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C23C14/355

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/355using electrons

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Patents Grantslast 30 patents

Information Patent Grant
Multifocal magnetron design for physical vapor deposition processin...
- Patent number 11,456,162
- Issue date Sep 27, 2022
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electromagnetic module for physical vapor deposition
- Patent number 11,396,695
- Issue date Jul 26, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electromagnetic module for physical vapor deposition
- Patent number 10,844,477
- Issue date Nov 24, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment method using a beam of singly- or multiply-charged gas io...
- Patent number 10,655,215
- Issue date May 19, 2020
- IONICS FRANCE
- Denis Busardo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotary cathode unit for magnetron sputtering apparatus
- Patent number 10,378,102
- Issue date Aug 13, 2019
- ULVAC, Inc.
- Shuuji Saitou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ti—Si—C—N piston ring coatings
- Patent number 10,316,970
- Issue date Jun 11, 2019
- Southwest Research Institute
- Jianliang Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and a method for deposition of material to form a coating
- Patent number 10,224,189
- Issue date Mar 5, 2019
- Teer Coatings Limited
- Dennis Teer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low pressure arc plasma immersion coating vapor deposition and ion...
- Patent number 10,056,237
- Issue date Aug 21, 2018
- Vapor Technologies, Inc.
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for enhanced physical vapor deposition
- Patent number 9,911,583
- Issue date Mar 6, 2018
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low pressure arc plasma immersion coating vapor deposition and ion...
- Patent number 9,793,098
- Issue date Oct 17, 2017
- Vapor Technologies, Inc.
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Drill having a coating
- Patent number 9,540,726
- Issue date Jan 10, 2017
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried Krassnitzer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Remote arc discharge plasma assisted processes
- Patent number 9,412,569
- Issue date Aug 9, 2016
- Vapor Technologies, Inc.
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing an ionized vapor deposition coating
- Patent number 8,895,115
- Issue date Nov 25, 2014
- Southwest Research Institute
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filtered cathodic arc deposition method and apparatus
- Patent number 8,658,010
- Issue date Feb 25, 2014
- G & H Technologies, LLC
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filtered cathodic arc deposition method and apparatus
- Patent number 8,282,794
- Issue date Oct 9, 2012
- G & H Technologies, LLC
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter deposition method for forming integrated circuit
- Patent number 8,038,850
- Issue date Oct 18, 2011
- Qimonda AG
- Klaus Ufert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Erosion resistant coatings
- Patent number 8,034,459
- Issue date Oct 11, 2011
- Southwest Research Institute
- Ronghua Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron-assisted deposition process and apparatus
- Patent number 7,931,787
- Issue date Apr 26, 2011
- Donald Bennett Hilliard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Small scanned magentron
- Patent number 7,807,030
- Issue date Oct 5, 2010
- Applied Materials, Inc.
- Ilyoung Richard Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for magnetron sputter deposition
- Patent number 7,790,003
- Issue date Sep 7, 2010
- Southwest Research Institute
- Kuang-Tsan Kenneth Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium nitride thin film formation on metal substrate by chemical...
- Patent number 7,438,955
- Issue date Oct 21, 2008
- Philippine Council for Advanced Science and Technology Research and Development
- Henry J. Ramos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filtered cathodic arc deposition method and apparatus
- Patent number 7,300,559
- Issue date Nov 27, 2007
- G & H Technologies LLC
- Vladimir I. Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filtered cathodic arc deposition method and apparatus
- Patent number 7,252,745
- Issue date Aug 7, 2007
- G & H Technologies, LLC
- Vladimir I. Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron executing planetary motion adjacent a sputtering target
- Patent number 7,169,271
- Issue date Jan 30, 2007
- Applied Materials, Inc.
- Ilyoung Richard Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming deposited film
- Patent number 6,878,241
- Issue date Apr 12, 2005
- Canon Kabushiki Kaisha
- Hirohito Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Small planetary magnetron
- Patent number 6,841,050
- Issue date Jan 11, 2005
- Applied Materials, Inc.
- Ilyoung Richard Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for ionization film formation
- Patent number 6,812,164
- Issue date Nov 2, 2004
- Canon Kabushiki Kaisha
- Hirohito Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming deposited film
- Patent number 6,787,478
- Issue date Sep 7, 2004
- Canon Kabushiki Kaisha
- Atsushi Koike
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-thermionic sputter material transport device, methods of use, a...
- Patent number 6,787,010
- Issue date Sep 7, 2004
- North Carolina State University
- Jerome J. Cuomo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
MIIIN based materials and methods and apparatus for producing same
- Patent number 6,784,085
- Issue date Aug 31, 2004
- North Carolina State University
- Jerome J. Cuomo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON-BEAM-ASSISTED SPUTTERING DEVICE AND METHOD THEREFOR
- Publication number 20250019819
- Publication date Jan 16, 2025
- INFOVION INC.
- Yong Hwan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFOCAL MAGNETRON DESIGN FOR PHYSICAL VAPOR DEPOSITION PROCESSIN...
- Publication number 20220406582
- Publication date Dec 22, 2022
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPROVEMENTS IN AND RELATING TO COATING PROCESSES
- Publication number 20210134571
- Publication date May 6, 2021
- GENCOA LTD
- Victor BELLIDO-GONZALEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electromagnetic Module for Physical Vapor Deposition
- Publication number 20210071295
- Publication date Mar 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Chih Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200165716
- Publication date May 28, 2020
- Konica Minolta, Inc.
- Masaaki Nose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFOCAL MAGNETRON DESIGN FOR PHYSICAL VAPOR DEPOSITION PROCESSIN...
- Publication number 20190180991
- Publication date Jun 13, 2019
- HIA, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electromagnetic Module for Physical Vapor Deposition
- Publication number 20190136369
- Publication date May 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Chih Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT METHOD USING A BEAM OF SINGLY - OR MULTIPLY - CHARGED GAS...
- Publication number 20190032198
- Publication date Jan 31, 2019
- Denis Busardo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotary Cathode Unit for Magnetron Sputtering Apparatus
- Publication number 20180030591
- Publication date Feb 1, 2018
- Ulvac, Inc.
- Shuuji Saitou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OFF-AXIS MAGNETRON SPUTTERING WITH REAL-TIME REFLECTION HIGH ENERGY...
- Publication number 20170167012
- Publication date Jun 15, 2017
- Wisconsin Alumni Research Foundation
- Chang-Beom Eom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRILL HAVING A COATING
- Publication number 20140248100
- Publication date Sep 4, 2014
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Pressure Arc Plasma Immersion Coating Vapor Deposition and Ion...
- Publication number 20140076715
- Publication date Mar 20, 2014
- VAPOR TECHNOLOGIES, INC.
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Pressure Arc Plasma Immersion Coating Vapor Deposition And Ion...
- Publication number 20140076716
- Publication date Mar 20, 2014
- VAPOR TECHNOLOGIES, INC.
- Vladimir GOROKHOVSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Remote Arc Discharge Plasma Assisted Processes
- Publication number 20140076718
- Publication date Mar 20, 2014
- VAPOR TECHNOLOGIES, INC.
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method And Apparatus For Producing An Ionized Vapor Deposition Coating
- Publication number 20120114871
- Publication date May 10, 2012
- SOUTHWEST RESEARCH INSTITUTE
- Vladimir GOROKHOVSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electron-assisted deposition
- Publication number 20110220491
- Publication date Sep 15, 2011
- Donald Bennett Hilliard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Filtered Cathodic Arc Deposition Method and Apparatus
- Publication number 20100170787
- Publication date Jul 8, 2010
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Filtered Cathodic Arc Deposition Method and Apparatus
- Publication number 20100170781
- Publication date Jul 8, 2010
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Erosion Resistant Coatings
- Publication number 20090214787
- Publication date Aug 27, 2009
- SOUTHWEST RESEARCH INSTITUTE
- Ronghua WEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Filtered cathodic arc deposition method and apparatus
- Publication number 20080116058
- Publication date May 22, 2008
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputter deposition apparatus and method
- Publication number 20070295597
- Publication date Dec 27, 2007
- Klaus Ufert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetron based wafer processing
- Publication number 20070205096
- Publication date Sep 6, 2007
- Makoto Nagashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Small Scanned Magentron
- Publication number 20070102284
- Publication date May 10, 2007
- Applied Materials, Inc.
- Ilyoung Richard Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Erosion Resistant Coatings
- Publication number 20070087185
- Publication date Apr 19, 2007
- SOUTHWEST RESEARCH INSTITUTE
- Ronghua WEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for improving plasma activity PVD-reactors
- Publication number 20070017804
- Publication date Jan 25, 2007
- SANDVIK INTELLECTUAL PROPERTY AB
- Toril Myrtveit
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for magnetron sputter deposition
- Publication number 20060251917
- Publication date Nov 9, 2006
- SOUTHWEST RESEARCH INSTITUTE
- Kuang-Tsan Kenneth Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Direct ion beam deposition method and system
- Publication number 20060225998
- Publication date Oct 12, 2006
- Seok Kyun Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for formation of titanium nitride films
- Publication number 20050126903
- Publication date Jun 16, 2005
- Henry J Ramos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for ionization film formation
- Publication number 20050029090
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Hirohito Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetron executing planetary motion adjacent a sputtering target
- Publication number 20040222087
- Publication date Nov 11, 2004
- Ilyoung Richard Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using electrons

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Multifocal magnetron design for physical vapor deposition processin...

Electromagnetic module for physical vapor deposition

Electromagnetic module for physical vapor deposition

Treatment method using a beam of singly- or multiply-charged gas io...

Rotary cathode unit for magnetron sputtering apparatus

Ti—Si—C—N piston ring coatings

Apparatus and a method for deposition of material to form a coating

Low pressure arc plasma immersion coating vapor deposition and ion...

Apparatus for enhanced physical vapor deposition

Low pressure arc plasma immersion coating vapor deposition and ion...

Drill having a coating

Remote arc discharge plasma assisted processes

Method for producing an ionized vapor deposition coating

Filtered cathodic arc deposition method and apparatus

Filtered cathodic arc deposition method and apparatus

Sputter deposition method for forming integrated circuit

Erosion resistant coatings

Electron-assisted deposition process and apparatus

Small scanned magentron

Method for magnetron sputter deposition

Titanium nitride thin film formation on metal substrate by chemical...

Filtered cathodic arc deposition method and apparatus

Filtered cathodic arc deposition method and apparatus

Magnetron executing planetary motion adjacent a sputtering target

Method of forming deposited film

Small planetary magnetron

Method and apparatus for ionization film formation

Method of forming deposited film

Non-thermionic sputter material transport device, methods of use, a...

MIIIN based materials and methods and apparatus for producing same

Patents Applicationslast 30 patents

ELECTRON-BEAM-ASSISTED SPUTTERING DEVICE AND METHOD THEREFOR

MULTIFOCAL MAGNETRON DESIGN FOR PHYSICAL VAPOR DEPOSITION PROCESSIN...

IMPROVEMENTS IN AND RELATING TO COATING PROCESSES

Electromagnetic Module for Physical Vapor Deposition

FILM FORMING METHOD AND FILM FORMING APPARATUS

MULTIFOCAL MAGNETRON DESIGN FOR PHYSICAL VAPOR DEPOSITION PROCESSIN...

Electromagnetic Module for Physical Vapor Deposition

TREATMENT METHOD USING A BEAM OF SINGLY - OR MULTIPLY - CHARGED GAS...

Rotary Cathode Unit for Magnetron Sputtering Apparatus

OFF-AXIS MAGNETRON SPUTTERING WITH REAL-TIME REFLECTION HIGH ENERGY...

DRILL HAVING A COATING

Low Pressure Arc Plasma Immersion Coating Vapor Deposition and Ion...

Low Pressure Arc Plasma Immersion Coating Vapor Deposition And Ion...

Remote Arc Discharge Plasma Assisted Processes

Method And Apparatus For Producing An Ionized Vapor Deposition Coating

Electron-assisted deposition

Filtered Cathodic Arc Deposition Method and Apparatus

Filtered Cathodic Arc Deposition Method and Apparatus

Erosion Resistant Coatings

Filtered cathodic arc deposition method and apparatus

Sputter deposition apparatus and method

Magnetron based wafer processing

Small Scanned Magentron

Erosion Resistant Coatings

Device for improving plasma activity PVD-reactors

Method for magnetron sputter deposition

Direct ion beam deposition method and system

Method for formation of titanium nitride films

Method and apparatus for ionization film formation

Magnetron executing planetary motion adjacent a sputtering target