3325393

Information

• Patent Grant
• 3325393

• References
• Source

• Patent Number

  3,325,393

• Date Filed

  Not available

• Date Issued

  Tuesday, June 13, 1967
  57 years ago

• CPC

  • C23C14/223 - specialy adapted for coating particles
  • C23C14/022 - by means of bombardment with energetic particles or radiation
  • C23C14/185 - by cathodic sputtering
  • C23C14/34 - Sputtering
  • C23C14/3421 - using heated targets
  • H01J37/34 - operating with cathodic sputtering
  • H01J37/36 - for cleaning surfaces while plating with ions of materials introduced into the discharge
  • Y10S148/169 - Vacuum deposition

• US Classifications

  • 204 - Chemistry: electrical and wave energy
  • 148 - Metal treatment