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C23C16/509
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C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/509
using internal electrodes
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Patents Grants
last 30 patents
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Patent Grant
Thin film manufacturing apparatus
Patent number
11,967,492
Issue date
Apr 23, 2024
AP SYSTEMS INC.
Byoung Il Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
Patent number
11,965,262
Issue date
Apr 23, 2024
ASM IP Holding B.V.
Yong Min Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
Patent number
11,967,490
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Akihiro Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dynamic phased array plasma source for complete plasma coverage of...
Patent number
11,948,783
Issue date
Apr 2, 2024
Applied Materials, Inc.
Hari Ponnekanti
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
Patent number
11,946,142
Issue date
Apr 2, 2024
Lam Research Corporation
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PECVD process
Patent number
11,898,249
Issue date
Feb 13, 2024
Applied Materials, Inc.
Nagarajan Rajagopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing chambers for deposition and etch
Patent number
11,887,811
Issue date
Jan 30, 2024
Applied Materials, Inc.
Khokan Chandra Paul
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High density carbon films for patterning applications
Patent number
11,842,897
Issue date
Dec 12, 2023
Applied Materials, Inc.
Eswaranand Venkatasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition apparatus and method of manufacturing dis...
Patent number
11,842,883
Issue date
Dec 12, 2023
Samsung Display Co., Ltd.
Jong-hoon Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conformal damage-free encapsulation of chalcogenide materials
Patent number
11,832,533
Issue date
Nov 28, 2023
Lam Research Corporation
James Samuel Sims
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing material on stepped structure
Patent number
11,827,981
Issue date
Nov 28, 2023
ASM IP Holding B.V.
Kentaro Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck for use in semiconductor processing
Patent number
11,817,341
Issue date
Nov 14, 2023
Lam Research Corporation
Troy Alan Gomm
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition radial and edge profile tunability through independent c...
Patent number
11,791,136
Issue date
Oct 17, 2023
Applied Materials, Inc.
Sanjeev Baluja
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PECVD apparatus for in-situ deposition of film stacks
Patent number
11,746,420
Issue date
Sep 5, 2023
Novellus Systems, Inc.
Pramod Subramonium
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
Patent number
11,749,510
Issue date
Sep 5, 2023
Kokusai Electric Corporation
Akihiro Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for a plasma enhanced deposition of material on...
Patent number
11,725,278
Issue date
Aug 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Kun-Mo Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
Patent number
11,725,282
Issue date
Aug 15, 2023
Novellus Systems, Inc.
Chunguang Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reaction chamber and semiconductor processing apparatus
Patent number
11,715,632
Issue date
Aug 1, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xingcun Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing chambers for deposition and etch
Patent number
11,699,571
Issue date
Jul 11, 2023
Applied Materials, Inc.
Khokan Chandra Paul
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Separation of plasma suppression and wafer edge to improve edge fil...
Patent number
11,674,226
Issue date
Jun 13, 2023
Lam Research Corporation
Fayaz Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for forming a layer comprising a condensing and a curing step
Patent number
11,643,726
Issue date
May 9, 2023
ASM IP Holding B.V.
Marko Tuominen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Passive electrical component with coating to improve the loading ca...
Patent number
11,646,148
Issue date
May 9, 2023
Fraunhofer-Gesellschaft zur Förderung dee angewandten Forschung e.V.
Dirk Salz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for depositing dielectric material
Patent number
11,631,591
Issue date
Apr 18, 2023
Applied Materials, Inc.
Bhargav S. Citla
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
PECVD process
Patent number
11,613,812
Issue date
Mar 28, 2023
Applied Materials, Inc.
Nagarajan Rajagopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-forming apparatus and film-forming method
Patent number
11,578,407
Issue date
Feb 14, 2023
Tokyo Electron Limited
Jun Yamawaku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF grounding configuration for pedestals
Patent number
11,569,072
Issue date
Jan 31, 2023
Applied Materials, Inc.
Satya Thokachichu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tuneable uniformity control utilizing rotational magnetic housing
Patent number
11,557,466
Issue date
Jan 17, 2023
Applied Materials, Inc.
Samuel E. Gottheim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-zone plasma-enhanced chemical vapor deposition apparatus and...
Patent number
11,551,961
Issue date
Jan 10, 2023
SanDisk Technologies LLC
Shoichi Murakami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
Patent number
11,551,914
Issue date
Jan 10, 2023
Kokusai Electric Corporation
Akihiro Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Rotary plasma reactor
Patent number
11,545,343
Issue date
Jan 3, 2023
Board of Trustees of Michigan State University
Qi Hua Fan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS
Publication number
20240087894
Publication date
Mar 14, 2024
Applied Materials, Inc.
Eswaranand VENKATASUBRAMANIAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT
Publication number
20240084453
Publication date
Mar 14, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xu ZHU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING
Publication number
20240038568
Publication date
Feb 1, 2024
LAM RESEARCH CORPORATION
Troy Alan Gomm
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PE-CVD APPARATUS AND METHOD
Publication number
20240011159
Publication date
Jan 11, 2024
SPTS TECHNOLOGIES LIMITED
Stephen BURGESS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND ATMOSPHERIC PLASMA FILM FORMING APPARATUS
Publication number
20230399748
Publication date
Dec 14, 2023
FUJIFILM CORPORATION
Akihisa YOSHIDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...
Publication number
20230392278
Publication date
Dec 7, 2023
ASM IP HOLDING B.V.
SungBae Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
Publication number
20230366094
Publication date
Nov 16, 2023
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ROBUST ASHABLE HARD MASK
Publication number
20230360922
Publication date
Nov 9, 2023
LAM RESEARCH CORPORATION
Matthew Scott WEIMER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE, SYSTEM AND METHOD FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSI...
Publication number
20230349046
Publication date
Nov 2, 2023
CENTROTHERM INTERNATIONAL AG
Jens-Uwe Fuchs
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WORKPIECE HOLDER, SYSTEM, AND OPERATING METHOD FOR PECVD
Publication number
20230349044
Publication date
Nov 2, 2023
CENTROTHERM INTERNATIONAL AG
Jens-Uwe Fuchs
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...
Publication number
20230352279
Publication date
Nov 2, 2023
LAM RESEARCH CORPORATION
Nick Ray Linebarger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR DEPOSITION AND ETCH
Publication number
20230343552
Publication date
Oct 26, 2023
Applied Materials, Inc.
Khokan Chandra Paul
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...
Publication number
20230323535
Publication date
Oct 12, 2023
LAM RESEARCH CORPORATION
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230295797
Publication date
Sep 21, 2023
Tokyo Electron Limited
Nobuo MATSUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS
Publication number
20230253232
Publication date
Aug 10, 2023
ASM IP HOLDING B.V.
Naoto Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
Publication number
20230243036
Publication date
Aug 3, 2023
ASM IP HOLDING B.V.
Marko Tuominen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IGNITION CONTROL METHOD, FILM FORMING METHOD, AND FILM FORMING APPA...
Publication number
20230235460
Publication date
Jul 27, 2023
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
Publication number
20230238222
Publication date
Jul 27, 2023
Kokusai Electric Corporation
Akihiro SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PECVD PROCESS
Publication number
20230193466
Publication date
Jun 22, 2023
Applied Materials, Inc.
Nagarajan RAJAGOPALAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA-ENHANCED THIN-FILM-DEPOSITION EQUIPMENT
Publication number
20230187181
Publication date
Jun 15, 2023
SKY TECH INC.
JING-CHENG LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM
Publication number
20230187189
Publication date
Jun 15, 2023
Samsung Electronics Co., Ltd.
Myungsub Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230173557
Publication date
Jun 8, 2023
Tokyo Electron Limited
Koichi NAKAJIMA
B08 - CLEANING
Information
Patent Application
HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS
Publication number
20230175128
Publication date
Jun 8, 2023
LAM RESEARCH CORPORATION
Davinder Sharma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE
Publication number
20230167552
Publication date
Jun 1, 2023
LAM RESEARCH CORPORATION
Michael J. JANICKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RF GROUNDING CONFIGURATION FOR PEDESTALS
Publication number
20230170190
Publication date
Jun 1, 2023
Applied Materials, Inc.
Satya THOKACHICHU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF FILLING RECESSES ON SUBSTRATE SURFACES AND FORMING VOIDS...
Publication number
20230170209
Publication date
Jun 1, 2023
ASM IP HOLDING B.V.
Jungtak Seo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING
Publication number
20230139431
Publication date
May 4, 2023
Applied Materials, Inc.
Samuel E. GOTTHEIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTRODE FILAMENT CONNECTION MEMBER, CHEMICAL VAPOR DEPOSITION APP...
Publication number
20230133485
Publication date
May 4, 2023
SHOWA DENKO K.K.
Hiromitsu Tanuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA CVD APPARATUS WITH A BEVEL MASK WITH A PLANAR INNER EDGE
Publication number
20230126912
Publication date
Apr 27, 2023
ASM IP HOLDING B.V.
Ryo Miyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH MODULUS BORON-BASED CERAMICS FOR SEMICONDUCTOR APPLICATIONS
Publication number
20230112746
Publication date
Apr 13, 2023
LAM RESEARCH CORPORATION
Ananda K. BANERJI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...