using internal electrodes

Industry

CPC
C23C16/509

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/509using internal electrodes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,362,151
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 12,338,531
- Issue date Jun 24, 2025
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas dispenser and deposition apparatus using the same
- Patent number 12,281,385
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment device
- Patent number 12,278,092
- Issue date Apr 15, 2025
- Nissin Electric Co., Ltd.
- Toshihiko Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process control enabled VDC sensor for plasma process
- Patent number 12,272,520
- Issue date Apr 8, 2025
- Tokyo Electron Limited
- Merritt Funk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for depositing a layer
- Patent number 12,255,053
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and device for diamond synthesis by CVD
- Patent number 12,227,834
- Issue date Feb 18, 2025
- DIAROTECH
- Horacio Tellez Oliva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,188,126
- Issue date Jan 7, 2025
- Jusung Engineering Co., Ltd.
- Jae Wan Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus and coating method
- Patent number 12,170,189
- Issue date Dec 17, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single chamber flowable film formation and treatments
- Patent number 12,142,459
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck with multiple radio frequency meshes to control...
- Patent number 12,136,536
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Edward P. Hammond
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface coating of drinkware
- Patent number 12,129,078
- Issue date Oct 29, 2024
- YETI Coolers, LLC
- Colby Brunet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 12,062,522
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Keiji Kitagaito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holding body
- Patent number 12,033,880
- Issue date Jul 9, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for transporting substrate, treatment device with receiving...
- Patent number 12,009,186
- Issue date Jun 11, 2024
- MEYER BURGER (GERMANY) GMBH
- Hermann Schlemm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor having cooling device
- Patent number 12,002,661
- Issue date Jun 4, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,996,268
- Issue date May 28, 2024
- Tokyo Electron Limited
- Toshihiko Iwao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film manufacturing apparatus
- Patent number 11,967,492
- Issue date Apr 23, 2024
- AP SYSTEMS INC.
- Byoung Il Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 11,965,262
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,967,490
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic phased array plasma source for complete plasma coverage of...
- Patent number 11,948,783
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chambers for deposition and etch
- Patent number 11,887,811
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density carbon films for patterning applications
- Patent number 11,842,897
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus and method of manufacturing dis...
- Patent number 11,842,883
- Issue date Dec 12, 2023
- Samsung Display Co., Ltd.
- Jong-hoon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal damage-free encapsulation of chalcogenide materials
- Patent number 11,832,533
- Issue date Nov 28, 2023
- Lam Research Corporation
- James Samuel Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing material on stepped structure
- Patent number 11,827,981
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Kentaro Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAP-FILLING METHOD FOR A SEMICONDUCTOR DEVICE AND METHOD OF MANUFAC...
- Publication number 20250233017
- Publication date Jul 17, 2025
- WONIK IPS CO., LTD.
- Chang Gyu SONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218733
- Publication date Jul 3, 2025
- TES CO., LTD.
- Woo-Young CHUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20250207287
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode and Coil Configurations For Processing Chambers and Relat...
- Publication number 20250210304
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND INSTALLATION FOR PLASMA COATING
- Publication number 20250207260
- Publication date Jun 26, 2025
- CCR GmbH, Beschichtungstechnologie
- Valbon DAUT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20250201526
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION EQ...
- Publication number 20250188614
- Publication date Jun 12, 2025
- YINGKOU JINCHEN MACHINERY CO., LTD.
- Yuming WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE FILAMENT CONNECTION MEMBER, CHEMICAL VAPOR DEPOSITION APP...
- Publication number 20250171903
- Publication date May 29, 2025
- Resonac Hard Disk Corporation
- Hiromitsu Tanuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250154645
- Publication date May 15, 2025
- Tokyo Electron Limited
- Tadashi MITSUNARI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250116004
- Publication date Apr 10, 2025
- JUSUNG ENGINEERING CO., LTD.
- Jae Wan LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD
- Publication number 20250115991
- Publication date Apr 10, 2025
- DIAROTECH
- Horacio TELLEZ OLIVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...
- Publication number 20250101580
- Publication date Mar 27, 2025
- LAM RESEARCH CORPORATION
- Tu HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT, THIN FILM PROCESSING DEVICE, AND THIN FILM DEPOS...
- Publication number 20250075323
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- SungYoung YOON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE-AREA DOUBLE-FREQUENCY THIN FILM DEPOSITION METHOD AND APPARAT...
- Publication number 20250066919
- Publication date Feb 27, 2025
- SUZHOU MAXWELL TECHNOLOGIES CO., LTD.
- Dengzhi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND-LIKE CARBON GAP FILL
- Publication number 20250046599
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Jialiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEUTRAL STRESS DIAMOND-LIKE CARBON
- Publication number 20250046611
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Jialiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250034710
- Publication date Jan 30, 2025
- Jusung Engineering Co., Ltd.
- Jun Young KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250029817
- Publication date Jan 23, 2025
- JUSUNG ENGINEERING CO., LTD.
- WOONG KYO OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...
- Publication number 20250022694
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Pranav Vijay Gadre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA DEVICE FOR POWDER SURFACE TREATMENT USING HORIZONTAL ELECTRODE
- Publication number 20240392442
- Publication date Nov 28, 2024
- INOPLAZTECH CO., LTD.
- Deuk Yeon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240355583
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Naohiko OKUNISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic Chuck and Method of Operation for Plasma Processing
- Publication number 20240355593
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR TRANSPORTING A SUBSTRATE, TREATMENT DEVICE WITH A RECEIV...
- Publication number 20240290584
- Publication date Aug 29, 2024
- MEYER BURGER (GERMANY) GMBH
- Hermann SCHLEMM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20240258086
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20240249923
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CHEMICAL VAPOR DEPOSITION (CVD) APPARATUS AND FILM FORMING M...
- Publication number 20240242940
- Publication date Jul 18, 2024
- KIOXIA Corporation
- Takuya HIROHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20240240320
- Publication date Jul 18, 2024
- SAMSUNG DISPLAY CO., LTD.
- Yong-Suk LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...
- Publication number 20240222081
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Edward P. HAMMOND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using internal electrodes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method

Spatially tunable deposition to compensate within wafer differentia...

Gas dispenser and deposition apparatus using the same

Plasma treatment device

Substrate supporting plate, thin film deposition apparatus includin...

Process control enabled VDC sensor for plasma process

Methods and systems for depositing a layer

Process and device for diamond synthesis by CVD

Substrate processing apparatus

Coating apparatus and coating method

Substrate processing system and temperature control method

Single chamber flowable film formation and treatments

Electrostatic chuck with multiple radio frequency meshes to control...

Surface coating of drinkware

Plasma etching method and plasma etching apparatus

Wafer holding body

Device for transporting substrate, treatment device with receiving...

Susceptor having cooling device

Plasma processing apparatus and plasma processing method

Thin film manufacturing apparatus

Substrate supporting plate, thin film deposition apparatus includin...

Plasma generating device, substrate processing apparatus, and metho...

Dynamic phased array plasma source for complete plasma coverage of...

Spatially tunable deposition to compensate within wafer differentia...

PECVD process

Semiconductor processing chambers for deposition and etch

High density carbon films for patterning applications

Chemical vapor deposition apparatus and method of manufacturing dis...

Conformal damage-free encapsulation of chalcogenide materials

Method of depositing material on stepped structure

Patents Applicationslast 30 patents

GAP-FILLING METHOD FOR A SEMICONDUCTOR DEVICE AND METHOD OF MANUFAC...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

Electrode and Coil Configurations For Processing Chambers and Relat...

METHOD AND INSTALLATION FOR PLASMA COATING

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

ELECTRODE ASSEMBLY AND PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION EQ...

ELECTRODE FILAMENT CONNECTION MEMBER, CHEMICAL VAPOR DEPOSITION APP...

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE PROCESSING APPARATUS

PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD

UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...

SUBSTRATE SUPPORT, THIN FILM PROCESSING DEVICE, AND THIN FILM DEPOS...

LARGE-AREA DOUBLE-FREQUENCY THIN FILM DEPOSITION METHOD AND APPARAT...

DIAMOND-LIKE CARBON GAP FILL

NEUTRAL STRESS DIAMOND-LIKE CARBON

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...

PLASMA DEVICE FOR POWDER SURFACE TREATMENT USING HORIZONTAL ELECTRODE

PLASMA PROCESSING APPARATUS

Electrostatic Chuck and Method of Operation for Plasma Processing

FILM FORMING APPARATUS AND FILM FORMING METHOD

DEVICE FOR TRANSPORTING A SUBSTRATE, TREATMENT DEVICE WITH A RECEIV...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

PLASMA CHEMICAL VAPOR DEPOSITION (CVD) APPARATUS AND FILM FORMING M...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...