using liquids only

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G03F7/422

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/422using liquids only

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Photoresist removal method and photoresist removal system
- Patent number 12,210,288
- Issue date Jan 28, 2025
- Tencent Technology (Shenzhen) Company Limited
- Zhongping Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of compositions comprising a solvent mixture for avoiding patte...
- Patent number 12,146,125
- Issue date Nov 19, 2024
- BASF SE
- Marcel Brill
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Composition containing a dicyanostyryl group, for forming a resist...
- Patent number 11,977,331
- Issue date May 7, 2024
- NISSAN CHEMICAL CORPORATION
- Takafumi Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device production method employing silicon-containing...
- Patent number 11,966,164
- Issue date Apr 23, 2024
- NISSAN CHEMICAL CORPORATION
- Wataru Shibayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, substrate processing apparatus, and re...
- Patent number 11,921,426
- Issue date Mar 5, 2024
- SCREEN Holdings Co., Ltd.
- Katsuya Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controlling porosity of an interference lithography process by fine...
- Patent number 11,914,304
- Issue date Feb 27, 2024
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Shailesh N. Joshi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method of manufacturing circuit board
- Patent number 11,854,830
- Issue date Dec 26, 2023
- HAESUNG DS CO., LTD.
- Dong Jin Yoon
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Solution, method of forming resist pattern, and semiconductor devic...
- Patent number 11,822,250
- Issue date Nov 21, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Hiroyuki Iida
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Stripping-solution machine and working method thereof
- Patent number 11,747,734
- Issue date Sep 5, 2023
- TCL China Star Optoelectronics Technology Co., Ltd.
- Tian Ou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Filter device, purification device, chemical solution production me...
- Patent number 11,745,142
- Issue date Sep 5, 2023
- FUJIFILM Corporation
- Tetsuya Kamimura
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatuses for reducing metal residue in edge bead region from met...
- Patent number 11,740,559
- Issue date Aug 29, 2023
- Inpria Corporation
- Mollie Waller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and computer...
- Patent number 11,693,322
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Takuya Miura
- B08 - CLEANING
Information Patent Grant
Method of forming patterned polyimide layer
- Patent number 11,609,496
- Issue date Mar 21, 2023
- ECHEM SOLUTIONS CORP.
- Ting-Wei Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface treatment of titanium containing hardmasks
- Patent number 11,556,057
- Issue date Jan 17, 2023
- International Business Machines Corporation
- Ekmini A. De Silva
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, substrate processing apparatus, and re...
- Patent number 11,543,752
- Issue date Jan 3, 2023
- SCREEN Holdings Co., Ltd.
- Katsuya Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Treatment liquid, method of manufacturing treatment liquid, pattern...
- Patent number 11,480,880
- Issue date Oct 25, 2022
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal probe structure and method for fabricating the same
- Patent number 11,474,128
- Issue date Oct 18, 2022
- Princo Corp.
- Yi-Lin Chu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning solution and method of cleaning wafer
- Patent number 11,456,170
- Issue date Sep 27, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Treatment liquid for manufacturing semiconductor, method of manufac...
- Patent number 11,372,331
- Issue date Jun 28, 2022
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon-containing underlayers
- Patent number 11,360,387
- Issue date Jun 14, 2022
- Rohm and Haas Electronic Materials LLC
- Li Cui
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Substrate treatment device and substrate treatment method
- Patent number 11,355,337
- Issue date Jun 7, 2022
- Shibaura Mechatronics Corporation
- Masaya Kamiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid chemical vapor recovery device, wet stripping device, photor...
- Patent number 11,231,652
- Issue date Jan 25, 2022
- BOE Technology Group Co., Ltd.
- Qianqian Li
- B08 - CLEANING
Information Patent Grant
Peripheral processing apparatus and peripheral processing method
- Patent number 11,231,651
- Issue date Jan 25, 2022
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- B08 - CLEANING
Information Patent Grant
Photoresist stripping device and photoresist stripping method
- Patent number 11,189,504
- Issue date Nov 30, 2021
- Yuehong Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for reducing metal residue in edge bead region from met...
- Patent number 11,187,986
- Issue date Nov 30, 2021
- Inpria Corporation
- Mollie Waller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,056,335
- Issue date Jul 6, 2021
- Tokyo Electron Limited
- Jiro Higashijima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Amide combinations for cleaning and stripping of electronic parts
- Patent number 11,016,392
- Issue date May 25, 2021
- Dow Global Technologies LLC
- Qi Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plated silicon-based electronic cigarette atomizing chip and prepar...
- Patent number 10,945,459
- Issue date Mar 16, 2021
- CHINA TOBACCO YUNNAN INDUSTRIAL CO., LTD
- Yi Han
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 10,915,026
- Issue date Feb 9, 2021
- Semes Co., Ltd.
- Hae-Won Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions for removing photoresist
- Patent number 10,795,263
- Issue date Oct 6, 2020
- Samsung Electronics Co., Ltd.
- Jung-Min Oh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL SOLUTION
- Publication number 20250028249
- Publication date Jan 23, 2025
- FUJIFILM CORPORATION
- Akihiko OHTSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compositions For Removing Photoresist And Etch Residue From A Subst...
- Publication number 20250002823
- Publication date Jan 2, 2025
- VERSUM MATERIALS US, LLC
- YUANMEI CAO
- B08 - CLEANING
Information Patent Application
CYCLIC DEVELOPMENT OF METAL OXIDE BASED PHOTORESIST FOR ETCH STOP D...
- Publication number 20240329538
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Da Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLEANING SOLUTION AND METHOD OF CLEANING WAFER
- Publication number 20240297036
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Ren Zi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
RELEASE AGENT FOR CIRCUIT BOARD RESIN FILM AND PRODUCTION METHOD FO...
- Publication number 20240294846
- Publication date Sep 5, 2024
- NOF Corporation
- Hiroki EZUKA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD THEREOF
- Publication number 20240210836
- Publication date Jun 27, 2024
- SEMES CO., LTD.
- Myung A JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING COMPOSITION AND SUBSTRATE PROCESSING METHOD US...
- Publication number 20230375937
- Publication date Nov 23, 2023
- SK Inc.
- Jinseok YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING COMPOSITION AND SUBSTRATE PROCESSING METHOD US...
- Publication number 20230367223
- Publication date Nov 16, 2023
- SK Inc.
- Jinseok YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MANUFACTURING METHOD FOR CURED SUBSTANCE, MANUFACTURING METHOD FOR...
- Publication number 20230213858
- Publication date Jul 6, 2023
- FUJIFILM CORPORATION
- Misaki TAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, TRAINI...
- Publication number 20230161301
- Publication date May 25, 2023
- SCREEN Holdings Co., Ltd.
- Seiji ANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF STRIPPING PHOTORESIST
- Publication number 20230102718
- Publication date Mar 30, 2023
- Chipbond Technology Corporation
- Hsueh-Shun Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST STRIPPING METHOD, RESIST STRIPPING DEVICE, AND PRETREATMENT...
- Publication number 20230101477
- Publication date Mar 30, 2023
- NOMURA MICRO SCIENCE CO., LTD.
- Takayuki Jizaimaru
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RE...
- Publication number 20230098367
- Publication date Mar 30, 2023
- SCREEN Holdings Co., Ltd.
- Katsuya AKIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRIPPER COMPOSITION FOR REMOVING PHOTORESIST AND STRIPPING METHOD...
- Publication number 20230091893
- Publication date Mar 23, 2023
- LG CHEM, LTD.
- Tae Moon PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Hybrid Development of EUV Resists
- Publication number 20230078946
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Steven Grzeskowiak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING POROSITY OF AN INTERFERENCE LITHOGRAPHY PROCESS BY FINE...
- Publication number 20230045339
- Publication date Feb 9, 2023
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Shailesh N. Joshi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
STRIPPING-SOLUTION MACHINE AND WORKING METHOD THEREOF
- Publication number 20220413390
- Publication date Dec 29, 2022
- TLC CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Tian OU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPOSITION CONTAINING A DICYANOSTYRYL GROUP, FOR FORMING A RESIST...
- Publication number 20220397828
- Publication date Dec 15, 2022
- NISSAN CHEMICAL CORPORATION
- Takafumi ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20220390848
- Publication date Dec 8, 2022
- SEMES CO., LTD.
- Ki Hoon CHOI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SILICON-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION INCLU...
- Publication number 20220373888
- Publication date Nov 24, 2022
- NISSAN CHEMICAL CORPORATION
- Wataru SHIBAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20220355344
- Publication date Nov 10, 2022
- SEMES CO., LTD.
- Hyun Seok Choi
- B08 - CLEANING
Information Patent Application
PHOTORESIST REMOVAL METHOD AND PHOTORESIST REMOVAL SYSTEM
- Publication number 20220317573
- Publication date Oct 6, 2022
- TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
- Zhongping ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THINNER COMPOSITION AND METHOD OF PROCESSING SURFACES OF SEMICONDUC...
- Publication number 20220243149
- Publication date Aug 4, 2022
- SK HYNIX INC.
- Kyung Hee OH
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
STORAGE CONTAINER STORING TREATMENT LIQUID FOR MANUFACTURING SEMICO...
- Publication number 20220221798
- Publication date Jul 14, 2022
- FUJIFILM CORPORATION
- Tetsuya KAMIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERAL PROCESSING METHOD
- Publication number 20220082942
- Publication date Mar 17, 2022
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- B08 - CLEANING
Information Patent Application
METHOD OF FILTERING LIQUIDS OR GASES FOR ELECTRONICS PRODUCTION
- Publication number 20210370237
- Publication date Dec 2, 2021
- TeraPore Technologies, Inc.
- Rachel M. Dorin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR IMPROVING UNIFORMITY OF PHOTORESIST DEVELOPMENT
- Publication number 20210349393
- Publication date Nov 11, 2021
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Lei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Production of Three-Dimensional Structures by Means of Photoresists
- Publication number 20210341835
- Publication date Nov 4, 2021
- Laser Imaging Systems GmbH
- Jens THEIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTORESIST STRIPPING DEVICE AND PHOTORESIST STRIPPING METHOD
- Publication number 20210247696
- Publication date Aug 12, 2021
- TCL China Star Optoelectronics Technology Co., Ltd.
- Yuehong ZHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHEMICAL LIQUID, CHEMICAL LIQUID STORAGE BODY, RESIST PATTERN FORMI...
- Publication number 20210223698
- Publication date Jul 22, 2021
- FUJIFILM CORPORATION
- Tetsuya KAMIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

using liquids only

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Photoresist removal method and photoresist removal system

Use of compositions comprising a solvent mixture for avoiding patte...

Composition containing a dicyanostyryl group, for forming a resist...

Semiconductor device production method employing silicon-containing...

Substrate processing method, substrate processing apparatus, and re...

Controlling porosity of an interference lithography process by fine...

Method of manufacturing circuit board

Solution, method of forming resist pattern, and semiconductor devic...

Stripping-solution machine and working method thereof

Filter device, purification device, chemical solution production me...

Apparatuses for reducing metal residue in edge bead region from met...

Liquid processing apparatus, liquid processing method, and computer...

Method of forming patterned polyimide layer

Surface treatment of titanium containing hardmasks

Substrate processing method, substrate processing apparatus, and re...

Treatment liquid, method of manufacturing treatment liquid, pattern...

Metal probe structure and method for fabricating the same

Cleaning solution and method of cleaning wafer

Treatment liquid for manufacturing semiconductor, method of manufac...

Silicon-containing underlayers

Substrate treatment device and substrate treatment method

Liquid chemical vapor recovery device, wet stripping device, photor...

Peripheral processing apparatus and peripheral processing method

Photoresist stripping device and photoresist stripping method

Apparatuses for reducing metal residue in edge bead region from met...

Substrate processing apparatus

Amide combinations for cleaning and stripping of electronic parts

Plated silicon-based electronic cigarette atomizing chip and prepar...

Substrate treating apparatus and substrate treating method

Compositions for removing photoresist

Patents Applicationslast 30 patents

CHEMICAL SOLUTION

Compositions For Removing Photoresist And Etch Residue From A Subst...

CYCLIC DEVELOPMENT OF METAL OXIDE BASED PHOTORESIST FOR ETCH STOP D...

CLEANING SOLUTION AND METHOD OF CLEANING WAFER

RELEASE AGENT FOR CIRCUIT BOARD RESIN FILM AND PRODUCTION METHOD FO...

SUBSTRATE PROCESSING APPARATUS AND METHOD THEREOF

SUBSTRATE PROCESSING COMPOSITION AND SUBSTRATE PROCESSING METHOD US...

SUBSTRATE PROCESSING COMPOSITION AND SUBSTRATE PROCESSING METHOD US...

MANUFACTURING METHOD FOR CURED SUBSTANCE, MANUFACTURING METHOD FOR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, TRAINI...

METHOD OF STRIPPING PHOTORESIST

RESIST STRIPPING METHOD, RESIST STRIPPING DEVICE, AND PRETREATMENT...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RE...

STRIPPER COMPOSITION FOR REMOVING PHOTORESIST AND STRIPPING METHOD...

Hybrid Development of EUV Resists

CONTROLLING POROSITY OF AN INTERFERENCE LITHOGRAPHY PROCESS BY FINE...

STRIPPING-SOLUTION MACHINE AND WORKING METHOD THEREOF

COMPOSITION CONTAINING A DICYANOSTYRYL GROUP, FOR FORMING A RESIST...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SILICON-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION INCLU...

APPARATUS AND METHOD FOR TREATING SUBSTRATE

PHOTORESIST REMOVAL METHOD AND PHOTORESIST REMOVAL SYSTEM

THINNER COMPOSITION AND METHOD OF PROCESSING SURFACES OF SEMICONDUC...

STORAGE CONTAINER STORING TREATMENT LIQUID FOR MANUFACTURING SEMICO...

PERIPHERAL PROCESSING METHOD

METHOD OF FILTERING LIQUIDS OR GASES FOR ELECTRONICS PRODUCTION

METHOD FOR IMPROVING UNIFORMITY OF PHOTORESIST DEVELOPMENT

Production of Three-Dimensional Structures by Means of Photoresists

PHOTORESIST STRIPPING DEVICE AND PHOTORESIST STRIPPING METHOD

CHEMICAL LIQUID, CHEMICAL LIQUID STORAGE BODY, RESIST PATTERN FORMI...