using laser beams

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H01L21/02675

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02675using laser beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Physical quantity sensor, inertial measurement unit, and method for...
- Patent number 12,174,214
- Issue date Dec 24, 2024
- Seiko Epson Corporation
- Teruo Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate-floatation-type laser processing apparatus and method for...
- Patent number 12,154,803
- Issue date Nov 26, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing apparatus, laser annealing method, and method for m...
- Patent number 12,136,548
- Issue date Nov 5, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Kenichi Ohmori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for improving the release of chips in the laser p...
- Patent number 12,136,547
- Issue date Nov 5, 2024
- Xerox Corporation
- Robert Jian Zhang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser light source and a laser crystallization apparatus including...
- Patent number 12,131,920
- Issue date Oct 29, 2024
- Samsung Display Co., Ltd.
- Kyong Sik Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device
- Patent number 12,125,453
- Issue date Oct 22, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
High density logic formation using multi-dimensional laser annealing
- Patent number 12,087,640
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- H. Jim Fulford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multigate device having reduced contact resistivity
- Patent number 12,080,771
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Georgios Vellianitis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with conformal source/drain layer
- Patent number 12,057,495
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yao-Sheng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device having polycrystalline silicon layer
- Patent number 12,058,888
- Issue date Aug 6, 2024
- Samsung Display Co., Ltd.
- Dong-Sung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crystalline semiconductor layer formed in BEOL processes
- Patent number 12,051,702
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Matthias Passlack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and manufacturing method of display apparatus using...
- Patent number 11,961,851
- Issue date Apr 16, 2024
- Samsung Display Co., Ltd.
- Dong-Min Lee
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor devices including channel regions having non-uniform...
- Patent number 11,961,911
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Chun Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annealing apparatus using two wavelengths of radiation
- Patent number 11,945,045
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Dean Jennings
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Display device including polycrystalline silicon layer, method of m...
- Patent number 11,942,481
- Issue date Mar 26, 2024
- Samsung Display Co., Ltd.
- Dong-Sung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device having polycrystalline silicon layer
- Patent number 11,903,247
- Issue date Feb 13, 2024
- Samsung Display Co., Ltd.
- Dong-Sung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing apparatus, laser annealing method, and method for m...
- Patent number 11,894,229
- Issue date Feb 6, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Kenichi Ohmori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Manufacturing apparatus and manufacturing method using the same
- Patent number 11,887,998
- Issue date Jan 30, 2024
- Samsung Display Co., Ltd.
- Soo Young Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light emitting display device and manufacturing method thereof
- Patent number 11,871,617
- Issue date Jan 9, 2024
- Samsung Display Co., Ltd.
- Keun Woo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing panel using a glass substrate as the laser...
- Patent number 11,842,898
- Issue date Dec 12, 2023
- JSW AKTINA SYSTEM CO., LTD.
- Suk-Hwan Chung
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate-floatation-type laser processing apparatus and method for...
- Patent number 11,749,545
- Issue date Sep 5, 2023
- JSW AKTINA SYSTEM CO., LTD.
- Daisuke Hayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Display device
- Patent number 11,735,131
- Issue date Aug 22, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device and manufacturing method thereof
- Patent number 11,715,739
- Issue date Aug 1, 2023
- Samsung Display Co., Ltd.
- Jong Oh Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and forming method thereof
- Patent number 11,705,507
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yao-Sheng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser light source and a laser crystallization apparatus including...
- Patent number 11,705,348
- Issue date Jul 18, 2023
- Samsung Display Co., Ltd.
- Kyong Sik Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical quantity sensor, inertial measurement unit, and method for...
- Patent number 11,698,387
- Issue date Jul 11, 2023
- Seiko Epson Corporation
- Teruo Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor and methods of forming transistors
- Patent number 11,695,071
- Issue date Jul 4, 2023
- Micron Technology, Inc.
- Manuj Nahar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for etching patterns inside objects
- Patent number 11,682,550
- Issue date Jun 20, 2023
- Tech Met, Inc.
- Michael Vidra
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing semiconductor structure
- Patent number 11,676,867
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus, laser irradiation method, and method f...
- Patent number 11,676,831
- Issue date Jun 13, 2023
- JSW AKTINA SYSTEM CO., LTD.
- Hiroaki Imamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING A SILICON CARBIDE SEMICONDUCTOR COMPONENT
- Publication number 20240371632
- Publication date Nov 7, 2024
- ROBERT BOSCH GmbH
- Humberto Rodriguez Alvarez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240371637
- Publication date Nov 7, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Huilong ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A LAYER STRUCTURE SURROUNDING AT LEAST ONE RECES...
- Publication number 20240290839
- Publication date Aug 29, 2024
- ROBERT BOSCH GmbH
- Heribert Weber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20240250173
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Chun CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING DOPED TRANSISTOR SOURCE AND DRAIN
- Publication number 20240203735
- Publication date Jun 20, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Shay REBOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PANEL LEVEL SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240145258
- Publication date May 2, 2024
- STMicroelectronics Pte Ltd
- David GANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTAL...
- Publication number 20240118221
- Publication date Apr 11, 2024
- SAMSUNG DISPLAY CO., LTD.
- JI-HWAN KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND METHOD FOR MANUFACTURI...
- Publication number 20240120198
- Publication date Apr 11, 2024
- JSW Aktina System Co., Ltd.
- Yoshihiro YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING APPARATUS, LASER ANNEALING METHOD, AND METHOD FOR M...
- Publication number 20240112910
- Publication date Apr 4, 2024
- JSW Aktina System Co., Ltd.
- Kenichi OHMORI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
UNIFORM EPITAXIAL GROWTH OVER CRYSTALLINE TEMPLATE
- Publication number 20240088222
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Shawn THOMAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISPLAY DEVICE
- Publication number 20230402018
- Publication date Dec 14, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTALLINE TRANSITION METAL DICHALCOGENIDE FILMS AND METHODS OF MA...
- Publication number 20230369046
- Publication date Nov 16, 2023
- University of Dayton
- Christopher Muratore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-FLOATATION-TYPE LASER PROCESSING APPARATUS AND METHOD FOR...
- Publication number 20230343618
- Publication date Oct 26, 2023
- JSW Aktina System Co., Ltd.
- Daisuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH CONFORMAL SOURCE/DRAIN LAYER
- Publication number 20230327004
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Sheng HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR WORKING A WAFER OF 4H-SIC MATERIAL TO FORM A 3C-SIC LAY...
- Publication number 20230298887
- Publication date Sep 21, 2023
- STMicroelectronics S.r.l.
- Gabriele BELLOCCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Physical Quantity Sensor, Inertial Measurement Unit, And Method For...
- Publication number 20230280366
- Publication date Sep 7, 2023
- SEIKO EPSON CORPORATION
- Teruo TAKIZAWA
- G01 - MEASURING TESTING
Information Patent Application
LASER LIGHT SOURCE AND A LASER CRYSTALLIZATION APPARATUS INCLUDING...
- Publication number 20230260809
- Publication date Aug 17, 2023
- SAMSUNG DISPLAY CO., LTD.
- Kyong Sik CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTALLINE SEMICONDUCTOR LAYER FORMED IN BEOL PROCESSES
- Publication number 20230197445
- Publication date Jun 22, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Matthias Passlack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING CRYSTALLINE SILICON FILM
- Publication number 20230197447
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Kota UMEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CRYSTALLIZATION METHOD OF AMORPHOUS SILICON
- Publication number 20230119285
- Publication date Apr 20, 2023
- SAMSUNG DISPLAY CO., LTD.
- Ji-Hwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CRYSTALLIZATION DEVICE, LASER CRYSTALLIZATION METHOD AND METH...
- Publication number 20230124284
- Publication date Apr 20, 2023
- SAMSUNG DISPLAY CO., LTD.
- DONG-MIN LEE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SOURCE AND DRAIN EPITAXIAL LAYERS
- Publication number 20230074496
- Publication date Mar 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hsien TU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING APPARATUS AND MANUFACTURING METHOD USING THE SAME
- Publication number 20230037161
- Publication date Feb 2, 2023
- SAMSUNG DISPLAY CO., LTD.
- Soo Young JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D STACKABLE BIDIRECTIONAL ACCESS DEVICE FOR MEMORY ARRAY
- Publication number 20220406843
- Publication date Dec 22, 2022
- International Business Machines Corporation
- Fabio Carta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY PANEL AND MANUFACTURING METHOD OF THE SAME
- Publication number 20220384538
- Publication date Dec 1, 2022
- SAMSUNG DISPLAY CO., LTD.
- Jongjun BAEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC SYSTEMS INCLUDING TWO-DIMENSIONAL MATERIAL STRUCTURES
- Publication number 20220344160
- Publication date Oct 27, 2022
- Micron Technology, Inc.
- Roy E. Meade
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY LOGIC FORMATION USING MULTI-DIMENSIONAL LASER ANNEALING
- Publication number 20220277957
- Publication date Sep 1, 2022
- TOKYO ELECTRON LIMITED
- H. Jim Fulford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20220231158
- Publication date Jul 21, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Chun CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS AND MANUFACTURING METHOD OF DISPLAY APPARATUS USING...
- Publication number 20220173134
- Publication date Jun 2, 2022
- SAMSUNG DISPLAY CO., LTD.
- Dong-min LEE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BOT GROUP MESSAGING USING BOT-SPECIFIC VOICE LIBRARIES
- Publication number 20220157663
- Publication date May 19, 2022
- Orion Labs, Inc.
- Jesse Robbins
- G10 - MUSICAL INSTRUMENTS ACOUSTICS

using laser beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Physical quantity sensor, inertial measurement unit, and method for...

Substrate-floatation-type laser processing apparatus and method for...

Laser annealing apparatus, laser annealing method, and method for m...

System and method for improving the release of chips in the laser p...

Laser light source and a laser crystallization apparatus including...

Display device

High density logic formation using multi-dimensional laser annealing

Multigate device having reduced contact resistivity

Semiconductor device with conformal source/drain layer

Display device having polycrystalline silicon layer

Crystalline semiconductor layer formed in BEOL processes

Laser apparatus and manufacturing method of display apparatus using...

Semiconductor devices including channel regions having non-uniform...

Annealing apparatus using two wavelengths of radiation

Display device including polycrystalline silicon layer, method of m...

Display device having polycrystalline silicon layer

Laser annealing apparatus, laser annealing method, and method for m...

Manufacturing apparatus and manufacturing method using the same

Light emitting display device and manufacturing method thereof

Method for manufacturing panel using a glass substrate as the laser...

Substrate-floatation-type laser processing apparatus and method for...

Display device

Display device and manufacturing method thereof

Semiconductor device and forming method thereof

Laser light source and a laser crystallization apparatus including...

Physical quantity sensor, inertial measurement unit, and method for...

Transistor and methods of forming transistors

Method and device for etching patterns inside objects

Method for manufacturing semiconductor structure

Laser irradiation apparatus, laser irradiation method, and method f...

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING A SILICON CARBIDE SEMICONDUCTOR COMPONENT

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR FORMING A LAYER STRUCTURE SURROUNDING AT LEAST ONE RECES...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

METHOD FOR PRODUCING DOPED TRANSISTOR SOURCE AND DRAIN

PANEL LEVEL SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME

LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTAL...

CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND METHOD FOR MANUFACTURI...

LASER ANNEALING APPARATUS, LASER ANNEALING METHOD, AND METHOD FOR M...

UNIFORM EPITAXIAL GROWTH OVER CRYSTALLINE TEMPLATE

DISPLAY DEVICE

CRYSTALLINE TRANSITION METAL DICHALCOGENIDE FILMS AND METHODS OF MA...

SUBSTRATE-FLOATATION-TYPE LASER PROCESSING APPARATUS AND METHOD FOR...

SEMICONDUCTOR DEVICE WITH CONFORMAL SOURCE/DRAIN LAYER

PROCESS FOR WORKING A WAFER OF 4H-SIC MATERIAL TO FORM A 3C-SIC LAY...

Physical Quantity Sensor, Inertial Measurement Unit, And Method For...

LASER LIGHT SOURCE AND A LASER CRYSTALLIZATION APPARATUS INCLUDING...

CRYSTALLINE SEMICONDUCTOR LAYER FORMED IN BEOL PROCESSES

METHOD AND APPARATUS FOR FORMING CRYSTALLINE SILICON FILM

CRYSTALLIZATION METHOD OF AMORPHOUS SILICON

LASER CRYSTALLIZATION DEVICE, LASER CRYSTALLIZATION METHOD AND METH...

SOURCE AND DRAIN EPITAXIAL LAYERS

MANUFACTURING APPARATUS AND MANUFACTURING METHOD USING THE SAME

3D STACKABLE BIDIRECTIONAL ACCESS DEVICE FOR MEMORY ARRAY

DISPLAY PANEL AND MANUFACTURING METHOD OF THE SAME

ELECTRONIC SYSTEMS INCLUDING TWO-DIMENSIONAL MATERIAL STRUCTURES

HIGH DENSITY LOGIC FORMATION USING MULTI-DIMENSIONAL LASER ANNEALING

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

LASER APPARATUS AND MANUFACTURING METHOD OF DISPLAY APPARATUS USING...

BOT GROUP MESSAGING USING BOT-SPECIFIC VOICE LIBRARIES