using DC, AC or RF discharges

Industry

CPC
C23C16/272

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/272using DC, AC or RF discharges

Industries

Patents Grantslast 30 patents

Information Patent Grant
Chemical vapor deposition process for producing diamond
- Patent number 11,905,594
- Issue date Feb 20, 2024
- The University of Bristol
- Neil Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density carbon films for patterning applications
- Patent number 11,842,897
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-planar polycrystalline diamond body
- Patent number 11,825,286
- Issue date Nov 21, 2023
- Element Six Technologies Limited
- Benjamin Wickham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing high-density, nitrogen-doped carbon films for...
- Patent number 11,664,214
- Issue date May 30, 2023
- Applied Materials, Inc.
- Jui-Yuan Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method
- Patent number 11,401,604
- Issue date Aug 2, 2022
- National University Corporation Okayama University
- Yuichi Imai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-supporting ultra-fine nanocrystalline diamond thick film
- Patent number 11,359,276
- Issue date Jun 14, 2022
- NINGBO INSTITUTE OF MATERIALS TECHNOLOGY AND ENGINEERING, CHINESE ACADEMY OF...
- Nan Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Foundation substrate for producing diamond film and method for prod...
- Patent number 11,180,865
- Issue date Nov 23, 2021
- Shin-Etsu Chemical Co., Ltd.
- Hitoshi Noguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-density low temperature carbon films for hardmask and other pa...
- Patent number 11,043,372
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multispectral interference coating with diamond-like carbon (DLC) film
- Patent number 10,705,273
- Issue date Jul 7, 2020
- Raytheon Company
- Shu-Chung Chiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Toroidal plasma processing apparatus with a shaped workpiece holder
- Patent number 10,704,161
- Issue date Jul 7, 2020
- Plasmability, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition or treatment of diamond-like carbon in a plasma reactor
- Patent number 10,544,505
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Yang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Toroidal plasma processing apparatus with a shaped workpiece holder
- Patent number 10,443,150
- Issue date Oct 15, 2019
- Plasmability, LLC
- William Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon film forming apparatus, carbon film forming method, and magn...
- Patent number 10,134,435
- Issue date Nov 20, 2018
- Showa Denko K.K.
- Ichiro Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of CVD plasma processing with a toroidal plasma processing a...
- Patent number 9,909,215
- Issue date Mar 6, 2018
- Plasmability, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powered anode for ion source for DLC and reactive processes
- Patent number 9,865,436
- Issue date Jan 9, 2018
- Plasma-Therm NES LLC
- Sarpangala H. Hegde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High power impulse magnetron sputtering process to achieve a high d...
- Patent number 9,695,503
- Issue date Jul 4, 2017
- Applied Materials, Inc.
- Michael W. Stowell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond producing method and DC plasma enhanced CVD apparatus
- Patent number 9,534,315
- Issue date Jan 3, 2017
- Shin-Etsu Chemical Co., Ltd.
- Hitoshi Noguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of diamond shells
- Patent number 9,481,930
- Issue date Nov 1, 2016
- Lawrence Livermore National Security, LLC
- Alex V. Hamza
- B43 - WRITING OR DRAWING IMPLEMENTS BUREAU ACCESSORIES
Information Patent Grant
Remote plasma source based cyclic CVD process for nanocrystalline d...
- Patent number 9,382,625
- Issue date Jul 5, 2016
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Base substrate for epitaxial diamond film, method for producing the...
- Patent number 9,353,458
- Issue date May 31, 2016
- ATSUHITO SAWABE
- Atsuhito Sawabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for fabricating nanocrystalline diamond film
- Patent number 9,074,281
- Issue date Jul 7, 2015
- Korea Institute of Science and Technology
- Wook Seong Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Direct-current plasma CVD apparatus and method for producing diamon...
- Patent number 8,826,854
- Issue date Sep 9, 2014
- Shin-Etsu Chemical Co., Ltd.
- Hitoshi Noguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond nucleation using polyethene
- Patent number 8,491,964
- Issue date Jul 23, 2013
- University of Puerto Rico
- Gerardo Morell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for DC plasma assisted chemical vapor deposition in the abse...
- Patent number 8,334,027
- Issue date Dec 18, 2012
- Korea Institute of Science and Technology
- Wook-Seong Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for making a highly stable diamond film on a substrate
- Patent number 7,833,581
- Issue date Nov 16, 2010
- The Hong Kong University of Science and Technology
- Liang Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond shell with a geometrical figure and method for fabrication...
- Patent number 7,815,969
- Issue date Oct 19, 2010
- Korea Institute of Science and Technology
- Phillip John
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous carbon film forming method and device
- Patent number 7,803,433
- Issue date Sep 28, 2010
- JTEKT Corporation
- Junji Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond films and methods of making diamond films
- Patent number 7,771,823
- Issue date Aug 10, 2010
- Nanotech LLC
- John Harvie Chaffin, III
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond films and methods of making diamond films
- Patent number 7,767,184
- Issue date Aug 3, 2010
- Nanotech LLC
- John Harvie Chaffin, III
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for synthesizing self-aligned carbon nanomaterials on large...
- Patent number 7,767,275
- Issue date Aug 3, 2010
- Korea Institute of Science and Technology
- Jae-Kap Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS
- Publication number 20240087894
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...
- Publication number 20230392255
- Publication date Dec 7, 2023
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING APPARATUS AND APPLICATION THEREOF
- Publication number 20230043892
- Publication date Feb 9, 2023
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-PLANAR POLYCRYSTALLINE DIAMOND BODY
- Publication number 20220369038
- Publication date Nov 17, 2022
- ELEMENT SIX TECHNOLOGIES LIMITED
- Benjamin Wickham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION PROCESS FOR PRODUCING DIAMOND
- Publication number 20220325406
- Publication date Oct 13, 2022
- The University of Bristol
- Neil FOX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-PLANAR DIAMOND BODY FOR A SPEAKER DOME
- Publication number 20220225043
- Publication date Jul 14, 2022
- ELEMENT SIX TECHNOLOGIES LIMITED
- Benjamin WICKHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PRODUCING HIGH-DENSITY DOPED-CARBON FILMS FOR HARDMASK...
- Publication number 20210407801
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PRODUCING HIGH-DENSITY, NITROGEN-DOPED CARBON FILMS FOR...
- Publication number 20210407791
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Jui-Yuan HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD
- Publication number 20210172060
- Publication date Jun 10, 2021
- DIAROTECH
- Horacio TELLEZ OLIVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-SUPPORTING ULTRA-FINE NANOCRYSTALLINE DIAMOND THICK FILM
- Publication number 20210140038
- Publication date May 13, 2021
- NINGB0 INSTITUTE OF MATERIALS TECHNOLOGY & ENGINEERING, CHINESE ACADEMY OF SC...
- Nan JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND-LIKE CARBON SYNTHESIZED BY ATMOSPHERIC PLASMA
- Publication number 20210002759
- Publication date Jan 7, 2021
- SAMU TECHNOLOGY, LLC
- Jinqiu Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BARRIER FILM
- Publication number 20200190663
- Publication date Jun 18, 2020
- Tetra Laval Holdings & Finance S.A.
- Jerome Larrieu
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS
- Publication number 20200135466
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Toroidal Plasma Processing Apparatus with a Shaped Workpiece Holder
- Publication number 20200010976
- Publication date Jan 9, 2020
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD
- Publication number 20200002809
- Publication date Jan 2, 2020
- STRAWB Inc.
- Yuichi IMAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTISPECTRAL INTERFERENCE COATING WITH DIAMOND-LIKE CARBON (DLC) FILM
- Publication number 20190293850
- Publication date Sep 26, 2019
- Raytheon Company
- Shu-Chung Chiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-DENSITY LOW TEMPERATURE CARBON FILMS FOR HARDMASK AND OTHER PA...
- Publication number 20180358222
- Publication date Dec 13, 2018
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OR TREATMENT OF DIAMOND-LIKE CARBON IN A PLASMA REACTOR
- Publication number 20180274089
- Publication date Sep 27, 2018
- Applied Materials, Inc.
- Yang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON
- Publication number 20180274100
- Publication date Sep 27, 2018
- Applied Materials, Inc.
- Yang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of CVD Plasma Processing with a Toroidal Plasma Processing A...
- Publication number 20180155839
- Publication date Jun 7, 2018
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE FILM AND METHOD FOR PRODUCING SAME
- Publication number 20180087149
- Publication date Mar 29, 2018
- IMOTT INC.
- Makoto MATSUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Toroidal Plasma Processing Apparatus
- Publication number 20170298513
- Publication date Oct 19, 2017
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS
- Publication number 20170073836
- Publication date Mar 16, 2017
- Shin-Etsu Chemical Co., Ltd.
- Hitoshi NOGUCHI
- C30 - CRYSTAL GROWTH
Information Patent Application
Toroidal Plasma Processing Apparatus with a Shaped Workpiece Holder
- Publication number 20160340798
- Publication date Nov 24, 2016
- PLASMABILITY, LLC
- William Holber
- C30 - CRYSTAL GROWTH
Information Patent Application
REMOTE PLASMA SOURCE BASED CYCLIC CVD PROCESS FOR NANOCRYSTALLINE D...
- Publication number 20150315707
- Publication date Nov 5, 2015
- Applied Materials, Inc.
- Jun XUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus of Growing Metal-free and Low Stress Thick Fil...
- Publication number 20150104648
- Publication date Apr 16, 2015
- NANO AND ADVANCED MATERIALS INSTITUTE LIMITED
- Zhonghui Alex WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR DEPOSITING CARBON FILM AND METHOD FOR DEPOSITING CARBON...
- Publication number 20150056386
- Publication date Feb 26, 2015
- JTEKT Corporation
- Masahiro SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Toroidal Plasma Processing Apparatus
- Publication number 20140272108
- Publication date Sep 18, 2014
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYCRYSTALLINE DIAMOND COMPACT COATED WITH HIGH ABRASION RESISTANC...
- Publication number 20140060937
- Publication date Mar 6, 2014
- DIAMOND INNOVATIONS, INC.
- Valeriy V. Konovalov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS
- Publication number 20140041574
- Publication date Feb 13, 2014
- Shin-Estu Chemical Co., Ltd.
- Hitoshi NOGUCHI
- C30 - CRYSTAL GROWTH

using DC, AC or RF discharges

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Chemical vapor deposition process for producing diamond

High density carbon films for patterning applications

Non-planar polycrystalline diamond body

Methods for producing high-density, nitrogen-doped carbon films for...

Film formation method

Self-supporting ultra-fine nanocrystalline diamond thick film

Foundation substrate for producing diamond film and method for prod...

High-density low temperature carbon films for hardmask and other pa...

Multispectral interference coating with diamond-like carbon (DLC) film

Toroidal plasma processing apparatus with a shaped workpiece holder

Deposition or treatment of diamond-like carbon in a plasma reactor

Toroidal plasma processing apparatus with a shaped workpiece holder

Carbon film forming apparatus, carbon film forming method, and magn...

Method of CVD plasma processing with a toroidal plasma processing a...

Powered anode for ion source for DLC and reactive processes

High power impulse magnetron sputtering process to achieve a high d...

Diamond producing method and DC plasma enhanced CVD apparatus

Fabrication of diamond shells

Remote plasma source based cyclic CVD process for nanocrystalline d...

Base substrate for epitaxial diamond film, method for producing the...

Methods for fabricating nanocrystalline diamond film

Direct-current plasma CVD apparatus and method for producing diamon...

Diamond nucleation using polyethene

Method for DC plasma assisted chemical vapor deposition in the abse...

Method for making a highly stable diamond film on a substrate

Diamond shell with a geometrical figure and method for fabrication...

Amorphous carbon film forming method and device

Diamond films and methods of making diamond films

Diamond films and methods of making diamond films

Method for synthesizing self-aligned carbon nanomaterials on large...

Patents Applicationslast 30 patents

HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS

Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...

COATING APPARATUS AND APPLICATION THEREOF

NON-PLANAR POLYCRYSTALLINE DIAMOND BODY

CHEMICAL VAPOR DEPOSITION PROCESS FOR PRODUCING DIAMOND

NON-PLANAR DIAMOND BODY FOR A SPEAKER DOME

METHODS FOR PRODUCING HIGH-DENSITY DOPED-CARBON FILMS FOR HARDMASK...

METHODS FOR PRODUCING HIGH-DENSITY, NITROGEN-DOPED CARBON FILMS FOR...

PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD

SELF-SUPPORTING ULTRA-FINE NANOCRYSTALLINE DIAMOND THICK FILM

DIAMOND-LIKE CARBON SYNTHESIZED BY ATMOSPHERIC PLASMA

BARRIER FILM

HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS

Toroidal Plasma Processing Apparatus with a Shaped Workpiece Holder

FILM FORMATION METHOD

MULTISPECTRAL INTERFERENCE COATING WITH DIAMOND-LIKE CARBON (DLC) FILM

HIGH-DENSITY LOW TEMPERATURE CARBON FILMS FOR HARDMASK AND OTHER PA...

DEPOSITION OR TREATMENT OF DIAMOND-LIKE CARBON IN A PLASMA REACTOR

ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON

Method of CVD Plasma Processing with a Toroidal Plasma Processing A...

PROTECTIVE FILM AND METHOD FOR PRODUCING SAME

Toroidal Plasma Processing Apparatus

DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS

Toroidal Plasma Processing Apparatus with a Shaped Workpiece Holder

REMOTE PLASMA SOURCE BASED CYCLIC CVD PROCESS FOR NANOCRYSTALLINE D...

Method and Apparatus of Growing Metal-free and Low Stress Thick Fil...

DEVICE FOR DEPOSITING CARBON FILM AND METHOD FOR DEPOSITING CARBON...

Toroidal Plasma Processing Apparatus

POLYCRYSTALLINE DIAMOND COMPACT COATED WITH HIGH ABRASION RESISTANC...

DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS