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H01L21/67046
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67046
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning system and substrate cleaning method
Patent number
12,220,732
Issue date
Feb 11, 2025
Ebara Corporation
Hiroki Takahashi
B08 - CLEANING
Information
Patent Grant
Apparatus and method of brush cleaning using periodic chemical trea...
Patent number
12,224,186
Issue date
Feb 11, 2025
Applied Materials, Inc.
Brian J. Brown
B08 - CLEANING
Information
Patent Grant
Cleaning apparatus and polishing apparatus
Patent number
12,205,831
Issue date
Jan 21, 2025
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Post-CMP cleaning and apparatus
Patent number
12,170,195
Issue date
Dec 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Fu-Ming Huang
B08 - CLEANING
Information
Patent Grant
Wafer cleaning method
Patent number
12,087,602
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kuo-Shu Tseng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
12,068,169
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ji Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Jig and installation method using same jig
Patent number
12,053,851
Issue date
Aug 6, 2024
Ebara Corporation
Lien Yin Cheng
B24 - GRINDING POLISHING
Information
Patent Grant
Cleaning system for semiconductor storage shelf
Patent number
12,030,091
Issue date
Jul 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yimo Wang
B08 - CLEANING
Information
Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
Patent number
12,033,847
Issue date
Jul 9, 2024
Ebara Corporation
Toshio Mizuno
B24 - GRINDING POLISHING
Information
Patent Grant
Method for forming semiconductor device structure
Patent number
12,009,222
Issue date
Jun 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Chen Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning device and substrate cleaning method
Patent number
12,002,688
Issue date
Jun 4, 2024
Ebara Corporation
Haiyang Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning device and substrate cleaning method
Patent number
11,996,303
Issue date
May 28, 2024
Ebara Corporation
Haiyang Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,967,509
Issue date
Apr 23, 2024
Tokyo Electron Limited
Osamu Miyahara
B08 - CLEANING
Information
Patent Grant
Apparatus and method for wafer cleaning
Patent number
11,958,090
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Bo Chen Chen
B08 - CLEANING
Information
Patent Grant
Cleaning apparatus and polishing apparatus
Patent number
11,948,811
Issue date
Apr 2, 2024
Ebara Corporation
Mitsuru Miyazaki
B08 - CLEANING
Information
Patent Grant
Gate valve device, cleaning method and mechanical apparatus
Patent number
11,933,416
Issue date
Mar 19, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Zhengzheng Wang
B08 - CLEANING
Information
Patent Grant
Methods and apparatuses for chemical delivery for brush conditioning
Patent number
11,923,208
Issue date
Mar 5, 2024
Illinois Tool Works Inc.
Bradley Scott Withers
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Semiconductor fabricating system having hybrid brush assembly
Patent number
11,908,681
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Ying Mai
B08 - CLEANING
Information
Patent Grant
Cleaning member mounting mechanism and substrate cleaning apparatus
Patent number
11,894,244
Issue date
Feb 6, 2024
Ebara Corporation
Mitsuru Miyazaki
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,887,869
Issue date
Jan 30, 2024
Tokyo Electron Limited
Nobuhiko Mouri
B08 - CLEANING
Information
Patent Grant
Cleaning apparatus for cleaning member, substrate cleaning apparatu...
Patent number
11,848,216
Issue date
Dec 19, 2023
Ebara Corporation
Takayuki Kajikawa
B08 - CLEANING
Information
Patent Grant
Washing device and washing method
Patent number
11,837,477
Issue date
Dec 5, 2023
Ebara Corporation
Tomoatsu Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method and substrate cleaning apparatus
Patent number
11,817,311
Issue date
Nov 14, 2023
Ebara Corporation
Tomoatsu Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning equipment, substrate treatment system including...
Patent number
11,791,173
Issue date
Oct 17, 2023
Samsung Electronics Co., Ltd.
Seung Hoon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
Patent number
11,791,174
Issue date
Oct 17, 2023
Mitsubishi Electric Corporation
Hiroshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus and manufacturing method of semicondu...
Patent number
11,784,064
Issue date
Oct 10, 2023
Kioxia Corporation
Yasuhito Yoshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sonic cleaning of brush
Patent number
11,772,134
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Han-Yeou Huang
B08 - CLEANING
Information
Patent Grant
Apparatus and method for wafer cleaning
Patent number
11,766,703
Issue date
Sep 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Bo Chen Chen
A46 - BRUSHWARE
Information
Patent Grant
Substrate processing method and substrate processing device
Patent number
11,764,055
Issue date
Sep 19, 2023
SCREEN Holdings Co., Ltd.
Nobuyuki Shibayama
B08 - CLEANING
Information
Patent Grant
Powder removing apparatus using screw cylinder for gas processing f...
Patent number
11,759,832
Issue date
Sep 19, 2023
Global Standard Technology Co., Ltd
Jong Min Park
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
CENTRAL SHAFT OF CLEANING ROLLER
Publication number
20250054780
Publication date
Feb 13, 2025
CENEFOM CORP.
Chen-Ping HSU
B08 - CLEANING
Information
Patent Application
WAFER CLEANING APPARATUS
Publication number
20250040693
Publication date
Feb 6, 2025
Samsung Electronics Co., Ltd.
DONGHOON KWON
A46 - BRUSHWARE
Information
Patent Application
WAFER ALIGNMENT DEVICE AND METHOD AND WAFER SPEED CALCULATION METHOD
Publication number
20250038031
Publication date
Jan 30, 2025
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Qi YIN
B08 - CLEANING
Information
Patent Application
BRUSH CLEANING SYSTEM AND BRUSH CLEANING METHOD
Publication number
20250033091
Publication date
Jan 30, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Shao-Yen KU
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20250001462
Publication date
Jan 2, 2025
SCREEN Holdings Co., Ltd.
Takuma TAKAHASHI
B08 - CLEANING
Information
Patent Application
PROCESSING TOOL AND METHOD
Publication number
20240395537
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi-hsiang Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POST CMP BRUSH AND METHOD OF MANUFACTURING
Publication number
20240381994
Publication date
Nov 21, 2024
RAJEEV BAJAJ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...
Publication number
20240383011
Publication date
Nov 21, 2024
EBARA CORPORATION
Shuichi SUEMASA
B08 - CLEANING
Information
Patent Application
WAFER CLEANING SYSTEM
Publication number
20240371667
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Shu TSENG
B08 - CLEANING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240363361
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ji CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING IMPROVEMENT
Publication number
20240363371
Publication date
Oct 31, 2024
Applied Materials, Inc.
Edward GOLUBOVSKY
B08 - CLEANING
Information
Patent Application
BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS
Publication number
20240341465
Publication date
Oct 17, 2024
Samsung Electronics Co., Ltd.
Jinoh IM
A46 - BRUSHWARE
Information
Patent Application
APPARATUS AND METHOD OF BRUSH CLEANING USING PERIODIC CHEMICAL TREA...
Publication number
20240332037
Publication date
Oct 3, 2024
Applied Materials, Inc.
Brian J. BROWN
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING DEVICE
Publication number
20240321598
Publication date
Sep 26, 2024
SCREEN Holdings Co., Ltd.
Takuma TAKAHASHI
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20240316600
Publication date
Sep 26, 2024
EBARA CORPORATION
Kenji KODERA
B08 - CLEANING
Information
Patent Application
BRUSH ASSEMBLY AND WAFER CLEANING DEVICE INCLUDING THE SAME
Publication number
20240290637
Publication date
Aug 29, 2024
Samsung Electronics Co., Ltd.
Minseon Kim
A46 - BRUSHWARE
Information
Patent Application
APPARATUS OF CLEANING SUBSTRATE, APPARATUS OF SEMICONDUCTOR DEVICE...
Publication number
20240242979
Publication date
Jul 18, 2024
Samsung Electronics Co., Ltd.
Hyo Shin LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Publication number
20240207900
Publication date
Jun 27, 2024
SCREEN Holdings Co., Ltd.
Kazuki NAKAMURA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240213046
Publication date
Jun 27, 2024
TOKYO ELECTRON LIMITED
Nobuhiko Mouri
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20240213045
Publication date
Jun 27, 2024
EBARA CORPORATION
Tomoatsu ISHIBASHI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Publication number
20240213076
Publication date
Jun 27, 2024
SCREEN Holdings Co., Ltd.
Yoshifumi OKADA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Publication number
20240213044
Publication date
Jun 27, 2024
SCREEN Holdings Co., Ltd.
Yoshifumi OKADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING APPARATUS AND POLISHING APPARATUS
Publication number
20240194498
Publication date
Jun 13, 2024
EBARA CORPORATION
Mitsuru MIYAZAKI
B08 - CLEANING
Information
Patent Application
SEMICONDUCTOR FABRICATING SYSTEM HAVING HYBRID BRUSH ASSEMBLY
Publication number
20240177988
Publication date
May 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsuan-Ying MAI
B08 - CLEANING
Information
Patent Application
Apparatus And Method For Wafer Cleaning
Publication number
20240157412
Publication date
May 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo Chen CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE DRYING APPARATUS, SUBSTRATE...
Publication number
20240145276
Publication date
May 2, 2024
EBARA CORPORATION
Yosuke HIMORI
B08 - CLEANING
Information
Patent Application
BRUSHES, SYSTEMS, AND METHODS FOR DISPENSING MULTIPLE FLUIDS DURING...
Publication number
20240112925
Publication date
Apr 4, 2024
Illinois Tool Works Inc.
Bradley Scott Withers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE
Publication number
20240112926
Publication date
Apr 4, 2024
Illinois Tool Works Inc.
Bradley Scott Withers
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20240091815
Publication date
Mar 21, 2024
SCREEN Holdings Co., Ltd.
Kazuki NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20240075503
Publication date
Mar 7, 2024
EBARA CORPORATION
Fumitoshi OIKAWA
B08 - CLEANING