using heated targets

Industry

CPC
C23C14/3421

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3421using heated targets

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Temperature control roller, transporting arrangement and vacuum arr...
- Patent number 11,566,321
- Issue date Jan 31, 2023
- VON ARDENNE Asset GmbH & Co. KG
- Uwe Wehner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated shield for physical vapor deposition chamber
- Patent number 11,339,466
- Issue date May 24, 2022
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target for insulating oxide film, method for forming ins...
- Patent number 11,342,447
- Issue date May 24, 2022
- Ricoh Company, Ltd.
- Yukiko Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming aluminum film
- Patent number 11,313,031
- Issue date Apr 26, 2022
- Mitsubishi Electric Corporation
- Yuji Tokura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for vapor depositing a substrate
- Patent number 11,293,090
- Issue date Apr 5, 2022
- Beijing Boe Display Technology Co., Ltd.
- Jiyu Wan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mn—Zn—O sputtering target and production method therefor
- Patent number 11,225,709
- Issue date Jan 18, 2022
- Dexerials Corporation
- Junichi Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target and method for producing sputtering target
- Patent number 10,883,169
- Issue date Jan 5, 2021
- Mitsubishi Materials Corporation
- Keita Umemoto
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Gas phase integrated multimaterial printhead for additive manufactu...
- Patent number 10,800,098
- Issue date Oct 13, 2020
- Obsidian Advanced Manufacturing, LLC
- Shomeek Mukhopadhyay
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
First wall conditioning in a fusion reactor vessel
- Patent number 10,796,806
- Issue date Oct 6, 2020
- TOKAMAK ENERGY LTD
- Vladimir Shevchenko
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Copper manganese sputtering target
- Patent number 10,760,156
- Issue date Sep 1, 2020
- Honeywell International Inc.
- Stephane Ferrasse
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Mechanically balanced and magnetically unbalanced device
- Patent number 10,748,571
- Issue date Aug 18, 2020
- Seagate Technology LLC
- Samuel Lewis Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas phase integrated multimaterial printhead for additive manufactu...
- Patent number 10,596,758
- Issue date Mar 24, 2020
- OBSIDIAN ADVANCED MANUFACTURING, LLC
- Shomeek Mukhopadhyay
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Film formation apparatus, film formation method, and manufacturing...
- Patent number 10,508,332
- Issue date Dec 17, 2019
- Ulvac, Inc.
- Junsuke Matsuzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas phase integrated multimaterial printhead for additive manufactu...
- Patent number 10,357,920
- Issue date Jul 23, 2019
- OBSIDIAN ADVANCED MANUFACTURING, LLC
- Shomeek Mukhopadhyay
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method for manufacturing acoustic wave device
- Patent number 9,584,088
- Issue date Feb 28, 2017
- Murata Manufacturing Co., Ltd.
- Taku Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hot tile sputtering system
- Patent number 9,476,117
- Issue date Oct 25, 2016
- Magna Mirrors of America, Inc.
- Ian A. McCabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter-enhanced evaporative deposition apparatus and method
- Patent number 8,691,064
- Issue date Apr 8, 2014
- Raytheon Canada Limited
- Daniel B. Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hot tile sputtering system
- Patent number 8,673,122
- Issue date Mar 18, 2014
- Magna Mirrors of America, Inc.
- Ian A. McCabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for controlling thin film defects
- Patent number 6,835,290
- Issue date Dec 28, 2004
- Seagate Technology LLC
- Jeffrey Shane Reiter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bimorphic, compositionally-graded, sputter-deposited, thin film sha...
- Patent number 6,689,486
- Issue date Feb 10, 2004
- Ken K. Ho
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Process for producing thin film, thin film and optical instrument i...
- Patent number 6,426,022
- Issue date Jul 30, 2002
- Olympus Optical Co., Ltd.
- Ken Kawamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing thin film, thin film and optical instrument i...
- Patent number 6,358,440
- Issue date Mar 19, 2002
- Olympus Optical Co., Ltd.
- Ken Kawamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing thin film, thin film and optical instrument i...
- Patent number 6,210,542
- Issue date Apr 3, 2001
- Olympus Optical Co., Ltd.
- Ken Kawamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing thin film
- Patent number 5,958,155
- Issue date Sep 28, 1999
- Olympus Optical Co., Ltd.
- Ken Kawamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Direct current sputtering of boron from boron/coron mixtures
- Patent number 5,372,686
- Issue date Dec 13, 1994
- The United States of America as represented by the United States Department o...
- John R. Timberlake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 5,082,545
- Issue date Jan 21, 1992
- Matsushita Electric Industrial Co., Ltd.
- Kunio Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically-assisted sputtering method for producing vertical reco...
- Patent number 4,487,675
- Issue date Dec 11, 1984
- Benjamin B. Meckel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically-assisted sputtering method for producing vertical reco...
- Patent number 4,414,087
- Issue date Nov 8, 1983
- Benjamin B. Meckel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering of magnetic materials
- Patent number 4,324,631
- Issue date Apr 13, 1982
- Spin Physics, Inc.
- Benjamin B. Meckel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
3325393
- Patent number 3,325,393
- Issue date Jun 13, 1967
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Glassy Carbon Shutter Disk For Physical Vapor Deposition (PVD) Chamber
- Publication number 20240093355
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Zhiyong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
- Publication number 20230257866
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD FOR FORMING ALUMINUM FILM
- Publication number 20220090255
- Publication date Mar 24, 2022
- Mitsubishi Electric Corporation
- Yuji TOKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20210292888
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Joined Body of Target Material and Backing Plate, and Method for Pr...
- Publication number 20210172057
- Publication date Jun 10, 2021
- JX NIPPON MINING & METALS CORPORATION
- Kotaro Nagatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature control roller, transporting arrangement and vacuum arr...
- Publication number 20200308693
- Publication date Oct 1, 2020
- VON ARDENNE Asset GmbH & Co. KG
- Uwe Wehner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET FOR INSULATING OXIDE FILM, METHOD FOR FORMING INS...
- Publication number 20200176588
- Publication date Jun 4, 2020
- Yukiko ABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIRST WALL CONDITIONING IN A FUSION REACTOR VESSEL
- Publication number 20200058412
- Publication date Feb 20, 2020
- Tokamak Energy Ltd.
- Vladimir Shevchenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING ALUMINUM FILM
- Publication number 20190390319
- Publication date Dec 26, 2019
- Mitsubishi Electric Corporation
- Yuji TOKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Phase Integrated Multimaterial Printhead for Additive Manufactu...
- Publication number 20190329492
- Publication date Oct 31, 2019
- Obsidian Advanced Manufacturing LLC
- Shomeek Mukhopadhyay
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Mn-Zn-O SPUTTERING TARGET AND PRODUCTION METHOD THEREFOR
- Publication number 20190242009
- Publication date Aug 8, 2019
- Dexerials Corporation
- Junichi SUGAWARA
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
MECHANICALLY BALANCED AND MAGNETICALLY UNBALANCED DEVICE
- Publication number 20190051327
- Publication date Feb 14, 2019
- SEAGATE TECHNOLOGY LLC
- Samuel Lewis TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS, FILM FORMATION METHOD, AND MANUFACTURING...
- Publication number 20180347032
- Publication date Dec 6, 2018
- ULVAC, Inc.
- Junsuke MATSUZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING TARGET AND METHOD FOR PRODUCING SPUTTERING TARGET
- Publication number 20180312961
- Publication date Nov 1, 2018
- MITSUBISHI MATERIALS CORPORATION
- Keita UMEMOTO
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20160032446
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Atsushi GOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...
- Publication number 20150259802
- Publication date Sep 17, 2015
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOT TILE SPUTTERING SYSTEM
- Publication number 20140197025
- Publication date Jul 17, 2014
- MAGNA MIRRORS OF AMERICA, INC.
- Ian A. McCabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING AN ITO LAYER AND SPUTTERING SYSTEM
- Publication number 20110192716
- Publication date Aug 11, 2011
- Applied Materials, Inc.
- Anke HELLMICH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for controlling a reactive-high-power pulsed magnetron sputt...
- Publication number 20100282598
- Publication date Nov 11, 2010
- Fraunhofer-Gesellschaft zur Foerderung der angewan dten Forschung e.V.
- Florian Ruske
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOT TILE SPUTTERING SYSTEM
- Publication number 20100252418
- Publication date Oct 7, 2010
- MAGNA MIRRORS OF AMERICA, INC.
- Ian A. McCabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputter-enhanced evaporative deposition apparatus and method
- Publication number 20090014316
- Publication date Jan 15, 2009
- Raytheon Company
- Daniel B. Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHAPE MEMORY DEVICE HAVING TWO-WAY CYCLICAL SHAPE MEMORY EFFECT DUE...
- Publication number 20060289295
- Publication date Dec 28, 2006
- Peter A. Jardine
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Metallization target optimization method providing enhanced metalli...
- Publication number 20060196765
- Publication date Sep 7, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsi-Kuei Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shape memory device having two-way cyclical shape memory effect due...
- Publication number 20040191556
- Publication date Sep 30, 2004
- Peter A. Jardine
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Bimorphic, compositionally-graded, sputter-deposited, thin film sha...
- Publication number 20030162048
- Publication date Aug 28, 2003
- Ken K. Ho
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
System and method for controlling thin film defects
- Publication number 20030150712
- Publication date Aug 14, 2003
- Jeffrey Shane Reiter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Bimorphic, compositionally-graded, sputter-deposited, thin film sha...
- Publication number 20020043456
- Publication date Apr 18, 2002
- Ken K. Ho
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Process for producing thin film, thin film and optical instrument i...
- Publication number 20020033480
- Publication date Mar 21, 2002
- Olympus Optical Co., Ltd.
- Ken Kawamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using heated targets

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Temperature control roller, transporting arrangement and vacuum arr...

Heated shield for physical vapor deposition chamber

Sputtering target for insulating oxide film, method for forming ins...

Method for forming aluminum film

Method for vapor depositing a substrate

Mn—Zn—O sputtering target and production method therefor

Sputtering target and method for producing sputtering target

Gas phase integrated multimaterial printhead for additive manufactu...

First wall conditioning in a fusion reactor vessel

Copper manganese sputtering target

Mechanically balanced and magnetically unbalanced device

Gas phase integrated multimaterial printhead for additive manufactu...

Film formation apparatus, film formation method, and manufacturing...

Gas phase integrated multimaterial printhead for additive manufactu...

Method for manufacturing acoustic wave device

Hot tile sputtering system

Sputter-enhanced evaporative deposition apparatus and method

Hot tile sputtering system

System and method for controlling thin film defects

Bimorphic, compositionally-graded, sputter-deposited, thin film sha...

Process for producing thin film, thin film and optical instrument i...

Process for producing thin film, thin film and optical instrument i...

Process for producing thin film, thin film and optical instrument i...

Process for producing thin film

Direct current sputtering of boron from boron/coron mixtures

Sputtering apparatus

Magnetically-assisted sputtering method for producing vertical reco...

Magnetically-assisted sputtering method for producing vertical reco...

Magnetron sputtering of magnetic materials

3325393

Patents Applicationslast 30 patents

Glassy Carbon Shutter Disk For Physical Vapor Deposition (PVD) Chamber

METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...

METHOD FOR FORMING ALUMINUM FILM

HEATED SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER

Joined Body of Target Material and Backing Plate, and Method for Pr...

Temperature control roller, transporting arrangement and vacuum arr...

SPUTTERING TARGET FOR INSULATING OXIDE FILM, METHOD FOR FORMING INS...

FIRST WALL CONDITIONING IN A FUSION REACTOR VESSEL

METHOD FOR FORMING ALUMINUM FILM

Gas Phase Integrated Multimaterial Printhead for Additive Manufactu...

Mn-Zn-O SPUTTERING TARGET AND PRODUCTION METHOD THEREFOR

MECHANICALLY BALANCED AND MAGNETICALLY UNBALANCED DEVICE

FILM FORMATION APPARATUS, FILM FORMATION METHOD, AND MANUFACTURING...

SPUTTERING TARGET AND METHOD FOR PRODUCING SPUTTERING TARGET

FILM FORMING APPARATUS AND FILM FORMING METHOD

APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...

HOT TILE SPUTTERING SYSTEM

METHOD FOR PRODUCING AN ITO LAYER AND SPUTTERING SYSTEM

Method for controlling a reactive-high-power pulsed magnetron sputt...

HOT TILE SPUTTERING SYSTEM

Sputter-enhanced evaporative deposition apparatus and method

SHAPE MEMORY DEVICE HAVING TWO-WAY CYCLICAL SHAPE MEMORY EFFECT DUE...

Metallization target optimization method providing enhanced metalli...

Shape memory device having two-way cyclical shape memory effect due...

Bimorphic, compositionally-graded, sputter-deposited, thin film sha...

System and method for controlling thin film defects

Bimorphic, compositionally-graded, sputter-deposited, thin film sha...

Process for producing thin film, thin film and optical instrument i...