using diffusion into or out of a solid from or into a liquid phase

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H01L21/228

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/228using diffusion into or out of a solid from or into a liquid phase

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, and semiconductor device
- Patent number 11,676,996
- Issue date Jun 13, 2023
- Mitsubishi Electric Corporation
- Akira Kiyoi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method for dopant introduction
- Patent number 10,777,415
- Issue date Sep 15, 2020
- SCREEN Holdings Co., Ltd.
- Kazuhiko Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inverted organic photosensitive devices
- Patent number 10,770,670
- Issue date Sep 8, 2020
- The Regents of the University of Michigan
- Stephen R. Forrest
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impurity adding apparatus, impurity adding method, and semiconducto...
- Patent number 10,658,183
- Issue date May 19, 2020
- Fuji Electric Co., Ltd.
- Kenichi Iguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual channel FinFETs having uniform fin heights
- Patent number 10,546,788
- Issue date Jan 28, 2020
- International Business Machines Corporation
- Zhenxing Bi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser doping device and semiconductor device manufacturing method
- Patent number 10,475,650
- Issue date Nov 12, 2019
- Kyushu University, National University Corporation
- Hiroshi Ikenoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Paste composition
- Patent number 10,446,291
- Issue date Oct 15, 2019
- Toyo Aluminium Kabushiki Kaisha
- Marwin Dhamrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual channel FinFETs having uniform fin heights
- Patent number 10,438,855
- Issue date Oct 8, 2019
- International Business Machines Corporation
- Zhenxing Bi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon germanium-on-insulator formation by thermal mixing
- Patent number 10,396,182
- Issue date Aug 27, 2019
- International Business Machines Corporation
- Stephen W. Bedell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon germanium-on-insulator formation by thermal mixing
- Patent number 10,249,737
- Issue date Apr 2, 2019
- International Business Machines Corporation
- Stephen W. Bedell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impurity diffusion agent composition and method for manufacturing s...
- Patent number 10,242,875
- Issue date Mar 26, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Yoshihiro Sawada
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,115,587
- Issue date Oct 30, 2018
- Fuji Electric Co., Ltd.
- Haruo Nakazawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Singulation of ion-exchanged substrates
- Patent number 10,026,651
- Issue date Jul 17, 2018
- Palo Alto Research Center Incorporated
- Scott J. Limb
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Semiconductor device manufacturing method including heat treatment
- Patent number 9,947,538
- Issue date Apr 17, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Yong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dopant precursors for mono-layer doping
- Patent number 9,929,014
- Issue date Mar 27, 2018
- Entegris, Inc.
- Thomas M. Cameron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitters of a backside contact solar cell
- Patent number 9,893,224
- Issue date Feb 13, 2018
- SunPower Corporation
- Paul Loscutoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing differently doped semiconductors
- Patent number 9,887,313
- Issue date Feb 6, 2018
- Evonik Degussa GmbH
- Christoph Mader
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion agent composition, method of forming impurity diffusion l...
- Patent number 9,870,924
- Issue date Jan 16, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Atsushi Murota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-planar III-V field effect transistors with conformal metal gate...
- Patent number 9,818,847
- Issue date Nov 14, 2017
- Intel Corporation
- Gilbert Dewey
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Liquid immersion doping
- Patent number 9,805,931
- Issue date Oct 31, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Roll-to-roll doping method of graphene film, and doped graphene film
- Patent number 9,728,605
- Issue date Aug 8, 2017
- Graphene Square, Inc.
- Byung Hee Hong
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Apparatus for doping impurities, method for doping impurities, and...
- Patent number 9,716,008
- Issue date Jul 25, 2017
- Fuji Electric Co., Ltd.
- Kenichi Iguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming an impurity diffusion layer by applying a diffus...
- Patent number 9,620,666
- Issue date Apr 11, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Toshiro Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion agent composition, method of forming impurity diffusion l...
- Patent number 9,620,367
- Issue date Apr 11, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Takaaki Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor substrate with diffusion age...
- Patent number 9,620,354
- Issue date Apr 11, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Yoshihiro Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitters of a backside contact solar cell
- Patent number 9,537,041
- Issue date Jan 3, 2017
- SunPower Corporation
- Paul Loscutoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inverted organic photosensitive devices
- Patent number 9,515,275
- Issue date Dec 6, 2016
- The Regents of the University of Michigan
- Stephen R. Forrest
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Printable inks with silicon/germanium based nanoparticles with high...
- Patent number 9,475,695
- Issue date Oct 25, 2016
- NanoGram Corporation
- Weidong Li
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of manufacturing n-doped graphene and electrical component u...
- Patent number 9,472,675
- Issue date Oct 18, 2016
- Korea Advanced Institute of Science and Technology
- Byung Jin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform depth fin trench formation
- Patent number 9,472,460
- Issue date Oct 18, 2016
- GLOBALFOUNDRIES Inc.
- Alexander Reznicek
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING CONDUCTIVE MEMBER AND METHOD OF FORMING CHANNEL
- Publication number 20230086545
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD OF MANUFACTURING SUBSTRATE P...
- Publication number 20210287916
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON GERMANIUM-ON-INSULATOR FORMATION BY THERMAL MIXING
- Publication number 20190267475
- Publication date Aug 29, 2019
- International Business Machines Corporation
- Stephen W. Bedell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT METHOD FOR DOPANT INTRODUCTION
- Publication number 20190244817
- Publication date Aug 8, 2019
- SCREEN Holdings Co., Ltd.
- Kazuhiko FUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-Temperature Dopant Activation Process Using a Cap Layer, and MO...
- Publication number 20190013203
- Publication date Jan 10, 2019
- Raghav SREENIVASAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PHASE EPITAXY DOPING AND SILICON PN JUNCTION PHOTOVOLTAIC DE...
- Publication number 20180240671
- Publication date Aug 23, 2018
- The Regents of the University of California
- David Fenning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASTE COMPOSITION
- Publication number 20180218801
- Publication date Aug 2, 2018
- TOYO ALUMINIUM KABUSHIKI KAISHA
- Marwan Dhamrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPURITY DIFFUSION AGENT COMPOSITION AND METHOD FOR MANUFACTURING S...
- Publication number 20170278711
- Publication date Sep 28, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Yoshihiro SAWADA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEMICONDUCTOR DEVICE AND RELATED MANUFACTURING METHOD
- Publication number 20170092498
- Publication date Mar 30, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- Yong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE DOPING OF NANOSTRUCTURES
- Publication number 20170069498
- Publication date Mar 9, 2017
- The Regents of the University of California
- Ayaskanta Sahu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Immersion Doping
- Publication number 20170062221
- Publication date Mar 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON GERMANIUM-ON-INSULATOR FORMATION BY THERMAL MIXING
- Publication number 20160351397
- Publication date Dec 1, 2016
- International Business Machines Corporation
- Stephen W. Bedell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DOPING IMPURITIES, METHOD FOR DOPING IMPURITIES, AND...
- Publication number 20160314974
- Publication date Oct 27, 2016
- Fuji Electric Co., Ltd.
- Kenichi IGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPURITY ADDING APPARATUS, IMPURITY ADDING METHOD, AND SEMICONDUCTO...
- Publication number 20160284547
- Publication date Sep 29, 2016
- Fuji Electric Co., Ltd.
- Kenichi IGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DOPING SUBSTRATE
- Publication number 20160284548
- Publication date Sep 29, 2016
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Moon Youn JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPANT PRECURSORS FOR MONO-LAYER DOPING
- Publication number 20160276155
- Publication date Sep 22, 2016
- Entegris, Inc.
- Thomas M. Cameron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR MOLECULAR LAYER DOPING OF GERMANIUM SUBSTRATES
- Publication number 20160240381
- Publication date Aug 18, 2016
- UNIVERSITY COLLEGE CORK, NATIONAL UNIVERSITY OF IRELAND, CORK
- Brenda Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPURITY INTRODUCING METHOD, IMPURITY INTRODUCING APPARATUS, AND ME...
- Publication number 20160005606
- Publication date Jan 7, 2016
- Fuji Electric Co., Ltd.
- Haruo NAKAZAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method of Manufacturing N-Doped Graphene and Electrical Component U...
- Publication number 20150280011
- Publication date Oct 1, 2015
- Korea Advanced Institute of Science and Technology
- Byung Jin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD
- Publication number 20150206751
- Publication date Jul 23, 2015
- Shinichi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR THE TREATMENT AND DIRECT BONDING OF A MATERIAL LAYER
- Publication number 20150194337
- Publication date Jul 9, 2015
- COMMISSARIAT A I'energie atomique et aux ene alt
- Hubert Moriceau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROLL-TO-ROLL DOPING METHOD OF GRAPHENE FILM, AND DOPED GRAPHENE FILM
- Publication number 20150162408
- Publication date Jun 11, 2015
- GRAPHENE SQUARE INC.
- Byung Hee Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-PLANAR III-V FIELD EFFECT TRANSISTORS WITH CONFORMAL METAL GATE...
- Publication number 20150072498
- Publication date Mar 12, 2015
- Intel Corporation
- Gilbert DEWEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRINTABLE INKS WITH SILICON/GERMANIUM BASED NANOPARTICLES WITH HIGH...
- Publication number 20140346436
- Publication date Nov 27, 2014
- NanoGram Corporation
- Weidong Li
- B82 - NANO-TECHNOLOGY
Information Patent Application
SILICON SUBSTRATES WITH DOPED SURFACE CONTACTS FORMED FROM DOPED SI...
- Publication number 20140162445
- Publication date Jun 12, 2014
- NanoGram Corporation
- Guojun Liu
- B82 - NANO-TECHNOLOGY
Information Patent Application
DIFFUSION SOURCES FROM LIQUID PRECURSORS
- Publication number 20140162444
- Publication date Jun 12, 2014
- PIQUANT RESEARCH LLC
- Daniel Inns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIELD EFFECT TRANSISTOR USING GRAPHENE, PHOSPHORUS-DOPED GRAPHENE,...
- Publication number 20140145148
- Publication date May 29, 2014
- Research & Business Foundation Sungkyunkwan University
- Hyoyoung LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMULATIONS OF SOLUTIONS AND PROCESSES FOR FORMING A SUBSTRATE INC...
- Publication number 20140124896
- Publication date May 8, 2014
- DYNALOY, LLC
- Spencer Erich Hochstetler
- C07 - ORGANIC CHEMISTRY
Information Patent Application
INORGANIC PHOSPHATE CONTAINING DOPING COMPOSITIONS
- Publication number 20140120705
- Publication date May 1, 2014
- Elena Rogojina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACK CONTACT SOLAR CELLS WITH EFFECTIVE AND EFFICIENT DESIGNS AND C...
- Publication number 20140106551
- Publication date Apr 17, 2014
- NanoGram Corporation
- Uma Srinivasan
- H01 - BASIC ELECTRIC ELEMENTS

using diffusion into or out of a solid from or into a liquid phase

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, and semiconductor device

Heat treatment method for dopant introduction

Inverted organic photosensitive devices

Impurity adding apparatus, impurity adding method, and semiconducto...

Dual channel FinFETs having uniform fin heights

Laser doping device and semiconductor device manufacturing method

Paste composition

Dual channel FinFETs having uniform fin heights

Silicon germanium-on-insulator formation by thermal mixing

Silicon germanium-on-insulator formation by thermal mixing

Impurity diffusion agent composition and method for manufacturing s...

Method of manufacturing semiconductor device

Singulation of ion-exchanged substrates

Semiconductor device manufacturing method including heat treatment

Dopant precursors for mono-layer doping

Emitters of a backside contact solar cell

Method for producing differently doped semiconductors

Diffusion agent composition, method of forming impurity diffusion l...

Non-planar III-V field effect transistors with conformal metal gate...

Liquid immersion doping

Roll-to-roll doping method of graphene film, and doped graphene film

Apparatus for doping impurities, method for doping impurities, and...

Method for forming an impurity diffusion layer by applying a diffus...

Diffusion agent composition, method of forming impurity diffusion l...

Method for manufacturing semiconductor substrate with diffusion age...

Emitters of a backside contact solar cell

Inverted organic photosensitive devices

Printable inks with silicon/germanium based nanoparticles with high...

Method of manufacturing n-doped graphene and electrical component u...

Uniform depth fin trench formation

Patents Applicationslast 30 patents

METHOD OF FORMING CONDUCTIVE MEMBER AND METHOD OF FORMING CHANNEL

SUBSTRATE PROCESSING DEVICE AND METHOD OF MANUFACTURING SUBSTRATE P...

SILICON GERMANIUM-ON-INSULATOR FORMATION BY THERMAL MIXING

HEAT TREATMENT METHOD FOR DOPANT INTRODUCTION

Low-Temperature Dopant Activation Process Using a Cap Layer, and MO...

LIQUID PHASE EPITAXY DOPING AND SILICON PN JUNCTION PHOTOVOLTAIC DE...

PASTE COMPOSITION

IMPURITY DIFFUSION AGENT COMPOSITION AND METHOD FOR MANUFACTURING S...

SEMICONDUCTOR DEVICE AND RELATED MANUFACTURING METHOD

SURFACE DOPING OF NANOSTRUCTURES

Liquid Immersion Doping

SILICON GERMANIUM-ON-INSULATOR FORMATION BY THERMAL MIXING

APPARATUS FOR DOPING IMPURITIES, METHOD FOR DOPING IMPURITIES, AND...

IMPURITY ADDING APPARATUS, IMPURITY ADDING METHOD, AND SEMICONDUCTO...

METHOD OF DOPING SUBSTRATE

DOPANT PRECURSORS FOR MONO-LAYER DOPING

PROCESS FOR MOLECULAR LAYER DOPING OF GERMANIUM SUBSTRATES

IMPURITY INTRODUCING METHOD, IMPURITY INTRODUCING APPARATUS, AND ME...

Method of Manufacturing N-Doped Graphene and Electrical Component U...

SUBSTRATE TREATMENT METHOD

METHOD FOR THE TREATMENT AND DIRECT BONDING OF A MATERIAL LAYER

ROLL-TO-ROLL DOPING METHOD OF GRAPHENE FILM, AND DOPED GRAPHENE FILM

NON-PLANAR III-V FIELD EFFECT TRANSISTORS WITH CONFORMAL METAL GATE...

PRINTABLE INKS WITH SILICON/GERMANIUM BASED NANOPARTICLES WITH HIGH...

SILICON SUBSTRATES WITH DOPED SURFACE CONTACTS FORMED FROM DOPED SI...

DIFFUSION SOURCES FROM LIQUID PRECURSORS

FIELD EFFECT TRANSISTOR USING GRAPHENE, PHOSPHORUS-DOPED GRAPHENE,...

FORMULATIONS OF SOLUTIONS AND PROCESSES FOR FORMING A SUBSTRATE INC...

INORGANIC PHOSPHATE CONTAINING DOPING COMPOSITIONS

BACK CONTACT SOLAR CELLS WITH EFFECTIVE AND EFFICIENT DESIGNS AND C...