim
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric material sensing apparatus including adjustable cou...
- Patent number 8,976,365
- Issue date Mar 10, 2015
- Harris Corporation
- Robert M. Montgomery
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interferometric sensing apparatus including adjustable coupling and...
- Patent number 8,842,290
- Issue date Sep 23, 2014
- Harris Corporation
- Robert M. Montgomery
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interferometric biometric sensing apparatus including adjustable co...
- Patent number 8,842,289
- Issue date Sep 23, 2014
- Harris Corporation
- Robert M. Montgomery
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interferometric biometric sensing apparatus including adjustable co...
- Patent number 8,665,451
- Issue date Mar 4, 2014
- Harris Corporation
- Robert M. Montgomery
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interferometric sensing apparatus including adjustable coupling and...
- Patent number 8,649,021
- Issue date Feb 11, 2014
- Harris Corporation
- Robert M. Montgomery
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interferometric material sensing apparatus including adjustable cou...
- Patent number 8,649,022
- Issue date Feb 11, 2014
- Harris Corporation
- Robert M. Montgomery
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method and arrangement for detecting a surface of an object
- Patent number 8,481,975
- Issue date Jul 9, 2013
- MTU Aero Engines AG
- Joachim Bamberg
- G01 - MEASURING TESTING
Information Patent Grant
Optical method and system for the characterization of laterally-pat...
- Patent number 7,894,070
- Issue date Feb 22, 2011
- Brown University
- Humphrey J. Maris
- G01 - MEASURING TESTING
Information Patent Grant
Optical method for the characterization of laterally-patterned samp...
- Patent number 7,782,471
- Issue date Aug 24, 2010
- Brown University
- Humphrey J. Maris
- G01 - MEASURING TESTING
Information Patent Grant
Metrology system with spectroscopic ellipsometer and photoacoustic...
- Patent number 7,705,974
- Issue date Apr 27, 2010
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Grant
Characterization of micro- and nano scale materials by acoustic wav...
- Patent number 7,649,632
- Issue date Jan 19, 2010
- The Trustees of Boston University
- Todd W. Murray
- G01 - MEASURING TESTING
Information Patent Grant
Metrology system with spectroscopic ellipsometer and photoacoustic...
- Patent number 7,522,272
- Issue date Apr 21, 2009
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Grant
Optical method for the characterization of laterally patterned samp...
- Patent number 7,505,154
- Issue date Mar 17, 2009
- Brown University
- Humphrey J. Maris
- G01 - MEASURING TESTING
Information Patent Grant
Method of determining properties of patterned thin film metal struc...
- Patent number 7,365,864
- Issue date Apr 29, 2008
- Advanced Metrology Systems LLC
- Michael Gostein
- G01 - MEASURING TESTING
Information Patent Grant
Optical method and system for the characterization of laterally-pat...
- Patent number 7,339,676
- Issue date Mar 4, 2008
- Brown University
- Humphrey J. Maris
- G01 - MEASURING TESTING
Information Patent Grant
Opto-acoustic apparatus with optical heterodyning for measuring sol...
- Patent number 7,327,468
- Issue date Feb 5, 2008
- Advanced Metrology Systems LLC
- Alexei Maznev
- G01 - MEASURING TESTING
Information Patent Grant
Metrology system with spectroscopic ellipsometer and photoacoustic...
- Patent number 7,253,887
- Issue date Aug 7, 2007
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for measuring thickness
- Patent number 7,204,146
- Issue date Apr 17, 2007
- Techno Network Shikoku Co., Ltd.
- Ichiro Ishimaru
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
HYBRID METROLOGY METHOD AND SYSTEM
- Publication number 20250003882
- Publication date Jan 2, 2025
- NOVA LTD
- GILAD BARAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-DESTRUCTIVE ESTIMATION OF COATING LAYER THICKNESS BASED ON SWEE...
- Publication number 20240151515
- Publication date May 9, 2024
- TATA CONSULTANCY SERVICES LIMITED
- ABHIJEET GOREY
- G01 - MEASURING TESTING
Information Patent Application
RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES
- Publication number 20220326159
- Publication date Oct 13, 2022
- NOVA LTD
- Gilad Barak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HYBRID METROLOGY METHOD AND SYSTEM
- Publication number 20220120690
- Publication date Apr 21, 2022
- NOVA LTD
- GILAD BARAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HYBRID METROLOGY METHOD AND SYSTEM
- Publication number 20210003508
- Publication date Jan 7, 2021
- NOVA MEASURING INSTRUMENTS LTD.
- GILAD BARAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES
- Publication number 20200256799
- Publication date Aug 13, 2020
- NOVA MEASURING INSTRUMENTS LTD.
- GILAD BARAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR NONDESTRUCTIVE MEASUREMENTS OF THICKNESS OF UNDERLYING...
- Publication number 20200208964
- Publication date Jul 2, 2020
- Samsung Electronics Co., Ltd.
- Duck-mahn OH
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS, INSPECTION METHOD, COMPUTER PROGRAM AND RECOR...
- Publication number 20190234872
- Publication date Aug 1, 2019
- Pioneer Corporation
- Takanori OCHIAI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR REAL-TIME INSPECTION OF STRUCTURAL COMPONENTS
- Publication number 20190186898
- Publication date Jun 20, 2019
- Triad National Security, LLC
- Nicholas D. Stull
- G01 - MEASURING TESTING
Information Patent Application
RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES
- Publication number 20180372644
- Publication date Dec 27, 2018
- NOVA MEASURING INSTRUMENTS LTD.
- GILAD BARAK
- G01 - MEASURING TESTING
Information Patent Application
HYBRID METROLOGY METHOD AND SYSTEM
- Publication number 20180372645
- Publication date Dec 27, 2018
- NOVA MEASURING INSTRUMENTS LTD.
- GILAD BARAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MEASURING A LONG PROFILE
- Publication number 20180113079
- Publication date Apr 26, 2018
- NEXTSENSE GMBH
- Gasser CLEMENS
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Application
INTERFEROMETRIC MATERIAL SENSING APPARATUS INCLUDING ADJUSTABLE COU...
- Publication number 20150009506
- Publication date Jan 8, 2015
- Harris Corporation
- ROBERT M. MONTGOMERY
- G02 - OPTICS
Information Patent Application
INTERFEROMETRIC BIOMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE CO...
- Publication number 20140128746
- Publication date May 8, 2014
- ROBERT M. MONTGOMERY
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE COUPLING AND...
- Publication number 20140098372
- Publication date Apr 10, 2014
- ROBERT M. MONTGOMERY
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC BIOMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE CO...
- Publication number 20120281228
- Publication date Nov 8, 2012
- Harris Corporation, Corporation of the State of Delaware
- Robert M. Montgomery
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
INTERFEROMETRIC MATERIAL SENSING APPARATUS INCLUDING ADJUSTABLE COU...
- Publication number 20120281229
- Publication date Nov 8, 2012
- Harris Corporation
- Robert M. MONTGOMERY
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
INTERFEROMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE COUPLING AND...
- Publication number 20120281227
- Publication date Nov 8, 2012
- Harris Corporation, Corporation of the State of Delaware
- Robert M. Montgomery
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Contact-free pipe wall thickness measurement device and pipe wall t...
- Publication number 20110138920
- Publication date Jun 16, 2011
- SMS Meer GmbH
- Martin Sauerland
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND ARRANGEMENT FOR DETECTING A SURFACE OF AN OBJECT
- Publication number 20110133102
- Publication date Jun 9, 2011
- MTU AERO ENGINES, GMBH
- Joachim Bamberg
- G01 - MEASURING TESTING
Information Patent Application
Optical Method For the Characterization of Laterally-Patterned Samp...
- Publication number 20100332203
- Publication date Dec 30, 2010
- Brown University Research Foundation
- Humphrey J. Maris
- G01 - MEASURING TESTING
Information Patent Application
NONCONTACT FILM THICKNESS MEASUREMENT METHOD AND DEVICE
- Publication number 20100195092
- Publication date Aug 5, 2010
- AISIN SEIKI KABUSHIKI KAISHA
- Hideyuki Ohtake
- G01 - MEASURING TESTING
Information Patent Application
Optical method for the characterization of laterally-patterned samp...
- Publication number 20090213375
- Publication date Aug 27, 2009
- Brown University Research Foundation
- Hamphrey J. Maris
- G01 - MEASURING TESTING
Information Patent Application
Metrology system with spectroscopic ellipsometer and photoacoustic...
- Publication number 20090201502
- Publication date Aug 13, 2009
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Application
Optical method for the characterization of laterally patterned samp...
- Publication number 20080151219
- Publication date Jun 26, 2008
- Brown University Research Foundation
- Humphrey J. Maris
- G01 - MEASURING TESTING
Information Patent Application
Characterization of Micro- and Nano Scale Materials By Acoustic Wav...
- Publication number 20070273952
- Publication date Nov 29, 2007
- Todd W. Murray
- G01 - MEASURING TESTING
Information Patent Application
Metrology system with spectroscopic ellipsometer and photoacoustic...
- Publication number 20070268478
- Publication date Nov 22, 2007
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Application
Method for measuring thin films
- Publication number 20070109540
- Publication date May 17, 2007
- Koninklijke Philips Electronics N.V.
- Alexei Maznev
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for measuring thickness of thin films via tran...
- Publication number 20070024871
- Publication date Feb 1, 2007
- Alexei Maznev
- G01 - MEASURING TESTING
Information Patent Application
Method of determining properties of patterned thin film meatal stru...
- Publication number 20060203876
- Publication date Sep 14, 2006
- Michael Gostein
- G01 - MEASURING TESTING

using an exciting beam and a detection beam including surface acoustic waves [SAW]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method

Raman spectroscopy based measurements in patterned structures

Hybrid metrology method and system

Raman spectroscopy based measurements in patterned structures

Hybrid metrology method and system

Method for real-time inspection of structural components

Methods for nondestructive measurements of thickness of underlying...

Inspection apparatus, inspection method, computer program and recor...

Hybrid metrology method and system

Raman spectroscopy based measurements in patterned structures

Method for determining the layer thickness of a connecting layer be...

Wavelength-selectable coating thickness measurement apparatus

Interferometric material sensing apparatus including adjustable cou...

Interferometric sensing apparatus including adjustable coupling and...

Interferometric biometric sensing apparatus including adjustable co...

Interferometric biometric sensing apparatus including adjustable co...

Interferometric sensing apparatus including adjustable coupling and...

Interferometric material sensing apparatus including adjustable cou...

Method and arrangement for detecting a surface of an object

Optical method and system for the characterization of laterally-pat...

Optical method for the characterization of laterally-patterned samp...

Metrology system with spectroscopic ellipsometer and photoacoustic...

Characterization of micro- and nano scale materials by acoustic wav...

Metrology system with spectroscopic ellipsometer and photoacoustic...

Optical method for the characterization of laterally patterned samp...

Method of determining properties of patterned thin film metal struc...

Optical method and system for the characterization of laterally-pat...

Opto-acoustic apparatus with optical heterodyning for measuring sol...

Metrology system with spectroscopic ellipsometer and photoacoustic...

Device and method for measuring thickness

Patents Applicationslast 30 patents

HYBRID METROLOGY METHOD AND SYSTEM

NON-DESTRUCTIVE ESTIMATION OF COATING LAYER THICKNESS BASED ON SWEE...

RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES

HYBRID METROLOGY METHOD AND SYSTEM

HYBRID METROLOGY METHOD AND SYSTEM

RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES

METHODS FOR NONDESTRUCTIVE MEASUREMENTS OF THICKNESS OF UNDERLYING...

INSPECTION APPARATUS, INSPECTION METHOD, COMPUTER PROGRAM AND RECOR...

METHOD FOR REAL-TIME INSPECTION OF STRUCTURAL COMPONENTS

RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES

HYBRID METROLOGY METHOD AND SYSTEM

METHOD AND DEVICE FOR MEASURING A LONG PROFILE

INTERFEROMETRIC MATERIAL SENSING APPARATUS INCLUDING ADJUSTABLE COU...

INTERFEROMETRIC BIOMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE CO...

INTERFEROMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE COUPLING AND...

INTERFEROMETRIC BIOMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE CO...

INTERFEROMETRIC MATERIAL SENSING APPARATUS INCLUDING ADJUSTABLE COU...

INTERFEROMETRIC SENSING APPARATUS INCLUDING ADJUSTABLE COUPLING AND...

Contact-free pipe wall thickness measurement device and pipe wall t...

METHOD AND ARRANGEMENT FOR DETECTING A SURFACE OF AN OBJECT

Optical Method For the Characterization of Laterally-Patterned Samp...

NONCONTACT FILM THICKNESS MEASUREMENT METHOD AND DEVICE

Optical method for the characterization of laterally-patterned samp...

Metrology system with spectroscopic ellipsometer and photoacoustic...

Optical method for the characterization of laterally patterned samp...

Characterization of Micro- and Nano Scale Materials By Acoustic Wav...

Metrology system with spectroscopic ellipsometer and photoacoustic...

Method for measuring thin films

Method and apparatus for measuring thickness of thin films via tran...

Method of determining properties of patterned thin film meatal stru...