using internal electrodes

Industry

CPC
C23C16/509

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/509using internal electrodes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,188,126
- Issue date Jan 7, 2025
- Jusung Engineering Co., Ltd.
- Jae Wan Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus and coating method
- Patent number 12,170,189
- Issue date Dec 17, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single chamber flowable film formation and treatments
- Patent number 12,142,459
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck with multiple radio frequency meshes to control...
- Patent number 12,136,536
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Edward P. Hammond
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface coating of drinkware
- Patent number 12,129,078
- Issue date Oct 29, 2024
- YETI Coolers, LLC
- Colby Brunet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 12,062,522
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Keiji Kitagaito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holding body
- Patent number 12,033,880
- Issue date Jul 9, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for transporting substrate, treatment device with receiving...
- Patent number 12,009,186
- Issue date Jun 11, 2024
- MEYER BURGER (GERMANY) GMBH
- Hermann Schlemm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor having cooling device
- Patent number 12,002,661
- Issue date Jun 4, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,996,268
- Issue date May 28, 2024
- Tokyo Electron Limited
- Toshihiko Iwao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film manufacturing apparatus
- Patent number 11,967,492
- Issue date Apr 23, 2024
- AP SYSTEMS INC.
- Byoung Il Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 11,965,262
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,967,490
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic phased array plasma source for complete plasma coverage of...
- Patent number 11,948,783
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chambers for deposition and etch
- Patent number 11,887,811
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density carbon films for patterning applications
- Patent number 11,842,897
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus and method of manufacturing dis...
- Patent number 11,842,883
- Issue date Dec 12, 2023
- Samsung Display Co., Ltd.
- Jong-hoon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal damage-free encapsulation of chalcogenide materials
- Patent number 11,832,533
- Issue date Nov 28, 2023
- Lam Research Corporation
- James Samuel Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing material on stepped structure
- Patent number 11,827,981
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Kentaro Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck for use in semiconductor processing
- Patent number 11,817,341
- Issue date Nov 14, 2023
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,791,136
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus for in-situ deposition of film stacks
- Patent number 11,746,420
- Issue date Sep 5, 2023
- Novellus Systems, Inc.
- Pramod Subramonium
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,749,510
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for a plasma enhanced deposition of material on...
- Patent number 11,725,278
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kun-Mo Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,725,282
- Issue date Aug 15, 2023
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber and semiconductor processing apparatus
- Patent number 11,715,632
- Issue date Aug 1, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xingcun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing chambers for deposition and etch
- Patent number 11,699,571
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA DEVICE FOR POWDER SURFACE TREATMENT USING HORIZONTAL ELECTRODE
- Publication number 20240392442
- Publication date Nov 28, 2024
- INOPLAZTECH CO., LTD.
- Deuk Yeon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240355583
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Naohiko OKUNISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic Chuck and Method of Operation for Plasma Processing
- Publication number 20240355593
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR TRANSPORTING A SUBSTRATE, TREATMENT DEVICE WITH A RECEIV...
- Publication number 20240290584
- Publication date Aug 29, 2024
- MEYER BURGER (GERMANY) GMBH
- Hermann SCHLEMM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20240258086
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20240249923
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20240240320
- Publication date Jul 18, 2024
- SAMSUNG DISPLAY CO., LTD.
- Yong-Suk LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CHEMICAL VAPOR DEPOSITION (CVD) APPARATUS AND FILM FORMING M...
- Publication number 20240242940
- Publication date Jul 18, 2024
- KIOXIA Corporation
- Takuya HIROHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...
- Publication number 20240222081
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Edward P. HAMMOND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING CHAMBERS FOR PLASMA-ENHANCED DEPOSITION
- Publication number 20240170254
- Publication date May 23, 2024
- Applied Materials, Inc.
- Jianming Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20240158942
- Publication date May 16, 2024
- ASM IP HOLDING B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...
- Publication number 20240162020
- Publication date May 16, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS
- Publication number 20240087894
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT
- Publication number 20240084453
- Publication date Mar 14, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xu ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING
- Publication number 20240038568
- Publication date Feb 1, 2024
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PE-CVD APPARATUS AND METHOD
- Publication number 20240011159
- Publication date Jan 11, 2024
- SPTS TECHNOLOGIES LIMITED
- Stephen BURGESS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND ATMOSPHERIC PLASMA FILM FORMING APPARATUS
- Publication number 20230399748
- Publication date Dec 14, 2023
- FUJIFILM CORPORATION
- Akihisa YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...
- Publication number 20230392278
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- SungBae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20230366094
- Publication date Nov 16, 2023
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ASHABLE HARD MASK
- Publication number 20230360922
- Publication date Nov 9, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott WEIMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE, SYSTEM AND METHOD FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSI...
- Publication number 20230349046
- Publication date Nov 2, 2023
- CENTROTHERM INTERNATIONAL AG
- Jens-Uwe Fuchs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WORKPIECE HOLDER, SYSTEM, AND OPERATING METHOD FOR PECVD
- Publication number 20230349044
- Publication date Nov 2, 2023
- CENTROTHERM INTERNATIONAL AG
- Jens-Uwe Fuchs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...
- Publication number 20230352279
- Publication date Nov 2, 2023
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR DEPOSITION AND ETCH
- Publication number 20230343552
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...
- Publication number 20230323535
- Publication date Oct 12, 2023
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230295797
- Publication date Sep 21, 2023
- Tokyo Electron Limited
- Nobuo MATSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20230253232
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20230243036
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using internal electrodes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus

Coating apparatus and coating method

Substrate processing system and temperature control method

Single chamber flowable film formation and treatments

Electrostatic chuck with multiple radio frequency meshes to control...

Surface coating of drinkware

Plasma etching method and plasma etching apparatus

Wafer holding body

Device for transporting substrate, treatment device with receiving...

Susceptor having cooling device

Plasma processing apparatus and plasma processing method

Thin film manufacturing apparatus

Substrate supporting plate, thin film deposition apparatus includin...

Plasma generating device, substrate processing apparatus, and metho...

Dynamic phased array plasma source for complete plasma coverage of...

Spatially tunable deposition to compensate within wafer differentia...

PECVD process

Semiconductor processing chambers for deposition and etch

High density carbon films for patterning applications

Chemical vapor deposition apparatus and method of manufacturing dis...

Conformal damage-free encapsulation of chalcogenide materials

Method of depositing material on stepped structure

Electrostatic chuck for use in semiconductor processing

Deposition radial and edge profile tunability through independent c...

PECVD apparatus for in-situ deposition of film stacks

Plasma generating device, substrate processing apparatus, and metho...

Systems and methods for a plasma enhanced deposition of material on...

Suppression of parasitic deposition in a substrate processing syste...

Reaction chamber and semiconductor processing apparatus

Semiconductor processing chambers for deposition and etch

Patents Applicationslast 30 patents

PLASMA DEVICE FOR POWDER SURFACE TREATMENT USING HORIZONTAL ELECTRODE

PLASMA PROCESSING APPARATUS

Electrostatic Chuck and Method of Operation for Plasma Processing

FILM FORMING APPARATUS AND FILM FORMING METHOD

DEVICE FOR TRANSPORTING A SUBSTRATE, TREATMENT DEVICE WITH A RECEIV...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA CHEMICAL VAPOR DEPOSITION (CVD) APPARATUS AND FILM FORMING M...

ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

BATCH PROCESSING CHAMBERS FOR PLASMA-ENHANCED DEPOSITION

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...

HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS

CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT

ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING

PE-CVD APPARATUS AND METHOD

FILM FORMING METHOD AND ATMOSPHERIC PLASMA FILM FORMING APPARATUS

SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

ROBUST ASHABLE HARD MASK

DEVICE, SYSTEM AND METHOD FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSI...

WORKPIECE HOLDER, SYSTEM, AND OPERATING METHOD FOR PECVD

MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...

SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR DEPOSITION AND ETCH

SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE TREATMENT APPARATUS

METHODS AND SYSTEMS FOR DEPOSITING A LAYER