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H01L21/67046
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67046
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,967,509
Issue date
Apr 23, 2024
Tokyo Electron Limited
Osamu Miyahara
B08 - CLEANING
Information
Patent Grant
Apparatus and method for wafer cleaning
Patent number
11,958,090
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Bo Chen Chen
B08 - CLEANING
Information
Patent Grant
Cleaning apparatus and polishing apparatus
Patent number
11,948,811
Issue date
Apr 2, 2024
Ebara Corporation
Mitsuru Miyazaki
B08 - CLEANING
Information
Patent Grant
Gate valve device, cleaning method and mechanical apparatus
Patent number
11,933,416
Issue date
Mar 19, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Zhengzheng Wang
B08 - CLEANING
Information
Patent Grant
Methods and apparatuses for chemical delivery for brush conditioning
Patent number
11,923,208
Issue date
Mar 5, 2024
Illinois Tool Works Inc.
Bradley Scott Withers
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Semiconductor fabricating system having hybrid brush assembly
Patent number
11,908,681
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Ying Mai
B08 - CLEANING
Information
Patent Grant
Cleaning member mounting mechanism and substrate cleaning apparatus
Patent number
11,894,244
Issue date
Feb 6, 2024
Ebara Corporation
Mitsuru Miyazaki
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,887,869
Issue date
Jan 30, 2024
Tokyo Electron Limited
Nobuhiko Mouri
B08 - CLEANING
Information
Patent Grant
Cleaning apparatus for cleaning member, substrate cleaning apparatu...
Patent number
11,848,216
Issue date
Dec 19, 2023
Ebara Corporation
Takayuki Kajikawa
B08 - CLEANING
Information
Patent Grant
Washing device and washing method
Patent number
11,837,477
Issue date
Dec 5, 2023
Ebara Corporation
Tomoatsu Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method and substrate cleaning apparatus
Patent number
11,817,311
Issue date
Nov 14, 2023
Ebara Corporation
Tomoatsu Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning equipment, substrate treatment system including...
Patent number
11,791,173
Issue date
Oct 17, 2023
Samsung Electronics Co., Ltd.
Seung Hoon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
Patent number
11,791,174
Issue date
Oct 17, 2023
Mitsubishi Electric Corporation
Hiroshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus and manufacturing method of semicondu...
Patent number
11,784,064
Issue date
Oct 10, 2023
Kioxia Corporation
Yasuhito Yoshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sonic cleaning of brush
Patent number
11,772,134
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Han-Yeou Huang
B08 - CLEANING
Information
Patent Grant
Apparatus and method for wafer cleaning
Patent number
11,766,703
Issue date
Sep 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Bo Chen Chen
A46 - BRUSHWARE
Information
Patent Grant
Substrate processing method and substrate processing device
Patent number
11,764,055
Issue date
Sep 19, 2023
SCREEN Holdings Co., Ltd.
Nobuyuki Shibayama
B08 - CLEANING
Information
Patent Grant
Powder removing apparatus using screw cylinder for gas processing f...
Patent number
11,759,832
Issue date
Sep 19, 2023
Global Standard Technology Co., Ltd
Jong Min Park
B08 - CLEANING
Information
Patent Grant
Substrate cleaning devices and methods thereof
Patent number
11,745,227
Issue date
Sep 5, 2023
Applied Materials, Inc.
Steven M. Zuniga
B08 - CLEANING
Information
Patent Grant
Wafer cleaning system and method
Patent number
11,742,227
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Shu Tseng
B08 - CLEANING
Information
Patent Grant
Die processing
Patent number
11,742,315
Issue date
Aug 29, 2023
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Cyprian Emeka Uzoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,731,240
Issue date
Aug 22, 2023
Ebara Corporation
Kuniaki Yamaguchi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,731,229
Issue date
Aug 22, 2023
Tokyo Electron Limited
Osamu Miyahara
B24 - GRINDING POLISHING
Information
Patent Grant
Post-CMP cleaning and apparatus
Patent number
11,728,157
Issue date
Aug 15, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Fu-Ming Huang
B08 - CLEANING
Information
Patent Grant
Apparatus and method for wafer cleaning
Patent number
11,705,324
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsin-Hsien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Brush cleaning apparatus, chemical-mechanical polishing (CMP) syste...
Patent number
11,694,909
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chang-Sheng Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical polishing cleaning system with temperature cont...
Patent number
11,694,889
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ssutzu Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Brush with non-constant nodule density
Patent number
11,694,910
Issue date
Jul 4, 2023
Illinois Tool Works Inc.
Bradley Scott Withers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid material post-CMP brushes and methods for forming the same
Patent number
11,684,144
Issue date
Jun 27, 2023
Illinois Tool Works Inc.
Bradley Scott Withers
B08 - CLEANING
Information
Patent Grant
Substrate cleaning device, substrate processing apparatus, substrat...
Patent number
11,676,811
Issue date
Jun 13, 2023
SCREEN Holdings Co., Ltd.
Koji Nishiyama
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE DRYING APPARATUS, SUBSTRATE...
Publication number
20240145276
Publication date
May 2, 2024
EBARA CORPORATION
B08 - CLEANING
Information
Patent Application
BRUSHES, SYSTEMS, AND METHODS FOR DISPENSING MULTIPLE FLUIDS DURING...
Publication number
20240112925
Publication date
Apr 4, 2024
Illinois Tool Works Inc.
Bradley Scott Withers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE
Publication number
20240112926
Publication date
Apr 4, 2024
Illinois Tool Works Inc.
Bradley Scott Withers
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20240091815
Publication date
Mar 21, 2024
SCREEN Holdings Co., Ltd.
Kazuki NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20240075503
Publication date
Mar 7, 2024
EBARA CORPORATION
Fumitoshi OIKAWA
B08 - CLEANING
Information
Patent Application
CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANIN...
Publication number
20240050991
Publication date
Feb 15, 2024
EBARA CORPORATION
Megumi UNO
B08 - CLEANING
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20240050990
Publication date
Feb 15, 2024
SEMES CO., LTD.
Do Hyung Kim
B08 - CLEANING
Information
Patent Application
DIE PROCESSING
Publication number
20240021572
Publication date
Jan 18, 2024
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Cyprian Emeka Uzoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230405762
Publication date
Dec 21, 2023
EBARA CORPORATION
Kuniaki YAMAGUCHI
B24 - GRINDING POLISHING
Information
Patent Application
CLEANING BRUSH FOR SEMICONDUCTOR FABRICATION PROCESS
Publication number
20230386868
Publication date
Nov 30, 2023
Entegris, Inc.
Aravind Vasanthakumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
Publication number
20230356267
Publication date
Nov 9, 2023
EBARA CORPORATION
Shuji UOZUMI
B08 - CLEANING
Information
Patent Application
WAFER CLEANING METHOD
Publication number
20230360938
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Shu TSENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Post-CMP Cleaning and Apparatus
Publication number
20230352295
Publication date
Nov 2, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Fu-Ming Huang
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
Publication number
20230352326
Publication date
Nov 2, 2023
EBARA CORPORATION
Kuniaki YAMAGUCHI
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20230326770
Publication date
Oct 12, 2023
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING CLEANING SYSTEM WITH TEMPERATURE CONT...
Publication number
20230326736
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssutzu CHEN
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20230307259
Publication date
Sep 28, 2023
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE PROCESSING METHOD
Publication number
20230268174
Publication date
Aug 24, 2023
SCREEN Holdings Co., Ltd.
Koji NISHIYAMA
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR TREATING A SUBSTRATE
Publication number
20230207355
Publication date
Jun 29, 2023
SEMES CO., LTD.
Kun Hee PARK
B08 - CLEANING
Information
Patent Application
FITTINGS FOR WAFER CLEANING SYSTEMS
Publication number
20230051164
Publication date
Feb 16, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Cheng-Ping Chen
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING SYSTEM AND SUBSTRATE CLEANING METHOD
Publication number
20230023260
Publication date
Jan 26, 2023
EBARA CORPORATION
Hiroki TAKAHASHI
B08 - CLEANING
Information
Patent Application
GATE VALVE DEVICE, CLEANING METHOD AND MECHANICAL APPARATUS
Publication number
20230015887
Publication date
Jan 19, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Zhengzheng WANG
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR WAFER CLEANING
Publication number
20230017404
Publication date
Jan 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Bo Chen CHEN
A46 - BRUSHWARE
Information
Patent Application
Powder Removing Apparatus Using Screw Cylinder for Gas Processing F...
Publication number
20220402001
Publication date
Dec 22, 2022
Global Standard Technology Co., LTD.
Jong Min Park
B08 - CLEANING
Information
Patent Application
COMPOSITIONS AND METHODS FOR REDUCING INTERACTION BETWEEN ABRASIVE...
Publication number
20220395865
Publication date
Dec 15, 2022
Entegris, Inc.
Daniela White
B08 - CLEANING
Information
Patent Application
DISPLACEMENT MEASUREMENTS IN SEMICONDUCTOR WAFER PROCESSING
Publication number
20220384278
Publication date
Dec 1, 2022
Applied Materials, Inc.
Justin Wong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR FABRICATING SYSTEM HAVIND HYBRID BURSH ASSEMBLY
Publication number
20220351957
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsuan-Ying MAI
B08 - CLEANING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20220310404
Publication date
Sep 29, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Ji CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD
Publication number
20220266308
Publication date
Aug 25, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC.
Peng DONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Post-CMP Cleaning and Apparatus
Publication number
20220262620
Publication date
Aug 18, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Fu-Ming Huang
B08 - CLEANING