using dc or ac discharges

Industry

CPC
C23C16/503

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/503using dc or ac discharges

Industries

Patents Grantslast 30 patents

Information Patent Grant
Artificial blood vessel
- Patent number 11,969,334
- Issue date Apr 30, 2024
- Kake Educational Institution
- Yasuhiro Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High voltage, low pressure plasma enhanced atomic layer deposition
- Patent number 11,935,759
- Issue date Mar 19, 2024
- Lotus Applied Technology, LLC
- Eric R. Dickey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for controlling ion energy distribution
- Patent number 11,901,157
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Linying Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, material layer deposition apparatus...
- Patent number 11,784,026
- Issue date Oct 10, 2023
- Samsung Electronics Co., Ltd.
- Woongsik Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post-discharge plasma coating device for wired substrates
- Patent number 11,756,770
- Issue date Sep 12, 2023
- Luxembourg Institute of Science and Technology (LIST)
- Simon Bulou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and plasma processing apparatus
- Patent number 11,721,595
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Sho Oikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed plasma (DC/RF) deposition of high quality C films for patter...
- Patent number 11,603,591
- Issue date Mar 14, 2023
- Applied Materials Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support and thin-film deposition apparatus using the same
- Patent number 11,598,006
- Issue date Mar 7, 2023
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of site-specific deposition onto a free-standing carbon article
- Patent number 11,512,390
- Issue date Nov 29, 2022
- Rochester Institute of Technology
- Brian J. Landi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electric discharge generator and power supply device of electric di...
- Patent number 11,466,366
- Issue date Oct 11, 2022
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Yoichiro Tabata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck and processing arrangement
- Patent number 11,387,081
- Issue date Jul 12, 2022
- Infineon Technologies AG
- Rudolf Kogler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for coating surfaces
- Patent number 11,348,759
- Issue date May 31, 2022
- AGM Container Controls, Inc.
- Andrew Tudhope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-function equipment implementing fabrication of high-k dielect...
- Patent number 11,322,348
- Issue date May 3, 2022
- Miin-Jang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma device
- Patent number 11,251,019
- Issue date Feb 15, 2022
- Toyota Jidosha Kabushiki Kaisha
- Tetsuharu Baba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, device and process for coating of articles
- Patent number 11,247,227
- Issue date Feb 15, 2022
- Master Dynamic Limited
- Yingnan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monopole antenna array source for semiconductor process equipment
- Patent number 11,244,808
- Issue date Feb 8, 2022
- Applied Materials, Inc.
- Qiwei Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monopole antenna array source with gas supply or grid filter for se...
- Patent number 11,222,769
- Issue date Jan 11, 2022
- Applied Materials, Inc.
- Qiwei Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-channel showerhead with improved profile
- Patent number 11,049,698
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode assembly
- Patent number 10,984,990
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Ramesh Bokka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming nitride film
- Patent number 10,927,454
- Issue date Feb 23, 2021
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Shinichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-k dielectric layer, fabricating method thereof and multi-funct...
- Patent number 10,923,343
- Issue date Feb 16, 2021
- Miin-Jang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a thin film, method for producing a magnetic d...
- Patent number 10,888,895
- Issue date Jan 12, 2021
- Showa Denko K.K.
- Hiroshi Tani
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method of forming conformal silicon carbide film by cyclic CVD
- Patent number 10,847,365
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tunable ground planes in plasma chambers
- Patent number 10,774,423
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Karthik Janakiraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing electrode for hydrogen production using tu...
- Patent number 10,697,073
- Issue date Jun 30, 2020
- Korea Institute of Science and Technology
- Wook Seong Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cutting tool
- Patent number 10,688,565
- Issue date Jun 23, 2020
- KYOCERA Corporation
- Satoshi Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas jetting apparatus for film formation apparatus
- Patent number 10,676,825
- Issue date Jun 9, 2020
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Yoichiro Tabata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma CVD device and method of manufacturing magnetic recording me...
- Patent number 10,657,999
- Issue date May 19, 2020
- ADVANCED MATERIAL TECHNOLOGIES, INC.
- Kouji Abe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck and processing arrangement
- Patent number 10,629,416
- Issue date Apr 21, 2020
- Infineon Technologies AG
- Rudolf Kogler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,580,625
- Issue date Mar 3, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF COATING ONTO FABRIC SUBSTRATES BY MEANS OF PLASMA
- Publication number 20240117563
- Publication date Apr 11, 2024
- AGC Glass Europe
- Hansjoerg WEIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20230230817
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...
- Publication number 20230220551
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTIMICROBIAL AND/OR ANTIVIRAL POLYMER SURFACES
- Publication number 20220316064
- Publication date Oct 6, 2022
- MOLECULAR PLASMA GROUP SA
- Raphael DABBOUS
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR PLASMA DEPOSITION OF ANTI-FOG COATINGS
- Publication number 20220243070
- Publication date Aug 4, 2022
- Universite Laval
- Gaétan LAROCHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SUPPORT AND THIN-FILM DEPOSITION APPARATUS USING THE SAME
- Publication number 20220220615
- Publication date Jul 14, 2022
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220139706
- Publication date May 5, 2022
- Applied Materials, Inc.
- Yaoying ZHONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOPOLE ANTENNA ARRAY SOURCE FOR SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20220139668
- Publication date May 5, 2022
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20220130647
- Publication date Apr 28, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Jeong Hee JO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING METAL
- Publication number 20220018021
- Publication date Jan 20, 2022
- AGC Glass Europe
- Grégory ARNOULT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL DEPOSITION SYSTEMS, AND RELATED METHODS AND MICROELECTRONI...
- Publication number 20210381107
- Publication date Dec 9, 2021
- Micron Technology, Inc.
- John A. Smythe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTIFICIAL BLOOD VESSEL
- Publication number 20210353404
- Publication date Nov 18, 2021
- National University Corporation Okayama University
- Yasuhiro FUJII
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, MATERIAL LAYER DEPOSITION APPARATUS...
- Publication number 20210222300
- Publication date Jul 22, 2021
- Samsung Electronics Co., Ltd.
- Woongsik KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD
- Publication number 20210172060
- Publication date Jun 10, 2021
- DIAROTECH
- Horacio TELLEZ OLIVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE UNIFORMITY TUNABILITY ON BIPOLAR ELECTROSTATIC CHUCK
- Publication number 20210159107
- Publication date May 27, 2021
- Applied Materials, Inc.
- Hyung Je Woo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-FUNCTION EQUIPMENT IMPLEMENTING FABRICATION OF HIGH-K DIELECT...
- Publication number 20210134587
- Publication date May 6, 2021
- Miin-Jang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...
- Publication number 20210040618
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK AND PROCESSING ARRANGEMENT
- Publication number 20200251314
- Publication date Aug 6, 2020
- INFINEON TECHNOLOGIES AG
- Rudolf Kogler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200227326
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Sho OIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR COATING SURFACES
- Publication number 20200118793
- Publication date Apr 16, 2020
- DURALAR TECHNOLOGIES, LLC
- Andrew Tudhope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINEAR PLASMA SOURCE WITH SEGMENTED HOLLOW CATHODE
- Publication number 20200058473
- Publication date Feb 20, 2020
- AGC Glass Europe
- Hugues WIAME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Site-specific Deposition Onto a Free-Standing Carbon Article
- Publication number 20200017959
- Publication date Jan 16, 2020
- ROCHESTER INSTITUTE OF TECHNOLOGY
- Brian J. Landi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING NITRIDE FILM
- Publication number 20190390332
- Publication date Dec 26, 2019
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Shinichi NISHIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING THE DEPOSITION RATE OF THIN FILMS IN A VACUU...
- Publication number 20190276937
- Publication date Sep 12, 2019
- FYZIKALNI USTAV AV CR, V.V.I.
- Jiri OLEJNICEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POST-DISCHARGE PLASMA COATING DEVICE FOR WIRED SUBSTRATES
- Publication number 20190259577
- Publication date Aug 22, 2019
- LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY
- Simon Bulou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA DEPOSITION METHOD
- Publication number 20190093225
- Publication date Mar 28, 2019
- Semblant Limited
- Shailendra Vikram SINGH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLASMA POWER TOOL MATCHING USING DC VOLTAGE FEEDBACK
- Publication number 20180366300
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Soonwook Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS PHASE PARTICLE REDUCTION IN PECVD CHAMBER
- Publication number 20180294139
- Publication date Oct 11, 2018
- Applied Materials, Inc.
- Bhaskar KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER PLATE, SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESS...
- Publication number 20180282869
- Publication date Oct 4, 2018
- ASM IP HOLDING B.V.
- Yoshio SUSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK AND PROCESSING ARRANGEMENT
- Publication number 20180211821
- Publication date Jul 26, 2018
- Infineon Technologies AG
- Rudolf Kogler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using dc or ac discharges

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Artificial blood vessel

High voltage, low pressure plasma enhanced atomic layer deposition

Apparatus and methods for controlling ion energy distribution

Substrate processing apparatus, material layer deposition apparatus...

Post-discharge plasma coating device for wired substrates

Processing method and plasma processing apparatus

Pulsed plasma (DC/RF) deposition of high quality C films for patter...

Wafer support and thin-film deposition apparatus using the same

Method of site-specific deposition onto a free-standing carbon article

Electric discharge generator and power supply device of electric di...

Wafer chuck and processing arrangement

Systems and methods for coating surfaces

Multi-function equipment implementing fabrication of high-k dielect...

Plasma device

Apparatus, device and process for coating of articles

Monopole antenna array source for semiconductor process equipment

Monopole antenna array source with gas supply or grid filter for se...

Dual-channel showerhead with improved profile

Electrode assembly

Method of forming nitride film

High-k dielectric layer, fabricating method thereof and multi-funct...

Method for producing a thin film, method for producing a magnetic d...

Method of forming conformal silicon carbide film by cyclic CVD

Tunable ground planes in plasma chambers

Method for manufacturing electrode for hydrogen production using tu...

Cutting tool

Gas jetting apparatus for film formation apparatus

Plasma CVD device and method of manufacturing magnetic recording me...

Wafer chuck and processing arrangement

Plasma source and methods for depositing thin film coatings using p...

Patents Applicationslast 30 patents

METHOD OF COATING ONTO FABRIC SUBSTRATES BY MEANS OF PLASMA

DEPOSITION METHOD AND DEPOSITION APPARATUS

PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...

ANTIMICROBIAL AND/OR ANTIVIRAL POLYMER SURFACES

METHOD FOR PLASMA DEPOSITION OF ANTI-FOG COATINGS

WAFER SUPPORT AND THIN-FILM DEPOSITION APPARATUS USING THE SAME

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

MONOPOLE ANTENNA ARRAY SOURCE FOR SEMICONDUCTOR PROCESS EQUIPMENT

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

METHOD FOR COATING METAL

MATERIAL DEPOSITION SYSTEMS, AND RELATED METHODS AND MICROELECTRONI...

ARTIFICIAL BLOOD VESSEL

SUBSTRATE PROCESSING APPARATUS, MATERIAL LAYER DEPOSITION APPARATUS...

PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD

EDGE UNIFORMITY TUNABILITY ON BIPOLAR ELECTROSTATIC CHUCK

MULTI-FUNCTION EQUIPMENT IMPLEMENTING FABRICATION OF HIGH-K DIELECT...

PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...

WAFER CHUCK AND PROCESSING ARRANGEMENT

PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

SYSTEMS AND METHODS FOR COATING SURFACES

LINEAR PLASMA SOURCE WITH SEGMENTED HOLLOW CATHODE

Method of Site-specific Deposition Onto a Free-Standing Carbon Article

METHOD OF FORMING NITRIDE FILM

METHOD FOR CONTROLLING THE DEPOSITION RATE OF THIN FILMS IN A VACUU...

POST-DISCHARGE PLASMA COATING DEVICE FOR WIRED SUBSTRATES

PLASMA DEPOSITION METHOD

PLASMA POWER TOOL MATCHING USING DC VOLTAGE FEEDBACK

GAS PHASE PARTICLE REDUCTION IN PECVD CHAMBER

SHOWER PLATE, SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESS...

WAFER CHUCK AND PROCESSING ARRANGEMENT